JPH0572011B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is for cleaning and cleaning disk members on which a recording layer is formed, such as magnetic disks and optical disks.
This invention relates to a cleaning device for drying disk members.

Prior Art As a disk member, for example, a magnetic disk, a disk member made of an annular plate made of aluminum or the like is smoothed by grinding such as lapping, and then a magnetic material is coated on the surface of the disk member. A magnetic recording layer is formed by coating the magnetic material. Here, in order to make the film thickness of the recording layer uniform as described above, it is necessary to apply the magnetic material after making sure that no foreign matter such as dust is attached to the surface of the disk member in advance. .
For this purpose, the disk member is cleaned before the recording layer is formed and, if necessary, after the recording layer is formed.

Conventionally, this cleaning of disk members involves immersing a large number of easily supported disk members in a cleaning solution, vibrating the cleaning solution at high frequency, or wiping the surface with a cleaning tool such as a sponge in the cleaning solution. I was doing it.

Problems to be Solved by the Invention As mentioned above, cleaning using high-frequency vibration not only complicates the overall structure of the cleaning device but also increases the size of the device configuration. There was also the inconvenience that it was impossible to completely remove dirt such as oil stains from the parts. In addition, manual cleaning is time-consuming and has drawbacks such as increased production costs for magnetic disks and optical disks.

The present invention has been made in order to eliminate the drawbacks of the prior art described above, and provides a disk member that has a simple configuration and allows automatic cleaning of the disk member using a small and compact device. The purpose of this invention is to provide a cleaning device for cleaning.

Means for Solving the Problems In order to achieve the above-mentioned object, the present invention is characterized in that racks for loading and unloading, which store the disk members in an upright state, are installed in the housing. A loading section and an unloading section are provided, respectively, a cleaning section for cleaning the surface of the disk member, and a drying section for drying the disk member after cleaning, and the cleaning section has a rotary table arranged vertically at a low position. , the rotary table is divided into a plurality of sections, each having a chuck member for chucking the disk member, so as to perform a required number of operations consisting of at least cleaning and rinsing; A carry-in handler, which is disposed at a higher position than the washing section and has a cover that can be opened and closed, the carry-out section is disposed at the highest position, and chuck members for chucking the disks are provided at one or more places, respectively; A loading handler and an unloading handler are provided. The disk member is delivered to the unloading handler via the handler.

Operation To clean disk members using the cleaning device configured as described above, a large number of disk members are placed in an upright position on a rack, and this rack is used to transport the conveyor unit provided in the housing. During this time, it is taken out by a carry-in handler, transferred to a transfer handler, and transferred from this transfer handler to a cleaning section located at a low place. Here, the cleaning section has a rotary table, and since this rotary table is equipped with a plurality of work sections, for example, cleaning and rinsing,
It can also perform multiple tasks such as surface cleaning, edge cleaning, and rinsing. After going through a plurality of steps in the cleaning section, the cleaned disk member moves to a drying section located at a higher location than the cleaning section, and is dried within a cover provided in the drying section. In this way, by locating the drying section higher than the washing section,
Even if the cleaning work and the drying work are performed at the same time, there is no risk that liquid will re-adhere to the disk member during or after the drying work due to the influence of the cleaning work. When the drying work is completed, the dried disk member is taken out by the transfer handler, transferred to the carry-out handler, and placed in the carry-out section located higher than the drying section. It will be transferred to a rack for carrying out the work.

In this way, the loading section, unloading section, cleaning section, and drying section for disk members are installed in the housing as a unit, and the handling member takes out the disk members one by one from the loading rack in the loading section and cleans them. In addition to drying, the cleaned and dried disk members are loaded onto the carrying out rack in the carrying out section by means of a handling member, making it easy to automatically clean the disk members by rack-to-rack using a small and compact device. be able to do it.

Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In this embodiment, the explanation will be made assuming that cleaning is performed after a disk member is lapped.

First, in FIGS. 1 and 2, 1 is a housing that constitutes the main body of the cleaning device;
Inside, there are formed a carry-in section 3 to which the carry-in rack 2 is conveyed, a carry-out section 5 to which the carry-out rack 4 is conveyed, and a work chamber 6 defined by partition walls 1a.
A drive chamber 7 is formed.

