JPH0525377B2 - - Google Patents
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- Publication number
- JPH0525377B2 JPH0525377B2 JP1298138A JP29813889A JPH0525377B2 JP H0525377 B2 JPH0525377 B2 JP H0525377B2 JP 1298138 A JP1298138 A JP 1298138A JP 29813889 A JP29813889 A JP 29813889A JP H0525377 B2 JPH0525377 B2 JP H0525377B2
- Authority
- JP
- Japan
- Prior art keywords
- mol
- sio
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- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000654 additive Substances 0.000 claims description 47
- 230000000996 additive effect Effects 0.000 claims description 47
- 239000000203 mixture Substances 0.000 claims description 44
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 39
- 239000000919 ceramic Substances 0.000 claims description 21
- 238000010304 firing Methods 0.000 claims description 15
- 229910052725 zinc Inorganic materials 0.000 claims description 15
- 239000003985 ceramic capacitor Substances 0.000 claims description 14
- 229910052749 magnesium Inorganic materials 0.000 claims description 13
- 230000001590 oxidative effect Effects 0.000 claims description 12
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 11
- 229910052791 calcium Inorganic materials 0.000 claims description 11
- 229910052712 strontium Inorganic materials 0.000 claims description 10
- 239000003990 capacitor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 238000010586 diagram Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 26
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 21
- 239000011701 zinc Substances 0.000 description 16
- 239000011777 magnesium Substances 0.000 description 14
- 239000000395 magnesium oxide Substances 0.000 description 14
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 14
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 14
- 239000011575 calcium Substances 0.000 description 13
- 229910052573 porcelain Inorganic materials 0.000 description 13
- 239000011787 zinc oxide Substances 0.000 description 13
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 12
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 12
- 239000000292 calcium oxide Substances 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 239000010410 layer Substances 0.000 description 8
- 229910018068 Li 2 O Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical group O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229910020220 Pb—Sn Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229920006222 acrylic ester polymer Polymers 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001089 mineralizing effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000012257 stirred material Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000012856 weighed raw material Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Ceramic Capacitors (AREA)
- Inorganic Insulating Materials (AREA)
Description
[産業上の利用分野]
本発明は、誘電体磁器と少なくとも2つの電極
とから成る単層又は積層構造の磁器コンデンサ及
びその製造方法に関する。
[従来の技術]
従来、積層磁器コンデンサを製造する際には、
誘電体磁器原料粉末から成るグリーンシート(未
焼結磁器シート)に白金又はパラジウム等の貴金
属の導電性ペーストを所望パターンに印刷し、こ
れを複数枚積み重ねて圧着し、1300℃〜1600℃の
酸化性雰囲気中で焼結させた。これにより、誘電
体磁器と内部電極とが同時に得られる。上述の如
く、貴金属を使用すれば、酸化性雰囲気中で高温
で焼結させても目的とする内部電極を得ることが
できる。しかし、白金、パラジウム等の貴金属は
高価であるため、必然的に積層磁器コンデンサが
コスト高になつた。
上述の問題を解決することができるものとし
て、本件出願人に係わる特公昭61−14607号公報
には、
(Bak-xMx)OkTiO2(但し、MはMg及びZnの
内の少なくとも1種)から成る基本成分と、Li2
OとSiO2とから成る添加成分とを含む誘電体磁
器組成物が開示されている。
また、特公昭61−14608号公報には、上記の特
公昭61−14607号公報のLi2OとSiO2の代りに、
Li2OとSiO2とMO(但し,MOはBaO,CaO及び
SrOの内の少なくとも1種)とから成る添加成分
とを含む誘電体磁器組成物が開示されている。
また、特公昭61−14609号公報には、(Bak-x-y
MxLy)OkTiO2(但し、MはMg及びZnの少なく
とも1種、LはSr及びCaの内の少なくとも1種)
から成る基本成分とLi2OとSiO2とから成る添加
成分とを含む誘電体磁器組成物が開示されてい
る。
また、特公昭61−14610号公報には、上記の特
公昭61−14609号公報におけるLi2OとSiO2の代り
に、Li2OとSiO2とMO(但し、MOはBaO,CaO
及びSrOの内の少なくとも1種)とから成る添加
成分を含む誘電体磁器組成物が開示されている。
また、特公昭61−14611号公報には、(Bak-x
Mx)OkTiO2(但し、MはMg,Zn,Sr及びCaの
少なくとも1種)から成る基本成分と、B2O3と
SiO2とから成る添加成分とを含む誘電体磁器組
成物が開示されている。
また、特公昭61−1595号公報には、(Bak-xMx)
OkTiO2(但し、MはMg,Zn,Sr及びCaの内の少
なくとも1種)から成る基本成分と、B2O3と
MO(但しMOはBaO,MgO,ZnO,SrO及び
CaOの少なくとも1種)とから成る添加成分とを
含む誘電体磁器組成物が開示されている。
また、特公昭62−1596号公報には、上記の特公
昭62−1595号公報のB2O3とMOの代りに、B2O3
とSiO2とMO(但しMOはBaO,MgO,ZnO,
SrO及びCaOの内の少なくとも1種)とから成る
添加成分とを含む誘電体磁器組成物が開示されて
