JPH0212748A - 高周波誘導結合プラズマ質量分析装置 - Google Patents

高周波誘導結合プラズマ質量分析装置

Info

Publication number
JPH0212748A
JPH0212748A JP63163260A JP16326088A JPH0212748A JP H0212748 A JPH0212748 A JP H0212748A JP 63163260 A JP63163260 A JP 63163260A JP 16326088 A JP16326088 A JP 16326088A JP H0212748 A JPH0212748 A JP H0212748A
Authority
JP
Japan
Prior art keywords
sample
plasma torch
state
valve
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63163260A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576130B2 (cs
Inventor
Kazuo Yamanaka
一夫 山中
Takeshi Murayama
健 村山
Kenichi Sakata
健一 阪田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP63163260A priority Critical patent/JPH0212748A/ja
Publication of JPH0212748A publication Critical patent/JPH0212748A/ja
Publication of JPH0576130B2 publication Critical patent/JPH0576130B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP63163260A 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置 Granted JPH0212748A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63163260A JPH0212748A (ja) 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63163260A JPH0212748A (ja) 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置

Publications (2)

Publication Number Publication Date
JPH0212748A true JPH0212748A (ja) 1990-01-17
JPH0576130B2 JPH0576130B2 (cs) 1993-10-22

Family

ID=15770422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63163260A Granted JPH0212748A (ja) 1988-06-30 1988-06-30 高周波誘導結合プラズマ質量分析装置

Country Status (1)

Country Link
JP (1) JPH0212748A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5475347A (en) * 1993-10-30 1995-12-12 Dong Il Technology Ltd. Compact AC noise filter with ground inductor
JP2010251324A (ja) * 2009-04-16 2010-11-04 Siemens Ag とりわけ粒子線治療設備用のガス噴射システムおよびガス噴射システムを動作させるための方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5475347A (en) * 1993-10-30 1995-12-12 Dong Il Technology Ltd. Compact AC noise filter with ground inductor
JP2010251324A (ja) * 2009-04-16 2010-11-04 Siemens Ag とりわけ粒子線治療設備用のガス噴射システムおよびガス噴射システムを動作させるための方法
EP2242339A3 (de) * 2009-04-16 2014-04-09 Siemens Aktiengesellschaft Gasinjektionssystem und Verfahren zum Betrieb eines Gasinjektionssystems, insbesondere für eine Partikeltherapieanlage

Also Published As

Publication number Publication date
JPH0576130B2 (cs) 1993-10-22

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