The inside of the work room 6 is divided into a washing section 8 and a drying section 9, and the disk members 10 that have been wrapped are transported to the work room 6 in an upright state on the loading rack 2, and are pre-washed in a shower 11. From the carry-in handler 12 as a carry-in handling member that takes out disk members one by one, the carry-in handler 13 as a carry-out handling member that transfers the disk members 10 after cleaning and drying to the carry-out rack 4, and the carry-in handler 12. A cleaning section 8, a drying section 9 from the cleaning section 8, and a transfer handler 14 for transferring disk members from the drying section 9 to an unloading handler 13 are provided.

Here, the positional relationship of the carrying-in section 3, carrying-out section 5, cleaning section 8, and drying section 9 in the housing 1 is such that the carrying-in section 3 is located lower than the carrying-out section 5, and the washing section 8 is located at the lowest position. The drying section 9 is located at a higher location than the cleaning section 8, and the carrying out section 5 is arranged at the highest location. Therefore, the disk members 10 that have been cleaned from the cleaning section 8 are sequentially moved to higher locations as they move toward the drying section 9 and the unloading section 5.

As shown in FIGS. 3 to 5, the cleaning section 8 has a rotary table 15, and the rotary table 15 is divided into four working sections by cross-shaped partition walls 15a. In FIG. 4, the working section A in the upper part of the figure is an attachment/detachment part for attaching and detaching the disk member 10 to and from the transfer handler 4, and the working part B in the right part of the figure is a part for attaching and detaching the disk member 10 to and from the transfer handler 4. A cleaning section for cleaning the front and back surfaces, a rinsing section for cleaning the disk member 10 by a rinsing device 17 in the lower working section C, and a rinsing section for rinsing after cleaning using the rinsing device 17; This is an edge washing section that cleans the inner and outer peripheral edges. A chuck member 20 consisting of three chuck pieces 20a, 20b, and 20c for holding the outer peripheral edge of the disk member 10 is installed in each of the aforementioned working sections A, B, C, and D. This chuck member 20
can be displaced between the chuck position shown by the solid line and the chuck release position shown by the chain line in the working section A. For this,
As shown in working section D, a gear drive 21 is provided for actuating each chuck piece 20a, 20b, 20c. As shown in FIGS. 4 and 5, the drive gear tooth 21a of the gear drive unit 21 is connected to a lever 22 on the back surface of the rotary table 15, and the lever 22 is normally operated by a spring as shown by the chain line. 23, the chuck member 20 is in a position where it abuts against the stopper 24, and at this time the chuck member 20 is in the chuck position, and is connected to a rotary drive part 25 provided in the drive chamber 7 across the partition wall 1a at a position corresponding to the working part A. By rotating the operating piece 26 from the chain line position to the solid line position, the lever 22 can be moved to the solid line position and the chuck member 20 can be displaced to the chuck release position.

Next, as shown in FIG. 6, the cleaning tool 16 has a pair of upper and lower arms 27a, 27b, and a rotating shaft 28a, 28b is inserted into each arm 27a, 27b. At one end of the shafts 28a, 28b, there are washing tools 29a, 2 made of a member such as a sponge.
9b is attached, and pulleys 30a, 3 are attached to the other end.
0b is attached, and each pulley 30a, 30b
Belts 33a and 33b are wound between the pulleys 32a and 32b provided on the rotating shaft 31, and by rotating the rotating shaft 31, the washing tool 29
a, 29b can be rotated. And these washing tools 29a, 29b
By this rotation, the disk member 10 is rotated while being held by the chuck member 20. Further, the washing tools 29a and 29b have an annular shape, and in order to supply a cleaning liquid made of neutral detergent etc. into the inside of the washing tools 29a and 29b, rotating shaft support blocks 33a and 33a are attached to the arms 27a and 27b, respectively. Hose 34a, 34b to 33b
are connected, and the cleaning liquid supplied from the respective hoses 34a, 34b is provided through passages 35a, 35b (the passage 35b is not shown in the drawing) bored in the rotating shafts 28a, 28b.

