JPH05162009A - Ball type chuck device - Google Patents

Ball type chuck device

Info

Publication number
JPH05162009A
JPH05162009A JP35228091A JP35228091A JPH05162009A JP H05162009 A JPH05162009 A JP H05162009A JP 35228091 A JP35228091 A JP 35228091A JP 35228091 A JP35228091 A JP 35228091A JP H05162009 A JPH05162009 A JP H05162009A
Authority
JP
Japan
Prior art keywords
chucked
holder
chuck
ball
insertion hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP35228091A
Other languages
Japanese (ja)
Inventor
Tomoteru Yasuda
智輝 安田
Masahiko Okuzumi
方彦 奥住
Chihiro Akatsu
千尋 赤津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP35228091A priority Critical patent/JPH05162009A/en
Publication of JPH05162009A publication Critical patent/JPH05162009A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To make the center axis of a holder coincide with that of a member to be chucked easily by slidably fitting an outer cylinder cover onto a holder and forming a taper which slides a chucking ball in the center direction of an insertion hole in the inner peripheral surface of the outer cylinder cover. CONSTITUTION:A member 2 to be chucked is inserted into an insertion hole 3 with a tapered part 6c meeting a chucking ball 5, and an outer cylinder cover 6 is moved in the direction of the member 2 to be chucked, so that the tapered part 6a moves the chucking ball 5 in the central direction of the insertion hole 3 to press the outer periphery of the member 2 to be chucked in the insertion hole 3 for chucking. At this time, the chucking ball 5 chicks the member 2 to be chucked by even force at regular intervals from at least three directions, so that the center axis of the member 2 to be chucked is made to coincide with that of the holder 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、工作機械や精密測定器
などにおいて工作物、工具や測定品などのチャッキング
に使用するボール式チャック装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ball type chuck device used for chucking a workpiece, a tool, a measured product or the like in a machine tool, a precision measuring instrument or the like.

【0002】[0002]

【従来の技術】従来、ボール式チャック装置としては、
実開昭62−198026号公報に開示されている。図
8は、上記公報のボール式チャック装置を示し、ホルダ
21には、その先端に被チャック部材22の保持穴23
が形成されていおり、この保持穴23にチャック用ボー
ル24を案内保持する複数の貫通孔25が形成されてい
る。ホルダ21には外筒カバー26が外挿されており、
外筒カバー26の内周面のうち前記貫通孔25に対する
同心位置には溝27が形成され、この溝27に、貫通孔
25により案内保持されるチャック用ボール24が当接
する弾性部材28が配置されている。そして前記貫通孔
25に対する同心位置に溝29が形成された被チャック
部材22をホルダ21の保持穴23に圧入することによ
り、チャック用ボール24を押しあげ、その後、前記弾
性部材28の反力により押し戻されたチャック用ボール
24が溝29に入ることで、被チャック部材22がチャ
ックされホルダ21に保持される。
2. Description of the Related Art Conventionally, as a ball type chuck device,
It is disclosed in Japanese Utility Model Publication No. 62-198026. FIG. 8 shows the ball-type chuck device of the above publication, in which the holder 21 has a holding hole 23 for a chucked member 22 at its tip.
Is formed, and a plurality of through holes 25 for guiding and holding the chuck balls 24 are formed in the holding hole 23. An outer cylinder cover 26 is externally inserted into the holder 21,
A groove 27 is formed on the inner peripheral surface of the outer cylinder cover 26 at a position concentric with the through hole 25, and an elastic member 28 with which the chuck ball 24 guided and held by the through hole 25 abuts is arranged in the groove 27. Has been done. Then, the chucked member 22 having the groove 29 formed concentrically with the through hole 25 is press-fitted into the holding hole 23 of the holder 21 to push up the chuck ball 24, and then by the reaction force of the elastic member 28. The chucked member 22 is chucked and held by the holder 21 when the chucked ball 24 pushed back enters the groove 29.

