JPH0521248Y2 - - Google Patents
Info
- Publication number
- JPH0521248Y2 JPH0521248Y2 JP2687487U JP2687487U JPH0521248Y2 JP H0521248 Y2 JPH0521248 Y2 JP H0521248Y2 JP 2687487 U JP2687487 U JP 2687487U JP 2687487 U JP2687487 U JP 2687487U JP H0521248 Y2 JPH0521248 Y2 JP H0521248Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- axis
- center
- shafts
- center chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims description 7
- 238000005070 sampling Methods 0.000 claims 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2687487U JPH0521248Y2 (fr) | 1987-02-25 | 1987-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2687487U JPH0521248Y2 (fr) | 1987-02-25 | 1987-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63134448U JPS63134448U (fr) | 1988-09-02 |
| JPH0521248Y2 true JPH0521248Y2 (fr) | 1993-05-31 |
Family
ID=30828372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2687487U Expired - Lifetime JPH0521248Y2 (fr) | 1987-02-25 | 1987-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521248Y2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3494553B2 (ja) * | 1996-08-30 | 2004-02-09 | 株式会社日立製作所 | 質量分析装置 |
-
1987
- 1987-02-25 JP JP2687487U patent/JPH0521248Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63134448U (fr) | 1988-09-02 |
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