JPH0632680Y2 - 半導体製造装置の加熱炉 - Google Patents

半導体製造装置の加熱炉

Info

Publication number
JPH0632680Y2
JPH0632680Y2 JP1989088237U JP8823789U JPH0632680Y2 JP H0632680 Y2 JPH0632680 Y2 JP H0632680Y2 JP 1989088237 U JP1989088237 U JP 1989088237U JP 8823789 U JP8823789 U JP 8823789U JP H0632680 Y2 JPH0632680 Y2 JP H0632680Y2
Authority
JP
Japan
Prior art keywords
heating furnace
insertion hole
coating material
semiconductor manufacturing
coat layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989088237U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327039U (da
Inventor
隆 金子
増雄 鈴木
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1989088237U priority Critical patent/JPH0632680Y2/ja
Publication of JPH0327039U publication Critical patent/JPH0327039U/ja
Application granted granted Critical
Publication of JPH0632680Y2 publication Critical patent/JPH0632680Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP1989088237U 1989-07-27 1989-07-27 半導体製造装置の加熱炉 Expired - Lifetime JPH0632680Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989088237U JPH0632680Y2 (ja) 1989-07-27 1989-07-27 半導体製造装置の加熱炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989088237U JPH0632680Y2 (ja) 1989-07-27 1989-07-27 半導体製造装置の加熱炉

Publications (2)

Publication Number Publication Date
JPH0327039U JPH0327039U (da) 1991-03-19
JPH0632680Y2 true JPH0632680Y2 (ja) 1994-08-24

Family

ID=31637860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989088237U Expired - Lifetime JPH0632680Y2 (ja) 1989-07-27 1989-07-27 半導体製造装置の加熱炉

Country Status (1)

Country Link
JP (1) JPH0632680Y2 (da)

Also Published As

Publication number Publication date
JPH0327039U (da) 1991-03-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term