いる。
これらに開示されている誘電体磁器組成物は、
還元性雰囲気1200℃以下の条件の焼成で得ること
ができ、比誘電率が2000以上、静電容量の温度変
化率が−25℃〜+85℃で±10%の範囲にすること
ができるものである。
[発明が解決しようとする課題]
ところで、近年の電子回路の高密度化に伴い、
積層コンデンサの小型化の要求が非常に強く、こ
れに対応する為に、温度変化率を悪化させること
なく誘電体の比誘電率を、上記各公報に開示され
ている誘電体磁器組成物の比誘電率よりも更に増
大させることが望まれている。
そこで、本発明の目的は、非酸化性雰囲気、
1200℃以下の温度での焼成で得るものであるにも
拘らず、高い誘電率を有し、且つ広い温度範囲に
わたつて誘電率の温度変化率が小さい誘電体磁器
を備えている磁器コンデンサ及びその製造方法を
提供することにある。
[課題を解決するための手段]
上記目的を達成するための本発明は、誘電体磁
器と、前記磁器に接触している少なくとも2つの
電極とから成る磁器コンデンサにおいて、前記磁
器が100.0重量部の基本成分と、0.01〜3.00重量部
の第1の添加成分と、0.2〜5.0重量部の第2の添
加成分とから成り、前記基本成分が、(Bak-x-y
MxLy)OkTiO2
(但し、MはMg,Znの内の少なくとも1種の
金属、LはCa,Srの内の少なくとも1種の金属、
k,x,yは、
1.00≦k≦1.05
0<x<0.10
0<y≦0.05
0.01≦x+y≦0.10を満足する数値)であり、
前記第1の添加成分がCr2O3とAl2O3の内の少な
くとも1種の金属酸化物であり、前記第2の添加
成分がB2O3とSiO2とMO(但し、MOはBaO,
SrO,CaO,MgO及びZnOの内の少なくとも1
種の金属酸化物)から成り、且つ前記B2O3と前
記SiO2と前記MOとの組成範囲がこれ等の組成を
モル%で示す三角図における前記B2O3が1モル
%、前記SiO2が80モル%、前記MOが19モル%の
点Aと、前記B2O3が1モル%、前記SiO2が39モ
ル%、前記MOが60モル%の点Bと、前記B2O3
が29モル%、前記SiO2が1モル%、前記MOが70
モル%の点Cと、前記B2O3が90モル%、前記
SiO2が1モル%、前記MOが9モル%の点Dと、
前記B2O3が90モル%、前記SiO2が9モル%、前
記MOが1モル%の点Eと、前記B2O3が19モル
%、前記SiO2が80モル%、前記MOが1モル%の
点Fとを順に結ぶ6本の直線で囲まれた領域内の
ものであるコンデンサに係わるものである。な
お、基本成分を示す組成式において、k−x,
x,kは勿論それぞれの元素の原子数を示し、
Baはバリウム、Oは酸素、Tiはチタン、Mgは
マグネシウム、Znは亜鉛、Caはカルシウム、Sr
はストロンチウムである。第1の添加成分のCr2
O3は酸化クロム、Al2O3は酸化アルミニウムであ
る。第2の添加成分におけるB2O3は酸化ホウ素、
SiO2は酸化けい素、BaOは酸化バリウム、SrOは
酸化ストロンチウム、CaOは酸化カルシウム、
MgOは酸化マグネシウム、ZnOは酸化亜鉛であ
る。
製造方法に係わる発明は、上記の基本成分と第
1及び第2の添加成分との混合物を用意する工程
と、少なくとも2つの電極部分を有する前記混合
物の成形物を作る工程と、前記電極部分を有する
前記成形物を非酸化性雰囲気で焼成する工程と、
前記焼成で得られた成形物を酸化性雰囲気で熱処
理する工程とを含む磁器コンデンサの製造方法に
係わるものである。
[作用効果]
上記発明の磁器コンデンサにおける誘電体磁器
を非酸化性雰囲気、1200℃以下の焼成で得ること
ができる。従つて、ニツケル等の卑金属の導電性
ペーストをグリーンシートに塗布し、グリーンシ
ートと導電性ペーストとを同時に焼成する方法に
よつて磁器コンデンサを製造することが可能にな
る。誘電体磁器の組成を本発明で特定された範囲
にすることによつて、比誘電率が3000以上、誘電
体損失tanδが2.5%以下、抵抗率ρが1×106
MΩ・cm以上であり、且つ比誘電率の温度変化率
が−55℃〜125℃で−15%〜+15%(25℃を基
準)、−25℃〜85℃で−10%〜+10%(20℃を基
準)の範囲に収まる誘電体磁器を備えたコンデン
サを提供することができる。
[実施例]
次に、本発明に従う実施例及び比較例について
説明する。
まず、本発明に従う基本成分の組成式
(Bak-x-yMxLy)OkTiO2を第1表の試料No.1
のMx,Lx,kの欄に示す割合で得るため、換言
すれば、(Ba0.96M0.04L0.02)O1.02TiO2、更に詳細
には、M0.04=Mg0.03Zn0.01及びL0.02=Ca0.01Sr0.01
であるので、
(Ba0.96Mg0.03Zn0.01Ca0.01Sr0.01)O1.02TiO2を
得るために、純度99.0%以上のBaCO3(炭酸バリ
ウム)、MgO(酸化マグネシウム)、ZnO(酸化亜
鉛)、及びTiO2(酸化チタン)を用意し、不純物
を目方に入れないで
BaCO3:1037.72g(0.96モル部相当)
MgO:6.62g(0.03モル部相当)
ZnO:4.46g(0.01モル部相当)
CaCO3:5.48g(0.01モル部相当)
SrCO3:8.09g(0.01モル部相当)
TiO2:437.63g(1.00モル部相当)を秤量した。
次に、秤量されたこれ等の原料をポツトミル
(pot mill)に入れ、更にアルミナボールと水2.5
とを入れ、15時間湿式攪拌した後、攪拌物をス
テンレスポツトに入れて熱風式乾燥器で150℃、
4時間乾燥した。次にこの乾燥物を粗粉砕し、こ
の粗粉砕物をトンネル炉にて大気中で1200℃、2
時間仮焼し、上記組成式の基本成分を得た。
一方、第2表の試料No.1の第2の添加成分を得
るために、B2O3を0.99g(1モル部)と、SiO2を
68.38g(80モル部)と、BaCO3を10.67g(3.8モル
部)と、SrCO3を7.98g(3.8モル部)と、CaCO3
を5.41g(3.8モル部)と、MgOを2.18g(3.8モル部)
と、ZnOを4.40g(3.8モル部)をそれぞれ秤量し、
この混合物にアルコールを300c.c.加え、ポリエチ
レンポツトにてアルミナボールを用いて10時間攪
拌した後、大気中1000℃で2時間仮焼成し、これ
を300c.c.の水と共にアルミナポツトに入れ、アル
ミナボールで15時間粉砕し、しかる後、150℃で
4時間乾燥させてB2O3が1モル%、SiO2が80モ
ル%、MOが19モル%(BaO 3.8モル%+SrO
3.8モル%+CaO 3.8モル%+MgO 3.8モル%+
ZnO 3.8モル%)の組成の第2の添加成分の粉末
を得た。なお、MOの内容であるBaOとSrOと
CaOとMgOとZnOとの割合は第2表に示すよう
にいずれも20モル%となる。
次に、100重量部(1000g)の基本成分に2重
量部(20g)の第2の添加成分を添加し、更に、
第1の添加成分として平均粒径が0.5μmでよく粒
の揃つた純度99.0%以上のCr2O3を0.1重量部
(1g)添加し、更に、アクリル酸エステルポリマ
ー、グリセリン、縮合リン酸塩の水溶液から成る
有機バインダを基本成分と第1及び第2の添加成
分との合計重量に対して15重量%添加し、更に、
50重量%の水を加え、これ等をボールミルに入れ
て粉砕及び混合して磁器原料のスラリーを作製し
た。
次に、上記スラリーを真空脱泡機に入れて脱泡
し、このスラリーをリバースロールコータに入れ
ここから得られる薄膜成形物を長尺なポリエステ
ルフイルム上に連続して受け取ると共に、同フイ
ルム上でこれを100℃に加熱して乾燥させ、厚さ
約25μmの未焼結磁器シートを得た。このシート
は長尺なものであるが、これを10cm角の正方形に
裁断して使用する。
一方、内部電極用の導電ペーストは、粒径平均
1.5μmのニツケル粉末10gと、エチルセルロース
0.9gをブチルカルビトール9.1gに溶解させたもの
とを攪拌機に入れ、10時間攪拌することにより得
た。この導電ペーストを長さ14mm、幅7mmのパタ
ーンを50個有するスクリーンを介して上記未焼結
磁器シートの片側に印刷した後、これを乾燥させ
た。
次に、上記印刷面を上にして未焼結磁器シート
を2枚積層した。この際、隣接する上下のシート
において、その印刷面がパターンの長手方向に約
半分程ずれるように配置した。更に、この積層物
の上下両面にそれぞれ4枚ずつ厚さ60μmの未焼
結磁器シートを積層した。次いで、この積層物を
約50℃の温度で厚さ方向に約40トンの荷重を加え
て圧着させた。しかる後、この積層物を格子状に
裁断し、50個の積層チツプを得た。
次に、この積層体を雰囲気焼成が可能な炉に入
れ、大気雰囲気中で100℃/hの速度で600℃まで
昇温して、有機バインダを燃焼させた。しかる
後、炉の雰囲気を大気からH2(2体積%)+N2
(98体積%)の雰囲気に変えた。そして、炉を上
述の如き還元性雰囲気とした状態を保つて、積層
体加熱温度を600℃から焼結温度の1150℃まで、
100℃/hの速度で昇温して1150℃(最高温度)
を3時間保持した後、100℃/hの速度で600℃ま
で降温し、雰囲気を大気雰囲気(酸化性雰囲気)
におきかえて、600℃を30分間保持して酸化処理
を行い、その後、室温まで冷却して積層焼結体チ
ツプを作製した。
次に、第1図に示す積層磁器コンデンサ10を
得るために、3つの誘電体磁器層12と2つの内
部電極14とから成る積層焼結体チツプ15に一
