JPH0623577Y2 - 液相エピタキシャル成長装置 - Google Patents

液相エピタキシャル成長装置

Info

Publication number
JPH0623577Y2
JPH0623577Y2 JP1988003180U JP318088U JPH0623577Y2 JP H0623577 Y2 JPH0623577 Y2 JP H0623577Y2 JP 1988003180 U JP1988003180 U JP 1988003180U JP 318088 U JP318088 U JP 318088U JP H0623577 Y2 JPH0623577 Y2 JP H0623577Y2
Authority
JP
Japan
Prior art keywords
slider
boat
epitaxial growth
liquid phase
phase epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988003180U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01110266U (sr
Inventor
智郁 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1988003180U priority Critical patent/JPH0623577Y2/ja
Publication of JPH01110266U publication Critical patent/JPH01110266U/ja
Application granted granted Critical
Publication of JPH0623577Y2 publication Critical patent/JPH0623577Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1988003180U 1988-01-14 1988-01-14 液相エピタキシャル成長装置 Expired - Lifetime JPH0623577Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988003180U JPH0623577Y2 (ja) 1988-01-14 1988-01-14 液相エピタキシャル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988003180U JPH0623577Y2 (ja) 1988-01-14 1988-01-14 液相エピタキシャル成長装置

Publications (2)

Publication Number Publication Date
JPH01110266U JPH01110266U (sr) 1989-07-25
JPH0623577Y2 true JPH0623577Y2 (ja) 1994-06-22

Family

ID=31204584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988003180U Expired - Lifetime JPH0623577Y2 (ja) 1988-01-14 1988-01-14 液相エピタキシャル成長装置

Country Status (1)

Country Link
JP (1) JPH0623577Y2 (sr)

Also Published As

Publication number Publication date
JPH01110266U (sr) 1989-07-25

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