JPH0622043B2 - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH0622043B2 JPH0622043B2 JP8160685A JP8160685A JPH0622043B2 JP H0622043 B2 JPH0622043 B2 JP H0622043B2 JP 8160685 A JP8160685 A JP 8160685A JP 8160685 A JP8160685 A JP 8160685A JP H0622043 B2 JPH0622043 B2 JP H0622043B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- head
- tip portion
- glass
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 58
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 24
- 239000004408 titanium dioxide Substances 0.000 claims description 12
- 239000010410 layer Substances 0.000 claims description 11
- 239000000696 magnetic material Substances 0.000 claims description 10
- 239000002344 surface layer Substances 0.000 claims description 6
- 230000004075 alteration Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 18
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 18
- 239000000919 ceramic Substances 0.000 description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 229910000859 α-Fe Inorganic materials 0.000 description 9
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、情報の記録、再生を行うための磁気ヘッドに
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head for recording and reproducing information.
従来の技術 従来の垂直磁気ヘッドは、例えば特公昭５７−１７２８
１号公報や特開昭５８−１３９３２３号公報に示されて
いるような構成が採られており、その概要を第４図によ
って説明すると、第１の基板１０１はアルミナ、チタン
カーバイドからなる非磁性基板１０２上に高透磁率膜か
らなる主磁極膜１０３を形成している。第２の基板１０
４はフェライト基板１０５と記録媒体（図示せず）と接
触する非磁性材料製のヘッド先端部１０６とより形成さ
れている。この第１の基板１０１の主磁極膜１０３が第
２の基板１０４のフェライト基板１０５とヘッド先端部
１０６に接着され、これら第１と第２の基板１０１と１
０４に記録再生用のコイル（図示せず）が施されてい
る。この様な構造の磁気ヘッドにおいて、第２の基板１
０４を製造するにはヘッド先端部１０６はその非磁性材
料として耐摩耗性の良いアルミナとチタンカーバイドの
焼結体であるセラミックスを用い、このヘッド先端部１
０６とフェライト基板１０５とを有機物の接着剤、例え
ばエポキシ樹脂等を用いて接着していた。2. Description of the Related Art A conventional perpendicular magnetic head is disclosed in, for example, Japanese Patent Publication No. 57-1728.
1 and Japanese Unexamined Patent Publication (Kokai) No. 58-139323, the structure of which is described with reference to FIG. 4. The first substrate 101 is a non-magnetic material composed of alumina and titanium carbide. A main magnetic pole film 103 made of a high magnetic permeability film is formed on a substrate 102. Second substrate 10
Reference numeral 4 is composed of a ferrite substrate 105 and a head tip portion 106 made of a non-magnetic material that comes into contact with a recording medium (not shown). The main magnetic pole film 103 of the first substrate 101 is adhered to the ferrite substrate 105 of the second substrate 104 and the head tip portion 106, and the first and second substrates 101 and 1
04 is provided with a recording / reproducing coil (not shown). In the magnetic head having such a structure, the second substrate 1
In order to manufacture No. 04, the head tip portion 106 is made of a ceramic which is a sintered body of alumina and titanium carbide having good wear resistance as the non-magnetic material.
06 and the ferrite substrate 105 were adhered to each other using an organic adhesive such as an epoxy resin.
発明が解決しようとする問題点 しかしながら上記従来の磁気ヘッドのようにフェライト
基板１０５とアルミナ、チタンカーバイドを主成分とす
るセラミックス基板よりなるヘッド先端部１０６との接
着に有機物の接着剤を用いると、接着強度が弱く、磁気
ヘッド加工時に剥れたり、又耐環境試験では接着部に段
作が生じたりして実用上に問題があった。一方、無機質
のガラス接着手段を用いると、接着強度が強く、耐候性
も良いことが実用の磁気ヘッドから実証されているが、
上記アルミナ、チタンカーバイドを主成分とするヘッド
先端部１０６とフェライト基板１０５の接着はガラス接
着手段を用いることができなかった。それはアルミナ、
チタンカーバイド基板とガラスとはいわゆるぬれ性がな
く、なじまないばかりでなく、基板からガスが発生し、
ガラスとの密着性を妨げているからである。Problems to be Solved by the Invention However, when an organic adhesive is used to bond the ferrite substrate 105 to the head tip portion 106 made of a ceramic substrate containing alumina and titanium carbide as main components, as in the conventional magnetic head described above, There was a problem in practical use because the adhesive strength was weak and the adhesive peeled off during processing of the magnetic head, and in the environment resistance test there was a step at the bonded part. On the other hand, when an inorganic glass bonding means is used, it has been proved from a practical magnetic head that the bonding strength is strong and the weather resistance is good.