対の外部電極16を形成した。なお、外部電極1
6は、電極が露出する焼結体チツプ15の側面に
亜鉛とガラスフリツト(glass frit)とビヒクル
(vehicle)とから成る導電性ペーストを塗布して
乾燥し、これを大気中で550℃の温度で15分間焼
付け、亜鉛電極層18を形成し、更にこの上に無
電解メツキで法で銅層20を形成し、更にこの上
に電気メツキ法でPb−Sn半田層22を設けたも
のから成る。
このコンデンサ10の誘電体磁器層12の厚さ
は0.02mm、一対の内部電極14の対向面積は5mm
×5mm=25mm2である。なお、焼結後の磁器層12
の組成は、焼結前の基本成分と添加成分との混合
組成と実質的に同じである。
次に、コンデンサ10の電気特性を測定し、そ
の平均値を求めたところ、第3表に示す如く、比
誘電率εsが3810、tanδが1/1%、抵抗率ρが
3.8×106MΩ・cm、25℃の静電容量を基準にした
−55℃及び+125℃の静電容量の変化率ΔC-55、
ΔC125が−10.6%、+3.6%、20℃の静電容量を基
準にした−25℃、+85℃の静電容量の変化率
ΔC-25、ΔC85は−5.1%、−6.1%であつた。
なお、電気的特性は次の要領で測定した。
(A) 比誘電率εsは、温度20℃、周波数1kHz、電圧
(実効値)1.0Vの条件で静電容量を測定し、こ
の測定値一対の内部電極14の対向面積25mm2と
一対の内部電極14間の磁器層12の厚さ0.02
mmから計算で求めた。
(B) 誘電体損失tanδ(%)は比誘電率と同一条件
で測定した。
(C) 抵抗率ρ(MΩ・cm)は、温度20℃において
DC100Vを1分間印加した後に一対の外部電極
16間の抵抗値を測定し、この測定値と寸法と
に基づいて計算で求めた。
(D) 静電容量の温度特性は、恒温槽の中に試料を
入れ、−55℃、−25℃、0℃、+20℃、25℃、+40
℃、+60℃、+85℃、+105℃、+125℃の各温度に
おいて、周波数1kHz、電圧(実効値)1.0Vの
条件で静電容量を測定し、20℃及び25℃の時の
静電容量に対する各温度における変化率を求め
ることによつて得た。
以上、試料No.1の作製方法及びその特性につい
て述べたが、試料No.2〜99についても、基本成
分、第1及び第2の添加成分の組成、これ等の割
合、及び還元性雰囲気での焼成温度を第1表〜第
3表に示すように変えた他は、試料No.1と全く同
一の方法で積層磁器コンデンサを作製し、同一方
法で電気的特性を測定した。
第1表は、それぞれの試料の基本成分と第1の
添加成分の組成及び添加量と第2の添加成分の添
加量を示し、第2表はそれぞれの試料の第2の添
加成分の組成を示し、第3表はそれぞれの試料の
焼成温度、及び電気的特性を示す。なお、第1表
の基本成分の欄のx,y,kは組成式の各元素の
原子数、即ちTiの原子数を1とした場合の各元
素の原子数の割合を示す。xの欄のMg,Znは、
一般式のMの内容を示し、Mg,Znの欄にはこれ
等の原子数が示され、yの欄のCa,Srは一般式
Lの内容を示し、Ca,Sr欄にはこれ等の原子数
が示され、合計の欄にはこれ等の合計値(y)が
示されている。x+yの欄には、Mg,Zn,Ca,
Srの原子数の和が示されている。第1及び第2
の添加成分の添加量は基本成分100重量部に対す
る重量部で示されている。第2表の第2の添加成
分のMOの内容の欄には、BaO,MgO,ZnO,
SrO,CaOの割合がモル%で示されている。第3
表において、静電容量の温度特性は、25℃の静電
容量を基準にした−55℃及び+125℃の静電容量
変化率をΔC-55(%)ΔC125(%)、20℃の静電容量
を基準にした−25℃及び+85℃の静電容量変化率
をΔC-25(%)、ΔC85(%)で示されている。
[Industrial Field of Application] The present invention relates to a ceramic capacitor having a single-layer or laminated structure consisting of dielectric ceramic and at least two electrodes, and a method for manufacturing the same. [Conventional technology] Conventionally, when manufacturing multilayer ceramic capacitors,
A conductive paste of noble metals such as platinum or palladium is printed in a desired pattern on a green sheet (unsintered porcelain sheet) made of dielectric porcelain raw material powder, multiple sheets are stacked and pressed together, and oxidized at 1300°C to 1600°C. sintered in a neutral atmosphere. Thereby, the dielectric ceramic and the internal electrode can be obtained at the same time. As mentioned above, if a noble metal is used, the intended internal electrode can be obtained even if it is sintered at high temperature in an oxidizing atmosphere. However, since precious metals such as platinum and palladium are expensive, the cost of multilayer ceramic capacitors has inevitably increased. As a solution to the above-mentioned problem, Japanese Patent Publication No. 14607/1987, filed by the applicant , states that ( Bakx Mx ) OkTiO2 (where M is at least one of Mg and Zn). species) and Li 2
A dielectric ceramic composition is disclosed that includes an additive component consisting of O and SiO 2 . Moreover, in Japanese Patent Publication No. 61-14608, instead of Li 2 O and SiO 2 in the above-mentioned Japanese Patent Publication No. 61-14607,
Li 2 O, SiO 2 and MO (however, MO is BaO, CaO and
A dielectric ceramic composition containing an additive component consisting of at least one type of SrO is disclosed. In addition, in Special Publication No. 61-14609, (Ba kxy
M x L y ) O k TiO 2 (M is at least one of Mg and Zn, L is at least one of Sr and Ca)
A dielectric ceramic composition is disclosed that includes a basic component consisting of Li 2 O and an additive component consisting of Li 2 O and SiO 2 . Furthermore, in Japanese Patent Publication No. 61-14610, Li 2 O, SiO 2 and MO ( however , MO is BaO, CaO
and at least one of SrO) is disclosed. In addition, in Special Publication No. 61-14611, (Ba kx
M x )O k TiO 2 (where M is at least one of Mg, Zn, Sr, and Ca), and B 2 O
A dielectric ceramic composition is disclosed that includes an additive component consisting of SiO 2 . In addition, in Special Publication No. 1595/1983, (Ba kx M x )
A basic component consisting of O k TiO 2 (where M is at least one of Mg, Zn, Sr, and Ca) and B 2 O 3 .
