JPS63148526A - イオンビーム注入装置 - Google Patents

イオンビーム注入装置

Info

Publication number
JPS63148526A
JPS63148526A JP61295341A JP29534186A JPS63148526A JP S63148526 A JPS63148526 A JP S63148526A JP 61295341 A JP61295341 A JP 61295341A JP 29534186 A JP29534186 A JP 29534186A JP S63148526 A JPS63148526 A JP S63148526A
Authority
JP
Japan
Prior art keywords
electrode
ion beam
deflection
redeflecting
deflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61295341A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563898B2 (mo
Inventor
Toshiharu Ozawa
小澤　敏晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61295341A priority Critical patent/JPS63148526A/ja
Publication of JPS63148526A publication Critical patent/JPS63148526A/ja
Publication of JPH0563898B2 publication Critical patent/JPH0563898B2/ja
Granted legal-status Critical Current

Links

JP61295341A 1986-12-10 1986-12-10 イオンビーム注入装置 Granted JPS63148526A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61295341A JPS63148526A (ja) 1986-12-10 1986-12-10 イオンビーム注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61295341A JPS63148526A (ja) 1986-12-10 1986-12-10 イオンビーム注入装置

Publications (2)

Publication Number Publication Date
JPS63148526A true JPS63148526A (ja) 1988-06-21
JPH0563898B2 JPH0563898B2 (mo) 1993-09-13

Family

ID=17819359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61295341A Granted JPS63148526A (ja) 1986-12-10 1986-12-10 イオンビーム注入装置

Country Status (1)

Country Link
JP (1) JPS63148526A (mo)

Also Published As

Publication number Publication date
JPH0563898B2 (mo) 1993-09-13

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