JPH05281400A - Ventilation hole device for electron irradiation device - Google Patents
Ventilation hole device for electron irradiation deviceInfo
- Publication number
- JPH05281400A JPH05281400A JP4109127A JP10912792A JPH05281400A JP H05281400 A JPH05281400 A JP H05281400A JP 4109127 A JP4109127 A JP 4109127A JP 10912792 A JP10912792 A JP 10912792A JP H05281400 A JPH05281400 A JP H05281400A
- Authority
- JP
- Japan
- Prior art keywords
- shield
- electron beam
- beam irradiation
- irradiation device
- cylindrical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009423 ventilation Methods 0.000 title abstract description 5
- 238000010894 electron beam technology Methods 0.000 claims description 33
- 238000005452 bending Methods 0.000 abstract description 8
- 238000003466 welding Methods 0.000 abstract description 7
- 238000009434 installation Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 230000002238 attenuated effect Effects 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電子線照射装置におけ
るＸ線の漏出を防止できる省スペース構造の通気口装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a space-saving vent device which can prevent leakage of X-rays in an electron beam irradiation device.
【０００２】[0002]
【従来の技術】電子線照射装置にあっては、電子線照射
に伴い照射室内に発生するオゾン或いは照射室内に供給
された不活性ガスの排気口、照射室内への空気或いは不
活性ガスの給気口等の通気口が設けられる。図８は、か
かる通気口を有する電子線照射装置の一例についての一
部破断概略構成図である。電子線照射装置１の中央上部
に設けられた電子線発生部から得られた電子線は照射室
２内に導入され、ビームキャッチャ３の上部を搬送され
る被照射物に照射される。照射室２の両脇位置には、被
照射物が通り抜けるスリットが形成されているシールド
内壁４で仕切られて第１及び第２予備室が設けられ、図
では右脇に位置する第１予備室５及び第２予備室６が示
されており、例えば、その第１予備室５の上部シールド
外壁７に、電子線照射装置１の内部のガスを排気する通
気口８が設けられている。2. Description of the Related Art In an electron beam irradiation apparatus, ozone generated in the irradiation chamber due to electron beam irradiation or an exhaust port for an inert gas supplied to the irradiation chamber, and a supply of air or an inert gas into the irradiation chamber. Vents such as air vents are provided. FIG. 8 is a partially cutaway schematic configuration diagram of an example of an electron beam irradiation apparatus having such a vent. An electron beam obtained from an electron beam generator provided in the upper center of the electron beam irradiation device 1 is introduced into the irradiation chamber 2 and is irradiated to the irradiation target transported above the beam catcher 3. At both sides of the irradiation chamber 2, first and second auxiliary chambers are provided, which are partitioned by a shield inner wall 4 having a slit through which an object to be irradiated passes, and a first auxiliary chamber located on the right side in the figure. 5 and the second auxiliary chamber 6 are shown, for example, the upper shield outer wall 7 of the first auxiliary chamber 5 is provided with a vent 8 for exhausting the gas inside the electron beam irradiation apparatus 1.
【０００３】[0003]
【発明が解決しようとする課題】通気口８は、電子線照
射装置内で発生したＸ線が通気口から漏出するとき許容
レベル以下になるように構成しなければならない。通気
口８はＸ線が透過しないように鉄またはステンレス製の
管材に鉛を巻いて構成されるが、点線矢印で示すよう
に、内部でＸ線を反射減衰させる曲げ部を必要とし、通
常、曲げは２回ないしそれ以上、全曲げ角度にして、お
よそ１８０度以上になるように構成する。図９に示す通
気口８は、例えば照射室などのように強いＸ線が入り込
むところで用いることができるもので、その入口と出口
が逆向き、入口と出口の軸線が平行となるように曲げら
れており、Ｘ線は、その内部で少なくとも３回反射し減
衰する。しかしながら、通気口８は、その径が小さいも
のでも１００ｍｍφ、大きいものでは５００ｍｍないし
６００ｍｍφに達するものであり、その曲げ、鉛巻き加
工は容易ではないし、その曲げ構成に伴い通気口部分に
かなりのスペースを必要とする。The vent hole 8 must be constructed so that when the X-ray generated in the electron beam irradiation device leaks from the vent hole, it is below an allowable level. The ventilation port 8 is constructed by winding lead on a pipe material made of iron or stainless steel so as not to transmit X-rays, but as shown by a dotted arrow, it needs a bent portion for internally reflecting and attenuating the X-rays, and normally, The bending is performed twice or more, and the total bending angle is about 180 degrees or more. The vent hole 8 shown in FIG. 9 can be used where strong X-rays enter, such as in an irradiation room, and is bent so that its inlet and outlet are opposite and the axes of the inlet and outlet are parallel. Therefore, the X-rays are internally reflected and attenuated at least three times. However, the vent hole 8 has a small diameter of 100 mmφ and a large one reaches 500 mm to 600 mmφ, and bending and lead winding are not easy, and a considerable space is required in the vent hole due to the bending structure. Need.