MO (However, MO is BaO, MgO, ZnO, SrO and
A dielectric ceramic composition containing an additive component consisting of at least one type of CaO is disclosed. In addition, in Japanese Patent Publication No. 62-1596, instead of B 2 O 3 and MO in the above-mentioned Japanese Patent Publication No. 62-1595, B 2 O 3
and SiO 2 and MO (however, MO is BaO, MgO, ZnO,
A dielectric ceramic composition containing an additive component consisting of at least one of SrO and CaO is disclosed. The dielectric ceramic compositions disclosed in these are:
It can be obtained by firing in a reducing atmosphere of 1200℃ or less, has a dielectric constant of 2000 or more, and can have a temperature change rate of capacitance of ±10% from -25℃ to +85℃. be. [Problem to be solved by the invention] By the way, with the recent increase in the density of electronic circuits,
There is a strong demand for miniaturization of multilayer capacitors, and in order to meet this demand, the dielectric constant of the dielectric material has been improved to the ratio of the dielectric ceramic compositions disclosed in the above publications without deteriorating the rate of temperature change. It is desired to further increase the dielectric constant. Therefore, the purpose of the present invention is to provide a non-oxidizing atmosphere,
Porcelain capacitors equipped with dielectric porcelain that has a high dielectric constant and a small rate of change in dielectric constant over a wide temperature range, even though it is obtained by firing at a temperature of 1200°C or lower. The object of the present invention is to provide a manufacturing method thereof. [Means for Solving the Problems] To achieve the above object, the present invention provides a ceramic capacitor comprising a dielectric ceramic and at least two electrodes in contact with the ceramic, in which the ceramic is 100.0 parts by weight. It consists of a basic component, a first additive component of 0.01 to 3.00 parts by weight, and a second additive component of 0.2 to 5.0 parts by weight, and the basic component is (Ba kxy
M x L y ) O k TiO 2 (However, M is at least one metal among Mg and Zn, L is at least one metal among Ca and Sr,
k, x, y are numerical values that satisfy 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10),
The first additive component is at least one metal oxide of Cr 2 O 3 and Al 2 O 3 , and the second additive component is B 2 O 3 , SiO 2 , and MO (however, MO is BaO,
At least one of SrO, CaO, MgO and ZnO
and the composition range of the B 2 O 3 , the SiO 2 and the MO is 1 mol % of the B 2 O 3 in the triangular diagram showing these compositions in mol %, A point A where SiO 2 is 80 mol % and the MO is 19 mol %; a point B where the B 2 O 3 is 1 mol %, the SiO 2 is 39 mol %, and the MO is 60 mol %; and the B 2 O 3
is 29 mol%, the SiO 2 is 1 mol%, and the MO is 70
Point C of mol % and said B 2 O 3 is 90 mol %, said
A point D where SiO 2 is 1 mol % and the MO is 9 mol %,
A point E where the B 2 O 3 is 90 mol %, the SiO 2 is 9 mol %, and the MO is 1 mol %, and the B 2 O 3 is 19 mol %, the SiO 2 is 80 mol %, and the MO is This relates to a capacitor that is within an area surrounded by six straight lines connecting points F of 1 mol % in sequence. In addition, in the composition formula showing the basic components, k-x,
Of course, x and k indicate the number of atoms of each element,
Ba is barium, O is oxygen, Ti is titanium, Mg is magnesium, Zn is zinc, Ca is calcium, Sr
is strontium. Cr2 of the first additive component
O3 is chromium oxide and Al2O3 is aluminum oxide. B 2 O 3 in the second additive component is boron oxide,
SiO 2 is silicon oxide, BaO is barium oxide, SrO is strontium oxide, CaO is calcium oxide,
MgO is magnesium oxide and ZnO is zinc oxide. The invention related to the manufacturing method includes the steps of: preparing a mixture of the basic component and the first and second additive components; making a molded product of the mixture having at least two electrode parts; a step of firing the molded article in a non-oxidizing atmosphere;
The present invention relates to a method for manufacturing a ceramic capacitor, which includes a step of heat-treating the molded product obtained by the firing in an oxidizing atmosphere. [Operation and Effect] The dielectric ceramic in the ceramic capacitor of the above invention can be obtained by firing in a non-oxidizing atmosphere at 1200°C or lower. Therefore, it becomes possible to manufacture a ceramic capacitor by applying a conductive paste of a base metal such as nickel to a green sheet and firing the green sheet and the conductive paste simultaneously. By setting the composition of the dielectric ceramic within the range specified in the present invention, the dielectric constant is 3000 or more, the dielectric loss tan δ is 2.5% or less, and the resistivity ρ is 1 × 10 6
MΩ・cm or more, and the temperature change rate of relative permittivity is -15% to +15% (based on 25°C) from -55°C to 125°C, and -10% to +10% (based on 25°C) from -25°C to 85°C. We can provide capacitors with dielectric ceramics that fall within the temperature range (20℃ standard). [Examples] Next, Examples and Comparative Examples according to the present invention will be described. First, the compositional formula (Ba kxy M x L y )O k TiO 2 of the basic component according to the present invention is converted to sample No. 1 in Table 1.
In other words, (Ba 0.96 M 0.04 L 0.02 ) O 1.02 TiO 2 , more specifically, M 0.04 = Mg 0.03 Zn 0.01 and L 0.02 = Ca 0.01. Sr 0.01
Therefore, in order to obtain (Ba 0.96 Mg 0.03 Zn 0.01 Ca 0.01 Sr 0.01 ) O 1.02 TiO 2 , BaCO 3 (barium carbonate), MgO (magnesium oxide), ZnO (zinc oxide), and Prepare TiO 2 (titanium oxide) without adding any impurities. BaCO 3 : 1037.72g (equivalent to 0.96 mol part) MgO: 6.62g (equivalent to 0.03 mol part) ZnO: 4.46g (equivalent to 0.01 mol part) CaCO 3 : 5.48 g (equivalent to 0.01 mole part) SrCO 3 : 8.09 g (equivalent to 0.01 mole part) TiO 2 : 437.63 g (equivalent to 1.00 mole part) were weighed. Next, put these weighed raw materials into a pot mill, add an alumina ball and 2.5 ml of water.
After wet stirring for 15 hours, the stirred material was placed in a stainless steel pot and heated to 150°C in a hot air dryer.
It was dried for 4 hours. Next, this dried material is coarsely pulverized, and the coarsely pulverized material is heated in a tunnel furnace at 1200°C in the atmosphere for 20 minutes.
After calcining for a period of time, the basic components having the above composition formula were obtained. On the other hand, in order to obtain the second additive component of sample No. 1 in Table 2, 0.99 g (1 mole part) of B 2 O 3 and SiO 2 were added.
68.38 g (80 mol parts), 10.67 g (3.8 mol parts) of BaCO 3 , 7.98 g (3.8 mol parts) of SrCO 3 , and CaCO 3
5.41g (3.8 mol parts) of MgO and 2.18g (3.8 mol parts) of MgO
Weighed 4.40g (3.8 mol parts) of ZnO and
300 c.c. of alcohol was added to this mixture, stirred for 10 hours using an alumina ball in a polyethylene pot, then pre-calcined in the air at 1000℃ for 2 hours, and poured into an alumina pot with 300 c.c. of water. , crushed with alumina balls for 15 hours, and then dried at 150°C for 4 hours to obtain 1 mol% B 2 O 3 , 80 mol% SiO 2 , 19 mol% MO (BaO 3.8 mol% + SrO
3.8 mol% + CaO 3.8 mol% + MgO 3.8 mol% +
A powder of a second additive component having a composition of 3.8 mol % ZnO was obtained. In addition, the contents of MO, BaO and SrO,
As shown in Table 2, the proportions of CaO, MgO, and ZnO are all 20 mol%. Next, 2 parts by weight (20g) of a second additive component is added to 100 parts by weight (1000g) of the base component, and further,
As the first additive component, 0.1 part by weight (1 g) of Cr 2 O 3 with an average particle size of 0.5 μm, well-organized particles, and a purity of 99.0% or more is added, and furthermore, acrylic ester polymer, glycerin, and condensed phosphate. An organic binder consisting of an aqueous solution of 15% by weight is added to the total weight of the basic component and the first and second additive components, and further,
50% by weight of water was added, and the mixture was placed in a ball mill and ground and mixed to prepare a slurry of porcelain raw materials. Next, the above slurry is put into a vacuum deaerator to degas it, and this slurry is put into a reverse roll coater, and the resulting thin film molded product is continuously received on a long polyester film. This was heated to 100°C and dried to obtain an unsintered porcelain sheet with a thickness of about 25 μm. This sheet is long, but it is cut into 10cm squares. On the other hand, the conductive paste for internal electrodes has an average particle size of
10g of 1.5μm nickel powder and ethyl cellulose
A solution of 0.9 g dissolved in 9.1 g of butyl carbitol was placed in a stirrer and stirred for 10 hours. This conductive paste was printed on one side of the unsintered porcelain sheet through a screen having 50 patterns of 14 mm in length and 7 mm in width, and then dried. Next, two unsintered porcelain sheets were laminated with the printed surfaces facing up. At this time, the adjacent upper and lower sheets were arranged so that their printed surfaces were shifted by about half in the longitudinal direction of the pattern. Furthermore, four unsintered porcelain sheets each having a thickness of 60 μm were laminated on the upper and lower surfaces of this laminate. Next, this laminate was compressed at a temperature of about 50° C. by applying a load of about 40 tons in the thickness direction. Thereafter, this laminate was cut into a grid shape to obtain 50 laminate chips. Next, this laminate was placed in a furnace capable of firing in an atmosphere, and the temperature was raised to 600° C. at a rate of 100° C./h in an air atmosphere to burn the organic binder. After that, the atmosphere of the furnace is changed from the atmosphere to H 2 (2% by volume) + N 2
(98% by volume). Then, while maintaining the reducing atmosphere in the furnace as described above, the laminate heating temperature was increased from 600°C to the sintering temperature of 1150°C.
