JPH05293766A - Polishing body - Google Patents
Polishing bodyInfo
- Publication number
- JPH05293766A JPH05293766A JP12540592A JP12540592A JPH05293766A JP H05293766 A JPH05293766 A JP H05293766A JP 12540592 A JP12540592 A JP 12540592A JP 12540592 A JP12540592 A JP 12540592A JP H05293766 A JPH05293766 A JP H05293766A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- binder
- resin
- abrasive
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 153
- 239000011230 binding agent Substances 0.000 claims abstract description 73
- 239000002245 particle Substances 0.000 claims abstract description 38
- 238000004321 preservation Methods 0.000 abstract 1
- 229920005989 resin Polymers 0.000 description 31
- 239000011347 resin Substances 0.000 description 31
- 238000000576 coating method Methods 0.000 description 19
- 239000011248 coating agent Substances 0.000 description 17
- 229920001577 copolymer Polymers 0.000 description 16
- 238000000034 method Methods 0.000 description 16
- -1 fatty acid ester Chemical class 0.000 description 13
- 239000000203 mixture Substances 0.000 description 11
- 239000003795 chemical substances by application Substances 0.000 description 10
- 150000001875 compounds Chemical class 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000005056 polyisocyanate Substances 0.000 description 8
- 229920001228 polyisocyanate Polymers 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 229940125782 compound 2 Drugs 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- 150000002009 diols Chemical class 0.000 description 5
- 125000003700 epoxy group Chemical group 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- RTTZISZSHSCFRH-UHFFFAOYSA-N 1,3-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC(CN=C=O)=C1 RTTZISZSHSCFRH-UHFFFAOYSA-N 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 229940126214 compound 3 Drugs 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- 239000012948 isocyanate Substances 0.000 description 4
- 150000002513 isocyanates Chemical class 0.000 description 4
- 229920000768 polyamine Polymers 0.000 description 4
- 229920002635 polyurethane Polymers 0.000 description 4
- 229920005749 polyurethane resin Polymers 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid group Chemical group S(O)(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000005396 acrylic acid ester group Chemical group 0.000 description 3
- 125000003277 amino group Chemical group 0.000 description 3
- 239000002612 dispersion medium Substances 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 238000004898 kneading Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920006122 polyamide resin Polymers 0.000 description 3
- 229920005906 polyester polyol Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000004814 polyurethane Substances 0.000 description 3
- 239000005060 rubber Substances 0.000 description 3
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000005058 Isophorone diisocyanate Substances 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- 239000004640 Melamine resin Substances 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- 229910039444 MoC Inorganic materials 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- QORUGOXNWQUALA-UHFFFAOYSA-N N=C=O.N=C=O.N=C=O.C1=CC=C(C(C2=CC=CC=C2)C2=CC=CC=C2)C=C1 Chemical compound N=C=O.N=C=O.N=C=O.C1=CC=C(C(C2=CC=CC=C2)C2=CC=CC=C2)C=C1 QORUGOXNWQUALA-UHFFFAOYSA-N 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 229920001807 Urea-formaldehyde Polymers 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 2
- 229920002678 cellulose Chemical class 0.000 description 2
- 239000001913 cellulose Chemical class 0.000 description 2
- 235000010980 cellulose Nutrition 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000010431 corundum Substances 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 235000014113 dietary fatty acids Nutrition 0.000 description 2
- 125000005442 diisocyanate group Chemical group 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 239000000194 fatty acid Substances 0.000 description 2
- 229930195729 fatty acid Natural products 0.000 description 2
- 239000002223 garnet Substances 0.000 description 2
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 2
- 229920001220 nitrocellulos Polymers 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N phosphoric acid Substances OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 125000002270 phosphoric acid ester group Chemical group 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 150000003077 polyols Chemical class 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- LNAZSHAWQACDHT-XIYTZBAFSA-N (2r,3r,4s,5r,6s)-4,5-dimethoxy-2-(methoxymethyl)-3-[(2s,3r,4s,5r,6r)-3,4,5-trimethoxy-6-(methoxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6r)-4,5,6-trimethoxy-2-(methoxymethyl)oxan-3-yl]oxyoxane Chemical compound CO[C@@H]1[C@@H](OC)[C@H](OC)[C@@H](COC)O[C@H]1O[C@H]1[C@H](OC)[C@@H](OC)[C@H](O[C@H]2[C@@H]([C@@H](OC)[C@H](OC)O[C@@H]2COC)OC)O[C@@H]1COC LNAZSHAWQACDHT-XIYTZBAFSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 1
- SXVRSCIZJBGJGB-UHFFFAOYSA-N 1-chloropropan-2-ylbenzene Chemical compound ClCC(C)C1=CC=CC=C1 SXVRSCIZJBGJGB-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- SZIFAVKTNFCBPC-UHFFFAOYSA-N 2-chloroethanol Chemical compound OCCCl SZIFAVKTNFCBPC-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- KWIUHFFTVRNATP-UHFFFAOYSA-N Betaine Natural products C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- 229920001747 Cellulose diacetate Polymers 0.000 description 1
- DQEFEBPAPFSJLV-UHFFFAOYSA-N Cellulose propionate Chemical compound CCC(=O)OCC1OC(OC(=O)CC)C(OC(=O)CC)C(OC(=O)CC)C1OC1C(OC(=O)CC)C(OC(=O)CC)C(OC(=O)CC)C(COC(=O)CC)O1 DQEFEBPAPFSJLV-UHFFFAOYSA-N 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- 239000004970 Chain extender Substances 0.000 description 1
- IVHVNMLJNASKHW-UHFFFAOYSA-M Chlorphonium chloride Chemical group [Cl-].CCCC[P+](CCCC)(CCCC)CC1=CC=C(Cl)C=C1Cl IVHVNMLJNASKHW-UHFFFAOYSA-M 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- 239000005909 Kieselgur Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 1
- JMHQPTAFBUVYBA-UHFFFAOYSA-N N=C=O.N=C=O.CC1=CC=CC=C1N Chemical compound N=C=O.N=C=O.CC1=CC=CC=C1N JMHQPTAFBUVYBA-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Chemical class 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 229940081735 acetylcellulose Drugs 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- GZCGUPFRVQAUEE-SLPGGIOYSA-N aldehydo-D-glucose Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C=O GZCGUPFRVQAUEE-SLPGGIOYSA-N 0.000 description 1
- 150000001334 alicyclic compounds Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 150000007824 aliphatic compounds Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 229910052910 alkali metal silicate Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- JZQOJFLIJNRDHK-CMDGGOBGSA-N alpha-irone Chemical compound CC1CC=C(C)C(\C=C\C(C)=O)C1(C)C JZQOJFLIJNRDHK-CMDGGOBGSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- 125000000539 amino acid group Chemical group 0.000 description 1
- 150000001414 amino alcohols Chemical class 0.000 description 1
- 229920003180 amino resin Polymers 0.000 description 1
- 239000003429 antifungal agent Substances 0.000 description 1
- 229940121375 antifungal agent Drugs 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229960003237 betaine Drugs 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 125000005619 boric acid group Chemical group 0.000 description 1
- NTXGQCSETZTARF-UHFFFAOYSA-N buta-1,3-diene;prop-2-enenitrile Chemical compound C=CC=C.C=CC#N NTXGQCSETZTARF-UHFFFAOYSA-N 0.000 description 1
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 229920006217 cellulose acetate butyrate Polymers 0.000 description 1
- 229920006218 cellulose propionate Polymers 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 229940125904 compound 1 Drugs 0.000 description 1
- 229940125898 compound 5 Drugs 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940117389 dichlorobenzene Drugs 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000010459 dolomite Substances 0.000 description 1
- 229910000514 dolomite Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 235000010944 ethyl methyl cellulose Nutrition 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000005462 imide group Chemical group 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 229920000592 inorganic polymer Polymers 0.000 description 1
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 229910001463 metal phosphate Inorganic materials 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 229920003087 methylethyl cellulose Polymers 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000006259 organic additive Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N phosphine group Chemical group P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Chemical class 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001610 polycaprolactone Polymers 0.000 description 1
- 239000004632 polycaprolactone Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000013557 residual solvent Substances 0.000 description 1
- 239000010458 rotten stone Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 125000005373 siloxane group Chemical group [SiH2](O*)* 0.000 description 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 1
- RPACBEVZENYWOL-XFULWGLBSA-M sodium;(2r)-2-[6-(4-chlorophenoxy)hexyl]oxirane-2-carboxylate Chemical compound [Na+].C=1C=C(Cl)C=CC=1OCCCCCC[C@]1(C(=O)[O-])CO1 RPACBEVZENYWOL-XFULWGLBSA-M 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical group NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 description 1
- 125000000944 sulfenic acid group Chemical group 0.000 description 1
- 125000000626 sulfinic acid group Chemical group 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical class [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気ヘッドや磁気ディス
ク等の表面の研磨に用いられる研磨体に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing body used for polishing the surface of a magnetic head, a magnetic disk or the like.