【０００４】本発明は、通気口について、管材を曲げず
に省スペース構造のものとした電子線照射装置の通気口
装置を提供することを目的とする。It is an object of the present invention to provide a vent hole device for an electron beam irradiation device which has a space saving structure without bending the pipe material.
【０００５】[0005]
【課題を解決するための手段】かかる目的を達成するた
めに、本発明は、電子線照射装置において、シールド壁
に設けられたシールド円筒部材と、この円筒部材の側面
部及び開口部を覆う鍔付きシールド蓋部材とにより通気
口を構成したことを備えたことを特徴とするものであ
る。In order to achieve such an object, the present invention provides, in an electron beam irradiation apparatus, a shield cylindrical member provided on a shield wall, and a collar that covers a side surface portion and an opening portion of the cylindrical member. And a shield lid member with an air vent.
【０００６】更に、電子線照射装置の通気口を、シール
ド壁に設けられた第１のシールド円筒部材と、この部材
の内部に同心状に設けられた第２のシールド円筒部材
と、これら両円筒部材の開口部を覆うシールド蓋部材と
により構成したことを特徴とするものである。Further, a vent hole of the electron beam irradiation device is provided with a first shield cylinder member provided on the shield wall, a second shield cylinder member provided concentrically inside the member, and both cylinders. It is characterized in that it is configured by a shield lid member that covers the opening of the member.
【０００７】[0007]
【作用】電子線照射装置の内部からシールド円筒部材を
通ったＸ線は鍔付きシールド蓋部材の円盤部と鍔部で反
射減衰し、管材をおよそ１８０度曲げたものとほぼ同じ
に働く。The X-rays that have passed through the shield cylindrical member from the inside of the electron beam irradiation device are reflected and attenuated by the disk portion and the flange portion of the shielded lid member with the flange, and work almost as if the pipe material was bent by about 180 degrees.
【０００８】また、シールド円筒部材を同心状に２重に
配置したことにより、シールド蓋部材から見たシールド
円筒部材の開口立体角をより小さくすることができ、Ｘ
線の反射、減衰機能がより向上する。Further, by arranging the shield cylindrical members in a concentric double manner, it is possible to further reduce the opening solid angle of the shield cylindrical member seen from the shield lid member.
Line reflection and attenuation functions are further improved.
【０００９】[0009]
【実施例】本発明の実施例について図１ないし図７を参
照して説明する。以下の説明において同一符号は図８の
符号を含めて同等部分を示す。図１は電子線照射装置に
おける通気口部の断面図であり、シールド円筒部材１１
は、鉄又はステンレス部（以下、鉄部という）１１1と
鉛部１１2で形成されており、そのフランジ部１２で電
子線照射装置のシールド外壁７に固定する。シールド円
筒部材１１の上部には円周方向に多数の通気孔１３を形
成する。鍔付きシールド蓋部材１４は、鉄部１４1と鉛
部１４2で形成され、シールド円筒部材１１の上面開口
部を覆う円盤部１５とシールド円筒部材の側面部を覆う
鍔部１６を有し、シールド円筒部材１１と、例えば溶接
により結合されている。Embodiments of the present invention will be described with reference to FIGS. In the following description, the same reference numerals indicate the same parts including the reference numerals of FIG. FIG. 1 is a cross-sectional view of a vent hole portion of an electron beam irradiation device, which shows a shield cylindrical member 11
Is formed of an iron or stainless steel portion (hereinafter referred to as an iron portion) 11 1 and a lead portion 11 2 , and is fixed to the shield outer wall 7 of the electron beam irradiation device by the flange portion 12 thereof. A large number of vent holes 13 are formed in the circumferential direction in the upper part of the shield cylinder member 11. The collared shield lid member 14 is formed of an iron portion 14 1 and a lead portion 14 2 , and has a disk portion 15 that covers an upper surface opening of the shield cylindrical member 11 and a collar portion 16 that covers a side surface portion of the shield cylindrical member, It is connected to the shield cylindrical member 11 by welding, for example.
