JPH0596470A - Grinding wheel and grinding method for slider - Google Patents
Grinding wheel and grinding method for sliderInfo
- Publication number
- JPH0596470A JPH0596470A JP25623591A JP25623591A JPH0596470A JP H0596470 A JPH0596470 A JP H0596470A JP 25623591 A JP25623591 A JP 25623591A JP 25623591 A JP25623591 A JP 25623591A JP H0596470 A JPH0596470 A JP H0596470A
- Authority
- JP
- Japan
- Prior art keywords
- grinding wheel
- slider
- grinding
- air bearing
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000227 grinding Methods 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims description 8
- 239000006061 abrasive grain Substances 0.000 claims abstract description 13
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 6
- 239000010432 diamond Substances 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 3
- 238000003672 processing method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000010953 base metal Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 229910018651 Mn—Ni Inorganic materials 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、浮上型磁気ヘッドに用
いられるスライダ−を加工する研削砥石と、その研削砥
石を用いてスライダ−を研削加工する方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding wheel for processing a slider used in a floating magnetic head and a method for grinding the slider using the grinding wheel.
【０００２】[0002]
【従来の技術】図７はコンポジット型の浮上式磁気ヘッ
ドの基本構成を示す斜視図である。同図において、７１
はスライダ−であり、ＣａＴｉＯ3ゃＭｎ−Ｎｉ等の非
磁性材料で構成されている。スライダ−の浮上面側の磁
気記録媒体対向面には、浮上のためのエアベアリング７
２ａ、７２ｂが形成されており、電磁変換部となるヘッ
ドコア７３がスリット７４にモ−ルドガラス７５により
固定保持されている。図８はヘッドコア８３をスリット
８４にモ−ルドガラス８５により固定保持する状態を示
す図である。スライダ−８１のエアベアリング８２はガ
ラスが固まった後に、平均面粗さ２００Å程度にラッピ
ングされる。従来の浮上型磁気ヘッドの浮上高さは０．
１５μｍ前後であり、それに対応するスライダ−の大き
さは、長さが４mm、幅が３mm、高さが１mm程度である。
図５は従来のスライダ−５１のエアベアリング近傍の拡
大図である。浮上高さを決めるエアベアリング５２は浮
上面側の段差の底部５６ａ、５６ｂより約８０μｍ高
く、平均面粗さは２００〜４００Åに構成されている。
また、エアベアリングの側面５７と段差の底部５６ａ、
５６ｂとが成す隅部は、浮上特性に影響を与えない０．
５Ｒ程度の円弧状に形成されている。このような構成の
エアベアリングの加工に用いられる研削砥石の一例を図
６に示す。図６において、６１は加工に用いる直径が１
００〜１５０Φのカップ型研削砥石である。６３は砥石
粒層、６２は台金であり。砥粒層はダイヤモンドの砥粒
とそれを結合するレジンボンドの結合剤で構成され、角
部６４はＲ形状である。このような砥石を用いる研削条
件は通常、回転数１０，０００ｒｐｍ、送り２０〜１０
０ｍｍ／ｍｉｎ、切り込み３０〜６０μｍの条件であ
る。図７にしめすスライダ−は、エアベアリングの側面
７７と底部７６をエアベアリング面からの深さ１００μ
ｍに加工し、スリット７４にヘッドコア７３を固定した
エアベアリング７２ａと対のエアベアリング７２ｂとを
ラッピングして段差の深さ８０μｍに仕上げている。2. Description of the Related Art FIG. 7 is a perspective view showing the basic structure of a composite type flying magnetic head. In the figure, 71
Is a slider and is made of a non-magnetic material such as CaTiO 3 or Mn-Ni. An air bearing 7 for flying is provided on the air bearing surface side of the slider facing the magnetic recording medium.
2a and 72b are formed, and the head core 73, which serves as an electromagnetic converter, is fixedly held in the slit 74 by the mold glass 75. FIG. 8 is a view showing a state in which the head core 83 is fixed and held in the slit 84 by the mold glass 85. The air bearing 82 of the slider 81 is lapped to an average surface roughness of about 200Å after the glass is hardened. The conventional flying type magnetic head has a flying height of 0.
The slider has a size of about 15 μm, and the corresponding slider has a length of 4 mm, a width of 3 mm, and a height of about 1 mm.
