JPH0570936B2 - - Google Patents

Info

Publication number
JPH0570936B2
JPH0570936B2 JP59121819A JP12181984A JPH0570936B2 JP H0570936 B2 JPH0570936 B2 JP H0570936B2 JP 59121819 A JP59121819 A JP 59121819A JP 12181984 A JP12181984 A JP 12181984A JP H0570936 B2 JPH0570936 B2 JP H0570936B2
Authority
JP
Japan
Prior art keywords
jig
wafer
cartridge
wafers
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59121819A
Other languages
English (en)
Japanese (ja)
Other versions
JPS612341A (ja
Inventor
Yoshiiku Sano
Tsugio Tanigawa
Yutaka Oohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12181984A priority Critical patent/JPS612341A/ja
Publication of JPS612341A publication Critical patent/JPS612341A/ja
Publication of JPH0570936B2 publication Critical patent/JPH0570936B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)
JP12181984A 1984-06-15 1984-06-15 ウエハ移し換え治具 Granted JPS612341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12181984A JPS612341A (ja) 1984-06-15 1984-06-15 ウエハ移し換え治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12181984A JPS612341A (ja) 1984-06-15 1984-06-15 ウエハ移し換え治具

Publications (2)

Publication Number Publication Date
JPS612341A JPS612341A (ja) 1986-01-08
JPH0570936B2 true JPH0570936B2 (sr) 1993-10-06

Family

ID=14820712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12181984A Granted JPS612341A (ja) 1984-06-15 1984-06-15 ウエハ移し換え治具

Country Status (1)

Country Link
JP (1) JPS612341A (sr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07223289A (ja) * 1994-02-10 1995-08-22 Fuooles:Kk 複合板材

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337056U (sr) * 1976-09-07 1978-04-01
JPS577097Y2 (sr) * 1976-09-27 1982-02-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07223289A (ja) * 1994-02-10 1995-08-22 Fuooles:Kk 複合板材

Also Published As

Publication number Publication date
JPS612341A (ja) 1986-01-08

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