【００１０】電子線照射装置内部に発生したオゾンを含
む空気、照射室（２）に供給された不活性ガス等のガス
は、矢印で示すようにシールド円筒部材１１の内部と多
数の通気孔１３を通って排出される。電子線照射装置の
内部からシールド円筒部材１１内に入り込んだＸ線は、
鍔付きシールド部材１４の円盤部１５と鍔部１６の内面
で２回反射することが可能となり、充分に減衰する。The air containing ozone generated inside the electron beam irradiation apparatus and the gas such as the inert gas supplied to the irradiation chamber (2) are inside the shield cylindrical member 11 and a large number of vent holes 13 as shown by arrows. Is discharged through. The X-rays entering the shield cylindrical member 11 from the inside of the electron beam irradiation device are
It becomes possible to reflect twice on the inner surfaces of the disk portion 15 and the collar portion 16 of the shield member 14 with the collar, and the damping is sufficient.
【００１１】図２は通気口部について他の実施例の断面
図であり、シールド円筒部材１１はシールド外壁７に例
えば溶接等により取り付けられている。同円筒部材１１
の上端部に数個のスペーサ１７が溶接等によって固定さ
れており、鍔付きシールド蓋部材１４は、これらスペー
サ１７を介してシールド円筒部材１１に取り付けるよう
に構成されており、シールド蓋部材１４は、例えばスペ
ーサ１７の内部に形成された雌ネジに螺合するボルトに
よってスペーサ１７に固定する。FIG. 2 is a cross-sectional view of another embodiment of the vent hole portion, in which the shield cylinder member 11 is attached to the shield outer wall 7 by, for example, welding. Same cylindrical member 11
Several spacers 17 are fixed to the upper end of the shield by welding or the like, and the flanged shield lid member 14 is configured to be attached to the shield cylindrical member 11 via these spacers 17. For example, it is fixed to the spacer 17 by a bolt that is screwed into a female screw formed inside the spacer 17.
【００１２】電子線照射装置内部のガスは、シールド円
筒部材１１の中を通り、同円筒部材１１と鍔付きシール
ド蓋部材１４との間に形成されている開口部１８を通し
て排出される。シールド円筒部材２内に入り込んだＸ線
は図１に示したものと同様に鍔付きシールド蓋部材１４
の円盤部１５と鍔部１６で２回反射、減衰させることが
できる。The gas inside the electron beam irradiation apparatus passes through the shield cylindrical member 11 and is discharged through an opening 18 formed between the cylindrical member 11 and the shielded lid member 14 with a collar. The X-ray that has entered the shield cylindrical member 2 is similar to that shown in FIG.
It can be reflected and attenuated twice by the disk portion 15 and the collar portion 16.
【００１３】図３はシールド円筒部材を二重に設けた実
施例の断面図である。第１のシールド円筒部材１９の内
部に同部材より長い第２のシールド円筒部材２０が同心
状に配置されている。これら第１、第２のシールド円筒
部材１９、２０も鉄部１９1、２０1と鉛部１９2、２０2
の２層で形成され、第２のシールド円筒部材２０の上部
には多数の通気孔２１が設けられており、同円筒部材２
０は鍔付きシールド蓋部材１４に例えば溶接により取り
付ける。第１のシールド円筒部材１９は電子線照射装置
のシールド外壁７に固定して設け、鍔付きシールド蓋部
材１４は数個のスペーサ１７によって第１のシールド円
筒部材１９の上部に間隔を置いて結合されている。FIG. 3 is a sectional view of an embodiment in which the shield cylinder member is double provided. Inside the first shield cylinder member 19, a second shield cylinder member 20, which is longer than the first shield cylinder member 19, is concentrically arranged. These first and second shield cylindrical members 19 and 20 are also iron parts 19 1 and 20 1 and lead parts 19 2 and 20 2.
The second shield cylindrical member 20 is provided with a plurality of ventilation holes 21 in the upper part thereof.
0 is attached to the shield lid member 14 with a collar by, for example, welding. The first shield cylinder member 19 is fixedly provided on the shield outer wall 7 of the electron beam irradiation apparatus, and the shielded lid member 14 with the collar is coupled to the upper part of the first shield cylinder member 19 with a space by several spacers 17. Has been done.