Raise the temperature at a rate of 100℃/h to 1150℃ (maximum temperature)
After holding for 3 hours, the temperature was lowered to 600°C at a rate of 100°C/h, and the atmosphere was changed to air (oxidizing atmosphere).
Instead, oxidation treatment was performed by holding the temperature at 600°C for 30 minutes, and then cooling to room temperature to produce a laminated sintered chip. Next, in order to obtain the multilayer ceramic capacitor 10 shown in FIG. 1, a pair of external electrodes 16 were formed on a multilayer sintered chip 15 consisting of three dielectric ceramic layers 12 and two internal electrodes 14. In addition, external electrode 1
In step 6, a conductive paste consisting of zinc, glass frit, and vehicle is applied to the side surface of the sintered chip 15 where the electrodes are exposed, dried, and then heated in the atmosphere at a temperature of 550°C. A zinc electrode layer 18 is formed by baking for 15 minutes, a copper layer 20 is formed thereon by electroless plating, and a Pb-Sn solder layer 22 is further formed on this by electroplating. The thickness of the dielectric ceramic layer 12 of this capacitor 10 is 0.02 mm, and the opposing area of a pair of internal electrodes 14 is 5 mm.
×5mm= 25mm2 . Note that the porcelain layer 12 after sintering
The composition of is substantially the same as the mixed composition of the basic components and additive components before sintering. Next, the electrical characteristics of the capacitor 10 were measured and the average values were calculated. As shown in Table 3, the relative dielectric constant ε s is 3810, the tan δ is 1/1%, and the resistivity ρ is
3.8×10 6 MΩ・cm, capacitance change rate ΔC -55 at -55℃ and +125℃ based on capacitance at 25℃,
ΔC 125 is -10.6%, +3.6%, capacitance change rate ΔC -25 at -25℃ and +85℃ based on capacitance at 20℃, ΔC 85 is -5.1%, -6.1%. It was hot. Note that the electrical characteristics were measured in the following manner. (A) The relative permittivity ε s is determined by measuring the capacitance under the conditions of temperature 20°C, frequency 1kHz, and voltage (effective value) 1.0V, and the measured value is calculated using the opposing area of 25 mm 2 of the pair of internal electrodes 14 and the pair of Thickness of porcelain layer 12 between internal electrodes 14: 0.02
Calculated from mm. (B) Dielectric loss tanδ (%) was measured under the same conditions as the relative dielectric constant. (C) Resistivity ρ (MΩ・cm) at a temperature of 20℃
After applying DC 100V for 1 minute, the resistance value between the pair of external electrodes 16 was measured, and calculated based on this measured value and the dimensions. (D) Temperature characteristics of capacitance are measured by placing the sample in a thermostatic chamber at -55°C, -25°C, 0°C, +20°C, 25°C, +40°C.
℃, +60℃, +85℃, +105℃, +125℃ under the conditions of frequency 1kHz and voltage (effective value) 1.0V, and the capacitance at 20℃ and 25℃ is measured. It was obtained by determining the rate of change at each temperature. The preparation method and characteristics of sample No. 1 have been described above, but samples No. 2 to 99 have also been described regarding the composition of the basic component, the first and second additive components, their ratios, and the reducing atmosphere. Multilayer ceramic capacitors were manufactured in exactly the same manner as Sample No. 1, except that the firing temperature was changed as shown in Tables 1 to 3, and the electrical characteristics were measured in the same manner. Table 1 shows the composition and amount of the basic component and the first additive component of each sample, and the amount of the second additive component, and Table 2 shows the composition of the second additive component of each sample. Table 3 shows the firing temperature and electrical properties of each sample. Note that x, y, and k in the column of basic components in Table 1 indicate the number of atoms of each element in the composition formula, that is, the ratio of the number of atoms of each element when the number of atoms of Ti is 1. Mg and Zn in the x column are
The contents of M in the general formula are shown, the Mg and Zn columns show the number of these atoms, the y column Ca and Sr show the contents of the general formula L, and the Ca and Sr columns show these atoms. The number of atoms is shown, and the total value (y) of these is shown in the total column. In the x+y column, Mg, Zn, Ca,
The sum of the numbers of Sr atoms is shown. 1st and 2nd
The amount of the additional component added is shown in parts by weight based on 100 parts by weight of the basic component. The MO content column of the second additive component in Table 2 contains BaO, MgO, ZnO,
The proportions of SrO and CaO are shown in mol%. Third
In the table, the temperature characteristics of capacitance are as follows: ΔC -55 (%) ΔC 125 (%), capacitance change rate at -55°C and +125°C based on the capacitance at 25°C, The capacitance change rate at -25°C and +85°C based on the capacitance is shown as ΔC -25 (%) and ΔC 85 (%).
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】【table】
【表】
第1表〜第3表から明らかな如く、本発明に従
う試料では、非酸化性雰囲気、1200℃以下の焼成
で、比誘電率εsが3000以上、誘電体損失tanδが
2.5%以下、抵抗率ρが1×106MΩ・cm以上、静
電容量の温度変化率ΔC-55及びΔC125が−15%〜
+15%、ΔC-25及びΔC85は−10%〜+10%の範囲
となり、所望特性のコンデンサを得ることが出来
る。一方、試料No.7〜10、26、31、32、37、38、
50〜56、64〜70、75、76、80、81、90、91、92、
98、99では本発明の目的を達成することができな
い。従つて、これ等は本発明の範囲外のものであ
る。
第3表にはΔC-55、ΔC125、ΔC-25、ΔC85のみ
が示されているが、本発明の範囲に属する試料の
−25℃〜+85℃の範囲の種々の静電容量の変化率
ΔCは、−10%〜+10%の範囲に収まり、また、−
55℃〜+125℃の範囲の種々の静電容量の変化率
ΔCは、−15%〜+15%の範囲に収まつている。
次に、組成の限定理由について述べる。
x+yの値が、試料No.38、56に示す如く、零の
場合には、ΔC-55が−15%〜+15%の範囲外及び
ΔC-25が−10%〜+15%の範囲外となるが、試料
No.39、40、41、42、57、58に示す如く、x+yの
値が0.01の場合には、所望の電気的特性を得るこ
とができる。従つて、x+yの値の下限は0.01で
ある。一方、試料No.52〜55、65〜69に示す如く、
x+yの値が0.12の場合には、ΔC85が−10%〜+
10%の範囲外となるが、試料No.46〜49,62,63に
示す如く、x+yの値が0.10の場合には、所望の
電気的特性を得ることができる。但し、x+yの
値が試料No.50、51、64に示す如く、0.10であつて
もyの値が0.05を越えてしまう場合にはΔC85が範
囲外になる。従つて、x+yの上限値は0.10であ
るが、同時にyの上限値を0.05にしなければなら
ない。なお、M成分のMgとZn及びL成分のCaと
Srはほぼ同様に働き、0<x<0.10を満足する範
囲でMgとZnの内の一方又は両方を使用するこ
と、また0<y≦0.05を満足する範囲でCa,Sr
の内の一方又は両方を使用することができる。そ
して、M成分及びL成分の1種又は複数種の何れ
の場合においてもx+yの値を0.01〜0.10の範囲
にすることが望ましい。
kの値が、試料No.70、76に示す如く、1.0より
も小さい場合には、ρが1×106MΩ・cm未満と
なり、大幅に低くなるが、試料No.71、77に示す如
く、kの値が1.00の場合には、所望の電気的特性
が得られる。従つて、kの値の下限は1.00であ
る。一方、kの値が、試料No.75、80に示す如く、
1.05より大きい場合には緻密な焼結体が得られな
いが、試料No.74、79に示す如く、kの値が1.05の
場合には所望の電気的特性が得られる。従つて、
kの値の上限は1.05である。
第1の添加成分であるCr2O3及び/又はAl2O3
の添加量が試料No.81、92に示す如く零の場合は、
ΔC-55が−15%未満となるが、試料No.82、83、
93、94に示す如く添加量が100重量部の基本成分
に対して0.01重量部の場合には所望の特性を得る
ことができる。従つて第1の添加成分の下限は
0.01である。一方、試料No.90、91、98、99に示す
如く添加量が3.0重量部よりも多い場合には1250
℃で焼成しても緻密な焼結体が得られないが、試
料No.87、88、89、97に示す如く添加量が3.0重量
部の場合には所望の特性を得ることができる。従
つて第1の添加成分の上限は3.0重量部である。
なお、第1の添加成分のCr2O3とAl2O3とはほぼ
同様に働き、これ等から選択された1つを使用し
ても、又は複数を使用しても同様な結果が得られ
る。そして、第1の添加成分が1種又は複数種の
何れの場合に於いても、添加量は0.01〜3.0の範
囲にすることが望ましい。なお、この第1の添加
成分は、静電容量の温度特性の改善に寄与する。
即ち、第1の添加成分の添加によつて−55℃〜
125℃の範囲での静電容量の温度変化率ΔC-55〜
ΔC125を−15%〜+15%の範囲に容易に収めるこ
とが可能になると共に、−25℃〜85℃の範囲での
静電容量の温度変化率ΔC-25〜ΔC85を−10%〜+
10%の範囲に容易に収めることが可能になり、且
つ各温度範囲における静電容量の温度変化率の変
動幅を小さくすることができる。また、第1の添
加成分は抵抗率ρを大きくする作用を若干有す
る。
第2の添加成分の添加量が零の場合には、試料
No.26、32から明らかな如く、焼成温度が1250℃で
あつても緻密な焼結体が得られないが、試料No.
27、33に示す如く、添加量が100重量部の基本成
分に対して0.2重量部の場合には、1190℃の焼成
で所望の電気的特性を有する焼結体が得られる。
従つて、第2の添加成分の下限は0.2重量部であ
る。一方、試料No.31、37に示す如く、第2の添加
成分の添加量が6.0重量部の場合には、εsが3000
未満となり、更にΔC-55が−15%〜+15%の範囲
外となるが、試料No.30、36に示す如く、添加量が
5.0重量部の場合には所望特性を得ることができ
る。従つて、添加量の上限は5.0重量部である。
第2の添加成分の好ましい組成は、第2図の
B2O3−SiO2−MOの組成比を示す三角図に基づ
いて決定することができる。三角図の第1の点A
は、試料No.1のB2O3が1モル%、SiO2が80モル
%、MOが19モル%の組成を示し、第2の点B
は、試料No.2のB2O3が1モル%、SiO2が39モル
%、MOが60モル%の組成を示し、第3の点C
は、試料No.3のB2O3が29モル%、SiO2が1モル
%、MOが70モル%の組成を示し、第4の点D
は、試料No.4のB2O3が90モル%、SiO2が1モル
%、MOが9モル%の組成を示し、第5の点E
は、試料No.5のB2O3が90モル%、SiO2が9モル
%、MOが1モル%の組成を示し、第6の点Fは
試料No.6のB2O3が19モル%、SiO2が80モル%、
MOが1モル%の組成を示す。
本発明の範囲に属する試料の第2の添加成分の
組成は三角図の第1〜6の点A〜Fを順に結ぶ6
本の直線で囲まれた領域内の組成になつている。
この領域内の組成とすれば、所望の電気的特性を
得ることができる。一方、試料No.7〜10のよう
に、第2の添加成分の組成が本発明で特定した範
囲外となれば、緻密な焼結体を得ることができな
い。なお、MO成分は例えば試料No.17〜21に示す
如くBaO,MgO,ZnO,SrO,CaOのいずれか
1つであつてもよいし、又は他の試料で示すよう
に適当な比率としてもよい。
[変形例]
以上、本発明の実施例について述べたが、本発
明はこれに限定されるものではなく、例えば次の
変形例が可能なものである。
(a) 基本成分の中に、本発明の目的を阻害しない
範囲で微量のMnO2(好ましくは0.05〜0.1重量
%)等の鉱化剤を添加し、焼結性を向上させて
もよい。また、その他の物質を必要に応じて添
加してもよい。
(b) 出発原料を、実施例で示したもの以外の酸化
物は水酸化物又はその他の化合物としてもよ
い。
(c) 焼成時の非酸化性雰囲気での処理の後の酸化
性雰囲気での処理の温度を600℃以外の焼結温
度よりも低い温度(好ましくは500℃〜1000℃
の範囲)としてもよい。即ち、ニツケル等の電
極材料と磁器の酸化とを考慮して種々変更する
ことが可能である。
(d) 非酸化性雰囲気中の焼成温度を、電極材料を
考慮して種々変えることができる。ニツケルを
内部電極とする場合には、1050℃〜1200℃の範
囲でニツケル粒子の凝集がほとんど生じない。
(e) 焼結を中性雰囲気で行つてもよい。
(f) 積層磁器コンデンサ以外の一般的な単層の磁
器コンデンサにも勿論適用可能である。[Table] As is clear from Tables 1 to 3, the samples according to the present invention have a relative dielectric constant ε s of 3000 or more and a dielectric loss tan δ when fired in a non-oxidizing atmosphere at 1200°C or lower.
2.5% or less, resistivity ρ is 1×10 6 MΩ・cm or more, temperature change rate of capacitance ΔC -55 and ΔC 125 is -15% ~
+15%, ΔC -25 and ΔC 85 are in the range of -10% to +10%, making it possible to obtain a capacitor with desired characteristics. On the other hand, sample Nos. 7 to 10, 26, 31, 32, 37, 38,
50-56, 64-70, 75, 76, 80, 81, 90, 91, 92,
98 and 99 cannot achieve the object of the present invention. Therefore, these are outside the scope of the present invention. Although only ΔC -55 , ΔC 125 , ΔC -25 and ΔC 85 are shown in Table 3, various capacitance changes in the range of -25°C to +85°C of samples belonging to the scope of the present invention are shown. The rate ΔC falls within the range of −10% to +10%, and −
The various capacitance change rates ΔC in the range of 55° C. to +125° C. are in the range of −15% to +15%. Next, the reasons for limiting the composition will be described. If the value of x+y is zero as shown in sample No. 38 and 56, ΔC -55 will be outside the range of -15% to +15% and ΔC -25 will be outside the range of -10% to +15%. However, the sample
As shown in Nos. 39, 40, 41, 42, 57, and 58, when the value of x+y is 0.01, desired electrical characteristics can be obtained. Therefore, the lower limit of the value of x+y is 0.01. On the other hand, as shown in sample Nos. 52-55 and 65-69,
When the value of x+y is 0.12, ΔC 85 is -10% to +
Although it is outside the range of 10%, desired electrical characteristics can be obtained when the value of x+y is 0.10, as shown in Sample Nos. 46 to 49, 62, and 63. However, as shown in sample Nos. 50, 51, and 64, even if the value of x+y is 0.10, if the value of y exceeds 0.05, ΔC 85 is out of the range. Therefore, the upper limit of x+y is 0.10, but at the same time the upper limit of y must be set to 0.05. In addition, Mg and Zn of M component and Ca and L component
Sr works in almost the same way, and one or both of Mg and Zn should be used within the range that satisfies 0<x<0.10, and Ca and Sr should be used within the range that satisfies 0<y≦0.05.