【0003】[0003]

【発明が解決しようとする課題】しかし、前記従来のチ
ャック装置にあっては、被チャック部材22には、ホル
ダ21に圧入した際に貫通孔25に対する同心位置に溝
29があることが必要であり、また、弾性部材28の反
力によりチャックしているが、その反力にバラツキがあ
ることにより工作物等の被チャック部材22とホルダ2
1との中心軸を合わせることが困難であるため、被チャ
ック部材22が曲がってチャックされ、精度を必要とす
る測定器等のチャック装置には不向きであるという問題
点がある。
However, in the above-mentioned conventional chuck device, it is necessary that the chucked member 22 has the groove 29 at the concentric position with respect to the through hole 25 when it is press-fitted into the holder 21. Also, although the chucking is performed by the reaction force of the elastic member 28, since the reaction force varies, the chucked member 22 such as a workpiece and the holder 2 are
Since it is difficult to align the central axis with the chuck 1, the chucked member 22 is bent and chucked, which is not suitable for a chucking device such as a measuring instrument that requires accuracy.

【0004】本発明は、上記従来技術の問題点に鑑みて
なされたもので、被チャック部材の溝の有無にかかわら
ず、またチャッキング時に被チャック部材が曲がってチ
ャックされることなく、さらに被チャック部材の外径の
変化したものにも容易に対応可能なボール式チャック装
置を提供することを目的とする。
The present invention has been made in view of the above-mentioned problems of the prior art. The present invention does not depend on the presence or absence of the groove of the chucked member, and the chucked member is not bent and chucked during chucking. An object of the present invention is to provide a ball type chuck device that can easily cope with a chuck member having a different outer diameter.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に、本発明のボール式チャック装置は、先端内部に被チ
ャック部材の挿入孔を成形したホルダを設け、この挿入
孔の内周面に開口した貫通孔を等間隔に少なくとも3本
以上形成し、それぞれの貫通孔内に少なくとも1個以上
のチャック用ボールを摺動自在に配置するとともに、上
記ホルダに外筒カバーを摺動自在に外嵌し、外筒カバー
の内周面に上記チャック用ボールを上記挿入孔の中心方
向に摺動するテーパを形成したものである。
In order to achieve the above object, a ball type chuck device of the present invention is provided with a holder having an insertion hole for a member to be chucked formed inside the tip, and the inner peripheral surface of the insertion hole. At least three open through-holes are formed at equal intervals, at least one chuck ball is slidably arranged in each through-hole, and the outer cylinder cover is slidably attached to the holder. The outer peripheral cover is fitted with a taper on the inner peripheral surface of the chuck ball so that the chuck ball slides toward the center of the insertion hole.

【0006】[0006]

【作用】上記の構成にあっては、テーパ部分をチャック
用ボールと対向した状態で、挿入孔に被チャック部材を
挿入し、外筒カバーを被チャック部材方向へ移動するこ
とにより、テーパがチャック用ボールを挿入孔(ホル
ダ)の中心方向へ移動し、挿入孔内の被チャック部材の
外周面を押圧してチャッキングする。この時、チャック
用ボールは、少なくとも3方向から等間隔で均等な力に
より被チャック部材をチャキングし、被チャック部材と
ホルダの中心軸が一致する。
In the above structure, the taper portion is inserted into the insertion hole with the taper portion facing the chucking ball, and the outer cylinder cover is moved toward the chucked member, whereby the taper is chucked. The work ball is moved toward the center of the insertion hole (holder), and the outer peripheral surface of the chucked member in the insertion hole is pressed to be chucked. At this time, the chucking ball chucks the chucked member with equal force in at least three directions at equal intervals, and the chucked member and the central axis of the holder coincide with each other.

【0007】[0007]

【実施例1】図1から図3は、本発明のボール式チャッ
ク装置の実施例1を示し、図1は中央縦断面図、図2は
図1におけるA−A線断面図、図3は図1におけるB部
の拡大断面図である。図において1で示すのはホルダ
で、ホルダ1の外周面中央には雄ねじ部1aが形成され
るとともに、先端中央部には被チャック部材2の挿入孔
3が形成されている。
Embodiment 1 FIGS. 1 to 3 show Embodiment 1 of a ball chuck device of the present invention. FIG. 1 is a central longitudinal sectional view, FIG. 2 is a sectional view taken along the line AA in FIG. 1, and FIG. It is an expanded sectional view of the B section in FIG. In the figure, reference numeral 1 denotes a holder. A male screw portion 1a is formed at the center of the outer peripheral surface of the holder 1, and an insertion hole 3 for a chucked member 2 is formed at the center of the tip.

