JPH0481965U

JPH0481965U -

Info

Publication number: JPH0481965U
Application number: JP12704390U
Authority: JP
Priority date: 1990-11-28
Filing date: 1990-11-28
Publication date: 1992-07-16

Description

[Brief explanation of the drawing]

第１図〜第７図はこの考案の第１実施例を示し
、第１図はゲート装置の縦断側面図、第２図は第
１図における−線断面図、第３図は第１図に
おける−線断面図、第４図及び第５図はそれ
ぞれゲート弁が閉じた状態を示す縦断側面図、第
６図及び第７図はそれぞれゲート弁が開いた状態
を示す縦断側面図である。第８図〜第１０図はこ
の考案の第２実施例を示し、第８図はゲート装置
の縦断正面図、第９図は平行リンク部を示す横断
底面図、第１０図はばね部を示す横断底面図であ
る。第１１図は従来のゲート装置の縦断側面図で
ある。１……真空槽、３……弁箱、４……通口、５…
…ケート弁、６……操作シリンダ、７……ピスト
ンロツド、８……バツクプレート、９……平行リ
ンク、１０……弁板、１１……ばね、１８……シ
ールリング、２１……ローラ、２３……レール、
２５，２６……弁板ローラ、２７……規制レール
、２８……ストツパー、２９，３０……シフト凹
部。 1 to 7 show a first embodiment of this invention, in which FIG. 1 is a vertical sectional side view of the gate device, FIG. 2 is a sectional view taken along the - line in FIG. - line sectional view, FIGS. 4 and 5 are longitudinal sectional side views showing the gate valve in a closed state, and FIGS. 6 and 7 are longitudinal sectional side views showing the gate valve in an open state, respectively. Figures 8 to 10 show a second embodiment of this invention, with Figure 8 being a longitudinal sectional front view of the gate device, Figure 9 being a lateral bottom view showing the parallel link section, and Figure 10 showing the spring section. It is a cross-sectional bottom view. FIG. 11 is a longitudinal sectional side view of a conventional gate device. 1... Vacuum chamber, 3... Valve box, 4... Port, 5...
... Kate valve, 6 ... Operation cylinder, 7 ... Piston rod, 8 ... Back plate, 9 ... Parallel link, 10 ... Valve plate, 11 ... Spring, 18 ... Seal ring, 21 ... Roller, 23 ……rail,
25, 26... Valve plate roller, 27... Regulation rail, 28... Stopper, 29, 30... Shift recess.

Claims

[Scope of Claim for Utility Model Registration] (1) A valve box provided adjacent to a vacuum chamber, a gate valve disposed inside the valve box that opens and closes a passage to the vacuum chamber, and a gate valve that opens and closes the gate valve. A gate device comprising an operating cylinder to operate the gate valve, the gate valve having a back plate connected to a piston rod of the operating cylinder, and a valve plate supported by the back plate via a parallel link, the gate valve comprising: A sealing ring is provided to surround the port on either side of the joint surface wall between the plate and the port, and a stopper is provided inside the valve box to define the closing stroke limit of the valve plate. A gate device for a vacuum device, characterized in that a spring is provided between the valve plate and the back plate to bias the valve plate toward the back plate against the weight of the spring. (2) Along the reciprocating locus of the gate valve, a rail that guides the roller provided on the back plate and a regulation rail that guides the valve plate roller provided on the valve plate face each other with the gate valve in between. The vacuum according to claim (1), wherein a shift recess is formed in the regulation rail to guide the valve plate roller down in correspondence with the position of the valve plate roller when the valve plate contacts the stopper. Gate device for equipment.