One or both of these can be used. It is desirable that the value of x+y be in the range of 0.01 to 0.10 in either case of one or more of the M component and the L component. When the value of k is smaller than 1.0, as shown in samples No. 70 and 76, ρ becomes less than 1×10 6 MΩ・cm, which is significantly lower, but as shown in samples No. 71 and 77, , k is 1.00, desired electrical characteristics can be obtained. Therefore, the lower limit of the value of k is 1.00. On the other hand, as shown in sample Nos. 75 and 80, the value of k is
When the value of k is greater than 1.05, a dense sintered body cannot be obtained, but as shown in Sample Nos. 74 and 79, when the value of k is 1.05, desired electrical characteristics can be obtained. Therefore,
The upper limit of the value of k is 1.05. Cr 2 O 3 and/or Al 2 O 3 as the first additive component
If the amount added is zero as shown in sample Nos. 81 and 92,
Although ΔC -55 is less than -15%, sample No. 82, 83,
As shown in 93 and 94, when the amount added is 0.01 part by weight per 100 parts by weight of the basic component, desired characteristics can be obtained. Therefore, the lower limit of the first additive component is
It is 0.01. On the other hand, when the amount added is more than 3.0 parts by weight as shown in sample Nos. 90, 91, 98, and 99, 1250
Although a dense sintered body cannot be obtained even if fired at 0.degree. C., desired characteristics can be obtained when the amount added is 3.0 parts by weight, as shown in sample Nos. 87, 88, 89, and 97. Therefore, the upper limit of the first additive component is 3.0 parts by weight.
Note that Cr 2 O 3 and Al 2 O 3 , which are the first additive components, work in almost the same way, and the same results can be obtained even if one selected from them or a combination of them is used. It will be done. Whether the first additive component is one type or multiple types, the amount added is preferably in the range of 0.01 to 3.0. Note that this first additive component contributes to improving the temperature characteristics of capacitance.
That is, by adding the first additive component, the temperature is -55℃~
Temperature change rate of capacitance ΔC in the range of 125℃ -55 ~
It becomes possible to easily keep ΔC 125 within the range of -15% to +15%, and the temperature change rate of capacitance ΔC -25 to ΔC 85 in the range of -25°C to 85°C can be reduced to -10%. +
It becomes possible to easily keep the capacitance within a range of 10%, and it is possible to reduce the fluctuation range of the temperature change rate of capacitance in each temperature range. Further, the first additive component has the effect of slightly increasing the resistivity ρ. If the amount of the second additive component is zero, the sample
As is clear from Nos. 26 and 32, a dense sintered body cannot be obtained even at a firing temperature of 1250°C, but sample No.
27 and 33, when the amount added is 0.2 parts by weight per 100 parts by weight of the basic components, a sintered body having desired electrical properties can be obtained by firing at 1190°C.
Therefore, the lower limit of the second additive component is 0.2 parts by weight. On the other hand, as shown in Sample Nos. 31 and 37, when the amount of the second additive component is 6.0 parts by weight, ε s is 3000 parts by weight.
Furthermore, ΔC -55 is outside the range of -15% to +15%, but as shown in sample Nos. 30 and 36, the amount added is
In the case of 5.0 parts by weight, desired properties can be obtained. Therefore, the upper limit of the amount added is 5.0 parts by weight. The preferred composition of the second additive component is shown in FIG.
It can be determined based on a triangular diagram showing the composition ratio of B2O3 - SiO2 -MO. First point A of the triangular diagram
indicates a composition of sample No. 1 with 1 mol% B 2 O 3 , 80 mol% SiO 2 , and 19 mol% MO, and the second point B
indicates the composition of sample No. 2 with 1 mol% B 2 O 3 , 39 mol% SiO 2 , and 60 mol% MO, and the third point C
indicates the composition of sample No. 3 with 29 mol% B 2 O 3 , 1 mol% SiO 2 , and 70 mol% MO, and the fourth point D
indicates the composition of sample No. 4 with 90 mol% B 2 O 3 , 1 mol% SiO 2 , and 9 mol% MO, and the fifth point E
indicates the composition of Sample No. 5 with 90 mol% of B 2 O 3 , 9 mol% of SiO 2, and 1 mol% of MO, and the sixth point F shows the composition of Sample No. 6 with 19% of B 2 O 3 mol%, SiO2 80 mol%,
It shows a composition of 1 mol% MO. The composition of the second additive component of the sample belonging to the scope of the present invention is 6
The composition is within the area surrounded by straight lines in the book.
If the composition is within this range, desired electrical characteristics can be obtained. On the other hand, if the composition of the second additive component falls outside the range specified in the present invention, as in Samples Nos. 7 to 10, a dense sintered body cannot be obtained. In addition, the MO component may be any one of BaO, MgO, ZnO, SrO, CaO as shown in Sample Nos. 17 to 21, or may be in an appropriate ratio as shown in other samples. . [Modifications] Although the embodiments of the present invention have been described above, the present invention is not limited thereto, and, for example, the following modifications are possible. (a) A trace amount of a mineralizing agent such as MnO 2 (preferably 0.05 to 0.1% by weight) may be added to the basic components to improve the sinterability, within a range that does not impede the object of the present invention. Further, other substances may be added as necessary. (b) The starting materials may be hydroxides or other compounds other than those shown in the examples. (c) The temperature of the treatment in the oxidizing atmosphere after the treatment in the non-oxidizing atmosphere during firing is lower than the sintering temperature other than 600℃ (preferably 500℃ to 1000℃).
range). That is, various changes can be made in consideration of the electrode material such as nickel and the oxidation of porcelain. (d) The firing temperature in a non-oxidizing atmosphere can be varied depending on the electrode material. When nickel is used as the internal electrode, almost no aggregation of nickel particles occurs in the range of 1050°C to 1200°C. (e) Sintering may be performed in a neutral atmosphere. (f) It is of course applicable to general single-layer ceramic capacitors other than multilayer ceramic capacitors.
第1図は本発明の実施例に係わる積層型磁器コ
ンデンサを示す断面図、第2図は添加成分の組成
範囲を示す三角図である。
12……磁器層、14……内部電極、16……
外部電極。
FIG. 1 is a sectional view showing a multilayer ceramic capacitor according to an embodiment of the present invention, and FIG. 2 is a triangular diagram showing the composition range of additive components. 12...Porcelain layer, 14...Internal electrode, 16...
external electrode.