A glass bonding means could not be used to bond the head tip portion 106 mainly composed of alumina and titanium carbide to the ferrite substrate 105. It is alumina,
The titanium carbide substrate and the glass do not have so-called wettability and do not fit well, and gas is generated from the substrate,
This is because the adhesion with the glass is hindered.
そこで、本発明は確実に接着することができるばかりで
なく、耐摩耗性を向上させることができ、しかも耐候性
を向上させ、信頼性を向上させることができるようにし
た磁気ヘッドを提供しようとするものである。Therefore, the present invention is intended to provide a magnetic head not only capable of reliably adhering, but also capable of improving wear resistance, weather resistance, and reliability. To do.
問題点を解決するための手段 そして上記問題点を解決するための本発明の磁気ヘッド
は、非磁性材から形成された第１の基板と、磁性材から
形成された第２の基板と、前記第１の基板と前記第２の
基板との間に設けられた非磁性材から形成されたヘッド
先端部と、前記第１の基板と前記ヘッド先端部との間に
設けられた主磁極膜とを有する磁気ヘッドであって、前
記ヘッド先端部の非磁性材は、チタンカーバイドを含む
セラミックス材であり、前記ヘッド先端部の前記第２の
基板側の表面層に変質により二酸化チタン層が形成さ
れ、前記ヘッド先端部の二酸化チタン層が前記第２の基
板にガラス接着されたものである。Means for Solving Problems The magnetic head of the present invention for solving the above problems includes a first substrate formed of a non-magnetic material, a second substrate formed of a magnetic material, and A head tip portion formed of a non-magnetic material provided between the first substrate and the second substrate, and a main magnetic pole film provided between the first substrate and the head tip portion. And a titanium dioxide layer is formed on the surface layer of the head tip portion on the side of the second substrate due to alteration. The titanium dioxide layer at the tip of the head is glass-bonded to the second substrate.
作 用 本発明は、上記構成により、予めチタンカーバイドを含
むセラミックス基板を電気炉中で熱処理することにより
基板の成分中の炭化チタン(TiC)を酸化反応させ、炭酸
ガス(CO2)と二酸化チタン(TiO2)に変化させてその表面
に二酸化チタン層を形成することができる。この時生成
された二酸化チタンはガラスと融着し易い物質であるの
で、基板とのガラス接着を容易に行なうことができ、又
基板から発生する炭酸ガス(CO2)は予め熱処理温度をガ
ラス融着温度よりも高温で処理することにより十分出し
切っておくことができ、これによりガラス接着時に新た
に発生するガスを未然に防止し、密着性の良いガラス接
着を行なうことができる。Operation According to the present invention, the ceramic substrate containing titanium carbide is heat-treated in an electric furnace in advance with the above-described structure to cause an oxidation reaction of titanium carbide (TiC) in the components of the substrate, and carbon dioxide gas (CO 2 ) and titanium dioxide. It can be changed to (TiO 2 ) to form a titanium dioxide layer on its surface. Since the titanium dioxide generated at this time is a substance that easily fuses with the glass, it is possible to easily adhere the glass to the substrate, and the carbon dioxide gas (CO 2 ) generated from the substrate has a heat treatment temperature that is set beforehand to the glass melt. By treating at a temperature higher than the bonding temperature, the gas can be sufficiently discharged, and thereby a gas newly generated at the time of glass bonding can be prevented and glass bonding with good adhesion can be performed.
実施例 以下、本発明の一実施例について図面を用いて説明す
る。第１図は記録媒体（図示せず）と接触するヘッド先
端部１とフェライト基板２よりなる第２の基板３の製造
工程説明用の概略図である。ヘッド先端部１はアルミ
ナ、チタンカーバイドを含むセラミックス基板４が空気
中又は酸化性雰囲気中において９００℃で３０分間、熱
処理され、基板４の表面に変質により薄い二酸化チタン
層５が形成されている。この二酸化チタン層５の表面に
はガラス６が塗布法又はスパッタリング法により形成さ
れている。一方、フェライト基板２はその表面にガラス
７が塗布法又はスパッタリング法により形成されてい
る。これらガラス６，７の接着面は滑らかに仕上げ研摩
され、この接着面が付き合わされ、ガラス融着温度の７
５０℃で接着されている。Embodiment An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram for explaining a manufacturing process of a second substrate 3 including a head tip portion 1 and a ferrite substrate 2 which are in contact with a recording medium (not shown). A ceramic substrate 4 containing alumina and titanium carbide is heat-treated at 900 ° C. for 30 minutes in the air or in an oxidizing atmosphere at the head tip portion 1 to form a thin titanium dioxide layer 5 on the surface of the substrate 4 due to alteration. Glass 6 is formed on the surface of the titanium dioxide layer 5 by a coating method or a sputtering method. On the other hand, the ferrite substrate 2 has glass 7 formed on its surface by a coating method or a sputtering method. The adhesive surfaces of these glasses 6 and 7 are smoothly finished and polished, and the adhesive surfaces are brought into contact with each other and the glass fusion temperature of 7 is applied.
