JPH0621234Y2 - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPH0621234Y2
JPH0621234Y2 JP401988U JP401988U JPH0621234Y2 JP H0621234 Y2 JPH0621234 Y2 JP H0621234Y2 JP 401988 U JP401988 U JP 401988U JP 401988 U JP401988 U JP 401988U JP H0621234 Y2 JPH0621234 Y2 JP H0621234Y2
Authority
JP
Japan
Prior art keywords
reaction
substrate
semiconductor manufacturing
manufacturing apparatus
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP401988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01108925U (2
Inventor
秀樹 古森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP401988U priority Critical patent/JPH0621234Y2/ja
Publication of JPH01108925U publication Critical patent/JPH01108925U/ja
Application granted granted Critical
Publication of JPH0621234Y2 publication Critical patent/JPH0621234Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP401988U 1988-01-14 1988-01-14 半導体製造装置 Expired - Lifetime JPH0621234Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP401988U JPH0621234Y2 (ja) 1988-01-14 1988-01-14 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP401988U JPH0621234Y2 (ja) 1988-01-14 1988-01-14 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH01108925U JPH01108925U (2) 1989-07-24
JPH0621234Y2 true JPH0621234Y2 (ja) 1994-06-01

Family

ID=31206160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP401988U Expired - Lifetime JPH0621234Y2 (ja) 1988-01-14 1988-01-14 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0621234Y2 (2)

Also Published As

Publication number Publication date
JPH01108925U (2) 1989-07-24

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