JPH0522729Y2 - - Google Patents

Description

[Detailed explanation of the invention] <Industrial application field> This invention is designed to maintain a high level of cleanliness in a clean space by separating a part of the clean space from other parts with a curtain, or to protect production equipment. This is a partitioning device that enables replacement, repair, or maintenance of a product without contaminating the surrounding production line, and provides a device whose position and range can be easily changed.

<Conventional technology> In order to ensure a high level of cleanliness, semiconductor product manufacturing factories use a downflow method in which a high-performance air filter is installed in the ceiling to filter the air and blow clean air out in a piston flow pattern. .

There are two methods for creating such a downflow type clean room: the full ceiling method and the tunnel method.

Figure 4 shows the schematic configuration of a full-ceiling clean room. 101 is a high-performance filter installed on the ceiling, and 102 is an air suction grating installed on the entire floor. Further, 103 and 104 indicate production equipment installed in the clean room 100. In the clean room with a full ceiling system,
Since the airflow flows vertically throughout the room, the degree of freedom in installing production equipment is extremely high. However, when repairing production equipment installed in a room, production had to be interrupted and contamination had to be tolerated.

FIG. 5 shows the schematic configuration of a tunnel-type clean room. Clean air that has been circulated and filtered by a fan filter unit 110 installed on the ceiling flows to surround the production equipment 103, 104, and even when a worker 107 approaches to work, the clean air acts as a barrier. In this tunnel system, maintenance of production equipment can be performed from the maintenance area provided between the tunnel clean rooms, but in this case, contamination also spreads laterally.

<Means for solving the problem> This invention installs a set of two first rails on or near the ceiling of a clean room, and a first rail that is movable on the rails in a direction perpendicular to the rails. Two curtain rails of No. 2 are installed, and two third curtain rails that are movable in the right angle direction are installed on top of these rails, and these second and third curtain rails are coated with a material such as transparent resin ( We installed a curtain rail made of non-electrostatically treated material, and these four movable curtains can be used to surround production equipment that needs maintenance or repair, allowing work to be carried out without contaminating other production lines. It was made so that it could be done.

<Example> Hereinafter, an example implemented for the tunnel type clean room shown in FIG. 5 will be described with reference to the drawings. Figure 1 is a plan view from above, Figure 2
The figure is a side view of FIG. 1 viewed from direction R, and FIG. 3 is an end view of FIG. 1 viewed from direction D. The partition device of the present invention is installed directly below the clean air outlet of the fan filter unit 60, as shown in FIG.

Two rails 11 and 12 are provided on both sides of the air outlet in the direction of the line where production equipment is lined up, and the rail 1
Two rails 21 and 24 are installed between 1 and 12. 22 and 23 are wheels at both ends of the rail 21 that engage with the rails 11 and 12, respectively, and 25 and 26 are wheels at both ends of the rail 24 that engage with the rails 11 and 12, respectively. Therefore, the rails 21, 24 can be moved longitudinally along the rails 11, 12. Furthermore, two curtain rails 31 and 34 are stretched between the rails 21 and 24. 32 and 33 are rail 2
1 and 24 are the wheels at both ends of the curtain rail 31, and 35 and 36 are wheels on both sides of the curtain rail 34 that are engaged with the rails 21 and 24.

A curtain 41 is attached to the rail 21, a curtain 42 is attached to the rail 24, a curtain 51 is attached to the curtain rail 31, and a curtain 52 is attached to the curtain rail 34. these curtains 4
In the space surrounded by 1, 42, 51, and 52, the clean air supplied from the top does not diffuse laterally and is mostly discharged (filtrated and circulated) from the floor to the outside of the clean room, so even if a large amount of air is Even if dust is generated, contaminant particles will not spread to the adjacent area.

In addition, the curtain rails 31 and 34 are replaced by the rail 21,
The size of the space can be changed by moving the rails 21 and 24 on the rail 1.
By moving along lines 1 and 12, it is also possible to relocate the space.

<Effects> The clean space partitioning device of this invention has such a configuration, and if it is slid on the curtain rail to the area around the production equipment undergoing maintenance or repair, even if dust is generated, it can be removed from other equipment. No more contamination of the production process. In other words, maintenance and repair of production equipment can be performed while continuing production activities.

In addition, since it is removable, it can be placed in a location where it does not normally interfere with production activities, and can be applied to tunnel-type clean rooms as well as clean rooms with full ceilings.

Furthermore, contrary to contamination diffusion, it can also be used especially when it is desired to obtain a cleaner environment than the surrounding environment, or when it is partitioned off from the surrounding environment in order to strictly control temperature and humidity conditions.

[Brief explanation of the drawing]

Figures 1 to 3 show an example of application of the clean space partitioning device of the present invention to a tunnel type clean room. Figure 1 is a plan view, Figure 2 is a side view of Figure 1 viewed from the R direction, and Figure 3 is an end view seen from direction D in Figure 1, and Figures 4 and 5 are diagrams explaining conventional clean room systems. Figure 4 is a full-ceiling type clean room, and Figure 5 is a tunnel. It is an explanatory diagram of a system clean room. Explanation of symbols, 11, 12...Longitudinal rail,
21, 24...Curtain rail, 22, 23, 2
5,26...Wheel, 31,34...Curtain rail, 32,33,35,36...Wheel, 41,4
2, 51, 52...Curtain.

Claims (1)

[Scope of utility model registration request] A pair of first rails is provided on the ceiling of the clean room, and a second rail is movable in a direction perpendicular to the rails.
Two curtain rails are installed, and a third two curtain rails that are movable at right angles to the second two curtain rails are installed,
A clean space partitioning device characterized in that curtains are installed on second and third curtain rails.