【００１４】電子線照射装置内部のガスは、第２のシー
ルド円筒部材２０の内部から多数の通気孔２１を通り、
また、第１と第２のシールド円筒部材１９と２０の間を
通り、第１のシールド円筒部材１９とシールド蓋部材１
４との間を抜けて外部に排出される。第２のシールド円
筒部材２０の内部に入り込んだＸ線はシールド蓋部材１
４の円盤部１５と鍔部１６の部分で少なくとも２回以上
反射し、充分に減衰させることができる。また、第１と
第２のシールド円筒部材１９、２０間の空間部は、入り
込むＸ線に対し小さな立体角のものであるから、その内
部でＸ線を多重反射減衰させることができ、さらにシー
ルド蓋部材１４の円盤部１５と鍔部１６で反射、減衰さ
せることができる。The gas inside the electron beam irradiation device passes through a large number of vent holes 21 from the inside of the second shield cylindrical member 20,
Further, the first shield cylindrical member 19 and the shield lid member 1 are passed through between the first and second shield cylindrical members 19 and 20.
It is discharged through 4 through 4. The X-rays that have entered the inside of the second shield cylindrical member 20 are shield lid members 1
The disk portion 15 and the collar portion 16 of No. 4 are reflected at least twice or more and can be sufficiently attenuated. Further, since the space between the first and second shield cylindrical members 19 and 20 has a small solid angle with respect to the X-ray entering, the X-ray can be attenuated by multiple reflection inside the shield, and the shield can be further reduced. It can be reflected and attenuated by the disk portion 15 and the collar portion 16 of the lid member 14.
【００１５】図４は第２のシールド円筒部材２０を鍔付
きシールド蓋部材１４に対し間隔を置いて配置した実施
例の断面図である。第１のシールド円筒部材１９の上部
にスペーサ取付け片部２２が設けられ、シールド蓋部材
１４は、同部材に溶接により固定されたスペーサ１７を
用いてスペーサ取付け片部２２にネジ止め固定される。
第２のシールド円筒部材２０は、同部材に溶接等により
固定されたフランジ板２３により電子線照射装置のシー
ルド外壁７に取り付けられている。フランジ板２３に
は、図５に示すように、第１のシールド円筒部材１９と
第２のシールド円筒部材２０との間にガスを通すための
多数の通気孔２４を設ける。FIG. 4 is a cross-sectional view of an embodiment in which the second shield cylindrical member 20 is arranged at a distance from the flanged shield lid member 14. A spacer attachment piece 22 is provided on the upper part of the first shield cylindrical member 19, and the shield lid member 14 is screwed and fixed to the spacer attachment piece 22 by using the spacer 17 fixed to the same member by welding.
The second shield cylindrical member 20 is attached to the shield outer wall 7 of the electron beam irradiation apparatus by a flange plate 23 fixed to the same member by welding or the like. As shown in FIG. 5, the flange plate 23 is provided with a large number of vent holes 24 for passing gas between the first shield cylindrical member 19 and the second shield cylindrical member 20.
【００１６】図６は鍔付きシールド蓋部材１４を電子線
照射装置の内部に配置した実施例の断面図である。シー
ルド蓋部材１４は第１のシールド円筒部材１９の電子線
照射装置内部に位置する部分にスペーサ１７を用いて、
図２、図３あるいは図４と同様に取り付ける。図６の第
２のシールド円筒部材２０は、フランジ板２３により第
１のシールド円筒部材１９のフランジ２５に取り付けら
れている。フランジ板２３には図５に示したものと同様
にガスの通気孔２４が設けられている。FIG. 6 is a sectional view of an embodiment in which the shield cover member 14 with a collar is arranged inside the electron beam irradiation apparatus. The shield lid member 14 uses a spacer 17 in a portion of the first shield cylindrical member 19 located inside the electron beam irradiation apparatus,
It is attached as in FIG. 2, FIG. 3 or FIG. The second shield cylinder member 20 of FIG. 6 is attached to the flange 25 of the first shield cylinder member 19 by the flange plate 23. The flange plate 23 is provided with a gas vent hole 24 similar to that shown in FIG.
【００１７】電子線照射装置のシールド外壁７の内面で
反射したＸ線の侵入をシールド蓋部材１４の鍔部１６で
防ぐと共に、同蓋部材内に侵入したＸ線は円盤部１５の
部分で反射して減衰し、この反射点からの第２のシール
ド円筒部材２０の内部、第１のシールド円筒部材１９と
第２のシールド円筒部材２０間の空間部の立体角を小さ
くできるから、Ｘ線の漏出を充分に阻止できる。The X-rays reflected on the inner surface of the shield outer wall 7 of the electron beam irradiation device are prevented from entering by the flange portion 16 of the shield lid member 14, and the X-rays entering the lid member are reflected by the disk portion 15. Then, the solid angle of the space between the first shield cylindrical member 19 and the second shield cylindrical member 20 inside the second shield cylindrical member 20 from this reflection point can be made small, so that the X-ray Can sufficiently prevent leakage.
