JPH0535230B2 - - Google Patents
Info
- Publication number
- JPH0535230B2 JPH0535230B2 JP13662085A JP13662085A JPH0535230B2 JP H0535230 B2 JPH0535230 B2 JP H0535230B2 JP 13662085 A JP13662085 A JP 13662085A JP 13662085 A JP13662085 A JP 13662085A JP H0535230 B2 JPH0535230 B2 JP H0535230B2
- Authority
- JP
- Japan
- Prior art keywords
- high vacuum
- ultra
- accelerator
- electron beam
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 14
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 239000011538 cleaning material Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13662085A JPS61295384A (ja) | 1985-06-21 | 1985-06-21 | 超高真空用材料の洗浄方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13662085A JPS61295384A (ja) | 1985-06-21 | 1985-06-21 | 超高真空用材料の洗浄方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61295384A JPS61295384A (ja) | 1986-12-26 |
| JPH0535230B2 true JPH0535230B2 (2) | 1993-05-26 |
Family
ID=15179560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13662085A Granted JPS61295384A (ja) | 1985-06-21 | 1985-06-21 | 超高真空用材料の洗浄方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61295384A (2) |
-
1985
- 1985-06-21 JP JP13662085A patent/JPS61295384A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61295384A (ja) | 1986-12-26 |
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