JPH0554253B2 - - Google Patents
Info
- Publication number
- JPH0554253B2 JPH0554253B2 JP58145507A JP14550783A JPH0554253B2 JP H0554253 B2 JPH0554253 B2 JP H0554253B2 JP 58145507 A JP58145507 A JP 58145507A JP 14550783 A JP14550783 A JP 14550783A JP H0554253 B2 JPH0554253 B2 JP H0554253B2
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- beam source
- shutter
- source cell
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/22—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using physical deposition, e.g. vacuum deposition or sputtering
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58145507A JPS6057611A (ja) | 1983-08-09 | 1983-08-09 | 分子線源シヤツタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58145507A JPS6057611A (ja) | 1983-08-09 | 1983-08-09 | 分子線源シヤツタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6057611A JPS6057611A (ja) | 1985-04-03 |
| JPH0554253B2 true JPH0554253B2 (2) | 1993-08-12 |
Family
ID=15386846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58145507A Granted JPS6057611A (ja) | 1983-08-09 | 1983-08-09 | 分子線源シヤツタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057611A (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6359318U (2) * | 1986-10-07 | 1988-04-20 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4813515U (2) * | 1971-07-02 | 1973-02-15 | ||
| JPS54122766U (2) * | 1978-02-15 | 1979-08-28 | ||
| JPS54180662U (2) * | 1978-06-12 | 1979-12-20 | ||
| JPS60129126U (ja) * | 1984-02-06 | 1985-08-30 | 日本電気株式会社 | 分子線エピタキシ装置 |
| JPS6150326A (ja) * | 1984-08-20 | 1986-03-12 | Fujitsu Ltd | 半導体結晶成長装置 |
-
1983
- 1983-08-09 JP JP58145507A patent/JPS6057611A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6057611A (ja) | 1985-04-03 |
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