【００１８】フランジ板２３及びフランジ２５の部分に
外部配管取付け用の接続フランジ２６を接続することに
より、外部配管部に設けたポンプで強制的に電子線照射
装置内部の排気、電子線照射装置内部への給気を行わせ
ることができる。By connecting a connecting flange 26 for attaching an external pipe to the flange plate 23 and the flange 25, the pump provided in the external pipe portion is forced to exhaust the inside of the electron beam irradiation device and the inside of the electron beam irradiation device. Can be supplied with air.
【００１９】図７は電子線照射装置のビ−ムキャッチャ
３（図８参照）をシールド蓋部材３として用いた実施例
の断面図であり、通気口は、例えば、冷却水が通流する
ステンレス製の角形パイプ並設体３1とその下面の鉛板
３2とで構成したビ−ムキャッチャ３の下部に設ける。
第２のシールド円筒部材２０の上端部に円環状シールド
部材２７を取付け、同シールド部材２７及び数個のスペ
ーサ１７を介して第２のシールド円筒部材２０を電子線
照射装置下部のシールド外壁７に取り付ける。第１のシ
ールド円筒部材１９の下端部のフランジ２５に外部配管
接続用フランジ２６が結合されている。FIG. 7 is a cross-sectional view of an embodiment in which the beam catcher 3 (see FIG. 8) of the electron beam irradiation device is used as the shield lid member 3. The vent hole is made of, for example, stainless steel through which cooling water flows. It is provided in the lower part of the beam catcher 3 which is composed of the rectangular pipes 3 1 arranged in parallel and the lead plate 3 2 on the lower surface thereof.
An annular shield member 27 is attached to the upper end of the second shield cylinder member 20, and the second shield cylinder member 20 is attached to the shield outer wall 7 below the electron beam irradiation device via the shield member 27 and several spacers 17. Install. An external pipe connecting flange 26 is joined to the flange 25 at the lower end of the first shield cylindrical member 19.
【００２０】第２のシールド円筒部材２０の内部に入り
込むＸ線はビ−ムキャッチャ３の下面部で反射したもの
であり、この下面部に当るＸ線は、ビ−ムキャッチャ３
の下面部と円環状シールド部材２７の間を抜けてくるも
のであるから、僅かな量に制限される。また第１と第２
のシールド円筒部材１９、２０の間に入り込むＸ線も円
環状シールド部材２７が設けられていることにより僅か
なものとすることができる。The X-rays that enter the inside of the second shield cylindrical member 20 are reflected by the lower surface of the beam catcher 3, and the X-rays that strike this lower surface are reflected by the beam catcher 3.
Since it comes out between the lower surface part of and the annular shield member 27, it is limited to a slight amount. Also the first and second
The X-rays that enter between the shield cylindrical members 19 and 20 can be reduced by providing the annular shield member 27.
【００２１】[0021]
【発明の効果】本発明は、以上説明したように、通気口
部を、シールド円筒部材と、その側面部及び開口部を覆
う鍔付きシールド蓋部材で構成したから、管材を曲げる
ことなく構成することができ、その製作は容易であり、
設置スペースを小さなものとすることができる。そし
て、電子線照射装置の内部からシールド円筒部材内に入
り、鍔付きシールド蓋部材に当るＸ線はシールド蓋部材
の円盤部と鍔部で反射減衰させることができるから、管
材をおよそ１８０度曲げたものとほぼ同じ機能を奏す
る。As described above, according to the present invention, since the vent hole portion is constituted by the shield cylindrical member and the flanged shield lid member which covers the side surface portion and the opening portion thereof, the pipe member is constructed without bending. And it's easy to make,
The installation space can be small. Then, since X-rays that enter the shield cylindrical member from the inside of the electron beam irradiation device and hit the shield lid member with the collar can be reflected and attenuated by the disk portion and the collar portion of the shield lid member, the pipe material is bent about 180 degrees. Plays almost the same function as
【００２２】また、シールド円筒部材を同心状に２重に
配置したことにより、電子線照射装置の内部で反射し、
両シールド円筒部材間の空間部、内側のシールド円筒部
材の内部を通過するＸ線を小量に抑制できるから、シー
ルド蓋部材と相俟って通気口部でのＸ線の反射、減衰機
能を一層向上させることができる。Further, since the shield cylinder members are concentrically arranged in double, they are reflected inside the electron beam irradiation device,
Since a small amount of X-rays passing through the space between both shield cylindrical members and the inside of the inner shield cylindrical member can be suppressed, the function of reflecting and attenuating X-rays at the vent part is combined with the shield lid member. It can be further improved.