FIG. 5 is an enlarged view of the vicinity of the air bearing of the conventional slider-51. The air bearing 52, which determines the flying height, is about 80 μm higher than the bottoms 56a and 56b of the steps on the air bearing surface side, and has an average surface roughness of 200 to 400Å.
Also, the side surface 57 of the air bearing and the bottom portion 56a of the step,
The corner formed by 56b does not affect the floating characteristics.
It is formed in an arc shape of about 5R. FIG. 6 shows an example of a grinding wheel used for processing an air bearing having such a structure. In FIG. 6, 61 has a diameter of 1 for processing.
It is a cup-type grinding wheel of 00-150Φ. 63 is a grindstone grain layer, 62 is a base metal. The abrasive grain layer is composed of diamond abrasive grains and a resin bond binder that bonds the abrasive grains, and the corner portions 64 are R-shaped. Grinding conditions using such a grindstone are usually 10,000 rpm and 20 to 10 feeds.
The conditions are 0 mm / min and a cut of 30 to 60 μm. In the slider shown in FIG. 7, the side surface 77 and the bottom portion 76 of the air bearing are 100 μm deep from the air bearing surface.
The air bearing 72a having the head core 73 fixed to the slit 74 and a pair of air bearings 72b are lapped to finish the step depth to 80 μm.
【０００３】[0003]
【発明が解決しようとする課題】磁気ディスク装置はノ
−トブック型のパソコン等への搭載により、小型化と高
密度記録化が要求されている。高密度化に対応するため
に、記録媒体である磁気ディスクは高保磁力の媒体を用
い、磁化反転密度、トラック記録密度、線記録密度を高
くしている。磁気ヘッドは、Ｍｎ−Ｚｎ単結晶フェライ
トのヘッドコアにＦｅ−Ａｌ−Ｓｉ等の金属磁性薄膜を
成膜して媒体の高保磁力化に、トラック幅を狭くした狭
トラック化や、ギャップ長を小さくすることにより、高
密度記録に対処している。一方磁気ヘッドの浮上高さ
は、高密度記録に対応して０．０５〜０．１μｍと低く
なリ、スライダ−も小型化している。また、安定した定
低浮上特性を得るためのひとつの方法として、図３に示
すようなエアベアリングの両側に深さ１０μｍ、幅１０
０μｍ、平均面粗さ５０〜７０Åの段差を設けたエアベ
アリングが用いられ始めてている。安定した定浮上特性
の為には、エアベアリングの側面３７と段差の底部３６
ａ，３６ｂのなす隅部のＲ形は状可能な限り小さく、エ
アベアリングの側面と底部の成す角度は直角に近いほう
が良い。しかし、従来のカップ型砥石を用いる研削方法
では、砥石形状による制約で、必要な形状のエアベアリ
ングを作製することができない。図６に示すカップ型砥
石の刃先６４のＲの大きさは最小３０μｍ程度である。
スリットにヘッドコアを固定したガラスを除去し７０Å
程度の平均面粗さに仕上げるためには、２０μｍ位の研
削代を付ける必要がある。エアベアリングの仕上げ後の
段差の深さを１０μｍとすると、図４に示すようにエア
ベアリングと段差とが成す隅部は、大きい曲率の円弧状
となってしまう。また、Ａｒ等のイオンビ−ムを処理材
の面に当て、衝撃により原子を吹きとばすイオンミ−リ
ング、塩酸、りん酸等の化学試薬によるケミカルエッチ
ング、レ−ザ加工等も考えられるが、必要な形状の段差
を形成することはできない。また、大規模な設備を必要
とし、生産効率も低く、大量生産を行なうスライダ−に
は適当でない。As the magnetic disk device is mounted on a notebook type personal computer or the like, downsizing and high density recording are required. In order to deal with higher density, a magnetic disk as a recording medium uses a medium having a high coercive force, and has a high magnetization reversal density, a track recording density, and a linear recording density. In a magnetic head, a magnetic metal thin film of Fe—Al—Si or the like is formed on a head core of Mn—Zn single crystal ferrite to increase the coercive force of the medium, narrow the track width to narrow the track, and reduce the gap length. By doing so, high density recording is dealt with. On the other hand, the flying height of the magnetic head is as low as 0.05 to 0.1 μm for high density recording, and the slider is also downsized. Further, as one method for obtaining stable constant low flying characteristics, a depth of 10 μm and a width of 10 μm are provided on both sides of an air bearing as shown in FIG.
