JPH064306Y2 - Physical quantity conversion device - Google Patents
Physical quantity conversion deviceInfo
- Publication number
- JPH064306Y2 JPH064306Y2 JP1986149688U JP14968886U JPH064306Y2 JP H064306 Y2 JPH064306 Y2 JP H064306Y2 JP 1986149688 U JP1986149688 U JP 1986149688U JP 14968886 U JP14968886 U JP 14968886U JP H064306 Y2 JPH064306 Y2 JP H064306Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- sensor
- signal
- meter body
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
Description
【考案の詳細な説明】 〈産業上の利用分野〉 本考案は、差圧あるいは圧力などの物理量を電気信号に
変換して伝送する物理量変換装置に係り、特に、温度補
正をした高精度の物理量変換装置に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a physical quantity converter for converting a physical quantity such as a differential pressure or a pressure into an electric signal and transmitting the electric signal, and particularly to a temperature-corrected high-precision physical quantity. Regarding the converter.
〈従来の技術〉 従来の差圧／圧力変換器を例にとり説明する。差圧／圧
力変換器はメータボディ部とこのメータボディ部で検出
されたセンサー信号を信号処理する増幅器部とが一体に
構成されている。<Prior Art> A conventional differential pressure / pressure converter will be described as an example. The differential pressure / pressure converter is integrally configured with a meter body portion and an amplifier portion which processes the sensor signal detected by the meter body portion.
このメータボディ部にはプロセス流体の例えば差圧が封
入液を介して半導体で作られた差圧センサ部に伝えられ
る。差圧センサ部では伝えられた差圧に応じて差圧セン
サが歪みその抵抗値が変化する。この抵抗値の変化をブ
リッジ回路で検出した後、アナログ／デジタル変換器
（Ａ／Ｄ変換器）でデジタル信号に変換してマイクロコ
ンピュータで構成された増幅器部の信号処理回路に送ら
れる。この場合、同時にセンサチップの上に形成された
温度センサによりセンサの温度が検出され信号処理回路
に送られる。A differential pressure of the process fluid, for example, a differential pressure of the process fluid is transmitted to the meter body portion via a filled liquid to a differential pressure sensor portion made of a semiconductor. In the differential pressure sensor section, the differential pressure sensor is distorted according to the transmitted differential pressure and its resistance value changes. After the change in the resistance value is detected by the bridge circuit, it is converted into a digital signal by the analog / digital converter (A / D converter) and sent to the signal processing circuit of the amplifier section configured by the microcomputer. In this case, at the same time, the temperature of the sensor is detected by the temperature sensor formed on the sensor chip and sent to the signal processing circuit.
信号処理回路ではこの温度センサからの温度信号を用い
て差圧センサの出力に対する温度補償、差圧演算、およ
びリニアリティの補正などをして統一信号に変換して出
力する。The signal processing circuit uses the temperature signal from the temperature sensor to perform temperature compensation on the output of the differential pressure sensor, differential pressure calculation, correction of linearity, etc., and converts it into a unified signal for output.
〈考案が解決しようとする問題点〉 しかしながら、この様な従来の物理量変換装置は差圧セ
ンサのみの温度変動を補償する構成であり、信号処理回
路での温度変化については考慮されていなかった。従っ
て、差圧センサ部と周囲温度との間の温度差が大きい場
合には、これらの間に温度差が生じるため、従来の構成
では正確な温度補償をすることが出来ないという問題点
があった。<Problems to be Solved by the Invention> However, such a conventional physical quantity conversion device has a configuration that compensates for temperature fluctuations of only the differential pressure sensor, and does not consider temperature changes in the signal processing circuit. Therefore, when the temperature difference between the differential pressure sensor unit and the ambient temperature is large, a temperature difference occurs between them, so that there is a problem that the conventional configuration cannot perform accurate temperature compensation. It was
〈問題点を解決するための手段〉 この考案は、物理量の変化を電気信号に変換するセンサ
ーが収納されたメータボディ部と、このセンサーからの
センサー信号を信号処理回路で信号処理して統一信号に
変換する変換手段が収納され先のメータボディ部と嵌合
部を介して交換可能な状態で一体に結合される増幅器部
と、先のメータボディ部に設けられこのメータボディ部
の近傍の温度を検出する第１温度センサーと、先の増幅
器部の中に設けられこの増幅器部の内部温度を検出する
第２温度センサーとを具備し、これらの温度センサーの
出力を用いて先の信号処理回路で前記センサー信号に対
して温度補償をするようにしたものである。<Means for solving the problem> This invention is a unified signal by processing the sensor body from a sensor that converts a change in physical quantity into an electrical signal and the sensor signal from this sensor with a signal processing circuit. An amplifier unit that accommodates conversion means for converting into a unit and is integrally coupled to the previous meter body unit in a replaceable manner via a fitting unit, and the temperature near the meter body unit provided in the previous meter body unit. And a second temperature sensor provided in the previous amplifier section for detecting the internal temperature of the amplifier section, and using the outputs of these temperature sensors, the above signal processing circuit Then, the temperature of the sensor signal is compensated.
〈実施例〉 以下本考案の実施例について図面に基づき説明する。第
１図は本考案の１実施例を示す縦断面図である。<Embodiment> An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a vertical sectional view showing an embodiment of the present invention.
１０はメータボディ部であり、１１は増幅器部である。
メータボディ部１０と増幅器部１１は嵌合部１２で一体
に結合されて差圧変換器を構成している。Reference numeral 10 is a meter body portion, and 11 is an amplifier portion.
The meter body portion 10 and the amplifier portion 11 are integrally connected by a fitting portion 12 to form a differential pressure converter.
メータボディ部１０は円筒状の支持体１３に固定バンド
１４で固定されている。メータボディ部１０はその両端
に一対の角状の支持板１５，１６が配置され、これらの
内面側には円形の凹部１７，１８が形成されている。ま
た、。支持板１５，１６には紙面に直角に圧力を導入す
る圧力孔が凹部１７，１８に連通してあけられている。
凹部１７，１８には差圧カプセル１９が挿入され、その
週端面は密封して固定されている。差圧カプセル１９の
両面は受圧ダイヤフラム２０，２１で密封されこの中に
静電容量形の差圧センサ２２が内臓されている。差圧セ
ンサ２２からの静電容量信号は端子Ｔ１，Ｔ２で引き出
され増幅器部１１に送出される。更に嵌合部１２の付近
のメータボディ部１０には、メータボディ部１０の付近
の温度を検出する温度センサ２３が固定され、端子Ｔ３
でその温度信号が取り出される。The meter body portion 10 is fixed to a cylindrical support 13 with a fixing band 14. A pair of angular support plates 15 and 16 are arranged at both ends of the meter body portion 10, and circular recesses 17 and 18 are formed on the inner surface side of these. Also,. Pressure holes for introducing pressure at right angles to the paper surface are formed in the support plates 15 and 16 so as to communicate with the recesses 17 and 18.
A differential pressure capsule 19 is inserted into the recesses 17 and 18, and the week end face thereof is hermetically fixed. Both sides of the differential pressure capsule 19 are sealed with pressure receiving diaphragms 20 and 21, and a capacitance type differential pressure sensor 22 is incorporated therein. The capacitance signal from the differential pressure sensor 22 is extracted at the terminals T1 and T2 and sent to the amplifier section 11. Further, a temperature sensor 23 for detecting the temperature near the meter body portion 10 is fixed to the meter body portion 10 near the fitting portion 12, and the terminal T3 is provided.
The temperature signal is taken out at.
増幅器部１１の中には増幅器部１１の温度を検出する温
度センサ２４、マイクロプロセッサで構成された信号処
理回路などが内蔵されている。A temperature sensor 24 that detects the temperature of the amplifier unit 11, a signal processing circuit including a microprocessor, and the like are built in the amplifier unit 11.