Further, the rinsing device 17 has the same structure as the cleaning tool 16, and the fluid supplied is rinsing water instead of the cleaning liquid.

Furthermore, as shown in FIG.
6, 37, a rotating shaft 39 supported by a support arm 38 is attached to the outer edge washing tool 36, and a pulley 40 is attached to the other end, and between the pulley 40 and a drive shaft 41 The washing tool 36 is rotated by a belt 42 that is wound around the washing tool 36. Further, the rotating shaft 39 has a wheel tooth 43.
is attached, and the wheel tooth 43 meshes with the wheel tooth 44, so that the wheel tooth 44 is rotationally driven in the direction opposite to the rotating shaft 39. A belt 47 is wound around between this wheel gear 44 and a pulley 46 provided on a rotating shaft 45 to which the washing tool 37 is attached.
6, it can be rotated in the opposite direction. Further, the support arm 38 includes washing tools 36, 3.
A nozzle 48 (the nozzle on the washing tool 37 side is omitted) is attached to the support arm 38 for supplying washing water toward the washing tool 7 . Further, the support arm 38 is swingable by a crank mechanism, so that the washing tools 36 and 37 can be swinged while being rotated during the washing operation.

The cleaning device 16, the rinsing device 17, and the edge cleaning device 18 can be rotated in conjunction with each other about their respective rotation axes by rotating the rotation shaft 49. Device 1
6. The rinsing device 17 and the edge cleaning device 18 are in the non-operating position shown in FIG.
It is adapted to be able to be displaced between an operating position in which it is displaced to the side and abuts against the disk member 10.

Next, as shown in FIG. 8, in the drying section 9, a rotating shaft 50 for rotating the disk member 10 at high speed is provided protruding from the partition wall 1a. A chuck member 51 is provided to chuck the peripheral edge. The rotating shaft 50 is rotationally driven by a motor 52 provided in the drive chamber 7, whereby the rotating shaft 50
The disk member 10 attached to the disk member 10 can be rotated at high speed. Further, a nozzle 53 is provided for supplying warm pure water to the disk member 10 when it rotates. Furthermore, disk member 1
A cover 54 is attached so as to be openable and closable to prevent water droplets from scattering around during the zero rotation.

As shown in FIG. 9, the carry-in handler 12 has an arm 56 attached to a rotating shaft 55 protruding from the partition wall 1a, and a chuck at the tip of the arm 56 that is operated by a gear mechanism or the like to check the inner peripheral edge of the disk member 10. It is formed by attaching the member 57. In addition, the carry-out handler 13 also handles the carry-in handler 1.
2, it is formed by attaching an arm 59 to the rotating shaft 58 and providing a chuck member 60 at the tip of the arm 59.

On the other hand, the transfer handler 14 has a T-shaped arm 61.
The arm 61 is attached to a rotating shaft 62, and the other end of the rotating shaft 62 extends from the partition wall 1a into the drive chamber 6, and is connected to a rotor rotated by a belt 63. 64 and spline connection. The rotating shaft 62 is connected to a crank arm 65 so that it can also be displaced in the axial direction. The arm 61 has three arm parts 61a,
61b, 61c, each arm portion 61a, 61
b, 61c have chuck members 66a, 66 at their tips.
b, 66c are provided, and each chuck member 66
a, 66b, 66c are cams 67a, 67b, 67
c allows for displacement between the chuck position and the chuck release position. These cams 67
a, 67b, 67c are levers 68a, 68b, 6
8c, and for this purpose the levers 68a, 68b, 68c are operated by the bars 69a,
69b and 69c, and the bar 69
a, 69b, and 69c are configured to be attached to a rotating plate 71 that is rotated by a motor 70.

Furthermore, a rotary table 1 is provided in the drive chamber 7.
5. Transfer handler 14, loading/unloading handler 1
2, 13, a motor 72 for driving the washing tools 29a, 29b, edge washing tools 36, 37, etc., is provided.
Directly or intermediate shaft 7 to the output shaft 72a of the motor 72
The above-mentioned parts are driven through 3. Furthermore, a motor (not shown) for rotationally driving the rotating shaft 50 and the like are also housed within the drive chamber 7.

