JPH0576130B2 - - Google Patents

Info

Publication number
JPH0576130B2
JPH0576130B2 JP63163260A JP16326088A JPH0576130B2 JP H0576130 B2 JPH0576130 B2 JP H0576130B2 JP 63163260 A JP63163260 A JP 63163260A JP 16326088 A JP16326088 A JP 16326088A JP H0576130 B2 JPH0576130 B2 JP H0576130B2
Authority
JP
Japan
Prior art keywords
sample
state
plasma torch
mass spectrometer
inductively coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63163260A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0212748A (ja
Inventor
Kazuo Yamanaka
Takeshi Murayama
Kenichi Sakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP63163260A priority Critical patent/JPH0212748A/ja
Publication of JPH0212748A publication Critical patent/JPH0212748A/ja
Publication of JPH0576130B2 publication Critical patent/JPH0576130B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP63163260A 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置 Granted JPH0212748A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63163260A JPH0212748A (ja) 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63163260A JPH0212748A (ja) 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置

Publications (2)

Publication Number Publication Date
JPH0212748A JPH0212748A (ja) 1990-01-17
JPH0576130B2 true JPH0576130B2 (cs) 1993-10-22

Family

ID=15770422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63163260A Granted JPH0212748A (ja) 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置

Country Status (1)

Country Link
JP (1) JPH0212748A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960002195Y1 (ko) * 1993-10-30 1996-03-15 주식회사 동일기연 노이즈 필터
DE102009017648A1 (de) * 2009-04-16 2010-10-21 Siemens Aktiengesellschaft Gasinjektionssystem und Verfahren zum Betrieb eines Gasinjektionssystems, insbesondere für eine Partikeltherapieanlage

Also Published As

Publication number Publication date
JPH0212748A (ja) 1990-01-17

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