Claims (1)
くとも2つの電極とから成る磁器コンデンサにお
いて、 前記磁器が100.0重量部の基本成分と、 0.01〜3.00重量部の第1の添加成分と、 0.2〜5.0重量部の第2の添加成分とから成り、 前記基本成分が、 (Bak-x-yMxLy)OkTiO2 (但し、MはMg,Znの内の少なくとも1種の
金属、LはCa,Srの内の少なくとも1種の金属、
k,x,yは 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10を満足する数値)であり、 前記第1の添加成分がCr2O3とAl2O3の内の少
なくとも1種の金属酸化物であり、 前記第2の添加成分がB2O3とSiO2とMO(但
し、MOはBaO,SrO,CaO,MgO及びZnOの内
の少なくとも1種の金属酸化物)から成り、且つ
前記B2O3と前記SiO2と前記MOとの組成範囲が
これ等の組成をモル%で示す三角図における 前記B2O3が1モル%、前記SiO2が80モル%、
前記MOが19モル%の点Aと、 前記B2O3が1モル%、前記SiO2が39モル%、
前記MOが60モル%の点Bと、 前記B2O3が29モル%、前記SiO2が1モル%、
前記MOが70モル%の点Cと、 前記B2O3が90モル%、前記SiO2が1モル%、
前記MOが9モル%の点Dと、 前記B2O3が90モル%、前記SiO2が9モル%、
前記MOが1モル%の点Eと、 前記B2O3が19モル%、前記SiO2が80モル%、
前記MOが1モル%の点F を順に結ぶ6本の直線で囲まれた領域内のもので
あることを特徴とするコンデンサ。 2 100.0重量部の基本成分と、0.01〜3.00重量部
の第1の添加成分と、0.2〜5.0重量部の第2の添
加成分とから成り、前記基本成分が、 (Bak-x-yMxLy)OkTiO2 (但し、MはMg,Znの内の少なくとも1種の
金属、LはCa,Srの内の少なくとも1種の金属、
k,x,yは 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10を満足する数値)であり、
前記第1の添加成分がCr2O3とAl2O3の内の少な
くとも1種の金属酸化物であり、前記第2の添加
成分がB2O3とSiO2とMO(但し、MOはBaO,
SrO,CaO,MgO及びZnOの内の少なくとも1
種の金属酸化物)から成り、且つ前記B2O3と前
記SiO2と前記MOとの組成範囲がこれ等の組成を
モル%で示す三角図における前記B2O3が1モル
%、前記SiO2が80モル%、前記MOが19モル%の
点Aと、前記B2O3が1モル%、前記SiO2が39モ
ル%、前記MOが60モル%の点Bと、前記B2O3
が29モル%、前記SiO2が1モル%、前記MOが70
モル%の点Cと、前記B2O3が90モル%、前記
SiO2が1モル%、前記MOが9モル%の点Dと、
前記B2O3が90モル%、前記SiO2が9モル%、前
記MOが1モル%の点Eと、前記B2O3が19モル
%、前記SiO2が80モル%、前記MOが1モル%の
点Fとを順に結ぶ6本の直線で囲まれた領域内の
ものであることを特徴とする混合物を用意する工
程と、 少なくとも2つの電極部分を有する前記混合物
の成形物を作る工程と、 前記電極部分を有する前記成形物を非酸化性雰
囲気で焼成する工程と、 前記焼成で得られた成形物を酸化性雰囲気で熱
処理する工程と、 を含む磁器コンデンサの製造方法。[Scope of Claims] 1. A ceramic capacitor comprising dielectric ceramic and at least two electrodes in contact with the ceramic, wherein the ceramic contains 100.0 parts by weight of a basic component and 0.01 to 3.00 parts by weight of a first component. It consists of an additive component and 0.2 to 5.0 parts by weight of a second additive component, and the basic component is ( Bakxy M x L y )O k TiO 2 (where M is at least one of Mg and Zn). metal, L is at least one metal among Ca and Sr,
k, x, y are numerical values satisfying 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10), and the first additive component is Cr 2 O 3 and Al 2 O 3 The second additive component is at least one metal oxide selected from the group consisting of B 2 O 3 , SiO 2 and MO (wherein MO is at least one metal oxide selected from BaO, SrO, CaO, MgO and ZnO). In a triangular diagram in which the composition ranges of the B 2 O 3 , the SiO 2 and the MO are expressed in mol %, the B 2 O 3 is 1 mol %, the SiO 2 is 80 mol%,
Point A where the MO is 19 mol %, the B 2 O 3 is 1 mol %, the SiO 2 is 39 mol %,
Point B where the MO is 60 mol%, the B 2 O 3 is 29 mol%, the SiO 2 is 1 mol%,
Point C where the MO is 70 mol %, the B 2 O 3 is 90 mol %, the SiO 2 is 1 mol %,
Point D where the MO is 9 mol %, the B 2 O 3 is 90 mol %, the SiO 2 is 9 mol %,
Point E where the MO is 1 mol %, the B 2 O 3 is 19 mol %, the SiO 2 is 80 mol %,
A capacitor characterized in that the MO is within a region surrounded by six straight lines sequentially connecting points F of 1 mol %. 2 Consists of 100.0 parts by weight of the basic component, 0.01 to 3.00 parts by weight of the first additive component, and 0.2 to 5.0 parts by weight of the second additive component, and the basic component is (Ba kxy M x L y ) O k TiO 2 (However, M is at least one metal among Mg and Zn, L is at least one metal among Ca and Sr,
k, x, y are numerical values that satisfy 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10),
The first additive component is at least one metal oxide of Cr 2 O 3 and Al 2 O 3 , and the second additive component is B 2 O 3 , SiO 2 , and MO (however, MO is BaO,
At least one of SrO, CaO, MgO and ZnO
and the composition range of the B 2 O 3 , the SiO 2 and the MO is 1 mol % of the B 2 O 3 in the triangular diagram showing these compositions in mol %, A point A where SiO 2 is 80 mol % and the MO is 19 mol %; a point B where the B 2 O 3 is 1 mol %, the SiO 2 is 39 mol %, and the MO is 60 mol %; and the B 2 O 3
is 29 mol%, the SiO 2 is 1 mol%, and the MO is 70
Point C of mol % and said B 2 O 3 is 90 mol %, said
A point D where SiO 2 is 1 mol % and the MO is 9 mol %,
A point E where the B 2 O 3 is 90 mol %, the SiO 2 is 9 mol %, and the MO is 1 mol %, and the B 2 O 3 is 19 mol %, the SiO 2 is 80 mol %, and the MO is A step of preparing a mixture characterized by being within an area surrounded by six straight lines connecting points F of 1 mol% in order, and producing a molded product of the mixture having at least two electrode parts. A method for manufacturing a ceramic capacitor, comprising: firing the molded product having the electrode portion in a non-oxidizing atmosphere; and heat-treating the molded product obtained by the firing in an oxidizing atmosphere.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1298138A JPH03159110A (en) | 1989-11-16 | 1989-11-16 | Porcelain capacitor and its manufacture |
| EP90120258A EP0432418B1 (en) | 1989-11-16 | 1990-10-22 | Solid dielectric capacitor and method of manufacture |
| DE69016619T DE69016619T2 (en) | 1989-11-16 | 1990-10-22 | Solid dielectric capacitor and manufacturing method. |
| US07/601,315 US5111357A (en) | 1989-11-16 | 1990-10-22 | Solid dielectric capacitor and method of manufacture |
| KR1019900018687A KR930011190B1 (en) | 1989-11-16 | 1990-11-16 | Solid dielectric capacitor and of manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1298138A JPH03159110A (en) | 1989-11-16 | 1989-11-16 | Porcelain capacitor and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03159110A JPH03159110A (en) | 1991-07-09 |
| JPH0525377B2 true JPH0525377B2 (en) | 1993-04-12 |
Family
ID=17855680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1298138A Granted JPH03159110A (en) | 1989-11-16 | 1989-11-16 | Porcelain capacitor and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03159110A (en) |
-
1989
- 1989-11-16 JP JP1298138A patent/JPH03159110A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03159110A (en) | 1991-07-09 |
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