Air bearings having a step difference of 0 μm and an average surface roughness of 50 to 70 Å are beginning to be used. For stable constant levitation characteristics, the side surface 37 of the air bearing and the bottom portion 36 of the step are
The R-shape of the corner formed by a and 36b is as small as possible, and the angle formed by the side surface and the bottom of the air bearing should be close to a right angle. However, in the conventional grinding method using a cup-shaped grindstone, an air bearing having a required shape cannot be manufactured due to the restriction of the shape of the grindstone. The size of R of the blade edge 64 of the cup-shaped grindstone shown in FIG. 6 is about 30 μm at the minimum.
Remove the glass with the head core fixed in the slit and remove it by 70Å
It is necessary to add a grinding allowance of about 20 μm to finish the surface with an average surface roughness. If the depth of the step after finishing the air bearing is 10 μm, the corner formed by the air bearing and the step becomes an arc shape having a large curvature, as shown in FIG. Further, ion milling in which an ion beam such as Ar is applied to the surface of the treated material and the atoms are blown off by impact, chemical etching with a chemical reagent such as hydrochloric acid, phosphoric acid, laser processing, etc. are conceivable, but they are necessary. It is not possible to form a step in shape. Further, it requires large-scale equipment, has low production efficiency, and is not suitable for a slider for mass production.
【０００４】[0004]
【課題を解決するための手段】本発明は浮上型磁気ヘッ
ドに用いられる非磁性セラミックで構成されたスライダ
−用の研削砥石であって、実質的に粒度が８以下の合成
ダイヤモンドの砥粒を集中度１２０％〜２００％で結合
し、直径Ｄが２ｍｍ以下、砥石軸保持具の端部からの突
出し長さＬが０．４〜５．０ｍｍ、直径Ｄと長さＬの比
Ｄ／Ｌが０．４〜５．０ｍｍであることを特徴とするス
ライダ−用の研削砥石と、その研削砥石を用いたスライ
ダ−の加工方法を提供するものである。本発明のスライ
ダ−の加工方法は、実質的に粒度が８以下の合成ダイヤ
モンドの砥粒を集中度１２０％〜２００％で結合し、直
径Ｄが２ｍｍ以下、砥石軸保持具の端部からの突出し長
さＬが０．４〜５．０ｍｍ、直径Ｄと長さＬの比Ｄ／Ｌ
が０．４〜５．０である研削砥石を用い、 砥石回転数：１００，０００〜３００，０００ｒｐｍ 送り：１００〜１５０ｍｍ／ｍｉｎ 切り込み：５〜１５μｍ の条件により研削加工するものである。DISCLOSURE OF THE INVENTION The present invention is a grinding wheel for a slider, which is composed of a non-magnetic ceramic used in a floating magnetic head, and which has substantially 8 grains or less of synthetic diamond grains. Combined with a concentration degree of 120% to 200%, the diameter D is 2 mm or less, the protruding length L from the end of the grindstone shaft holder is 0.4 to 5.0 mm, and the ratio D / L of the diameter D and the length L is D / L. Is 0.4 to 5.0 mm, and a grinding wheel for a slider, and a method for processing a slider using the grinding wheel. The slider processing method of the present invention is such that synthetic diamond abrasive grains having a grain size of 8 or less are bonded at a concentration degree of 120% to 200%, the diameter D is 2 mm or less, and the end portion of the grindstone shaft holder is used. The protruding length L is 0.4 to 5.0 mm, the ratio D / L of the diameter D and the length L
Is 0.4 to 5.0, and the grinding is performed under the conditions of the number of rotations of the whetstone: 100,000 to 300,000 rpm, the feed: 100 to 150 mm / min, and the incision: 5 to 15 μm.
【０００５】[0005]
【作用】図２は本発明のスライダ−の加工状態を示す図
である。図２において、スライダ−２１のエアベアリン
グ２２は最終仕上げ加工が施されている。エアベアリン
グの両側の段差の深さは１０μｍである。エアベアリン
グ両側の段差はの加工はその深さ１０μｍのみ加工すれ
ばよく、小型の研削砥石が使用でき、従来より高速の研
削条件が適用できる。側面２７と段差の底面２６の加工
は、＃８以下の砥粒２３を用い、その砥粒数を出来るだ
け少ない数、好ましくは１〜２個の砥粒を結合した研削
砥石２４を用いて、最大３００，０００ｒｐｍの高速回
転することにより、面精度が良好で、必要な精度が確保
できる。FIG. 2 is a view showing a processed state of the slider of the present invention. In FIG. 2, the air bearing 22 of the slider-21 has been subjected to final finishing. The depth of the step on both sides of the air bearing is 10 μm. The steps on both sides of the air bearing need only be machined to a depth of 10 μm, a small grinding wheel can be used, and higher-speed grinding conditions than before can be applied. The side surface 27 and the bottom surface 26 of the step are processed by using the abrasive grains 23 of # 8 or less, and by using the grinding stone 24 in which the number of the abrasive grains is as small as possible, preferably 1 to 2 abrasive grains, By rotating at a maximum speed of 300,000 rpm, the surface accuracy is good and the required accuracy can be secured.
