JPS63240925A - 同位体分離装置 - Google Patents

同位体分離装置

Info

Publication number
JPS63240925A
JPS63240925A JP7044587A JP7044587A JPS63240925A JP S63240925 A JPS63240925 A JP S63240925A JP 7044587 A JP7044587 A JP 7044587A JP 7044587 A JP7044587 A JP 7044587A JP S63240925 A JPS63240925 A JP S63240925A
Authority
JP
Japan
Prior art keywords
electron gun
evaporation crucible
isotope
crucible
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7044587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546244B2 (2
Inventor
Yoshihiro Oguchi
義広 小口
Koji Ichihashi
公嗣 市橋
Hidetoshi Mukoda
向田　秀敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP7044587A priority Critical patent/JPS63240925A/ja
Publication of JPS63240925A publication Critical patent/JPS63240925A/ja
Publication of JPH0546244B2 publication Critical patent/JPH0546244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7044587A 1987-03-26 1987-03-26 同位体分離装置 Granted JPS63240925A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7044587A JPS63240925A (ja) 1987-03-26 1987-03-26 同位体分離装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7044587A JPS63240925A (ja) 1987-03-26 1987-03-26 同位体分離装置

Publications (2)

Publication Number Publication Date
JPS63240925A true JPS63240925A (ja) 1988-10-06
JPH0546244B2 JPH0546244B2 (2) 1993-07-13

Family

ID=13431702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7044587A Granted JPS63240925A (ja) 1987-03-26 1987-03-26 同位体分離装置

Country Status (1)

Country Link
JP (1) JPS63240925A (2)

Also Published As

Publication number Publication date
JPH0546244B2 (2) 1993-07-13

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