JPH03250407A - Production of laminated type magnetic head - Google Patents

Abstract

PURPOSE:To enhance the wettability with glass so as to prevent the generation of bubbles and to prevent the reaction with glass as well by heat treating composite ceramic substrates contg. a nonoxide under prescribed conditions, and then forming magnetic films. CONSTITUTION:The substrates 1 consisting of the composite ceramic material contg. the nonoxide are used at the time of producing a lamination type magnetic head having a core structure in which both sides of magnetic material cores are held in place by the nonmagnetic substrates 1. These substrates are used after being heat treated at 700 to 1,000 deg.C in the atm. or oxygen-contg. atmosphere. For example, the lamination type magnetic head is produced by using the substrates 1 consisting of Al2O3-TiC, forming a magnetic film 2, diffusion preventive films 3 and glass films 4 successively by sputtering, etc., on the substrates 1 after a heat treatment of the above conditions and a washing stage, superposing several sheets of such substrates on each other and heating the substrates to form the laminate.

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to a technique for manufacturing a laminated magnetic head having a core structure in which a magnetic core is sandwiched between non-magnetic substrates.

Conventional Danki 1 Traditionally, heads compatible with high-density recording media have a so-called sandwich core structure in which magnetic alloys such as permalloy and sendust are formed into thin plates of approximately 50 μm or less and sandwiched from both sides by non-magnetic substrates with good wear resistance. A stacked head has been put into practical use.

A problem when manufacturing this laminated head is the adhesion between the magnetic material and the nonmagnetic substrate. Organic adhesives are easy to handle and relatively easy to heat to cure, but an adhesive layer of several tens of micrometers is required to obtain practical strength.
Reliability against changes in temperature and humidity after bonding is poor.

Therefore, at present, bonding using glass, which is an inorganic adhesive, is used as a highly reliable bond.

In addition, hard disk heads and the like require wear resistance, and it is desired to use composite ceramics with excellent wear resistance, such as Al2O2-TIC ceramics, for nonmagnetic substrates that sandwich magnetic materials.

Conventionally, as shown in Fig. 1, a method for manufacturing a laminated magnetic head involves forming a magnetic film, a diffusion prevention film, and a glass film serving as an adhesive on a nonmagnetic substrate by sputtering, etc. Magnetic heads were manufactured by heating sheets of laminated glass to a working point and forming a laminate.

However, when composite ceramics are used for non-magnetic substrates, if the composite ceramics contains non-oxides, the non-oxides have poor wettability with glass, which serves as an adhesive, and bubbles may form in those areas. There are cases.

Further, when the non-oxide contained in the glass is a carbide, as in Al203-TIC ceramics, a reaction occurs between the carbide and the glass, resulting in bubbles being generated and the glass losing its original properties. When using composite ceramics as a non-magnetic substrate, it is necessary to simply prevent diffusion between the substrate and the glass (in order to prevent carbide reactions, an oxide film or a metal film such as Cr or Pt with a thickness of several μm should be placed between the substrate and the glass). I had to pinch it.

- In order to solve the above-mentioned problem of bubble generation, the present invention adopts a technical means of forming a magnetic film after heat-treating a non-magnetic substrate in an oxidizing atmosphere before forming a magnetic film. It is.

1. In the present invention, the non-magnetic substrate is heat-treated in an oxidizing atmosphere in advance, so that the non-oxide on the surface of the non-magnetic substrate is oxidized, and the wettability of the non-oxide and the adhesive glass is improved. The badness will be resolved. In addition, only the surface of carbide is oxidized, which prevents it from reacting with glass, making it possible to achieve bubble-free and high bonding strength without interposing an oxide film or metal film such as Or or Pt between the non-magnetic substrate and glass. A core laminate can be obtained.

As an example of the present invention, Al203-Tic was applied to a non-magnetic substrate.
A case of a magnetic head having a core laminated body using ceramics will be explained.

Aj20z-TIC ceramic substrate is made of Al203 (
When TIG (~30 wt%) is dispersed in ~7°wt%) (dispersion strengthened type) ceramics.

For this reason, there is a difference in the wettability of Al203 and TIC to glass, or because TIC is a carbide, it has the property of reacting with glass and producing bubbles.

Therefore, in order to manufacture a multilayer head using an Al203-Tic ceramic substrate as a nonmagnetic substrate, it is necessary to sandwich a film of oxide or the like with good wettability to the glass between the glass and the substrate.

While investigating the properties of A1□03-TIG ceramics, etc., it was found that when the substrate is heated to 700°C or higher in the atmosphere, only the TLC on the surface is oxidized to TiO□. A1゜03(113), Tic(20
0) and Ti09(110) as curve I
, II and ■ are shown in FIG.

Taking advantage of this fact, A/20G before forming the magnetic film
- Heat-treat the Tic ceramic substrate in advance at 700°C or higher in the atmosphere. Thereafter, through a cleaning process, a magnetic film, a diffusion prevention film, and a glass film are formed by sputtering or the like, and several of the substrates are stacked and heated to a glass working point to form a laminate and manufacture a laminate type magnetic head.

By heating the Al203-TiG ceramic substrate to 700°C or higher in advance in the atmosphere, TjC on the surface of the Al203-TiG ceramic substrate is oxidized to TjO□, which suppresses the reaction between the glass and TIC, and prevents the generation of bubbles. Bubbles and high-strength laminated heads can be manufactured with good yield.

Although the upper limit of the heating temperature cannot necessarily be clearly defined, a temperature up to about 1000° C. is applicable because it does not impair the inherent properties of the ceramic substrate (oxidation of only the surface of the ceramic substrate is suppressed).

In the above embodiment, heat treatment was performed in the atmosphere, but the present invention is not limited to this embodiment, and any oxygen-containing atmosphere that oxidizes the surface of the ceramic substrate may be used.

As is clear from the above explanation, according to the present invention, when a composite ceramic containing a non-oxide is used as a non-magnetic substrate, by heat-treating the non-magnetic substrate in advance, the bond between the substrate and glass can be improved. It is possible to manufacture a laminated magnetic head in which reactions can be suppressed, the core structure can be simplified without sandwiching oxide films or metal films, and the bonding strength is high and reliability is high.

[Brief explanation of drawings]

FIG. 1 shows Ar203 for explaining one embodiment of the present invention.
-A at each temperature of Tic ceramic substrate! . 03
．． The X-ray diffraction intensity characteristic curves of Tic and TiO3 are shown in FIG. 2, and FIG. 1...Nonmagnetic substrate, 4...Glass film, ■...A! X-ray diffraction intensity of 20G (113),
■・・・X-ray diffraction intensity of TiC (200), ■・
...X-ray diffraction intensity of TiC2 (110).

Claims (1)

[Claims] In manufacturing a laminated magnetic head having a core structure in which a magnetic core is sandwiched between non-magnetic substrates on both sides, the non-magnetic substrate is made of a composite ceramic material containing a non-oxide, and the magnetic head is manufactured in air or in an oxygen-containing atmosphere. , 700-10
A method for manufacturing a magnetic head, characterized in that heat treatment is performed in advance at 00°C.