JPH0538526Y2 - - Google Patents
Info
- Publication number
- JPH0538526Y2 JPH0538526Y2 JP13178987U JP13178987U JPH0538526Y2 JP H0538526 Y2 JPH0538526 Y2 JP H0538526Y2 JP 13178987 U JP13178987 U JP 13178987U JP 13178987 U JP13178987 U JP 13178987U JP H0538526 Y2 JPH0538526 Y2 JP H0538526Y2
- Authority
- JP
- Japan
- Prior art keywords
- irradiation
- window
- chamber
- vacuum chamber
- window flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 27
- 238000010894 electron beam technology Methods 0.000 claims description 15
- 239000011888 foil Substances 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000012423 maintenance Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000008531 maintenance mechanism Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13178987U JPH0538526Y2 (da) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13178987U JPH0538526Y2 (da) | 1987-08-28 | 1987-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6435654U JPS6435654U (da) | 1989-03-03 |
| JPH0538526Y2 true JPH0538526Y2 (da) | 1993-09-29 |
Family
ID=31388176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13178987U Expired - Lifetime JPH0538526Y2 (da) | 1987-08-28 | 1987-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538526Y2 (da) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011051064A (ja) * | 2009-09-02 | 2011-03-17 | Mori Seiki Co Ltd | 工作機械 |
| JP5707286B2 (ja) * | 2011-09-21 | 2015-04-30 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |
| JP6207824B2 (ja) | 2012-10-01 | 2017-10-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ |
| JP5976147B2 (ja) * | 2015-02-17 | 2016-08-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |
-
1987
- 1987-08-28 JP JP13178987U patent/JPH0538526Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6435654U (da) | 1989-03-03 |
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