JPH0525837B2 - - Google Patents

Info

Publication number
JPH0525837B2
JPH0525837B2 JP1123775A JP12377589A JPH0525837B2 JP H0525837 B2 JPH0525837 B2 JP H0525837B2 JP 1123775 A JP1123775 A JP 1123775A JP 12377589 A JP12377589 A JP 12377589A JP H0525837 B2 JPH0525837 B2 JP H0525837B2
Authority
JP
Japan
Prior art keywords
substrate
plasma
diamond
gas
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1123775A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02302396A (ja
Inventor
Junichi Suzuki
Hiroshi Kawarada
Akio Hiraki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1123775A priority Critical patent/JPH02302396A/ja
Publication of JPH02302396A publication Critical patent/JPH02302396A/ja
Publication of JPH0525837B2 publication Critical patent/JPH0525837B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1123775A 1989-05-16 1989-05-16 プラズマ処理装置 Granted JPH02302396A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1123775A JPH02302396A (ja) 1989-05-16 1989-05-16 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1123775A JPH02302396A (ja) 1989-05-16 1989-05-16 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH02302396A JPH02302396A (ja) 1990-12-14
JPH0525837B2 true JPH0525837B2 (sr) 1993-04-14

Family

ID=14868976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1123775A Granted JPH02302396A (ja) 1989-05-16 1989-05-16 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH02302396A (sr)

Also Published As

Publication number Publication date
JPH02302396A (ja) 1990-12-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees