JPH0563898B2 - - Google Patents

Info

Publication number
JPH0563898B2
JPH0563898B2 JP61295341A JP29534186A JPH0563898B2 JP H0563898 B2 JPH0563898 B2 JP H0563898B2 JP 61295341 A JP61295341 A JP 61295341A JP 29534186 A JP29534186 A JP 29534186A JP H0563898 B2 JPH0563898 B2 JP H0563898B2
Authority
JP
Japan
Prior art keywords
electrode
deflection
ion beam
deflected
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61295341A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63148526A (ja
Inventor
Toshiharu Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61295341A priority Critical patent/JPS63148526A/ja
Publication of JPS63148526A publication Critical patent/JPS63148526A/ja
Publication of JPH0563898B2 publication Critical patent/JPH0563898B2/ja
Granted legal-status Critical Current

Links

JP61295341A 1986-12-10 1986-12-10 イオンビーム注入装置 Granted JPS63148526A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61295341A JPS63148526A (ja) 1986-12-10 1986-12-10 イオンビーム注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61295341A JPS63148526A (ja) 1986-12-10 1986-12-10 イオンビーム注入装置

Publications (2)

Publication Number Publication Date
JPS63148526A JPS63148526A (ja) 1988-06-21
JPH0563898B2 true JPH0563898B2 (mo) 1993-09-13

Family

ID=17819359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61295341A Granted JPS63148526A (ja) 1986-12-10 1986-12-10 イオンビーム注入装置

Country Status (1)

Country Link
JP (1) JPS63148526A (mo)

Also Published As

Publication number Publication date
JPS63148526A (ja) 1988-06-21

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