This embodiment is constructed as described above, and its operation will be explained next.

The disk member is finished to have an extremely smooth surface by a wrapping device, and is placed in an upright position on the loading rack 2, and in this state is conveyed through the loading rack 2 into the loading section 3. While the carry-in rack 2 is being transported, most of the abrasive powder is washed away by washing it with a shower 11. When the carry-in rack 2 reaches a predetermined position in the carry-in section 3, the carry-in handler 12 rotates its arm 56 toward the carry-in rack 2 and chucks the disk member 10 with the chuck member 57. After that, the arm 56 is rotated and the disk member 10 is attached to the chuck member 66a of the arm 61a of the transfer handler 14.
Move it to a position where it faces the Then, the rotating shaft 62 of the transfer handler 14 is axially displaced in a direction approaching the partition wall 1a, and the chuck member 66a is operated to chuck the disk member 10. At the same time, by releasing the chuck by the chuck member 57, the disk member 10 is transferred from the carry-in handler 12 to the transfer handler 14.
Transfer.

After the disk member 10 is transferred to the transfer handler 14, the transfer handler 14 is displaced in a direction protruding from the partition wall 1a and rotated 90 degrees to face the working part A of the rotary table 15. At this time, the carry-in handler 12 is rotated toward the carry-in rack 2 side. Then, the rotation shaft 62 is moved in a direction approaching the rotary table 15, and the disk member 10 is transferred to the chuck member 20. The disk member 10 transferred to the rotary table 15 in this way is rotated by indexing the rotary table 15 by 90 degrees, thereby cleaning the work part B, rinsing work part C, and edge cleaning work part. D, and each of these working sections A,
The disk member 10 is cleaned by operating the washing device 16, the rinsing device 17, and the edge cleaning device 18 at B, C, and D, respectively. Here, since each of the working sections A, B, C, and D is partitioned by a partition wall 15a, the cleaning liquid from one working section, especially the working section B that performs cleaning work, enters the other working sections and precedes them. It does not contaminate clean disk members. As the rotary table 15 rotates, the carry-in handler 12 and the transfer handler 14 operate, and the disk members 10 of the carry-in rack 2 are sequentially transferred to the rotary table 15. Disk member 1 after cleaning
0 returns to the working section A again, and at this time, the transfer handler 14 is displaced toward the rotary table 15, thereby chucking the disk member 10 with the chuck member 66b of the arm portion 61b. At the same time, the chuck member 66a of the arm portion 61a receives the disk member 10 from the carry-in handler 12. Thereafter, by rotating the transfer handler 14 by 90 degrees, the cleaned disk member 10 is transferred to the drying section 9. Therefore, by operating the chuck member 51 attached to the rotary shaft 50, the disk member 10 is chucked, the rotary shaft 50 is rotated, and hot pure water is supplied to the disk member 10.
By heating the 0, droplets adhering to it are scattered and dried.

The disk member 10 dried in this way is transferred to the transfer handler 14 by the operation of the transfer handler 14.
is chucked by the chuck member 66c of the arm 61c, and is transferred to the carry-out handler 13 by the rotation of the transfer handler 14.
3, it is placed in the carry-out rack 4. By sequentially repeating this operation, the disk member 1
After being washed and dried, the carrying out rack 4 is transported from the carrying out section 5 to the outside.

Next, FIG. 13 shows a second embodiment of the present invention. In this embodiment, a disk member 83 is attached and detached from each working section defined by a partition wall 82 on a rotary table 81. A pre-cleaning shower 84 is provided in the working part A which constitutes the attaching/detaching part, and the cleaning liquid is supplied to the working part B which constitutes the cleaning part from a nozzle 86 provided on the side of the washing tool 85. There is. Further, in the third working section C, rinsing by a rinsing member 87 and cleaning of the inner and outer peripheral edges by an edge cleaning member 88 are performed simultaneously, and in the fourth working section D, the disk member is dried. It is composed of Then, the disk member 83 is directly transferred to the rotary table 81 from the carry-in handler 89 that takes out the disk member 83 from the carry-in rack 88, and then the disk member 83 is transferred from the work section D to the carry-out handler 90, and then placed on the carry-out rack 91. It is designed to be taken out.

