JPH058471Y2 - - Google Patents

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a tube furnace used for heat treatment of electronic component materials, for example.

<Prior Art> A tube-type furnace having a tube-type furnace body is used for heat treatment of electronic component materials.

As a traditional general tube type furnace, the third
The one shown in the figure is known. This tube type furnace has a structure in which a heater 21 is disposed on the outer periphery of a cylindrical furnace body 20 made of quartz that is fixedly supported only at one end.

The heat treatment of the electronic component material 25 in this tube furnace is performed as follows.

A large number of electronic component materials 2 are placed at predetermined positions within the furnace body 20.
5 is charged, and the opening 20a of the furnace body 20 is closed with the door body 23. Next, after the furnace body 20 is evacuated to a vacuum state, the furnace body 20 is heated by the heater 21, and the electronic component material 25 is heated by radiation from the inner surface of the heated furnace body 20.

<Problems to be solved by the invention> By the way, in the tube-type furnace described above, since the opening-side portion 20b of the furnace body 20 and the door body 23 protrude outward from the heating range of the heater 21, this protruding portion Heat dissipates to the outside through.
Therefore, the internal temperature of this protruding portion is reduced by the heater 21.
The temperature is lower than that of the parts placed inside, creating a temperature gradient.

When such a temperature gradient occurs inside the furnace body 20, the heating conditions for each electronic component material 25 change depending on the charging position, and the characteristics of the electronic component materials 25 are no longer the same. In order to avoid such inconvenience, the opening-side portion 20b of the furnace body 20
To prevent the temperature from decreasing, the soaking area in the furnace body 20 is opened 2.
It is necessary to extend it to the 0a side. Conventionally, in order to ensure a sufficiently long soaking area within the furnace body 20, the heater 21 was extended to a portion 20b closer to the opening than the charging position of the electronic component material 25 within the furnace body 20. . Therefore, the length of the heater 21 becomes longer than the charging position of the electronic component material 25, resulting in a problem that the entire tube type furnace becomes larger.

The present invention was developed in view of the above-mentioned problems, and it suppresses the temperature drop between the opening side of the furnace body and the door body, expands the soaking area necessary for heating materials, and achieves good heat treatment. The aim is to make the tube furnace more compact and to make the entire tube furnace more compact.

<Means for Solving the Problems> In order to achieve the above object, the tube type furnace according to the present invention has a heat shielding member inside the opening portion of the furnace body that protrudes outward from the heating range of the heater. It is characterized by being removably inserted.

<Operation> According to the above configuration, heat dissipation from the portion near the opening is suppressed by the heat shielding member, and the soaking area within the furnace body is expanded to a position near the heat shielding member.

<Example> Hereinafter, the present invention will be described in detail based on an example shown in the drawings.

FIGS. 1 and 2 show an embodiment of the present invention, with FIG. 1 being a sectional view of a tube furnace, and FIG. 2 being a perspective view of a heat shield member. The tube type furnace according to the present invention is the same as the conventional example shown in FIG. 3 except that a heat shielding member is installed. Therefore, parts in FIG. 1 that correspond to those in FIG. 3 are given the same reference numerals.

In these figures, numeral 20 is a furnace body, and 21 is a heater. The furnace body 20 is a cylindrical tube made of quartz having an opening 20a at one end and a closed end at the other end, and is disposed horizontally with a portion 20b near the opening fixedly supported. Most of this furnace body 20 is made of quartz,
Only a part 20c on the side of the opening 20a is made of stainless steel, and this part 20c is the part of the vacuum exhaust device 2.
Connected to 2. Further, the opening 20a of the furnace body 20 is provided with a door body 23 made of stainless steel that closes the opening 20a. This door body 23 is opened and closed with one side rotatably supported. On the other hand, electronic component materials 25 placed on a mounting table 24 at intervals are charged into the furnace body 20 .

Next, reference numeral 10 denotes a heat shielding member, and this heat shielding member 10 includes a plurality of (three in the figure) stainless steel discs 1 having an outer diameter that can be inserted into the furnace body 20.
0a, and a stainless steel bar 1 that passes through the center of these discs and connects them at intervals.
0b. Note that this heat shielding member 10 is not limited to the one shown in this figure, but may be any member that has a reflective surface with respect to the closed end surface of the furnace body 20.

On the other hand, the heater 21 is disposed on the outer periphery of the furnace body 20, and is capable of directly heating a portion of the furnace body 20 other than the opening-side portion 20b. This heater 2
1 is covered by an outer shell 21b except for the opening 20a into which the furnace body 20 is inserted, and can be moved in a direction away from the furnace body 20 along a guide rail 27 by a guide 26 fixed to the lower part of the outer shell 21b.

Processing of the electronic component material 25 in such a tube furnace is performed in the following procedure.

A mounting table 24 on which a large number of electronic component materials 25 are mounted is loaded into a predetermined position within the furnace body 20 using a loading jig (not shown). After setting the heat shielding member 10 inside the opening-side portion 20b of the furnace body 20 and sealing it with the door body 23, the inside of the furnace body 20 is evacuated by the evacuation device 22 to create a vacuum state. The furnace body 20 is heated by the heater 21, and the heated furnace body 2
The electronic component material 25 is heated by radiation from the inner surface. At this time, part of the heat applied to the furnace body 20 is dissipated from the opening-side portion 20b and the door body 23, but the dissipation of this heat is suppressed by the heat shielding member 10, and the temperature on the opening 20a side is reduced. becomes less. As a result, the soaking area within the furnace body 20 expands to the front of the heat shielding member 10.

<Effects of the invention> As described above, according to the invention, since the heat shielding member is inserted inside the part of the furnace body near the opening, the temperature on the opening side of the furnace body is reduced by suppressing radiation from this part. It is possible to suppress the drop and expand the soaking area.

Therefore, uniform heat treatment can be performed over a wide range within the furnace body. Furthermore, since no temperature difference occurs in the furnace body itself, the length of the heater can be shortened, and the entire tube-type furnace can be made smaller.

[Brief explanation of the drawing]

1 and 2 relate to an embodiment of the present invention, FIG. 1 is a sectional view of a tube type furnace, FIG. 2 is a perspective view of a heat shielding member, and FIG. 3 is a tube type furnace of a conventional example. FIG. 3 is a cross-sectional view of the furnace. 10... Heat shielding member, 20... Furnace body, 21... Heater.

Claims (1)

[Claims for Utility Model Registration] A tube-type furnace having a tube-shaped furnace body, and a portion of the furnace body near the opening and a door protruding outward from the heating range of the heater, A tube-type furnace characterized in that a heat shielding member is removably inserted inside a portion near the opening.