【0002】[0002]
【従来の技術】ビデオや高級オーディオの磁気ヘッドま
たは磁気ディスク等は、可撓性支持体上に研磨剤、結合
剤、添加剤等を含む研磨塗液を塗布し、乾燥させて研磨
層が形成されてなる研磨体により研磨されて製作されて
いる。このような研磨体には、テープ状又はディスク状
のもの等があり、テープ状のものの場合、一般には磁気
ヘッドを挟む2つのリール間に研磨テープを走行させ被
研磨面に接触させて研磨する方法が取られている。又デ
ィスク状のものの場合もディスクを回転させて、研磨す
る方法が取られている。2. Description of the Related Art For magnetic heads or magnetic disks for video and high-quality audio, a polishing layer is formed by applying a polishing coating liquid containing an abrasive, a binder, an additive, etc. on a flexible support and drying it. It is manufactured by polishing with a polishing body. Such polishing bodies include tape-shaped or disk-shaped ones. In the case of tape-shaped ones, generally, a polishing tape is run between two reels holding a magnetic head and brought into contact with the surface to be polished for polishing. The method is taken. Also, in the case of a disc-shaped one, a method of rotating the disc to polish it is adopted.
【0003】このような研磨テープは、可撓性支持体を
有しているため、研磨砥石に比べ、磁気ヘッド等の曲面
の研磨に適し、また、被研磨面の傷つきが少なく精密研
磨が可能で更に所望のポリッシング加工を行うことがで
きるため、仕上げ研磨には不可欠のものである。ところ
で、近年のVTRの普及にともない、研磨テープの使用
環境も幅広い環境条件で使用、保存されている。Since such a polishing tape has a flexible support, it is more suitable for polishing a curved surface of a magnetic head or the like than a polishing grindstone, and the surface to be polished is less scratched and can be precisely polished. Since it is possible to further carry out a desired polishing process, it is indispensable for finish polishing. By the way, with the spread of VTR in recent years, the polishing tape is used and stored under a wide range of environmental conditions.
【0004】一方、研磨体の結合剤の材料には、結合剤
樹脂の他、例えば、脂肪酸、脂肪酸エステル、シリコン
オイル、及び界面活性剤を添加して研磨テープの走行性
を改良する方法も取られている。また、走行安定性の向
上、帯電防止、研磨剤の分散性の向上を達成する事の可
能な添加物を使用する方法も取られている。On the other hand, in addition to the binder resin, for example, a fatty acid, a fatty acid ester, a silicone oil, and a surfactant are added to the binder material of the polishing body to improve the running property of the polishing tape. Has been. In addition, a method of using an additive capable of achieving improvement in running stability, antistatic property, and dispersibility of an abrasive is also used.
【0005】ところで、上記有機結合剤においては、耐
熱性、耐水性に劣るものが多く、1種又は2種以上の樹
脂との混用や共重合などの方法でもって行っている。し
かし、例えば、耐熱性については一般的に100℃以下
のものが多く、研磨テープ製造工程中の乾燥温度は70
〜80℃とし長時間の乾燥を要する必要があり、製造効
率は下がる結果となっている。By the way, most of the above organic binders have poor heat resistance and water resistance, and such a method is carried out by a method such as mixing with one or more kinds of resins or copolymerization. However, for example, many of them generally have a heat resistance of 100 ° C. or lower, and the drying temperature during the polishing tape manufacturing process is 70
It is necessary to set the temperature to -80 ° C. and to dry for a long time, resulting in a decrease in manufacturing efficiency.
【0006】また、乾燥が十分でないと使用中もしくは
保存中に研磨層上に異物が析出して、それが磁気ヘッド
に付着して出力の低下や磁気ディスク、磁気テープに不
良を起こすトラブルを発生する事がある。この現象は、
特に高湿下において使用、保存した時に顕著となり実用
上の大きな問題となっている。この異物は、有機結合剤
の溶媒として使用する有機溶剤等が研磨層中に残存し
て、その残存溶媒が保存しているうちに研磨層中から抜
け出る時にいわゆるクロマトグラフィーの原理により研
磨層中にある析出し易い成分を溶解して研磨層表面まで
移行して、その表面で溶解成分を析出するものと考えら
れる。Further, if the drying is not sufficient, foreign matter may be deposited on the polishing layer during use or storage, and the foreign matter may adhere to the magnetic head to cause a reduction in output or a defect on the magnetic disk or magnetic tape. I have something to do. This phenomenon is
In particular, it becomes remarkable when used and stored under high humidity, which is a serious problem in practical use. This foreign matter is contained in the polishing layer according to the so-called chromatographic principle when the organic solvent used as a solvent of the organic binder remains in the polishing layer and the residual solvent escapes from the polishing layer during storage. It is considered that a certain easy-to-precipitate component is dissolved and transferred to the surface of the polishing layer, and the soluble component is precipitated on the surface.
【0007】また、高温高湿の環境下においては、例え
ば、微量の水分の混入等によって反応が生じ、研磨層の
剥離、被研磨物への研磨粉付着または研磨剤の剥落等が
生じるものもあり、研磨不良の原因となる等の耐久性の
問題がある。また、研磨層をできるだけ薄くし、スティ
フネス(剛性)を小さくし研磨効率を高め、かつ研磨剤
を有効に使用できることが望ましいが、研磨剤粒子の粉
落ちを防止する有効な手段が見出せないために実現は困
難である。In a high-temperature and high-humidity environment, for example, a reaction may occur due to the mixing of a small amount of water, which may cause the peeling of the polishing layer, the attachment of polishing powder to the object to be polished, or the removal of the polishing agent. There is a problem of durability such as a cause of poor polishing. Further, it is desirable that the polishing layer be made as thin as possible, the stiffness (rigidity) be reduced to improve the polishing efficiency, and that the polishing agent can be used effectively, but an effective means for preventing the polishing agent particles from falling off cannot be found. Realization is difficult.
【0008】従来、研磨層の熱的、機械的特性を主とし
て研磨層組成の面から改良する発明が提案されている。
特開平2−292179号公報には、研磨時の摩擦熱に
よるダメージを改良するために研磨層の支持体としてポ
リアミドフィルムを使用する例が開示されている。ま
た、特開平3−19775号公報には、塩酢ビ共重合体
/ガラス転移温度(Tg)0〜30℃であるポリウレタ
ンを結合剤にして、耐熱性を向上させる例を、特開平3
−237617号公報には、有機燐酸化合物を添加する
ことにより研磨剤粒子(アルミナ)の分散安定性を高め
長期保存安定性を向上させる例を開示している。更に、
EP398580号では、ポリアセチレン等の特定の結
合剤樹脂を使用することにより、静電気の発生を抑え
て、粒子の付着を防止して切削速度を上げてもライフタ
イムの低下がないようにできるとの記載があり、EP−
438671号では、水溶性高分子を結合剤にした研磨
層を開示している。Conventionally, inventions have been proposed which improve the thermal and mechanical properties of the polishing layer mainly in terms of the composition of the polishing layer.
Japanese Patent Application Laid-Open No. 2-292179 discloses an example in which a polyamide film is used as a support for a polishing layer in order to improve damage due to frictional heat during polishing. Further, JP-A-3-19775 discloses an example in which a vinyl chloride / vinyl acetate copolymer / polyurethane having a glass transition temperature (Tg) of 0 to 30 ° C. is used as a binder to improve heat resistance.
JP-A-237617 discloses an example in which the dispersion stability of abrasive particles (alumina) is increased and the long-term storage stability is improved by adding an organic phosphoric acid compound. Furthermore,
EP 398580 describes that by using a specific binder resin such as polyacetylene, it is possible to suppress the generation of static electricity, prevent particles from adhering, and prevent the lifetime from decreasing even if the cutting speed is increased. There is EP-
Japanese Patent No. 438671 discloses a polishing layer containing a water-soluble polymer as a binder.
【0009】しかしながら、研磨層の薄い研磨テープを
高温高湿度下で使用、保存した場合の上記の異物発生、
研磨層の剥離、粉落ちの問題に対しては、未だ有効な手
段は提案されていない。However, when the polishing tape with a thin polishing layer is used and stored under high temperature and high humidity, the above-mentioned generation of foreign matter,
No effective means has yet been proposed for the problem of peeling of the polishing layer and powder drop.