Bonded at 50 ° C.
このようにガラス接着されたアルミナ、チタンカーバイ
ドを含むセラミックス基板４よりなるヘッド先端部１
と、フェライト基板２よりなる第２の基板３はエポキシ
ン樹脂等の有機物の接着に比べて接着力が強く、耐環境
試験によっても接着部に段差を生じることなく強固に接
着された複合基板となった。A head tip portion 1 made of a ceramic substrate 4 containing alumina and titanium carbide bonded to glass in this manner
Then, the second substrate 3 composed of the ferrite substrate 2 has a stronger adhesive force than the adhesive of an organic substance such as an epoxy resin, and is a composite substrate that is firmly adhered without causing a step in the adhered portion even in the environment resistance test. It was
上記の如くアルミナ、チタンカーバイドを含むセラミッ
クス基板４を熱処理することにより表面層がTiCからTiO
2に変質する実験結果をＸ線回折データから示す。第２
図(a)，(b)はそれぞれアルミナ、チタンカーバイドを含
むセラミックス基板４の熱処理前、熱処理後の表面のＸ
線回折のパターンの一部である。第２図(a)では基板４
の主成分であるAl2O3のピーク（イ、ロ、ニ）とTiCのピ
ーク(ハ)のみが観測されている。第２図(b)ではAl2O3の
ピーク（イ′、ロ′、ニ′）の値は熱処理前とほとんど
変わっていない。それに対してTiCのピーク(ハ′)値は
減少し、変わりにTiO2のピーク(ホ)が現われ、明らかに
表面層がTiO2に変化していることを示している。By heat treating the ceramic substrate 4 containing alumina and titanium carbide as described above, the surface layer is changed from TiC to TiO 2.
The result of the experiment that changes to 2 is shown from the X-ray diffraction data. Second
Figures (a) and (b) respectively show the X of the surface of the ceramic substrate 4 containing alumina and titanium carbide before and after the heat treatment.
It is a part of the pattern of line diffraction. Substrate 4 in FIG. 2 (a)
Only the peaks of Al 2 O 3 (a, b, and d) and the peak of TiC (c), which are the main components of, are observed. In FIG. 2 (b), the values of Al 2 O 3 peaks (a ', b', d ') are almost the same as those before the heat treatment. On the other hand, the peak (c ') value of TiC decreased, and the peak (v) of TiO 2 appeared instead, clearly indicating that the surface layer was changed to TiO 2 .
第３図は基板４の熱処理を行なったサンプルを少しずつ
研摩し、その時のＸ線回折のTiO2のピークをAl2O3のピ
ークで規格化し、深さ方向の分布を示す。この第３図か
らTiO2の変質層５は基板４の表面層のみの数μｍ以内ま
でであることが明らかである。このことは、ガラス接着
に寄与している層は数μｍ以内であり、他の部分は全く
変質してないことを意味している。即ち、アルミナ、チ
タンカーバイドを含むセラミックス基板４の本来の高硬
度、緻密性等の特性が損なわれないでガラス密着できる
ことを表わしている。FIG. 3 shows the distribution in the depth direction by gradually polishing the heat-treated sample of the substrate 4 and normalizing the TiO 2 peak of the X-ray diffraction at that time with the Al 2 O 3 peak. From this FIG. 3, it is clear that the altered layer 5 of TiO 2 is within several μm of only the surface layer of the substrate 4. This means that the layer contributing to the glass adhesion is within several μm and the other parts are not deteriorated at all. That is, it means that the ceramic substrate 4 containing alumina and titanium carbide can adhere to glass without impairing the original characteristics such as high hardness and denseness.
