JPH0546244B2 - - Google Patents

Info

Publication number: JPH0546244B2
Authority: JP; Japan
Prior art keywords: electron gun; evaporation crucible; isotope; fitting surface; raw material
Prior art date: 1987-03-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP7044587A

Other languages

English (en)

Japanese (ja)

Other versions

JPS63240925A (ja

Inventor

Yoshihiro Oguchi

Koji Ichihashi

Hidetoshi Mukoda

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Toshiba Corp

Original Assignee

Tokyo Shibaura Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-03-26

Filing date

1987-03-26

Publication date

1993-07-13

1987-03-26 Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd

1987-03-26 Priority to JP7044587A priority Critical patent/JPS63240925A/ja

1988-10-06 Publication of JPS63240925A publication Critical patent/JPS63240925A/ja

1993-07-13 Publication of JPH0546244B2 publication Critical patent/JPH0546244B2/ja

Status Granted legal-status Critical Current

Links

238000001704 evaporation Methods 0.000 claims description 52
230000008020 evaporation Effects 0.000 claims description 52
238000001816 cooling Methods 0.000 claims description 26
238000010894 electron beam technology Methods 0.000 claims description 18
238000005372 isotope separation Methods 0.000 claims description 17
229910052751 metal Inorganic materials 0.000 claims description 16
239000002184 metal Substances 0.000 claims description 16
239000002994 raw material Substances 0.000 claims description 16
230000005684 electric field Effects 0.000 claims description 4
238000012423 maintenance Methods 0.000 description 8
238000000926 separation method Methods 0.000 description 8
230000008859 change Effects 0.000 description 7
230000001681 protective effect Effects 0.000 description 7
230000008439 repair process Effects 0.000 description 4
230000000694 effects Effects 0.000 description 3
230000005284 excitation Effects 0.000 description 3
230000009471 action Effects 0.000 description 2
239000000470 constituent Substances 0.000 description 2
238000010586 diagram Methods 0.000 description 2
230000009931 harmful effect Effects 0.000 description 2
230000007935 neutral effect Effects 0.000 description 2
238000013021 overheating Methods 0.000 description 2
238000011084 recovery Methods 0.000 description 2
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
229910052770 Uranium Inorganic materials 0.000 description 1
238000010521 absorption reaction Methods 0.000 description 1
238000005452 bending Methods 0.000 description 1
239000000498 cooling water Substances 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
239000010949 copper Substances 0.000 description 1
230000008878 coupling Effects 0.000 description 1
238000010168 coupling process Methods 0.000 description 1
238000005859 coupling reaction Methods 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
238000007689 inspection Methods 0.000 description 1
238000009434 installation Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
238000002844 melting Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
238000000034 method Methods 0.000 description 1
239000000203 mixture Substances 0.000 description 1
238000001179 sorption measurement Methods 0.000 description 1
JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1

Landscapes

Physical Vapour Deposition (AREA)

JP7044587A 1987-03-26 1987-03-26 同位体分離装置 Granted JPS63240925A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP7044587A JPS63240925A (ja)	1987-03-26	1987-03-26	同位体分離装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP7044587A JPS63240925A (ja)	1987-03-26	1987-03-26	同位体分離装置

Publications (2)

Publication Number	Publication Date
JPS63240925A JPS63240925A (ja)	1988-10-06
JPH0546244B2 true JPH0546244B2 (2)	1993-07-13

Family

ID=13431702

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP7044587A Granted JPS63240925A (ja)	1987-03-26	1987-03-26	同位体分離装置

Country Status (1)

Country	Link
JP (1)	JPS63240925A (2)

1987
- 1987-03-26 JP JP7044587A patent/JPS63240925A/ja active Granted

Also Published As

Publication number	Publication date
JPS63240925A (ja)	1988-10-06

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