【0008】ホルダ1の先端部には、挿入孔3の内周面
の略中間に開口した貫通孔4がホルダ1の先端外周面か
ら形成されている。貫通孔4は、挿入孔3の中心軸に対
して垂直に形成されるとともに、中心軸を中心に120
度の間隔で放射状に3本設けられている。貫通孔4の挿
入孔3側の開口部には爪部4aが形成され、貫通孔4内
に摺動可能に挿入して配置したチャック用ボール5の挿
入孔3内への落下を防止している。
At the tip of the holder 1, there is formed a through hole 4 which is opened substantially in the middle of the inner peripheral surface of the insertion hole 3 from the outer peripheral surface of the tip of the holder 1. The through hole 4 is formed perpendicularly to the central axis of the insertion hole 3, and is 120 mm centered on the central axis.
It is provided radially at three intervals. A claw portion 4a is formed in the opening of the through hole 4 on the insertion hole 3 side to prevent the chuck ball 5 slidably inserted and arranged in the through hole 4 from falling into the insertion hole 3. There is.

【0009】ホルダ1の外周部には、外筒カバー6が着
脱自在に外嵌されている。外筒カバー6の先端内周面6
aは、ホルダ1の先端外径と同一又は若干大径に形成さ
れ、その先端内周面6aから内部につながる内周面に
は、ホルダ1の雄ねじ部1aにかみ合う雌ねじ部6bが
形成されている。先端内周面6aの開口側には、開口部
側に拡開されたテーパ6cが形成されており、このテー
パ6cは、外筒カバー6をホルダ1に締め付けた時、ホ
ルダ1のチャック用ボール5が当接しない位置に設けら
れている。
An outer cylinder cover 6 is detachably fitted on the outer peripheral portion of the holder 1. Outer cylinder cover 6 tip inner peripheral surface 6
a is formed to be the same as or slightly larger than the outer diameter of the tip of the holder 1, and the inner peripheral surface connecting from the inner peripheral surface 6a of the tip to the inside is formed with a female screw portion 6b that meshes with the male screw portion 1a of the holder 1. There is. On the opening side of the tip inner peripheral surface 6a, a taper 6c that is widened toward the opening side is formed. When the outer cylinder cover 6 is fastened to the holder 1, the taper 6c is used for chuck balls of the holder 1. 5 is provided at a position where it does not abut.

【0010】本実施例にあっては、テーパ6cをチャッ
ク用ボール5の所に位置させて、ホルダ1の挿入孔3に
被チャック部材2を挿入する。そして、外筒カバーをね
じ1a,1bの締め付け方向に回し、外周カバー6の先
端内周面6aとチャック用ボール5を当接させる。この
時、チャック用ボール5は、テーパ6c面に押されて挿
入孔3方向に貫通孔4内を摺動し、被チャック部材2の
外周面2aを押圧して被チャック部材2をチャッキング
する。
In this embodiment, the taper 6c is positioned at the chuck ball 5 and the chucked member 2 is inserted into the insertion hole 3 of the holder 1. Then, the outer cylinder cover is turned in the tightening direction of the screws 1a and 1b to bring the tip inner peripheral surface 6a of the outer peripheral cover 6 into contact with the chuck balls 5. At this time, the chuck ball 5 is pushed by the taper 6c surface and slides in the through hole 4 in the insertion hole 3 direction, and presses the outer peripheral surface 2a of the chucked member 2 to chuck the chucked member 2. ..