With this configuration, the disk member 83 can be automatically cleaned and dried in the same way as described above.

In each of the above-mentioned embodiments, the description has been made assuming that the disk member is cleaned after being lapped, but it goes without saying that the present invention is not limited to this, and can also be applied to cleaning performed either before or after applying the magnetic material. stomach. The cleaning device of the present invention cleans,
Since the drying member is compactly housed in the housing, it can be suitably used even when installed in a small device, such as in a clean room immediately before applying a magnetic material. In addition, the cleaning process may include not only the washing section, the rinsing section, and the edge washing section, but also spray cleaning, shower cleaning, etc., as appropriate.
Alcohol, Freon, etc. can be used.

Effects of the Invention As detailed above, the present invention integrates the disk member loading section, unloading section, cleaning section, and drying section into a housing, and also includes a loading handler, a transfer handler, and an unloading handler within this housing. From the loading handler to the transfer handler, from the transfer handler to the cleaning section, from the cleaning section to the transfer handler to the drying section, and from the drying section to the transfer handler to the unloading handler. Since the disk members are transferred and moved sequentially from the cleaning section to the drying section and then to the unloading section, the distance between the cleaning section and the drying section and between the drying section and the unloading section is reduced. Even if the time is shortened, the disk members that are sequentially cleaned will not be contaminated in the subsequent process due to the influence of the previous process.Moreover, in the cleaning section, a rotary table is provided, and multiple rotary tables are installed on this rotary table. Since it is configured to have work sections, the cleaning section that is cleaned through multiple steps can be compactly organized, and the steps in the cleaning section, such as surface and edge cleaning and rinsing, can be kept as short as possible. Make more,
The cleaning can be made more complete, and the disk member can be more completely cleaned by the overall small and compact cleaning device, and furthermore, the automatic cleaning of the disk member can be easily carried out in an easy-to-use manner.

[Brief explanation of drawings]

1 to 12 show a first embodiment of the present invention.
Figure 2 is a configuration explanatory diagram showing the connection relationship between the work chamber and the drive chamber, Figure 3 is an enlarged front view of the cleaning section, Figure 4 is a sectional view taken along line XX in Figure 3, and Figure 5 is the rotary table. A configuration explanatory diagram showing the operating mechanism of the chuck member,
FIG. 6 is a partially sectional front view of the cleaning device, FIG. 7 is a partially sectional front view of the edge cleaning member, FIG. 8 is an explanatory diagram of the structure of the drying section, FIG. 9 is a front view of the carry-in handler,
FIG. 10 is a rear view of the transfer handler, FIG. 11 is a configuration explanatory diagram showing the drive mechanism of the transfer handler, and FIG.
The figure is a configuration explanatory diagram showing the drive mechanism of the transfer handler.
FIG. 13 is an explanatory diagram of the configuration of a second embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Housing, 3... Carrying-in part, 5... Carrying-out part, 6... Working room, 9... Drive room, 10, 83...
...Disk member, 12... Carrying handler, 13...
...Export handler, 14...Transfer handler, 15...
...Rotary table.

Claims (1)

[Claims] 1 Inside the housing, there are a loading section and an unloading section for mounting loading and unloading racks for storing disk members in an upright state, respectively, a cleaning section for cleaning the surfaces of disk members, and a cleaning section for cleaning the disk members after cleaning. The washing section has a rotary table disposed vertically at a low position, and the rotary table is divided into a plurality of sections each having a chuck member for chucking the disk. , at least a required number of operations consisting of washing and rinsing are performed, and the drying section is located at a higher position than the washing section and is provided with a cover that can be opened and closed, and the unloading section is located at the highest position. A carry-in handler, a transfer handler, and a carry-out handler each having a chuck member for chucking a disk member at one or more locations are provided. cleaning of a disk member, characterized in that the disk member is delivered from the washing section to the drying section via a transfer handler, and from the drying section to an unloading handler via a transfer handler. Device.