第２図は第１図に示す差圧変換器の回路構成を示すブロ
ック図である。FIG. 2 is a block diagram showing a circuit configuration of the differential pressure converter shown in FIG.
差圧センサ２２からの静電容量信号は容量／デジタル変
換器２５でデジタル信号とされ、この信号はマイクロプ
ロセッサ２６に入力される。一方、温度センサ２３，２
４からの温度信号はスイッチＳＷを介して温度／デジタ
ル変換器２７でデジタル信号とされ、この信号はマイク
ロプロセッサ２６に入力される。マイクロプロセッサ２
６はスイッチＳＷを切り替えてそれぞれ温度信号を取り
込む。The capacitance signal from the differential pressure sensor 22 is converted into a digital signal by the capacitance / digital converter 25, and this signal is input to the microprocessor 26. On the other hand, the temperature sensors 23, 2
The temperature signal from 4 is converted into a digital signal by the temperature / digital converter 27 via the switch SW, and this signal is input to the microprocessor 26. Microprocessor 2
Reference numeral 6 switches the switch SW to capture a temperature signal.
このようにして、取り込んだ静電容量信号と温度信号と
を用いてマイクロプロセッサ２６は差圧演算、温度補
正、リイアリティ補正などの演算を施し、その演算結果
をデジタル／アナログ変換器２８で４〜２０ｍＡの統一
電流に変換して出力端２９に出力する。In this way, the microprocessor 26 uses the captured capacitance signal and temperature signal to perform calculations such as differential pressure calculation, temperature correction, and reality correction, and the calculation result is calculated by the digital / analog converter 28 from 4 to 4. The integrated current of 20 mA is converted and output to the output terminal 29.
今までの説明では、静電容量形の差圧伝送器について説
明したが、本考案はこれに限られることはなく例えば半
導体ストレンゲージ形或いは振動子形など各種のものに
用いられる。In the above description, the capacitance type differential pressure transmitter has been described, but the present invention is not limited to this and can be used in various types such as a semiconductor strain gauge type or a vibrator type.
〈考案の効果〉 以上、実施例と共に具体的に説明したように本考案によ
れば、メータボディ部と増幅器部との温度変動を独立に
検出して温度補正しているため、これらの間に温度差が
あってもその影響をうけない。<Effect of Device> As described above in detail with the embodiments, according to the present invention, the temperature fluctuations of the meter body part and the amplifier part are detected independently and the temperature is corrected between them. Even if there is a temperature difference, it is not affected.
また、メータボディ部と増幅器部との互換性をとる場合
にもメータボディ部のみ或いは増幅器部のみを単独で交
換しても精度の確保ができ、このため保守費用の低減が
できる。Further, even when the meter body section and the amplifier section are compatible with each other, the accuracy can be ensured even if only the meter body section or only the amplifier section is exchanged, so that the maintenance cost can be reduced.
第１図は本考案の１実施例を示す縦断面図、第２図は第
１図に示す実施例に内臓される回路のブロック図であ
る。 １０……メータボディ部、１１……増幅器部、１２……
嵌合部、１５，１６……支持板、１９……差圧カプセ
ル、２２……差圧センサ、２３，２４……温度センサ、
２５……容量／デジタル変換器、２６……マイクロプロ
セッサ、２７……温度／デジタル変換器、２８……デジ
タル／アナログ変換器。FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIG. 2 is a block diagram of a circuit incorporated in the embodiment shown in FIG. 10 ... Meter body, 11 ... Amplifier, 12 ...
Fitting part, 15, 16 ... Support plate, 19 ... Differential pressure capsule, 22 ... Differential pressure sensor, 23, 24 ... Temperature sensor,
25 ... Capacity / digital converter, 26 ... Microprocessor, 27 ... Temperature / digital converter, 28 ... Digital / analog converter.
