JPH0482841U - - Google Patents
Info
- Publication number
- JPH0482841U JPH0482841U JP12421290U JP12421290U JPH0482841U JP H0482841 U JPH0482841 U JP H0482841U JP 12421290 U JP12421290 U JP 12421290U JP 12421290 U JP12421290 U JP 12421290U JP H0482841 U JPH0482841 U JP H0482841U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- wafer carrier
- transfer device
- transfer
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 7
- 230000032683 aging Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の実施例の構成図、第２図は従
来例の構成図、第３図はクリーニングの管理プロ
グラムフローチヤート、第４図はエージングの管
理プログラムフローチヤートである。
１……ウエハキヤリア、２……自動搬送車、３
……ドライエツチング装置、４……装置バツフア
、５……ウエハステージ、６……移載装置、７…
…リフタ、８……搬送ロボツト、９……受渡しバ
ツフア、１０……待機バツフア、１１……ダミー
バツフア、１２……制御装置、１３……データ入
力装置。
FIG. 1 is a block diagram of an embodiment of the present invention, FIG. 2 is a block diagram of a conventional example, FIG. 3 is a flowchart of a cleaning management program, and FIG. 4 is a flowchart of an aging management program. 1...Wafer carrier, 2...Automated transport vehicle, 3
...Dry etching device, 4...Device buffer, 5...Wafer stage, 6...Transfer device, 7...
... Lifter, 8 ... Transfer robot, 9 ... Delivery buffer, 10 ... Standby buffer, 11 ... Dummy buffer, 12 ... Control device, 13 ... Data input device.
Claims (1)
グ装置において、 (a) ドライエツチングを行う処理装置とウエ
ハキヤリアの移載を行う移載装置とを有し、 (b) 該移載装置に、クリーニング用ダミーウ
エハキヤリアを設置するためのダミーバツフアと
、 (c) クリーニング周期とそのレシピを管理し
、かつ前記移載装置および処理装置を制御する手
段とを具備することを特徴とするドライエツチン
グ装置。 (2) 自動搬送システムを用いたドライエツチン
グ装置において、 (a) ドライエツチングを行う処理装置とウエ
ハキヤリアの移載を行う移載装置とを有し、 (b) 該移載装置に、エージング用ダミーウエ
ハキヤリアを設置するためのダミーバツフアと、 (c) エージングの開始タイミングとそのレシ
ピを管理し、かつ前記移載装置および処理装置を
制御する手段 とを具備することを特徴とするドライエツチン
グ装置。[Scope of Claim for Utility Model Registration] (1) A dry etching device using an automatic transfer system, (a) having a processing device for dry etching and a transfer device for transferring a wafer carrier; (b) The transfer device is equipped with a dummy buffer for installing a dummy wafer carrier for cleaning, and (c) means for managing the cleaning cycle and its recipe and controlling the transfer device and the processing device. Dry etching equipment. (2) A dry etching device using an automatic transfer system, which (a) has a processing device that performs dry etching and a transfer device that transfers a wafer carrier, and (b) has an aging device in the transfer device. A dry etching apparatus comprising: a dummy buffer for installing a dummy wafer carrier; and (c) means for managing aging start timing and its recipe, and controlling the transfer device and processing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12421290U JPH0482841U (en) | 1990-11-28 | 1990-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12421290U JPH0482841U (en) | 1990-11-28 | 1990-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0482841U true JPH0482841U (en) | 1992-07-20 |
Family
ID=31871872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12421290U Pending JPH0482841U (en) | 1990-11-28 | 1990-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0482841U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574739A (en) * | 1991-09-13 | 1993-03-26 | Hitachi Ltd | Vacuum processing apparatus and operating method thereof |
-
1990
- 1990-11-28 JP JP12421290U patent/JPH0482841U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574739A (en) * | 1991-09-13 | 1993-03-26 | Hitachi Ltd | Vacuum processing apparatus and operating method thereof |
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