JPH0521869Y2 - - Google Patents

Info

Publication number: JPH0521869Y2
Authority: JP; Japan
Prior art keywords: outer cylinder; exhaust; exhaust port; exhaust pipe; dilution chamber
Prior art date: 1987-10-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP16774387U

Other languages

English (en)

Japanese (ja)

Other versions

JPH0171435U (2

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-10-30

Filing date

1987-10-30

Publication date

1993-06-04

1987-10-30 Application filed filed Critical

1987-10-30 Priority to JP16774387U priority Critical patent/JPH0521869Y2/ja

1989-05-12 Publication of JPH0171435U publication Critical patent/JPH0171435U/ja

1993-06-04 Application granted granted Critical

1993-06-04 Publication of JPH0521869Y2 publication Critical patent/JPH0521869Y2/ja

2002-10-30 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000010790 dilution Methods 0.000 claims description 20
239000012895 dilution Substances 0.000 claims description 20
238000004140 cleaning Methods 0.000 claims description 16
238000003780 insertion Methods 0.000 claims description 12
230000037431 insertion Effects 0.000 claims description 12
238000005229 chemical vapour deposition Methods 0.000 claims description 6
239000007789 gas Substances 0.000 description 21
229910004298 SiO 2 Inorganic materials 0.000 description 3
239000010409 thin film Substances 0.000 description 2
229910003902 SiCl 4 Inorganic materials 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
238000010586 diagram Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
238000000034 method Methods 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
150000003377 silicon compounds Chemical class 0.000 description 1

Landscapes

Cleaning In General (AREA)

JP16774387U 1987-10-30 1987-10-30 Expired - Lifetime JPH0521869Y2 (2)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP16774387U JPH0521869Y2 (2)	1987-10-30	1987-10-30

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP16774387U JPH0521869Y2 (2)	1987-10-30	1987-10-30

Publications (2)

Publication Number	Publication Date
JPH0171435U JPH0171435U (2)	1989-05-12
JPH0521869Y2 true JPH0521869Y2 (2)	1993-06-04

Family

ID=31456312

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP16774387U Expired - Lifetime JPH0521869Y2 (2)	1987-10-30	1987-10-30

Country Status (1)

Country	Link
JP (1)	JPH0521869Y2 (2)

1987
- 1987-10-30 JP JP16774387U patent/JPH0521869Y2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH0171435U (2)	1989-05-12

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