JPH062202Y2 - 電子銃装置 - Google Patents

電子銃装置

Info

Publication number
JPH062202Y2
JPH062202Y2 JP6309888U JP6309888U JPH062202Y2 JP H062202 Y2 JPH062202 Y2 JP H062202Y2 JP 6309888 U JP6309888 U JP 6309888U JP 6309888 U JP6309888 U JP 6309888U JP H062202 Y2 JPH062202 Y2 JP H062202Y2
Authority
JP
Japan
Prior art keywords
electron beam
electron gun
electron
evaporated
beam sweep
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6309888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01166954U (cs
Inventor
久 山本
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP6309888U priority Critical patent/JPH062202Y2/ja
Publication of JPH01166954U publication Critical patent/JPH01166954U/ja
Application granted granted Critical
Publication of JPH062202Y2 publication Critical patent/JPH062202Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6309888U 1988-05-13 1988-05-13 電子銃装置 Expired - Lifetime JPH062202Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6309888U JPH062202Y2 (ja) 1988-05-13 1988-05-13 電子銃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6309888U JPH062202Y2 (ja) 1988-05-13 1988-05-13 電子銃装置

Publications (2)

Publication Number Publication Date
JPH01166954U JPH01166954U (cs) 1989-11-22
JPH062202Y2 true JPH062202Y2 (ja) 1994-01-19

Family

ID=31288627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6309888U Expired - Lifetime JPH062202Y2 (ja) 1988-05-13 1988-05-13 電子銃装置

Country Status (1)

Country Link
JP (1) JPH062202Y2 (cs)

Also Published As

Publication number Publication date
JPH01166954U (cs) 1989-11-22

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