【0011】本実施例によれば、チャック用ボール5
は、それぞれ均等に被チャック部材2の外周面を押圧す
るため、被チャック部材2を安定した状態でチャッキン
グできるとともに、被チャック部材2とホルダ1との中
心軸5を一致させることができ、曲がった状態でチャッ
キングするのを防ぐことができる。また、チャック用ボ
ール5の貫通孔4内での移動量を範囲内での、被チャッ
ク部材2の外径の異なる部材にも、チャック用ボール5
のみの交換で、ホルダ1等の交換をすることなく対応す
ることができる。さらに、図4に示すように、チャック
外径Gは、爪間距離hとチャック用ボール径Hとの関係
により決定されるため、上記パラメータを変えることに
よりあらゆる外径の被チャック部材2をチャックするこ
とができる。
According to this embodiment, the chuck balls 5 are used.
Presses the outer peripheral surface of the chucked member 2 evenly, so that the chucked member 2 can be chucked in a stable state, and the central axes 5 of the chucked member 2 and the holder 1 can be aligned. It is possible to prevent chucking in a bent state. Further, even if the chuck balls 5 have different outer diameters within the range of the movement of the chuck balls 5 within the through holes 4, the chuck balls 5 can be used.
It is possible to deal with it by exchanging only the holder 1 without exchanging the holder 1 or the like. Further, as shown in FIG. 4, since the chuck outer diameter G is determined by the relationship between the claw distance h and the chuck ball diameter H, the chucked member 2 having any outer diameter can be chucked by changing the above parameters. can do.

【0012】[0012]

【実施例2】図5から図7は、本発明のボール式チャッ
ク装置の実施例2を示し、図5は中央縦断面図、図6は
図5におけるC−C線断面図、図7は図5におけるD部
の拡大断面図である。図において11で示すのはホルダ
で、先端中央部には被チャック部材2の挿入孔13が形
成されている。ホルダ11の先端部には、挿入孔13の
内周面に開口した貫通孔14が設けられている。貫通孔
14は、挿入孔13の開口部を小径にしたテーパ状に形
成されるとともに、挿入孔13(ホルダ11)の中心軸
に対して垂直で、かつ中心軸を中心に90度の等間隔で
放射状に4本設けられている。各貫通孔14内には、そ
れぞれチャック用ボール15が摺動自在に配置されてい
る。
Second Embodiment FIGS. 5 to 7 show a second embodiment of the ball chuck device of the present invention. FIG. 5 is a central longitudinal sectional view, FIG. 6 is a sectional view taken along the line CC in FIG. 5, and FIG. It is an expanded sectional view of the D section in FIG. Reference numeral 11 in the drawing denotes a holder, and an insertion hole 13 for the chucked member 2 is formed at the center of the tip. At the tip of the holder 11, there is provided a through hole 14 that opens to the inner peripheral surface of the insertion hole 13. The through holes 14 are formed in a tapered shape in which the opening of the insertion hole 13 has a small diameter and are perpendicular to the central axis of the insertion hole 13 (holder 11) and are equally spaced by 90 degrees about the central axis. There are four radial lines. A chuck ball 15 is slidably arranged in each through hole 14.

【0013】チャック用ボール15は、挿入孔13の開
口側から順次大径となるように、それぞれ大きさの異な
った径に形成されている。上記開口部に位置するチャッ
ク用ボール15の外径は、開口部の内径より若干大径に
形成され、これにより、チャック用ボール15の挿入孔
13内部への落下を防止している。
The chuck balls 15 are formed in different diameters so that the diameters of the chuck balls 15 increase sequentially from the opening side of the insertion hole 13. The outer diameter of the chuck ball 15 located in the opening is formed to be slightly larger than the inner diameter of the opening, thereby preventing the chuck ball 15 from falling into the insertion hole 13.

【0014】ホルダ11の外周部には、外筒カバー16
がホルダ11の長手方向に摺動自在に外嵌されている。
また、外筒カバー16aの先端内周面6aには、実施例
1と同様にテーパ16bが形成されている。一方、外筒
カバー16の後端側には、圧縮バネ17がホルダ11に
捲回して設けられている。圧縮バネ17は、ホルダ11
の後端に取り付け固定されているリング18により、常
時外筒カバー16方向に付勢された状態で装着され、外
筒カバー16をホルダ11の先端方向へ常に押し付けて
いる。なお、外筒カバー16は、ホルダ11の段部11
aと係止することにより、ホルダ11から抜けるのを防
止している。
An outer cylinder cover 16 is provided on the outer peripheral portion of the holder 11.
Is slidably fitted in the longitudinal direction of the holder 11.
Further, a taper 16b is formed on the inner peripheral surface 6a at the tip of the outer cylinder cover 16a, as in the first embodiment. On the other hand, on the rear end side of the outer cylinder cover 16, a compression spring 17 is wound around the holder 11. The compression spring 17 is attached to the holder 11
A ring 18 attached and fixed to the rear end of the outer cylinder cover 16 is always biased toward the outer cylinder cover 16 so that the outer cylinder cover 16 is constantly pressed toward the tip of the holder 11. In addition, the outer cylinder cover 16 includes the stepped portion 11 of the holder 11.
It is prevented from coming off from the holder 11 by engaging with a.

