JPH0564697B2 - - Google Patents

Info

Publication number
JPH0564697B2
JPH0564697B2 JP62021495A JP2149587A JPH0564697B2 JP H0564697 B2 JPH0564697 B2 JP H0564697B2 JP 62021495 A JP62021495 A JP 62021495A JP 2149587 A JP2149587 A JP 2149587A JP H0564697 B2 JPH0564697 B2 JP H0564697B2
Authority
JP
Japan
Prior art keywords
aluminum nitride
weight
sintered body
parts
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62021495A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63190133A (ja
Inventor
Kazuo Eda
Takashi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP62021495A priority Critical patent/JPS63190133A/ja
Publication of JPS63190133A publication Critical patent/JPS63190133A/ja
Publication of JPH0564697B2 publication Critical patent/JPH0564697B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Powder Metallurgy (AREA)
JP62021495A 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法 Granted JPS63190133A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62021495A JPS63190133A (ja) 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62021495A JPS63190133A (ja) 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
JPS63190133A JPS63190133A (ja) 1988-08-05
JPH0564697B2 true JPH0564697B2 (fr) 1993-09-16

Family

ID=12056549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62021495A Granted JPS63190133A (ja) 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法

Country Status (1)

Country Link
JP (1) JPS63190133A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0757023A3 (fr) * 1995-08-03 1997-08-13 Ngk Insulators Ltd Corps frittés à base de nitrure d'aluminium et leur utilisation pour la préparation des semi-conducteurs

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264388A (en) * 1988-05-16 1993-11-23 Sumitomo Electric Industries, Inc. Sintered body of aluminum nitride
WO2014057564A1 (fr) * 2012-10-11 2014-04-17 岩谷産業株式会社 Procédé de fabrication de nanoparticules sèches par lyophilisation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61295275A (ja) * 1985-06-24 1986-12-26 日本特殊陶業株式会社 高熱伝導性窒化アルミニウム焼結体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0757023A3 (fr) * 1995-08-03 1997-08-13 Ngk Insulators Ltd Corps frittés à base de nitrure d'aluminium et leur utilisation pour la préparation des semi-conducteurs
EP0992470A3 (fr) * 1995-08-03 2002-07-17 Ngk Insulators, Ltd. Corps frittés en nitrure d'aluminium et leur utilisation comme substrat dans un dispositif pour la fabrication de semiconducteurs

Also Published As

Publication number Publication date
JPS63190133A (ja) 1988-08-05

Similar Documents

Publication Publication Date Title
US4755490A (en) Low firing temperature ceramic materials
CA1222832A (fr) Enlevement des residus de carbone des corps en ceramique a metal dans la masse
US5728470A (en) Multi-layer wiring substrate, and process for producing the same
US4272500A (en) Process for forming mullite
JPH039636B2 (fr)
US5145540A (en) Ceramic composition of matter and its use
EP0132740A2 (fr) Procédé pour fabriquer un substrat diélectrique
JPH02197189A (ja) 窒化アルミニウム回路基板及びその製造方法
EP0196670B1 (fr) Supports céramiques pour circuits microélectroniques et procédé de leur fabrication
CN115340367A (zh) 一种氧化铝陶瓷及其制备方法和应用
US5264388A (en) Sintered body of aluminum nitride
EP1447391A2 (fr) Materiau en céramique oxydée, substrat céramique, materiau céramique stratifié et module amplificateur de puissance
JP2900711B2 (ja) 半導体装置実装用低温焼結型磁器の製造方法
US5068210A (en) Low dielectric constant ceramic materials
JPS63190133A (ja) 窒化アルミニウム焼結体およびその製造方法
JPH0881267A (ja) 窒化アルミニウム焼結体、その製造方法と窒化アルミニウム回路基板、その製造方法
JPH11157921A (ja) 酸化物セラミックス材料およびこれを用いた多層配線基板
US4963514A (en) Ceramic mullite-silica glass composite
JP3450400B2 (ja) 窒化アルミニウム焼結体および窒化アルミニウム多層回路基板
JPS61286267A (ja) 窒化アルミニウム質焼結体の製造方法
JPH04285073A (ja) 窒化アルミニウム質回路基板
JP3515867B2 (ja) 低温焼成セラミック組成物
EP0242226A2 (fr) Matériaux vitrocéramiques avec une température de cuisson basse
JP3372733B2 (ja) ガラスセラミック焼結体の製造方法および配線基板の製造方法
JPH08259329A (ja) ＡｌＮ連続焼成炉