JPH0516224Y2 - - Google Patents
Info
- Publication number
- JPH0516224Y2 JPH0516224Y2 JP12094687U JP12094687U JPH0516224Y2 JP H0516224 Y2 JPH0516224 Y2 JP H0516224Y2 JP 12094687 U JP12094687 U JP 12094687U JP 12094687 U JP12094687 U JP 12094687U JP H0516224 Y2 JPH0516224 Y2 JP H0516224Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction vessel
- water
- head tank
- tank
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 29
- 239000000498 cooling water Substances 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 11
- 238000001947 vapour-phase growth Methods 0.000 claims description 10
- 238000003860 storage Methods 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000008399 tap water Substances 0.000 description 3
- 235000020679 tap water Nutrition 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094687U JPH0516224Y2 (mo) | 1987-08-06 | 1987-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094687U JPH0516224Y2 (mo) | 1987-08-06 | 1987-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426379U JPS6426379U (mo) | 1989-02-14 |
| JPH0516224Y2 true JPH0516224Y2 (mo) | 1993-04-28 |
Family
ID=31367511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12094687U Expired - Lifetime JPH0516224Y2 (mo) | 1987-08-06 | 1987-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516224Y2 (mo) |
-
1987
- 1987-08-06 JP JP12094687U patent/JPH0516224Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6426379U (mo) | 1989-02-14 |
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