上記のように構成した第２の基板３を非磁性基板に主磁
極膜を形成した第１の基板（図示せず）と接着すること
により磁気ヘッドを構成することができる。A magnetic head can be constructed by bonding the second substrate 3 constructed as described above to a first substrate (not shown) in which a main magnetic pole film is formed on a non-magnetic substrate.
発明の効果 以上の説明より明らかなように本発明によれば、ヘッド
先端部は少なくともチタンカーバイドを含むセラミック
ス基板の少なくとも一部に変質により二酸化チタン層を
形成しているので、このヘッド先端部と基板とをガラス
接着を行うことができ、しかもガスの発生を阻止するこ
とができるので、接着強度を向上させることができる。
又ヘッド先端部を構成するセラミックス基板は表面層の
みしか変質しないので、本来の材料特性を変えないでガ
ラス接着できるので、ヘッド耐摩耗性の良好なヘッドを
得ることができるばかりでなく、ヘッド加工時に接着部
の剥がれがなく、しかも耐候性を向上させ、信頼性の高
いヘッドを得ることができる。EFFECTS OF THE INVENTION As is apparent from the above description, according to the present invention, the head tip portion forms the titanium dioxide layer by alteration on at least a part of the ceramic substrate containing at least titanium carbide. Since the glass can be bonded to the substrate and the generation of gas can be prevented, the bonding strength can be improved.
In addition, since the ceramics substrate that constitutes the head tip portion only deteriorates the surface layer, glass bonding can be performed without changing the original material properties, so that not only a head with good wear resistance can be obtained, but also head processing At times, there is no peeling of the adhesive portion, the weather resistance is improved, and a highly reliable head can be obtained.
第１図は本発明の磁気ヘッドの一実施例の製造工程図、
第２図(a)，(b)はそれぞれヘッド先端部に用いる基板の
熱処理前と熱処理後の表面のＸ線回折図、第３図はヘッ
ド先端部に用いる基板の熱処理後の二酸化チタンの深さ
方向の分布を示す図、第４図は従来の垂直磁気ヘッドの
代表的なヘッドチップ部の斜視図である。 １……ヘッド先端部、２……フェライト基板、４……チ
タンカーバイドを含むセラミックス基板、５……二酸化
チタン層、６，７……ガラス。FIG. 1 is a manufacturing process diagram of an embodiment of a magnetic head of the present invention,
2 (a) and 2 (b) are X-ray diffraction patterns of the surface of the substrate used for the head tip before and after the heat treatment, and FIG. 3 is the depth of titanium dioxide after the heat treatment of the substrate used for the head tip. FIG. 4 is a perspective view of a typical head chip portion of a conventional perpendicular magnetic head, showing a distribution in the depth direction. 1 ... Head tip part, 2 ... Ferrite substrate, 4 ... Ceramic substrate containing titanium carbide, 5 ... Titanium dioxide layer, 6, 7 ... Glass.
Claims (1)
性材から形成された第２の基板と、前記第１の基板と前
記第２の基板との間に設けられた非磁性材から形成され
たヘッド先端部と、前記第１の基板と前記ヘッド先端部
との間に設けられた主磁極膜とを有する磁気ヘッドであ
って、前記ヘッド先端部の非磁性材は、チタンカーバイ
ドを含むセラミックス材であり、前記ヘッド先端部の前
記第２の基板側の表面層に変質により二酸化チタン層が
形成され、前記ヘッド先端部の二酸化チタン層が前記第
２の基板にガラス接着されている磁気ヘッド。1. A first substrate made of a non-magnetic material, a second substrate made of a magnetic material, and a non-magnetic material provided between the first substrate and the second substrate. A magnetic head having a head tip portion formed of a material, and a main magnetic pole film provided between the first substrate and the head tip portion, wherein the non-magnetic material of the head tip portion is titanium. A ceramic material containing carbide, wherein a titanium dioxide layer is formed on the surface layer of the head tip portion on the side of the second substrate by alteration, and the titanium dioxide layer of the head tip portion is glass-bonded to the second substrate. Magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8160685A JPH0622043B2 (en) | 1985-04-17 | 1985-04-17 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8160685A JPH0622043B2 (en) | 1985-04-17 | 1985-04-17 | Magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61240410A JPS61240410A (en) | 1986-10-25 |
| JPH0622043B2 true JPH0622043B2 (en) | 1994-03-23 |
Family
ID=13750973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8160685A Expired - Fee Related JPH0622043B2 (en) | 1985-04-17 | 1985-04-17 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622043B2 (en) |
-
1985
- 1985-04-17 JP JP8160685A patent/JPH0622043B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61240410A (en) | 1986-10-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |