JPH0640321Y2 - アキュムレータ - Google Patents

アキュムレータ

Info

Publication number
JPH0640321Y2
JPH0640321Y2 JP1987060173U JP6017387U JPH0640321Y2 JP H0640321 Y2 JPH0640321 Y2 JP H0640321Y2 JP 1987060173 U JP1987060173 U JP 1987060173U JP 6017387 U JP6017387 U JP 6017387U JP H0640321 Y2 JPH0640321 Y2 JP H0640321Y2
Authority
JP
Japan
Prior art keywords
diaphragm
thin film
metal thin
gas
resin member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987060173U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63166702U (da
Inventor
順一 江村
陽 三根
Original Assignee
株式会社ユニシアジェックス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ユニシアジェックス filed Critical 株式会社ユニシアジェックス
Priority to JP1987060173U priority Critical patent/JPH0640321Y2/ja
Publication of JPS63166702U publication Critical patent/JPS63166702U/ja
Application granted granted Critical
Publication of JPH0640321Y2 publication Critical patent/JPH0640321Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
  • Diaphragms And Bellows (AREA)
JP1987060173U 1987-04-20 1987-04-20 アキュムレータ Expired - Lifetime JPH0640321Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987060173U JPH0640321Y2 (ja) 1987-04-20 1987-04-20 アキュムレータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987060173U JPH0640321Y2 (ja) 1987-04-20 1987-04-20 アキュムレータ

Publications (2)

Publication Number Publication Date
JPS63166702U JPS63166702U (da) 1988-10-31
JPH0640321Y2 true JPH0640321Y2 (ja) 1994-10-19

Family

ID=30892349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987060173U Expired - Lifetime JPH0640321Y2 (ja) 1987-04-20 1987-04-20 アキュムレータ

Country Status (1)

Country Link
JP (1) JPH0640321Y2 (da)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074361Y2 (ja) * 1988-12-16 1995-02-01 エヌオーケー株式会社 ダイアフラム
JP2009293507A (ja) * 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ

Also Published As

Publication number Publication date
JPS63166702U (da) 1988-10-31

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