JPH0577290B2 - - Google Patents

Info

Publication number
JPH0577290B2
JPH0577290B2 JP61048462A JP4846286A JPH0577290B2 JP H0577290 B2 JPH0577290 B2 JP H0577290B2 JP 61048462 A JP61048462 A JP 61048462A JP 4846286 A JP4846286 A JP 4846286A JP H0577290 B2 JPH0577290 B2 JP H0577290B2
Authority
JP
Japan
Prior art keywords
film
metal
tungsten
opening
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61048462A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62206852A (ja
Inventor
Kyoichi Suguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61048462A priority Critical patent/JPS62206852A/ja
Publication of JPS62206852A publication Critical patent/JPS62206852A/ja
Publication of JPH0577290B2 publication Critical patent/JPH0577290B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP61048462A 1986-03-07 1986-03-07 半導体装置の製造方法 Granted JPS62206852A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61048462A JPS62206852A (ja) 1986-03-07 1986-03-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61048462A JPS62206852A (ja) 1986-03-07 1986-03-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62206852A JPS62206852A (ja) 1987-09-11
JPH0577290B2 true JPH0577290B2 (de) 1993-10-26

Family

ID=12804033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61048462A Granted JPS62206852A (ja) 1986-03-07 1986-03-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62206852A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3777538D1 (de) * 1986-11-10 1992-04-23 American Telephone & Telegraph Wolfram metallisierung.
JP3017742B2 (ja) * 1988-09-13 2000-03-13 ソニー株式会社 半導体装置
JP2543192B2 (ja) * 1989-07-10 1996-10-16 松下電器産業株式会社 半導体装置およびその製造方法
JPH03239365A (ja) * 1990-02-17 1991-10-24 Takehide Shirato 半導体装置
JP2720567B2 (ja) * 1990-03-28 1998-03-04 ソニー株式会社 半導体装置の製造方法
JP3001931B2 (ja) * 1990-06-06 2000-01-24 松下電子工業株式会社 半導体装置の電極配線およびその形成方法
US5250467A (en) * 1991-03-29 1993-10-05 Applied Materials, Inc. Method for forming low resistance and low defect density tungsten contacts to silicon semiconductor wafer
JP2830540B2 (ja) * 1991-10-01 1998-12-02 日本電気株式会社 多層配線の製造方法
JP5365577B2 (ja) * 2010-05-10 2013-12-11 富士通セミコンダクター株式会社 半導体装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61147549A (ja) * 1984-12-21 1986-07-05 Toshiba Corp 半導体装置
JPS61248442A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 半導体素子用微細電極配線

Also Published As

Publication number Publication date
JPS62206852A (ja) 1987-09-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term