JPH0516653B2 - - Google Patents

Info

Publication number
JPH0516653B2
JPH0516653B2 JP60278006A JP27800685A JPH0516653B2 JP H0516653 B2 JPH0516653 B2 JP H0516653B2 JP 60278006 A JP60278006 A JP 60278006A JP 27800685 A JP27800685 A JP 27800685A JP H0516653 B2 JPH0516653 B2 JP H0516653B2
Authority
JP
Japan
Prior art keywords
substrate
thin film
oxygen
silicon thin
quartz tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60278006A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62137820A (ja
Inventor
Takao Hashimoto
Yoshinori Yamashita
Hiroyuki Aoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60278006A priority Critical patent/JPS62137820A/ja
Publication of JPS62137820A publication Critical patent/JPS62137820A/ja
Publication of JPH0516653B2 publication Critical patent/JPH0516653B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP60278006A 1985-12-12 1985-12-12 半導体薄膜の形成方法 Granted JPS62137820A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60278006A JPS62137820A (ja) 1985-12-12 1985-12-12 半導体薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60278006A JPS62137820A (ja) 1985-12-12 1985-12-12 半導体薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS62137820A JPS62137820A (ja) 1987-06-20
JPH0516653B2 true JPH0516653B2 (cs) 1993-03-05

Family

ID=17591316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60278006A Granted JPS62137820A (ja) 1985-12-12 1985-12-12 半導体薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS62137820A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010044998A (ko) * 1999-11-02 2001-06-05 박종섭 불순물 도핑 장치의 세정방법

Also Published As

Publication number Publication date
JPS62137820A (ja) 1987-06-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term