【０００６】[0006]
【実施例】図９は研削砥石９１を研削砥石軸保持具９２
により加工機主軸９３に取付けた状態を示す図である。
加工機主軸はエアモ−タの採用により最大３００，００
０ｒｐｍの高速回転が可能である。研削砥石軸径Ｄは
１．５mm、突出し長さＬは３mm、Ｄ／Ｌ＝０．５、砥粒
は＃１５００を用いた。回転数は２００，０００ｒｐｍ
とし、図２に示すようにエアベアリングの段差、深さ１
０μｍ，幅１００μｍを研削加工した。送りは８０、１
１０、１４５、１６０mm／min 、切り込みは５、１０、
１５、２０μｍの各４種類とした。送りが１００以下で
は能率が悪く、１６０ではカケが出やすくなりとなり適
当でなかった。切り込みも２０μｍになるとカケが出や
すくなり適当でない。送りが１１０、１４５で、切り込
みが５、１０、１５、の場合には面粗さ５０Å、段差の
角部のチッピングも少なく良好エアベアリングを得るこ
とができた。EXAMPLE FIG. 9 shows a grinding wheel 91 with a grinding wheel shaft holder 92.
It is a figure which shows the state attached to the processing machine main shaft 93 by.
The processing machine spindle has a maximum of 300,000 due to the adoption of an air motor.
High-speed rotation of 0 rpm is possible. The grinding wheel shaft diameter D was 1.5 mm, the protruding length L was 3 mm, D / L = 0.5, and the abrasive grains were # 1500. Rotation speed is 200,000 rpm
As shown in Fig. 2, the air bearing step, depth 1
Grinding was performed to 0 μm and a width of 100 μm. 80, 1
10, 145, 160 mm / min, notches 5, 10,
There were four types of 15 and 20 μm each. When the feed rate was 100 or less, the efficiency was poor, and when the feed rate was 160, chipping was likely to occur, which was not suitable. If the cut is 20 μm, chipping is likely to occur, which is not suitable. When the feed was 110 and 145 and the cuts were 5, 10 and 15, the surface roughness was 50Å and chipping at the corners of the step was small, and a good air bearing could be obtained.
【０００７】[0007]
【発明の効果】本発明の研削砥石と研削方法により、低
浮上型のスライダ−に必要なエアベアリング両側の段差
を効率的に研削することが可能となる。また、段差の底
部と段差の側面とのなす隅部のＲ形状を小さく、かつ段
差の底部と段差の側面とのなす角度を９０度に近くする
ことが可能となり、性能の良好な定浮上型のスライダ−
を得ることができる。With the grinding wheel and the grinding method of the present invention, it is possible to efficiently grind the steps on both sides of the air bearing, which are necessary for a low-flying slider. Further, the R shape of the corner formed by the bottom of the step and the side surface of the step can be made small, and the angle formed by the bottom of the step and the side surface of the step can be made close to 90 degrees. Slider
Can be obtained.
【図１】本発明の研削砥石を示す図である。FIG. 1 is a view showing a grinding wheel of the present invention.
【図２】本発明の研削砥石を用いた加工状態を示す図で
ある。FIG. 2 is a diagram showing a processing state using the grinding wheel of the present invention.
【図３】本発明を適用するスライダ−のエアベアリング
近傍を示す図である。FIG. 3 is a diagram showing the vicinity of an air bearing of a slider to which the present invention is applied.
【図４】従来の研削砥石を用いた加工状態を示す図であ
る。FIG. 4 is a diagram showing a processing state using a conventional grinding wheel.
【図５】従来のスライダ−のエアベアリング近傍を示す
図である。FIG. 5 is a view showing the vicinity of an air bearing of a conventional slider.
【図６】従来の研削砥石を示す図ある。FIG. 6 is a view showing a conventional grinding wheel.
【図７】浮上型磁気ヘッドを示す図である。FIG. 7 is a diagram showing a floating magnetic head.
【図８】ヘッドコアをスライダ−に固定する工程を示す
図である。FIG. 8 is a diagram showing a process of fixing the head core to the slider.
【図９】研削砥石を加工機に取付けた状態を示す図であ
る。FIG. 9 is a view showing a state in which a grinding wheel is attached to a processing machine.
１１ 研削砥石 １２ 砥石軸 １３ 台金 １４ 砥粒 ２１ スライダ− ２２ エアベアリング ２３ 砥粒 ２４ 台金 ２６ 段差底部 ２７ エアベアリング側面 ９１ 研削砥石 ９２ 研削砥石軸保持具 ９３ 加工機主軸 11 Grinding Wheel 12 Grinding Wheel Axis 13 Base Metal 14 Abrasive Grain 21 Slider-22 Air Bearing 23 Abrasive Grain 24 Base Metal 26 Step Bottom 27 Air Bearing Side 91 Grinding Wheel Spindle Holder 92 Grinding Wheel Spindle 93 Machining Machine Spindle
Claims (2)
ラミックで構成されたスライダ−を研削する砥石であっ
て、実質的に粒度が８以下の合成ダイヤモンドの砥粒を
集中度１２０％〜２００％で結合し、直径Ｄが２ｍｍ以
下、砥石軸保持具の端部からの突出し長さＬが０．４〜
５．０ｍｍ、直径Ｄと長さＬの比Ｄ／Ｌが０．４〜５．
０であることを特徴とするスライダ−用の研削砥石。1. A grindstone for grinding a slider made of non-magnetic ceramic used in a floating magnetic head, wherein abrasive grains of synthetic diamond having a grain size of 8 or less are substantially concentrated at 120% to 200%. , The diameter D is 2 mm or less, and the protruding length L from the end of the grindstone shaft holder is 0.4 to
5.0 mm, the ratio D / L of the diameter D to the length L is 0.4 to 5.
A grinding wheel for a slider, which has a value of 0.
スライダ−の加工方法であって、実質的に粒度が８以下
の合成ダイヤモンドの砥粒を集中度１２０％〜２００％
で結合し、直径Ｄが２ｍｍ以下、砥石軸保持具の端部か
らの突出し長さＬが０．４〜５．０ｍｍ、直径Ｄと長さ
Ｌの比Ｄ／Ｌが０．４〜５．０ｍｍである研削砥石を用
い、 砥石回転数：１００，０００〜３００，０００ｒｐｍ、 送り：１００〜１５０ｍｍ／ｍｉｎ 切り込み：１〜１５μｍ の条件により研削加工することを特徴とするスライダ−
の加工方法。2. A method for processing a non-magnetic slider used in a floating magnetic head, wherein abrasive grains of synthetic diamond having a grain size of 8 or less are substantially concentrated to 120% to 200%.
The diameter D is 2 mm or less, the protruding length L from the end of the grindstone shaft holder is 0.4 to 5.0 mm, and the ratio D / L of the diameter D to the length L is 0.4 to 5. Using a grinding wheel of 0 mm, the number of rotations of the wheel is 100,000 to 300,000 rpm, the feed is 100 to 150 mm / min, and the depth of cut is 1 to 15 μm.
Processing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25623591A JPH0596470A (en) | 1991-10-03 | 1991-10-03 | Grinding wheel and grinding method for slider |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25623591A JPH0596470A (en) | 1991-10-03 | 1991-10-03 | Grinding wheel and grinding method for slider |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0596470A true JPH0596470A (en) | 1993-04-20 |
Family
ID=17289813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25623591A Pending JPH0596470A (en) | 1991-10-03 | 1991-10-03 | Grinding wheel and grinding method for slider |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0596470A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012145284A3 (en) * | 2011-04-18 | 2012-12-27 | 3M Innovative Properties Company | Resin bonded grinding wheel |
| US10125359B2 (en) | 2007-10-25 | 2018-11-13 | Revalesio Corporation | Compositions and methods for treating inflammation |
-
1991
- 1991-10-03 JP JP25623591A patent/JPH0596470A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10125359B2 (en) | 2007-10-25 | 2018-11-13 | Revalesio Corporation | Compositions and methods for treating inflammation |
| WO2012145284A3 (en) * | 2011-04-18 | 2012-12-27 | 3M Innovative Properties Company | Resin bonded grinding wheel |
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