【図１】本発明の実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.
【図２】他の実施例の断面図である。FIG. 2 is a cross-sectional view of another embodiment.
【図３】シールド円筒部材を二重に配置した実施例の断
面図である。FIG. 3 is a cross-sectional view of an embodiment in which shield cylinder members are doubly arranged.
【図４】他の実施例の断面図であるFIG. 4 is a sectional view of another embodiment.
【図５】シールド円筒部材を取り付けるフランジ板の平
面図である。FIG. 5 is a plan view of a flange plate to which a shield cylinder member is attached.
【図６】シールド円筒部材を二重に配置した更に他の実
施例の断面図である。FIG. 6 is a cross-sectional view of yet another embodiment in which the shield cylinder members are arranged in double.
【図７】ビ−ムキャッチャの下に通気口部を設けた実施
例の断面図である。FIG. 7 is a cross-sectional view of an embodiment in which a vent hole portion is provided below a beam catcher.
【図８】従来の通気口を有する電子線照射装置の概略構
成図である。FIG. 8 is a schematic configuration diagram of a conventional electron beam irradiation apparatus having a ventilation port.
【図９】曲げ管路による通気口の構成図である。FIG. 9 is a configuration diagram of a vent hole formed by a bending pipe line.
11 シールド円筒部材 13 通気孔 14 鍔付きシールド蓋部材 15 円盤部 16 鍔部 17 スペーサ 19 第１のシールド円筒部材 20 第２のシールド円筒部材 23 フランジ板 26 外部配管接続用フランジ 27 円環状シールド部材 11 Shield Cylindrical member 13 Vent hole 14 Shield lid member with collar 15 Disc part 16 Collar part 17 Spacer 19 First shield cylindrical member 20 Second shield cylindrical member 23 Flange plate 26 Flange for external pipe connection 27 Circular shield member
Claims (2)
材と、この円筒部材の側面部及び開口部を覆う鍔付きシ
ールド蓋部材とを備えたことを特徴とする電子線照射装
置の通気口装置。1. A vent hole device for an electron beam irradiation apparatus, comprising: a shield cylinder member provided on a shield wall; and a shield lid member with a collar that covers a side surface portion and an opening portion of the cylinder member.
円筒部材と、この部材の内部に同心状に設けられた第２
のシールド円筒部材と、これら両円筒部材の開口部を覆
うシールド蓋部材とを備えたことを特徴とする電子線照
射装置の通気口装置。2. A first shield cylindrical member provided on a shield wall and a second shield concentrically provided inside the member.
And a shield lid member that covers the openings of both of the cylindrical members, and a vent hole device for an electron beam irradiation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10912792A JP3188982B2 (en) | 1992-04-03 | 1992-04-03 | Vent device for electron beam irradiation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10912792A JP3188982B2 (en) | 1992-04-03 | 1992-04-03 | Vent device for electron beam irradiation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05281400A true JPH05281400A (en) | 1993-10-29 |
| JP3188982B2 JP3188982B2 (en) | 2001-07-16 |
Family
ID=14502261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10912792A Expired - Lifetime JP3188982B2 (en) | 1992-04-03 | 1992-04-03 | Vent device for electron beam irradiation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3188982B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09243794A (en) * | 1996-03-12 | 1997-09-19 | Ebara Corp | X-ray or gamma-ray shielding equipment |
| WO2012176378A1 (en) * | 2011-06-07 | 2012-12-27 | Canon Kabushiki Kaisha | X-ray tube |
-
1992
- 1992-04-03 JP JP10912792A patent/JP3188982B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09243794A (en) * | 1996-03-12 | 1997-09-19 | Ebara Corp | X-ray or gamma-ray shielding equipment |
| WO2012176378A1 (en) * | 2011-06-07 | 2012-12-27 | Canon Kabushiki Kaisha | X-ray tube |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3188982B2 (en) | 2001-07-16 |
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