【0010】[0010]
【発明が解決しようとする課題】本発明は、上記従来技
術の問題点に鑑みてなされたものであり、高温高湿度下
での保存や使用においても研磨耐久性の優れた研磨テー
プを提供することを目的としている。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems of the prior art, and provides a polishing tape having excellent polishing durability even in storage and use under high temperature and high humidity. The purpose is to
【0011】[0011]
【課題を解決するための手段】本発明者等は、研磨テー
プを使用しているとき、また保存しているときに研磨層
上にしばしば発生する研磨層剥離、研磨粉付着、被研磨
物への異物の付着の防止に対し鋭意研究した結果、本発
明に至った。即ち、上記本発明の目的は、支持体上に研
磨剤粒子及び結合剤を主体とする研磨層を有する研磨体
において、該結合剤は有機結合剤及び無機結合剤からな
り、前記無機結合剤は研磨剤粒子に対して1〜30重量
%であることを特徴とする研磨体により達成される。DISCLOSURE OF THE INVENTION The present inventors have found that when an abrasive tape is used and stored, the abrasive layer is often peeled off from the abrasive layer, the abrasive powder adheres to the object to be abraded. As a result of earnest research on prevention of adhesion of foreign matter, the present invention has been accomplished. That is, the object of the present invention is a polishing body having a polishing layer mainly comprising abrasive particles and a binder on a support, the binder comprises an organic binder and an inorganic binder, the inorganic binder is It is achieved by an abrasive body characterized by being 1 to 30% by weight with respect to the abrasive particles.
【0012】本発明は、無機結合剤を研磨剤粒子に対し
特定量使用し、有機結合剤と併用することにより高温高
湿度下の研磨作業中または研磨体保存中においても、研
磨層の剥離、研磨粉付着等を生じることがなく、研磨不
良を起こすことがない研磨体を提供するものである。本
発明に使用する無機結合剤は、研磨剤と親和性があり、
研磨剤と静電的に相互作用するかあるいは共有結合して
研磨剤粒子表面に存在しやすい性質を有し、無機結合剤
を介して互いに結合してある種の集合構造体が形成され
るため有機結合剤中において該構造体は従来に比べ強固
に研磨層有機結合剤中に固定されるものと考えられる。According to the present invention, the inorganic binder is used in a specific amount with respect to the abrasive particles, and by using it together with the organic binder, the polishing layer is peeled off even during polishing work under high temperature and high humidity or during storage of the polishing body. The object of the present invention is to provide a polishing body which does not cause polishing defects such as adhesion of polishing powder. The inorganic binder used in the present invention has an affinity with the abrasive,
Because it has the property of easily interacting with the abrasive or covalently bonding to the surface of the abrasive particles, and tends to exist on the surface of the abrasive particles, and is bound to each other through an inorganic binder to form a certain aggregate structure. It is considered that in the organic binder, the structure is firmly fixed in the polishing layer organic binder as compared with the conventional structure.
【0013】従って、本発明は研磨層を薄くしても研磨
剤粒子を粉落ち等を発生させずに充分に保持できる。本
発明においては、研磨層は1〜10μm、好ましくは3
〜6μmの範囲で設けることができる。無機結合剤の他
の機能としては、研磨剤粒子の表面を硬化させ、耐水性
を高める機能を有する無機結合剤を包含し、上記機能等
と合わせ持っていてもよい。また、本発明においては、
無機結合剤の機能は、上記機能に限定されるものではな
く、その素材も基本的には研磨層中で無機質素材として
機能するものであれば特に制限されるものではない。た
だし、有機質成分を側鎖等として包含しても差し支えな
い。Therefore, according to the present invention, even if the polishing layer is thinned, the abrasive particles can be sufficiently retained without causing powder drop or the like. In the present invention, the polishing layer has a thickness of 1 to 10 μm, preferably 3
It can be provided in the range of 6 μm. As another function of the inorganic binder, an inorganic binder having a function of hardening the surface of the abrasive particles to enhance water resistance may be included, and may have the above-mentioned functions and the like. Further, in the present invention,
The function of the inorganic binder is not limited to the above-mentioned function, and its material is not particularly limited as long as it basically functions as an inorganic material in the polishing layer. However, the organic component may be included as a side chain or the like.
【0014】従って、更に、本発明の効果を高める為
に、該構造体形成用無機結合剤の他硬化機能を有する無
機結合剤を添加し更に耐水性向上を図るように機能の異
なる無機結合剤を複数種使用することができる。無機結
合剤としては、活性が強く耐水性を高めるが、研磨剤と
の混合と同時にゲル化するものから、逆に活性が弱く、
研磨剤と混合しても常温では反応せずに、加熱によって
反応するものまであるため、その無機結合剤の選択は、
研磨体製造条件、処方、研磨特性等によって決定され
る。Therefore, in order to further enhance the effect of the present invention, an inorganic binder having a curing function is added to the inorganic binder for forming the structure to further improve the water resistance. Multiple types can be used. As an inorganic binder, it has strong activity and enhances water resistance, but since it gels at the same time as it is mixed with an abrasive, the activity is weak on the contrary,
Even when mixed with an abrasive, some inorganic binders do not react at room temperature but react by heating.
It is determined according to the polishing body manufacturing conditions, prescription, polishing characteristics, and the like.
【0015】本発明の研磨体に使用する無機結合剤の条
件として、以下の要件を満たしていることが好ましい。 (1)研磨体製造の乾燥条件は100℃前後であるこ
と。 (2)水、有機結合剤との親和性が良いこと。 (3)研磨層中に混入、分散させても研磨層の膜物性を
低下させないこと。The conditions for the inorganic binder used in the abrasive body of the present invention preferably satisfy the following requirements. (1) The drying condition for producing the abrasive body is about 100 ° C. (2) Good affinity with water and organic binder. (3) Even if mixed or dispersed in the polishing layer, the film physical properties of the polishing layer are not deteriorated.
【0016】本発明に使用される好ましい無機結合剤の
具体例としては、以下のものが挙げられる。主として研
磨剤と構造体を形成する機能を有する無機結合剤は化合
物1〜3が挙げられる。 (化合物1)水溶性無機ポリマー アルカリ金属珪酸塩、金属燐酸塩の水溶液、アルカリ金
属の一部をII〜IV族金属酸化物で置換変性した珪酸塩 (化合物2)コロイド状酸化物(シリカゾル系) 珪酸、レーマイトのコロイド状粒子の水分散液 (化合物3)珪酸エステル エチルシリケート また、主として研磨剤の硬化機能を有する無機結合剤と
して、下記のものが挙げられる。 (化合物4)金属酸化物・水酸化物系 ZnO、MgO、SiO2 、Al(OH)3 等 (化合物5)珪弗化物 Na2 SiF6 (化合物6)燐酸塩 2ZnO・P2 O5 等 (化合物7)ほう酸及びその塩 H3 BO3 、Na2 B4 O7 等 本発明において、無機結合剤の配合量は、研磨剤粒子に
対し1〜30重量%であり、好ましくは、5〜25重量
%、更に好ましくは、5〜15重量%の範囲である。Specific examples of preferred inorganic binders used in the present invention include the following. Examples of the inorganic binder having a function of forming a structure mainly with an abrasive include compounds 1 to 3. (Compound 1) Water-soluble inorganic polymer Alkali metal silicate, aqueous solution of metal phosphate, silicate obtained by substituting part of alkali metal with Group II to IV metal oxide (Compound 2) Colloidal oxide (silica sol system) Aqueous Dispersion of Colloidal Particles of Silicic Acid and Rehmite (Compound 3) Silicic Acid Ester Ethyl Silicate Also, the following are mainly mentioned as the inorganic binder having a curing function of the abrasive. (Compound 4) Metal oxide / hydroxide system ZnO, MgO, SiO 2 , Al (OH) 3 etc. (Compound 5) Silica fluoride Na 2 SiF 6 (Compound 6) Phosphate 2ZnO · P 2 O 5 etc. in compound 7) boric acid and its salts H 3 BO 3, Na 2 B 4 O 7 , etc. the present invention, amount of the inorganic binder, 1 to 30% by weight relative to abrasive particles, preferably, 5 to 25 %, More preferably 5 to 15% by weight.
【0017】該配合量が、1%未満であると上記機能を
発揮することができないから本発明の目的を達成でき
ず、30重量%より高くなると研磨層全体の柔軟性が低
下して、磁気ヘッドに対する当たりが不均一になるため
か研磨量にばらつきが生じ易くなり、また磁気ヘッドの
面を偏磨耗したり、傷を付けたりするので、好ましくな
い。If the blending amount is less than 1%, the above-mentioned function cannot be exhibited, so that the object of the present invention cannot be achieved. If the blending amount is more than 30% by weight, the flexibility of the entire polishing layer is lowered and the magnetic properties are reduced. The amount of polishing tends to vary due to non-uniform contact with the head, and the surface of the magnetic head is unevenly worn or scratched, which is not preferable.
【0018】また、本発明において無機結合剤と有機結
合剤の配合割合は、有機結合剤100重量部当たり12
0〜630重量部、好ましくは125〜400重量部の
範囲である。本発明において、上記無機結合剤、研磨剤
粒子、有機結合剤樹脂、有機溶媒、添加剤等からなる研
磨層形成塗料の作製における分散、混合の方法は任意で
あり、従来公知の方法が適用できるが、好ましくは、以
下の方法が望ましい。In the present invention, the compounding ratio of the inorganic binder and the organic binder is 12 per 100 parts by weight of the organic binder.
It is in the range of 0 to 630 parts by weight, preferably 125 to 400 parts by weight. In the present invention, the method of dispersion and mixing in the preparation of the polishing layer-forming coating material comprising the above-mentioned inorganic binder, abrasive particles, organic binder resin, organic solvent, additive, etc. is arbitrary, and conventionally known methods can be applied. However, the following method is preferable.
【0019】まず、研磨剤粒子と無機結合剤を混合し、
無機結合剤の溶媒あるいは分散媒により研磨剤粒子と無
機結合剤を混合、分散した研磨剤粒子−無機結合剤分散
液を調製し、これに有機結合剤、有機溶媒、その他添加
剤を加えて混合、分散する方法である。ここで、研磨剤
粒子−無機結合剤分散液の分散媒としては、1〜4重量
%である。また、該分散液は、分散媒を除去した後に有
機結合剤に分散するようにしてもよい。First, the abrasive particles and the inorganic binder are mixed,
Abrasive particles and inorganic binder are mixed and dispersed with a solvent or dispersion medium of an inorganic binder to prepare an abrasive particle-inorganic binder dispersion liquid, and an organic binder, an organic solvent, and other additives are added and mixed. , The method of dispersion. Here, the dispersion medium of the abrasive particle-inorganic binder dispersion liquid is 1 to 4% by weight. Further, the dispersion liquid may be dispersed in the organic binder after removing the dispersion medium.
【0020】例えば、無機結合剤としてエチルシリケー
トを用いた場合を以下説明する。まず、研磨剤中にエチ
ルシリケートを混合し、攪拌・分散させたところに無機
結合剤の溶媒である、例えば、イソプロピルアルコール
を添加し充分に攪拌させる。少量添加の無機結合剤溶媒
を攪拌によって揮発させると共に化1に示す〜の一
連の反応を行なわせる。即ち、加水分解、及び縮
合反応により、シロキサン結合の側鎖に−OHと−OC
2 H5 を有するオルガノシリカゾルが形成され、研磨剤
粒子の表面と相互作用(共有結合も含むと考えられる)
して無機結合剤粒子を介して研磨剤粒子は結び付けられ
集合構造体が形成される。次いで、この研磨剤粒子は、
有機結合剤、有機溶媒に分散され、研磨層塗布液が調製
され、支持体上に塗設されて研磨体が製造される。該集
合構造体は、研磨層中でも保持される。有機結合剤中に
おける該集合構造体の状態概念を模式的に図2に示し
た。For example, the case where ethyl silicate is used as the inorganic binder will be described below. First, ethyl silicate is mixed into the polishing agent, and after stirring and dispersing, isopropyl alcohol, which is a solvent of the inorganic binder, is added and sufficiently stirred. The inorganic binder solvent added in a small amount is volatilized by stirring, and at the same time, the series of reactions shown in Chemical formula 1 are performed. That is, by the hydrolysis and condensation reaction, -OH and -OC are attached to the side chain of the siloxane bond.
An organosilica sol containing 2 H 5 is formed and interacts with the surface of the abrasive particles (it is considered that covalent bonds are also included).
Then, the abrasive particles are bound to each other through the inorganic binder particles to form an aggregate structure. The abrasive particles are then
Dispersed in an organic binder and an organic solvent, a polishing layer coating solution is prepared and coated on a support to produce a polishing body. The aggregate structure is retained even in the polishing layer. The concept of the state of the aggregate structure in the organic binder is shown schematically in FIG.
【0021】集合構造体11は、研磨剤粒子12とその
表面を被覆するように結合された多数のエチルシリケー
ト重合体からなる無機結合剤粒子13からなり、研磨剤
粒子同士は、無機結合剤粒子13を介して結合されてい
る。The aggregate structure 11 comprises abrasive particles 12 and inorganic binder particles 13 composed of a large number of ethyl silicate polymers bonded so as to cover the surface thereof, and the abrasive particles are inorganic binder particles. It is connected through 13.
【0022】[0022]
【化1】 [Chemical 1]
【0023】本発明の研磨体の研磨層に分散される研磨
剤としては、一般に使用される研磨作用もしくは琢磨作
用を持つ材料で、α−アルミナ、γ−アルミナ、溶融ア
ルミナ、炭化珪素、酸化クロム、酸化セリウム、コラン
ダム、人造ダイヤモンド、α酸化鉄、ザクロ石、エメリ
ー(主成分:コランダムと磁鉄鉱)、ガーネット、ケイ
石、窒化珪素、窒化硼素、炭化モリブデン、炭化ホウ
素、炭化モリブデン、炭化硼素、炭化タングステン、チ
タンカーバイト、クォーツ、トリポリ、ケイソウ土、ド
ロマイト等があり、主としてモース硬度6以上より好ま
しくはモース硬度8以上の材料が1ないし4種までの組
合せで使用される。又これらの研磨剤の望ましい平均粒
子サイズは研磨の目的によって変化し、例えば、粗研磨
であれば16〜1μm程度、仕上げ研磨であれば1〜
0.1μm程度が望ましい。The polishing agent dispersed in the polishing layer of the polishing body of the present invention is a commonly used material having a polishing action or a polishing action, such as α-alumina, γ-alumina, fused alumina, silicon carbide and chromium oxide. , Cerium oxide, corundum, artificial diamond, α iron oxide, garnet, emery (main components: corundum and magnetite), garnet, silica, silicon nitride, boron nitride, molybdenum carbide, boron carbide, molybdenum carbide, boron carbide, carbonized There are tungsten, titanium carbide, quartz, tripoli, diatomaceous earth, dolomite, etc., and materials having a Mohs hardness of 6 or more, more preferably 8 or more, are preferably used in combination of 1 to 4 kinds. The desirable average particle size of these abrasives varies depending on the purpose of polishing, and for example, about 16 to 1 μm for rough polishing and 1 to 1 for finish polishing.
About 0.1 μm is desirable.
【0024】本発明で用いる結合剤樹脂としては、当業
界公知の種々のものを使用できる。これらの樹脂は単独
でも2種以上の組合せとしても用いることができ、例え
ば、熱可塑性樹脂、熱硬化性樹脂、又は反応型樹脂等が
挙げられる。熱可塑性樹脂としては軟化温度が150℃
以下、平均分子量が10000〜300000、重合度
が約50〜2000程度のもので、例えば、(メタ)ア
クリル酸エステル、スチレン、(メタ)アクリロニトリ
ル、ブタジエン、ビニルエステル、(メタ)アクリルア
ミド、塩化ビニル、塩化ビニリデン等の重合体あるいは
これらの誘導体の重合体或いは共重合体や更にこれらと
共重合可能なモノマーとの共重合体、例えば、塩化ビニ
ル酢酸ビニル共重合体、塩化ビニル共重合体、塩化ビニ
ル塩化ビニリデン共重合体、塩化ビニルアクリロニトリ
ル共重合体、アクリル酸エステルアクリロニトリル共重
合体、アクリル酸エステル塩化ビニリデン共重合体、ア
クリル酸エステルスチレン共重合体、メタクリル酸エス
テルアクリロニトリル共重合体、メタクリル酸エステル
塩化ビニリデン共重合体、メタクリル酸エステルスチレ
ン共重合体、ウレタンエラストマー、ナイロン−シリコ
ン系樹脂、ニトロセルロース−ポリアミド樹脂、ポリフ
ッカビニル、塩化ビニリデンアクリロニトリル共重合
体、ブタジエンアクリロニトリル共重合体、ポリアミド
樹脂、ポリビニルブチラール、セルロース誘導体(セル
ロースアセテートブチレート、セルロースダイアセテー
ト、セルローストリアセテート、セルロースプロピオネ
ート、ニトロセルロース、エチルセルロース、メチルセ
ルロース、プロピルセルロース、メチルエチルセルロー
ス、カルボキシメチルセルロース、アセチルセルロース
等)、スチレンブタジエン共重合体、ポリエステル樹
脂、クロロビニルエーテルアクリル酸エステル共重合
体、アミノ樹脂、各種の合成ゴム系の熱可塑性樹脂及び
これらの混合物等が使用される。As the binder resin used in the present invention, various resins known in the art can be used. These resins can be used alone or in combination of two or more, and examples thereof include thermoplastic resins, thermosetting resins, and reactive resins. As a thermoplastic resin, the softening temperature is 150 ° C
Hereinafter, those having an average molecular weight of 10,000 to 300,000 and a degree of polymerization of about 50 to 2,000, for example, (meth) acrylic acid ester, styrene, (meth) acrylonitrile, butadiene, vinyl ester, (meth) acrylamide, vinyl chloride, Polymers or copolymers of polymers such as vinylidene chloride or their derivatives, and copolymers with monomers copolymerizable therewith, such as vinyl chloride vinyl acetate copolymer, vinyl chloride copolymer, vinyl chloride Vinylidene chloride copolymer, vinyl acrylonitrile copolymer, acrylic acid ester acrylonitrile copolymer, acrylic acid ester vinylidene chloride copolymer, acrylic acid ester styrene copolymer, methacrylic acid ester acrylonitrile copolymer, methacrylic acid ester chloride Vinylidene Coalescence, methacrylic acid styrene copolymer, urethane elastomer, nylon-silicone resin, nitrocellulose-polyamide resin, polyfucca vinyl, vinylidene acrylonitrile copolymer, butadiene acrylonitrile copolymer, polyamide resin, polyvinyl butyral, cellulose derivative (Cellulose acetate butyrate, cellulose diacetate, cellulose triacetate, cellulose propionate, nitrocellulose, ethyl cellulose, methyl cellulose, propyl cellulose, methyl ethyl cellulose, carboxymethyl cellulose, acetyl cellulose, etc.), styrene butadiene copolymer, polyester resin, chlorovinyl ether Acrylic ester copolymer, amino resin, various synthetic rubber type Sex resins and mixtures thereof and the like can be used.
