JPH0643168Y2 - 熱雰囲気作業ロボットの安全装置 - Google Patents

熱雰囲気作業ロボットの安全装置

Info

Publication number
JPH0643168Y2
JPH0643168Y2 JP10758687U JP10758687U JPH0643168Y2 JP H0643168 Y2 JPH0643168 Y2 JP H0643168Y2 JP 10758687 U JP10758687 U JP 10758687U JP 10758687 U JP10758687 U JP 10758687U JP H0643168 Y2 JPH0643168 Y2 JP H0643168Y2
Authority
JP
Japan
Prior art keywords
arm
safety device
atmosphere
hot
work robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10758687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6412791U (sr
Inventor
昇 三嶋
満雄 浜田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mazda Motor Corp
Original Assignee
Mazda Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mazda Motor Corp filed Critical Mazda Motor Corp
Priority to JP10758687U priority Critical patent/JPH0643168Y2/ja
Publication of JPS6412791U publication Critical patent/JPS6412791U/ja
Application granted granted Critical
Publication of JPH0643168Y2 publication Critical patent/JPH0643168Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
JP10758687U 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置 Expired - Lifetime JPH0643168Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10758687U JPH0643168Y2 (ja) 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10758687U JPH0643168Y2 (ja) 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置

Publications (2)

Publication Number Publication Date
JPS6412791U JPS6412791U (sr) 1989-01-23
JPH0643168Y2 true JPH0643168Y2 (ja) 1994-11-09

Family

ID=31342131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10758687U Expired - Lifetime JPH0643168Y2 (ja) 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置

Country Status (1)

Country Link
JP (1) JPH0643168Y2 (sr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5236142B2 (ja) 2000-06-16 2013-07-17 東京エレクトロン株式会社 コントローラ間の接続状態を検出する半導体製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5236142B2 (ja) 2000-06-16 2013-07-17 東京エレクトロン株式会社 コントローラ間の接続状態を検出する半導体製造装置

Also Published As

Publication number Publication date
JPS6412791U (sr) 1989-01-23

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