フロントページの続き (72)考案者 山下 信行 東京都武蔵野市中町２丁目９番32号 横河 北辰電機株式会社内 (56)参考文献 特開 昭60−76637（ＪＰ，Ａ) 特開 昭57−115873（ＪＰ，Ａ)Front page continuation (72) Inventor Nobuyuki Yamashita 2-932 Nakamachi, Musashino-shi, Tokyo Inside Yokogawa Hokushin Electric Co., Ltd. (56) Reference JP-A-60-76637 (JP, A) JP-A-57- 115873 (JP, A)
Claims (1)
ーが収納されたメータボディ部と、このセンサーからの
センサー信号を信号処理回路で信号処理して統一信号に
変換する変換手段が収納され前記メータボディ部と嵌合
部を介して交換可能な状態で一体に結合される増幅器部
と、前記メータボディ部に設けられこのメータボディ部
の近傍の温度を検出する第１温度センサーと、前記増幅
器部の中に設けられこの増幅器部の内部温度を検出する
第２温度センサーとを具備し、これらの温度センサーの
出力を用いて前記信号処理回路で前記センサー信号に対
して温度補償をすることを特徴とする物理量変換装置。1. A meter body part accommodating a sensor for converting a change in physical quantity into an electric signal, and a conversion means for accommodating a sensor signal from the sensor by a signal processing circuit to convert it into a unified signal. An amplifier part that is integrally connected to the meter body part in a replaceable manner via a fitting part, a first temperature sensor provided in the meter body part for detecting the temperature in the vicinity of the meter body part, and the amplifier A second temperature sensor that is provided inside the unit and that detects the internal temperature of the amplifier unit, and that the signal processing circuit uses the outputs of these temperature sensors to perform temperature compensation on the sensor signal. Characteristic physical quantity conversion device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986149688U JPH064306Y2 (en) | 1986-09-30 | 1986-09-30 | Physical quantity conversion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986149688U JPH064306Y2 (en) | 1986-09-30 | 1986-09-30 | Physical quantity conversion device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355137U JPS6355137U (en) | 1988-04-13 |
| JPH064306Y2 true JPH064306Y2 (en) | 1994-02-02 |
Family
ID=31065134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986149688U Expired - Lifetime JPH064306Y2 (en) | 1986-09-30 | 1986-09-30 | Physical quantity conversion device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064306Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016166824A1 (en) * | 2015-04-15 | 2016-10-20 | 理化工業株式会社 | Sensor signal converter and sensor signal converting method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2786668B2 (en) * | 1989-04-21 | 1998-08-13 | 株式会社日立製作所 | Automotive engine control sensors |
| JP2523912B2 (en) * | 1989-12-22 | 1996-08-14 | 松下電器産業株式会社 | Automotive angular velocity detector |
| JP5445020B2 (en) * | 2009-10-20 | 2014-03-19 | 横河電機株式会社 | Electronic differential pressure / pressure transmitter |
| JP5548531B2 (en) * | 2010-06-17 | 2014-07-16 | アズビル株式会社 | Dual physical quantity sensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57115873A (en) * | 1981-01-09 | 1982-07-19 | Hitachi Ltd | Semiconductor diaphragm type pressure sensor |
| JPS6046419A (en) * | 1983-08-25 | 1985-03-13 | Tokyo Tatsuno Co Ltd | Flow rate measuring device |
| JPS6076637A (en) * | 1983-10-03 | 1985-05-01 | Hitachi Ltd | semiconductor pressure gauge |
| US4592002A (en) * | 1983-12-13 | 1986-05-27 | Honeywell Inc. | Method of digital temperature compensation and a digital data handling system utilizing the same |
-
1986
- 1986-09-30 JP JP1986149688U patent/JPH064306Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016166824A1 (en) * | 2015-04-15 | 2016-10-20 | 理化工業株式会社 | Sensor signal converter and sensor signal converting method |
| JPWO2016166824A1 (en) * | 2015-04-15 | 2017-11-24 | 理化工業株式会社 | Sensor signal converter and sensor signal conversion method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6355137U (en) | 1988-04-13 |
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