【0025】熱硬化性樹脂又は反応型樹脂としては塗布
液の状態では200000以下の分子量であり、塗布、
乾燥後に加熱することにより、縮合、付加等の反応によ
り分子量は無限大のものとなる。又、これらの樹脂のな
かで、樹脂が熱分解するまでの間に軟化又は溶融しない
ものが好ましい。具体的には例えばフェノール樹脂、フ
ェノキシ樹脂、エポキシ樹脂、ポリウレタン硬化型樹
脂、尿素樹脂、メラミン樹脂、アルキッド樹脂、シリコ
ン樹脂、アクリル系反応樹脂、エポキシ−ポリアミド樹
脂、ニトロセルロースメラミン樹脂、高分子量ポリエス
テル樹脂とイソシアネートプレポリマーの混合物、メタ
クリル酸塩共重合体とジイソシアネートプレポリマーの
混合物、ポリエステルポリオールとポリイソシアネート
との混合物、尿素ホルムアルデヒド樹脂、低分子量グリ
コール/高分子量ジオール/トリフェニルメタントリイ
ソシアネートの混合物、ポリアミン樹脂、ポリイミン樹
脂及びこれらの混合物等である。The thermosetting resin or the reactive resin has a molecular weight of 200,000 or less in the state of a coating solution.
By heating after drying, the molecular weight becomes infinite due to reactions such as condensation and addition. Among these resins, those that do not soften or melt before the resin thermally decomposes are preferable. Specifically, for example, phenol resin, phenoxy resin, epoxy resin, polyurethane curable resin, urea resin, melamine resin, alkyd resin, silicone resin, acrylic reaction resin, epoxy-polyamide resin, nitrocellulose melamine resin, high molecular weight polyester resin. And isocyanate prepolymer mixture, methacrylate copolymer and diisocyanate prepolymer mixture, polyester polyol and polyisocyanate mixture, urea formaldehyde resin, low molecular weight glycol / high molecular weight diol / triphenylmethane triisocyanate mixture, polyamine Resins, polyimine resins and mixtures thereof.
【0026】これらの熱可塑性樹脂、熱硬化性樹脂、反
応型樹脂は、主たる官能基以外に以下にカルボン酸基、
スルフィン酸基、スルフェン酸基、スルホン酸基、燐酸
基、硫酸基、ホスホン基、ホスフィン基、ホウ酸基、硫
酸エステル基、燐酸エステル基、これらのアルキルエス
テル基等の酸性基(これらの酸性基は、Na塩などの形
でもよい);アミノ酸類の基;アミノスルホン酸類の
基、アミノアルコールの硫酸または燐酸エステル類の
基;アルキルベタイン型等の両性類の基;アミノ基、イ
ミノ基、イミド基、アミド基等の塩基性基;反応により
水酸基を生ずるエポキシ基、水酸基、アルコキシル基、
チオール基、ハロゲン基、シリル基、シロキサン基など
を通常1種以上6種以内含み、樹脂1g当たり、1×1
0-6〜1×10-2当量/g含むことが好ましい。These thermoplastic resins, thermosetting resins, and reactive resins have the following carboxylic acid groups in addition to the main functional groups.
Acid groups such as sulfinic acid group, sulfenic acid group, sulfonic acid group, phosphoric acid group, sulfuric acid group, phosphon group, phosphine group, boric acid group, sulfuric acid ester group, phosphoric acid ester group, and alkyl ester groups thereof (these acidic groups May be in the form of Na salt, etc.); Amino acid group; Aminosulfonic acid group, Sulfuric acid or phosphoric acid ester group of amino alcohol; Amphoteric group such as alkyl betaine type; Amino group, imino group, imide Group, basic group such as amide group; epoxy group, hydroxyl group, alkoxyl group, which produces a hydroxyl group by reaction
Usually contains 1 to 6 types of thiol groups, halogen groups, silyl groups, siloxane groups, etc., and 1 × 1 per 1 g of resin
It is preferable to contain 0 −6 to 1 × 10 −2 equivalent / g.
【0027】極性基含有樹脂として、本発明では特に、
塩化ビニル樹脂、ポリウレタン樹脂が好ましい。特に、
極性基としては、エポキシ基、−SO3 M基が好まし
い。塩化ビニル樹脂としては、好ましくは、エポキシ基
含有塩化ビニル系共重合体が挙げられ、塩化ビニル繰返
し単位と、エポキシ基を有する繰返し単位と、−SO3
M(Mは、前記と同義で特にNaが好ましい)を有する
繰返し単位とを含む塩化ビニル系共重合体が挙げられ
る。In the present invention, as the polar group-containing resin,
Vinyl chloride resin and polyurethane resin are preferred. In particular,
The polar group is preferably an epoxy group or a —SO 3 M group. As the vinyl chloride resin, preferably, an epoxy group-containing vinyl chloride copolymer is used, and a vinyl chloride repeating unit, an epoxy group-containing repeating unit, and -SO 3
And a vinyl chloride-based copolymer containing a repeating unit having M (M is synonymous with the above and is particularly preferably Na).
【0028】極性基含有樹脂の極性基含有量は、1×1
0-6〜1×10-2当量/gの範囲が好ましい。更に好ま
しくは、1×10-6〜1×10-2当量/gである。ま
た、分子量は10000〜200000が好ましい。極
性基含有ポリウレタン樹脂は、具体的には、ポリエーテ
ルジオール、ポリエステルジオール、ポリカーボネート
ジオール、ポリカプロラクトンジオールのようなポリオ
ールとジイソシアネート、更に必要に応じて多価アルコ
ール、脂肪族ポリアミン、脂環式ポリアミン、芳香族ポ
リアミン等の鎖延長剤とから製造することができ、該極
性基は、種々の手段を使用して導入することができる。The polar group content of the polar group-containing resin is 1 × 1.
The range of 0 -6 to 1 × 10 -2 equivalent / g is preferable. More preferably, it is 1 × 10 −6 to 1 × 10 −2 equivalent / g. The molecular weight is preferably 10,000 to 200,000. The polar group-containing polyurethane resin is specifically a polyol such as a polyether diol, a polyester diol, a polycarbonate diol, a polycaprolactone diol, and a diisocyanate, and if necessary, a polyhydric alcohol, an aliphatic polyamine, an alicyclic polyamine, It can be prepared with a chain extender such as an aromatic polyamine, and the polar group can be introduced using various means.
【0029】例えば、極性基を有する多塩基酸もしくは
ポリオールを使用してポリエステルポリオールに極性基
を導入し、このポリエステルポリールとポリイソシアネ
ート化合物を反応させることにより得ることができる。
このポリイソシアネート化合物は、ポリウレタン樹脂の
構成成分の他、下記の硬化剤として上記樹脂の3次元網
目構造を形成する上でも使用できる。また、本発明にお
いては、任意の硬化剤を使用できる。For example, it can be obtained by introducing a polar group into a polyester polyol using a polybasic acid or a polyol having a polar group, and reacting the polyester polyol with a polyisocyanate compound.
The polyisocyanate compound can be used as a constituent of the polyurethane resin and also as a curing agent described below for forming a three-dimensional network structure of the resin. Further, in the present invention, any curing agent can be used.
【0030】該ポリイソシアネート化合物としては、分
子中に−N=C=O基を2個以上有する脂肪族、芳香族
および脂環式化合物から選ばれるジ、トリおよびテトラ
イソシアネートが例示できる。具体的には、トリレンジ
イソシアネート、4,4′−ジフェニルメタンジイソシ
アネート、ヘキサメチレンジイソシアネート、キシリレ
ンジイソシアネート、ナフチレン−1,5−ジイソシア
ネート、o−トルイジンジイソシアネート、イソホロン
ジイソシアネート、トリフェニルメタントリイソシアネ
ート、イソホロンジイソシアネート等のイソシアネート
類、又当該イソシアネート類とポリアルコールとの生成
物、又イソシアネート類の縮合に依って生成したポリイ
ソシアネート等を使用することができる。これらポリイ
ソシアネートの市販されている商品名としては、コロネ
ートL、コロネートHL、コロネート2030、コロネ
ート2031、ミリオネートMR、ミリオネートMTL
(日本ポリウレタン(株)製)、タケネートD−10
2、タケネートD−110N、タケネートD−200、
タケネートD−202(武田薬品(株)製)、デスモジ
ュールL、デスモジュールIL、デスモジュールN、デ
スモジュールHL(住友バイエル社製)等があり、これ
らを単独若しくは硬化反応性の差を利用して二つ若しく
はそれ以上の組み合わせによって使用することができ
る。又、硬化反応を促進する目的で、水酸基(ブタンジ
オール、ヘキサンジオール、分子量が1000〜100
00のポリウレタン、水 等)、アミノ基(モノメチル
アミン、ジメチルアミン、トリメチルアミン等)を有す
る化合物や金属酸化物の触媒を併用する事も出来る。こ
れらの水酸基やアミノ基を有する化合物は多官能である
事が望ましい。これらのポリイソシアネート化合物は結
合剤樹脂総量の45〜65重量%で用いることが好まし
い。Examples of the polyisocyanate compound include di, tri and tetraisocyanates selected from aliphatic, aromatic and alicyclic compounds having two or more -N = C = O groups in the molecule. Specifically, tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, hexamethylene diisocyanate, xylylene diisocyanate, naphthylene-1,5-diisocyanate, o-toluidine diisocyanate, isophorone diisocyanate, triphenylmethane triisocyanate, isophorone diisocyanate, etc. The above-mentioned isocyanates, products of the isocyanates with polyalcohols, polyisocyanates produced by condensation of isocyanates, and the like can be used. Commercially available trade names of these polyisocyanates are Coronate L, Coronate HL, Coronate 2030, Coronate 2031, Millionate MR, Millionate MTL.
(Nippon Polyurethane Co., Ltd.), Takenate D-10
2, Takenate D-110N, Takenate D-200,
Takenate D-202 (manufactured by Takeda Pharmaceutical Co., Ltd.), death module L, death module IL, death module N, death module HL (manufactured by Sumitomo Bayer Co., Ltd.), etc. are available alone or by utilizing the difference in curing reactivity. Can be used in combination of two or more. For the purpose of accelerating the curing reaction, hydroxyl groups (butanediol, hexanediol, molecular weight of 1000-100
No. 00 polyurethane, water, etc.), a compound having an amino group (monomethylamine, dimethylamine, trimethylamine, etc.), or a metal oxide catalyst can be used in combination. It is desirable that these compounds having a hydroxyl group or an amino group are polyfunctional. These polyisocyanate compounds are preferably used in an amount of 45 to 65% by weight based on the total amount of binder resin.
【0031】本発明で研磨剤粒子、樹脂等を分散、混
練、塗布の際に使用する有機溶媒としては、任意の比率
で混合使用することができる。以下にその具体例を示す
と、アセトン、メチルエチルケトン、メチルイソブチル
ケトン、シクロヘキサノン等のケトン系;メタノール、
エタノール、プロパノール、ブタノールなどのアルコー
ル系;酢酸メチル、酢酸エチル、酢酸ブチル、乳酸エチ
ル、酢酸グリコールモノエチルエーテル等のエステル
系;エーテル、グリコールジメチルエーテル、グリコー
ルモノエチルエーテル、ジオキサンなどのグリコールエ
ーテル系;ベンゼン、トルエン、キシレン、クレゾー
ル、クロルベンゼン、スチレンなどのタール系(芳香族
炭化水素);メチレンクロライド、エチレンクロライ
ド、四塩化炭素、クロロホルム、エチレンクロルヒドリ
ン、ジクロルベンゼン等の塩素化炭化水素、N,N−ジ
メチルホルムアルデヒド、ヘキサン等が使用できる。The organic solvent used in the present invention for dispersing, kneading and coating the abrasive particles, resin and the like can be mixed and used in any ratio. Specific examples are shown below. Acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone and other ketones; methanol,
Ethanol, propanol, butanol and other alcohols; methyl acetate, ethyl acetate, butyl acetate, ethyl lactate, glycol acetate monoethyl ether and other ester bases; ether, glycol dimethyl ether, glycol monoethyl ether, dioxane and other glycol ethers; benzene , Toluene, xylene, cresol, chlorobenzene, styrene and other tar-based (aromatic hydrocarbons); methylene chloride, ethylene chloride, carbon tetrachloride, chloroform, ethylene chlorohydrin, dichlorobenzene and other chlorinated hydrocarbons, N , N-dimethylformaldehyde, hexane and the like can be used.
【0032】本発明の研磨層は前記の研磨剤粒子の他に
添加剤として、潤滑剤、分散剤、帯電防止剤、防黴剤等
を含んでもよい。これら添加剤の使用量は、研磨層に対
し各々3重量%、好ましくは2重量%以下が好ましい。
本発明において、上記無機結合剤、研磨剤粒子、有機結
合剤樹脂、有機溶媒、添加剤等からなる研磨層形成塗料
の作製における混練分散に当たっては各種の混練機が使
用される。例えば、二本ロールミル、三本ロールミル、
ボールミル、ペブルミル、トロンミル、サンドグライン
ダー、ゼグバリ(Szegvari)、アトライター、
高速インペラー分散機、高速ストーンミル、高速衝撃ミ
ル、ディスパー、ニーダー、高速ミキサー、ホモジナイ
ザー、超音波分散機などを用いることができる。The polishing layer of the present invention may contain a lubricant, a dispersant, an antistatic agent, an antifungal agent, etc. as additives in addition to the above-mentioned abrasive particles. The amount of each of these additives used is 3% by weight, preferably 2% by weight or less, based on the polishing layer.
In the present invention, various kneaders are used for kneading and dispersing in the preparation of the polishing layer-forming coating material comprising the above-mentioned inorganic binder, abrasive particles, organic binder resin, organic solvent, additives and the like. For example, two roll mill, three roll mill,
Ball mill, pebble mill, tron mill, sand grinder, segvari, attritor,
A high speed impeller disperser, a high speed stone mill, a high speed impact mill, a disper, a kneader, a high speed mixer, a homogenizer, an ultrasonic disperser and the like can be used.
【0033】また、支持体上に研磨層を形成する方法と
しては、従来公知の方法を用いることが出来、詳しくは
「コーティング工学」(昭和46年朝倉書店)等の成書
に記載されている方法を行うことができる。上記のよう
にして調製した塗料の塗布方法としては任意の塗布装
置、例えば、エアードクターコート、ブレードコート、
エアナイフコート、スクイズコート、含浸コート、リバ
ースロールコート、トランスファーロールコート、グラ
ビアコート、キスコート、キャストコート、スプレイコ
ート、バーコート、スピンコート等を使用する方法等が
挙げられる。As a method for forming the polishing layer on the support, a conventionally known method can be used, and details thereof are described in books such as "Coating Engineering" (Asakura Shoten 1969). The method can be done. As a coating method of the coating material prepared as described above, any coating device, for example, an air doctor coat, a blade coat,
Examples thereof include a method using air knife coat, squeeze coat, impregnation coat, reverse roll coat, transfer roll coat, gravure coat, kiss coat, cast coat, spray coat, bar coat, spin coat and the like.
【0034】混練分散、塗布に関する技術は、T.C.
PATTON著(テー.シー.パットン)“塗料の流動
と顔料分散”(1975年)に記載された如く多層同時
塗布法によって同時に異なる組成の2層以上の研磨層を
設けることもできる。又、この乾燥厚味は研磨テープの
用途、形状、規格などにより決められる。このような方
法により、支持体上に塗布された研磨層は必要により更
に所望添加剤の含浸処理を施し、乾燥され、カレンダリ
ング処理などの表面処理を施される。Techniques relating to kneading dispersion and coating are described in T.W. C.
It is also possible to provide two or more polishing layers of different compositions at the same time by a multi-layer simultaneous coating method as described in "Paint Flow and Pigment Dispersion" (1975) by Patton (T.C. Patton). The dry thickness is determined by the use, shape, standard, etc. of the polishing tape. By such a method, the polishing layer applied on the support is optionally impregnated with a desired additive, dried, and surface-treated such as calendering.
【0035】さらに硬化処理として、熱処理、電子線等
の照射処理等を必要に応じて行うこともできる。その後
所望の形状に裁断したりして、本発明の研磨体を製造す
る。本発明で使用する支持体には特に制限はなく、通常
使用されているものを用いることができる。支持体を形
成する素材の例としては、ポリエチレンテレフタレー
ト、ポリエチレン、ポリプロピレン、ポリカーボネー
ト、ポリエチレンナフタレート、ポリアミド、ポリアミ
ドイミド、ポリイミド、ポリサルホン、ポリエーテルサ
ルホン等の各種合成樹脂のフィルム、およびアルミニウ
ム箔、ステンレス箔などの金属箔を挙げることができ
る。支持体は一般には5〜300μm、好ましくは10
〜50μmの厚さのものが使用され、テープ、シート、
ディスクなどの形状で使用される。Further, as the curing treatment, a heat treatment, an irradiation treatment with an electron beam or the like can be carried out if necessary. After that, the abrasive body of the present invention is manufactured by cutting it into a desired shape. The support used in the present invention is not particularly limited, and a commonly used support can be used. Examples of the material forming the support include polyethylene terephthalate, polyethylene, polypropylene, polycarbonate, polyethylene naphthalate, polyamide, polyamideimide, polyimide, polysulfone, films of various synthetic resins such as polyethersulfone, and aluminum foil, stainless steel. Mention may be made of metal foils such as foils. The support is generally 5 to 300 μm, preferably 10
-50 μm thick tapes, sheets,
Used in the shape of disks.
【0036】次に図面を参照して本発明の研磨体につい
て説明する。図3は、本発明の研磨テープを用いた研磨
装置の略図である。上記研磨テープ1は、テープ巻取り
リール7が矢印A方向に回転する事によりテープ送り出
しリール6から図中矢印方向に送り出される。この研磨
テープ1はその走行路に於いてパスロール8により所定
のラップ角で被研磨体である磁気ヘッド5に接触せしめ
られ、この磁気ヘッド5のテープ摺動面の研磨を行う。
研磨テープ1は、図4に示すように、ポリエチレンテレ
フタレート(PET)、ポリエチレン−2,6−ナフタ
レート等からなる可撓性でかつ非磁性の支持体2上に研
磨層3が塗設されてなるものであり、この研磨層3が上
記磁気ヘッド5に摺接することにより研磨が行われる。
即ち、図4に示すように研磨層3から突出した硬い研磨
剤4により、磁気ヘッド5のテープ摺動面が平滑に研磨
される。Next, the polishing body of the present invention will be described with reference to the drawings. FIG. 3 is a schematic view of a polishing apparatus using the polishing tape of the present invention. The polishing tape 1 is delivered from the tape delivery reel 6 in the direction of the arrow in the figure when the tape take-up reel 7 rotates in the direction of arrow A. The polishing tape 1 is brought into contact with a magnetic head 5 which is an object to be polished at a predetermined wrap angle by a pass roll 8 on its running path, and the tape sliding surface of the magnetic head 5 is polished.
As shown in FIG. 4, the polishing tape 1 has a polishing layer 3 coated on a flexible and non-magnetic support 2 made of polyethylene terephthalate (PET), polyethylene-2,6-naphthalate or the like. The polishing layer 3 is brought into sliding contact with the magnetic head 5 to perform polishing.
That is, as shown in FIG. 4, the tape sliding surface of the magnetic head 5 is polished smoothly by the hard polishing agent 4 protruding from the polishing layer 3.
【0037】また、研磨層3と支持体2の好ましい厚さ
は、磁気ヘッドの研磨形状によって異なるが、研磨テー
プが前述したS−VHS方式用の磁気ヘッドの仕上げ研
磨を行うものである場合には、非磁性支持体の厚さが一
例として30μmであれば研磨層の厚さは5μm、該支
持体の厚さが一例として23μmであれば研磨層の厚さ
は10μm程度であるのが好ましい。尚、研磨層の厚さ
が大きすぎると、磁気ヘッドと研磨テープの接触が悪く
なるので、研磨層の厚さは、常に50μm以下にするの
が好ましい。The preferred thicknesses of the polishing layer 3 and the support 2 differ depending on the polishing shape of the magnetic head, but when the polishing tape is for finishing polishing of the above-mentioned S-VHS type magnetic head. When the thickness of the non-magnetic support is 30 μm as an example, the thickness of the polishing layer is 5 μm, and when the thickness of the support is 23 μm as an example, the thickness of the polishing layer is preferably about 10 μm. .. If the thickness of the polishing layer is too large, the contact between the magnetic head and the polishing tape will deteriorate, so the thickness of the polishing layer is preferably always 50 μm or less.
【0038】また、本発明の研磨体は上記のような高性
能な磁気ヘッドの研磨に特に適したものであるが、図5
および図6に示すようにハードディスク9を研磨する場
合には、2つのゴムローラ10によりハードディスクを
挟み、これらのゴムローラ10により2本の研磨テープ
1の研磨層をディスクの両面に押しつけ、この状態でハ
ードディスク9を矢印B方向に回転させればディスクの
両面を同時に研磨することができる。The polishing body of the present invention is particularly suitable for polishing a high performance magnetic head as described above.
When polishing the hard disk 9 as shown in FIG. 6 and FIG. 6, the hard disk is sandwiched by two rubber rollers 10, and the polishing layers of the two polishing tapes 1 are pressed by the rubber rollers 10 on both sides of the disk. By rotating 9 in the direction of arrow B, both sides of the disk can be polished simultaneously.
【0039】また、本発明に於ける研磨体とは、上述し
たテープのものに限られるものではなく、薄い円形支持
体状に研磨層を形成したディスク状のものも含むものと
する。Further, the polishing body in the present invention is not limited to the above-mentioned tape, but also includes a disk-shaped one having a polishing layer formed on a thin circular support.
【0040】[0040]
【実施例】本発明の研磨テープの新規な効果を以下の実
施例により更に具体的に説明する。なお、以下、「部」
とは、いずれも「重量部」を示す。 実施例1 研磨塗布液組成 α−Fe2 O3 ……225部 (粒状、平均粒子径0.11μm、モース硬度5.0) Cr2 O3 …… 75部 (粒状、平均粒子径0.30μm、モース硬度8.5) 研磨剤中に化合物2(コロイダルシリカ)を上記研磨剤
α−Fe2 O3 及びCr2 O3 300部に対し、5重量
%添加し、攪拌させ、溶剤としてイソプロピルアルコー
ルを化合物2に対して20重量%添加し、充分に攪拌・
分散させた後、下記有機結合剤、溶剤等を添加し、全体
を充分に攪拌・分散させて、研磨塗布液を調製した。EXAMPLES The novel effects of the polishing tape of the present invention will be described more concretely by the following examples. In the following, "part"
And “all” represent “parts by weight”. Example 1 Polishing coating liquid composition α-Fe 2 O 3 ...... 225 parts (granular, average particle size 0.11 μm, Mohs hardness 5.0) Cr 2 O 3 …… 75 parts (granular, average particle size 0.30 μm , Mohs' hardness 8.5) 5% by weight of compound 2 (colloidal silica) was added to the abrasives α-Fe 2 O 3 and 300 parts of Cr 2 O 3 in the abrasive, and the mixture was stirred and isopropyl alcohol was used as a solvent. 20% by weight with respect to the compound 2 and sufficiently stirred
After dispersion, the following organic binder, solvent and the like were added, and the whole was sufficiently stirred and dispersed to prepare a polishing coating solution.
【0041】 塩化ビニル系樹脂 …… 8.3部 (樹脂総重量に対して塩化ビニル(平均分子量2.6×104 )87重量% 、エポキシ基3.5重量%、スルホン酸ソーダ基0.5重量%含有) スルホン酸含有ポリウレタン樹脂 …… 4.8部 (分子量25000、SO3 H1つ当たりの分子量25000) ポリイソシアネート …… 9.6部 (3モルの2,4−トリレンジイソシアネート化合物と1モルのトリメチロ ールプロパンの反応生成物の75重量%酢酸エチル溶液) メチルエチルケトン ……100部 シクロヘキサノン ……100部 次いで、厚さ23μmのポリエチレンテレフタレート
(PET)支持体上に上記の組成で調製した研磨塗布液
を乾燥厚味が5μm厚になるように塗布し乾燥した後、
1/2インチ幅にスリットして実施例1−1の研磨テー
プを作成した。Vinyl chloride resin: 8.3 parts (87% by weight of vinyl chloride (average molecular weight 2.6 × 10 4 ) based on the total weight of the resin, 3.5% by weight of an epoxy group, and 0. Sulfonic acid-containing polyurethane resin: 4.8 parts (molecular weight: 25,000, molecular weight per SO 3 H: 25,000) Polyisocyanate: 9.6 parts (3 moles of 2,4-tolylene diisocyanate compound) 75 wt% ethyl acetate solution of the reaction product of 1 mol of trimethylolpropane) Methyl ethyl ketone ...... 100 parts Cyclohexanone ...... 100 parts Then, polishing coating prepared with the above composition on a polyethylene terephthalate (PET) support having a thickness of 23 μm. After applying the solution to a dry thickness of 5 μm and drying,
The polishing tape of Example 1-1 was prepared by slitting into a 1/2 inch width.
【0042】実施例1−2〜1−4 実施例1−1において、化合物2の添加量を10、15
又は20重量%に変更した以外は、実施例1−1と同様
にして各研磨塗布液を次いで研磨テープを作成した。 実施例2 実施例1−1において、化合物2に替えて化合物3(エ
チルシリケート)を使用した以外は実施例1−1と同様
にして研磨塗布液を次いで実施例2−1の研磨テープを
作成した。Examples 1-2 to 1-4 In Example 1-1, the addition amount of the compound 2 was 10, 15
Or, each polishing coating solution was prepared into a polishing tape in the same manner as in Example 1-1, except that the content was changed to 20% by weight. Example 2 A polishing coating solution was prepared in the same manner as in Example 1-1, except that Compound 3 (ethyl silicate) was used in place of Compound 2 in Example 1-1, and then the polishing tape of Example 2-1 was prepared. did.
【0043】実施例2−2〜2−4 実施例2−1において、化合物3の添加量を10、15
又は20重量%に変更した以外は、実施例2−1と同様
にして各研磨塗布液を次いで研磨テープを作成した。 比較例 実施例1または2において、化合物2または3を研磨塗
布液に含有させない以外は、実施例1〜2と同一の条件
で研磨テープを作成した。Examples 2-2 to 2-4 In Example 2-1, the addition amount of the compound 3 was 10, 15
Alternatively, except for changing the content to 20% by weight, each polishing coating solution was used to prepare a polishing tape in the same manner as in Example 2-1. Comparative Example A polishing tape was prepared under the same conditions as in Examples 1 and 2 except that the compound 2 or 3 was not contained in the polishing coating liquid in Example 1 or 2.
【0044】上記のように作成された実施例1〜2及び
比較例の各試料について、研磨層の剥離、被研磨物への
異物付着状況を下記のような方法で評価した。 比較試験1 高温高湿度試験槽にて磁気ヘッドの研磨評価を行った。
まず、各試料サンプルを図2のようにセットし、暫く高
温高湿槽内に放置した。With respect to each of the samples of Examples 1 and 2 and the comparative example prepared as described above, peeling of the polishing layer and adhesion of foreign matter to the object to be polished were evaluated by the following methods. Comparative Test 1 The magnetic head was evaluated for polishing in a high temperature and high humidity test tank.
First, each sample sample was set as shown in FIG. 2 and left in the high temperature and high humidity tank for a while.
【0045】試験槽条件:60℃、70% 研磨条件:研磨テープ送り速度 ;18mm/秒 ヘッド突出量 ;150μm テープバックテンション;60〜70g シリンダー回転速度 ;1800rpm 研磨時間 ;10秒(正逆) 上記試験の結果、研磨テープ、磁気ヘッド摺動面を光学
顕微鏡の倍率を100倍にして観察した所、実施例1及
び2では、研磨粉落ち及び膜剥離が無く、かつ磁気ヘッ
ドへの異物の付着は観察されなかった。一方、比較例で
は、研磨粉落ちが有り、磁気ヘッドへの異物の付着が認
められた。Test tank conditions: 60 ° C., 70% Polishing conditions: Polishing tape feed rate; 18 mm / sec Head protrusion amount; 150 μm Tape back tension; 60 to 70 g Cylinder rotation speed; 1800 rpm Polishing time; 10 sec (forward / reverse) As a result of the test, when the polishing tape and the sliding surface of the magnetic head were observed with an optical microscope at a magnification of 100, in Examples 1 and 2, no polishing powder was dropped and no film was peeled off, and foreign matter was attached to the magnetic head. Was not observed. On the other hand, in the comparative example, the polishing powder was removed, and the adhesion of foreign matter to the magnetic head was recognized.
【0046】比較試験2 各研磨テープの膜強度を研磨層の引掻強度によって評価
した。 試験条件:各サンプル試料をガラスプレート上に弛みの
ないように貼り固定し、研磨テープの上をφ0.4μm
のダイヤモンド針で加重50〜300gを順に掛けてい
き、研磨テープ研磨層に引掻き傷が生じる時点まで行っ
た。この結果を研磨剤に対する無機結合剤量に対して引
掻強度をプロットした結果を図1に示した(比較例は、
無機結合剤はないが、比較のため引掻強度を点線で示し
た。)。Comparative Test 2 The film strength of each polishing tape was evaluated by the scratching strength of the polishing layer. Test condition: Each sample is stuck and fixed on a glass plate without slack, and φ0.4 μm on the polishing tape.
A weight of 50 to 300 g was sequentially applied by the diamond needle of No. 1 until the time when scratches were generated on the polishing layer of the polishing tape. The results of plotting the scratching strength against the amount of the inorganic binder with respect to the polishing agent are shown in FIG. 1 (comparative example,
Although there is no inorganic binder, the scratch strength is shown by a dotted line for comparison. ).
【0047】図1から明らかなように本発明の研磨体
は、比較例以上の膜強度を実現できることが分かる。As is apparent from FIG. 1, the abrasive body of the present invention can realize the film strength higher than that of the comparative example.
【0048】[0048]
【発明の効果】以上説明したように、本発明の研磨テー
プによれば、研磨剤中に特定の無機結合剤を特定量含有
させることにより、高温高湿度下での使用においても研
磨層の剥離、研磨粉落ち、被研磨物への異物の付着等の
発生を抑えることが出来る。As described above, according to the polishing tape of the present invention, by including a specific amount of a specific inorganic binder in the polishing agent, the polishing layer can be peeled off even when used under high temperature and high humidity. It is possible to suppress the generation of polishing powder, the adhesion of foreign matter to the object to be polished, and the like.
【図1】実施例及び比較例において、研磨剤に対する無
機結合剤量に対して引掻強度をプロットしたグラフであ
る。FIG. 1 is a graph in which scratch strength is plotted against the amount of an inorganic binder with respect to an abrasive in Examples and Comparative Examples.
【図2】本発明の研磨体の研磨層における研磨体粒子と
無機結合剤粒子とからなる結合状態を模式的に示す図で
ある。FIG. 2 is a diagram schematically showing a bonded state composed of abrasive particles and inorganic binder particles in the polishing layer of the abrasive of the present invention.
【図3】本発明の研磨テープを用いた研磨装置の概略図
である。FIG. 3 is a schematic view of a polishing apparatus using the polishing tape of the present invention.
【図4】上記研磨テープと磁気ヘッドの拡大図である。FIG. 4 is an enlarged view of the polishing tape and the magnetic head.
【図5】他の研磨装置の概略斜視図である。FIG. 5 is a schematic perspective view of another polishing apparatus.
【図6】図5の断面図である。6 is a cross-sectional view of FIG.
1 研磨テープ 2 支持体 3 研磨層 4 研磨剤 5 磁気ヘッド 6 送り出しロール 7 巻取りリール 8 パスロール 9 ハードディスク 10 ゴムローラ 11 集合構造体 12 研磨剤粒子 13 無機結合剤粒子 1 Abrasive Tape 2 Support 3 Abrasive Layer 4 Abrasive 5 Magnetic Head 6 Sending Roll 7 Take-up Reel 8 Pass Roll 9 Hard Disk 10 Rubber Roller 11 Aggregate Structure 12 Abrasive Particle 13 Inorganic Binder Particle
Claims (2)
とする研磨層を有する研磨体において、該結合剤は有機
結合剤及び無機結合剤からなり、前記無機結合剤は研磨
剤粒子に対して1〜30重量%であることを特徴とする
研磨体。1. A polishing body having a polishing layer mainly comprising abrasive particles and a binder on a support, wherein the binder comprises an organic binder and an inorganic binder, and the inorganic binder is abrasive particles. The abrasive body is characterized by being 1 to 30% by weight.
請求項1記載の研磨体。2. The polishing body according to claim 1, wherein the polishing layer has a thickness of 1 to 10 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12540592A JPH05293766A (en) | 1992-04-20 | 1992-04-20 | Polishing body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12540592A JPH05293766A (en) | 1992-04-20 | 1992-04-20 | Polishing body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05293766A true JPH05293766A (en) | 1993-11-09 |
Family
ID=14909306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12540592A Pending JPH05293766A (en) | 1992-04-20 | 1992-04-20 | Polishing body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05293766A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5391210A (en) * | 1993-12-16 | 1995-02-21 | Minnesota Mining And Manufacturing Company | Abrasive article |
| JPH08267363A (en) * | 1995-03-30 | 1996-10-15 | Fuji Photo Film Co Ltd | Abrasive body |
| JP2000503601A (en) * | 1996-01-22 | 2000-03-28 | マイクロン テクノロジー,インコーポレイテッド | Polishing pad having covalently bonded particles and method for manufacturing polishing pad |
| JP2011016169A (en) * | 2009-07-07 | 2011-01-27 | Fujibo Holdings Inc | Polishing pad and manufacturing method for the polishing pad |
-
1992
- 1992-04-20 JP JP12540592A patent/JPH05293766A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5391210A (en) * | 1993-12-16 | 1995-02-21 | Minnesota Mining And Manufacturing Company | Abrasive article |
| JPH08267363A (en) * | 1995-03-30 | 1996-10-15 | Fuji Photo Film Co Ltd | Abrasive body |
| JP2000503601A (en) * | 1996-01-22 | 2000-03-28 | マイクロン テクノロジー,インコーポレイテッド | Polishing pad having covalently bonded particles and method for manufacturing polishing pad |
| JP2011016169A (en) * | 2009-07-07 | 2011-01-27 | Fujibo Holdings Inc | Polishing pad and manufacturing method for the polishing pad |
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