【0015】本実施例にあっては、外筒カベー16を圧
縮バネ17の弾力に抗して、ホルダ11の後端側に引っ
張って移動し、チャック用ボール15をテーパ16bの
所に位置させてチャック用ボール15を開放の状態にす
る。そして、ホルダ11の挿入孔13に被チャック部材
2を挿入し、外筒カバー16の引っ張りを解除する。こ
れによって、外筒カバー16は、圧縮バネ17によりホ
ルダ11の先端方向に移動し、外筒カバー16のテーパ
16bがチャック用ボール15を被チャック部材2方向
に移動する。これによって、チャック用ボール15は、
貫通孔14内で摺動し、被チャック部材2の外周面を押
圧して、被チャック部材2をチャッキングする。
In this embodiment, the outer cylinder cover 16 is pulled against the elastic force of the compression spring 17 and moved toward the rear end of the holder 11 to position the chuck ball 15 at the taper 16b. To open the chuck balls 15. Then, the chucked member 2 is inserted into the insertion hole 13 of the holder 11, and the pulling of the outer cylinder cover 16 is released. As a result, the outer cylinder cover 16 moves toward the tip of the holder 11 by the compression spring 17, and the taper 16b of the outer cylinder cover 16 moves the chuck ball 15 toward the chucked member 2. As a result, the chuck balls 15 are
The chucked member 2 is chucked by sliding in the through hole 14 and pressing the outer peripheral surface of the chucked member 2.

【0016】本実施例によれば、外筒カバー16の動作
手段に圧縮バネ17を用いたのでチャッキング方法が簡
潔になる。また、貫通孔14内のチャック用ボール15
の保持手段をテーパによる受けにしたことで、例えば実
施例1のような爪による保持に比べ、機械的疲労による
チャッキング精度の劣化を少なくすることができる。さ
らに、被チャック部材2の外径の変化に対しても、チャ
ック用ボールの交換により若干ではあるが対応すること
ができる。
According to this embodiment, since the compression spring 17 is used as the operating means of the outer cylinder cover 16, the chucking method is simplified. Also, the chuck balls 15 in the through holes 14
By using the taper as the holding means, the deterioration of the chucking accuracy due to mechanical fatigue can be reduced as compared with the holding by the claw as in the first embodiment. Further, even if the outer diameter of the member to be chucked 2 is changed, it can be dealt with to some extent by exchanging the chuck balls.

【0017】[0017]

【発明の効果】以上にように、本発明のボール式チャッ
ク装置によれば、ホルダ先端の挿入孔に被チャック部材
を挿入し、外筒カバーをホルダ先端方向へ移動すること
により、外筒カバーの内周面先端に形成したテーパによ
りチャック用ボールが貫通孔内をホルダの中心軸方向に
移動して被チャック部材の外周面を等間隔で均等な力で
押圧してチャッキングできる。これにより、ホルダと被
チャック部材との中心軸の合致が容易に行われ、例えば
工作機等による加工精度等が向上する。
As described above, according to the ball type chuck device of the present invention, the chucked member is inserted into the insertion hole at the tip of the holder, and the outer cylinder cover is moved toward the tip of the holder. Due to the taper formed at the tip of the inner peripheral surface of the chuck, the chuck ball moves in the through hole in the direction of the central axis of the holder, and the outer peripheral surface of the chucked member is pressed at equal intervals and chucked. As a result, the center axes of the holder and the member to be chucked can be easily matched, and, for example, the processing accuracy of a machine tool or the like can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のボール式チャック装置の実施例1を示
す中央縦断面図である。
FIG. 1 is a central longitudinal sectional view showing a first embodiment of a ball type chuck device of the present invention.

【図2】図1におけるA−A線断面図である。FIG. 2 is a sectional view taken along line AA in FIG.

【図3】図1におけるB部の拡大断面図である。FIG. 3 is an enlarged sectional view of a B part in FIG.

【図4】爪間距離、チャック用ボール径とチャック外径
の関係を示す説明図である。
FIG. 4 is an explanatory diagram showing a relationship between a distance between claws, a chuck ball diameter, and a chuck outer diameter.

【図5】本発明のボール式チャック装置の実施例2を示
す中央縦断面図である。
FIG. 5 is a central longitudinal sectional view showing a second embodiment of the ball chuck device of the present invention.

【図6】図5におけるC−C線断面図である。6 is a cross-sectional view taken along the line CC in FIG.

【図7】図5におけるD部の拡大断面図である。FIG. 7 is an enlarged cross-sectional view of a D part in FIG.

【図8】従来のボール式チャック装置の断面図である。FIG. 8 is a cross-sectional view of a conventional ball chuck device.

【符号の説明】[Explanation of symbols]

1,11 ホルダ 2 被チャック部材 3,13 挿入孔 4,14 貫通孔 5,15 チャック用ボール 6,16 外筒カバー 6a,16a 挿入孔の内周面 6c,16b テーパ 1,11 Holder 2 Chucked member 3,13 Insertion hole 4,14 Through hole 5,15 Chuck ball 6,16 Outer cylinder cover 6a, 16a Inner peripheral surface of insertion hole 6c, 16b Taper

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 先端内部に被チャック部材の挿入孔を成
形したホルダを設け、この挿入孔の内周面に開口した貫
通孔を等間隔に少なくとも3本以上形成し、それぞれの
貫通孔内に少なくとも1個以上のチャック用ボールを摺
動自在に配置するとともに、上記ホルダに外筒カバーを
摺動自在に外嵌し、外筒カバーの内周面に上記チャック
用ボールを上記挿入孔の中心方向に摺動するテーパを形
成したことを特徴とするボール式チャック装置。
1. A holder in which an insertion hole for a chucked member is formed is provided inside a tip, and at least three through holes opened on the inner peripheral surface of the insertion hole are formed at equal intervals, and each through hole is formed in each through hole. At least one chuck ball is slidably arranged, an outer cylinder cover is slidably fitted on the holder, and the chuck ball is attached to the inner peripheral surface of the outer cylinder cover at the center of the insertion hole. A ball type chuck device characterized in that a taper that slides in a direction is formed.
JP35228091A 1991-12-13 1991-12-13 Ball type chuck device Withdrawn JPH05162009A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35228091A JPH05162009A (en) 1991-12-13 1991-12-13 Ball type chuck device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35228091A JPH05162009A (en) 1991-12-13 1991-12-13 Ball type chuck device

Publications (1)

Publication Number Publication Date
JPH05162009A true JPH05162009A (en) 1993-06-29

Family

ID=18422986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35228091A Withdrawn JPH05162009A (en) 1991-12-13 1991-12-13 Ball type chuck device

Country Status (1)

Country Link
JP (1) JPH05162009A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008032582A1 (en) * 2006-09-13 2008-03-20 Sintokogio, Ltd. Long member supporting mechanism, long member supporting unit using the supporting mechanism, and deflection preventing method for preventing long member deflections
JP2018089712A (en) * 2016-11-30 2018-06-14 株式会社日本マイクロシステム Chuck device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008032582A1 (en) * 2006-09-13 2008-03-20 Sintokogio, Ltd. Long member supporting mechanism, long member supporting unit using the supporting mechanism, and deflection preventing method for preventing long member deflections
JP2008093731A (en) * 2006-09-13 2008-04-24 Sintokogio Ltd Long material support mechanism, long material support unit using the support mechanism, and a steady method for stabilizing the long material
US8413921B2 (en) 2006-09-13 2013-04-09 Sintokogio, Ltd. Supporting mechanism for a long material a supporting unit using this mechanism, and a method for preventing swing of a long piece of material
TWI398319B (en) * 2006-09-13 2013-06-11 Sintokogio Ltd A supporting mechanism for a long strip material, a supporting unit using a long strip of the supporting mechanism, and an anti-vibration method for preventing the anti-
JP2018089712A (en) * 2016-11-30 2018-06-14 株式会社日本マイクロシステム Chuck device

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Effective date: 19990311