JPH0644005Y2 - Ion source main unit attachment / detachment device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an ion source including an ion source body provided with an ion source material for extracting an ion beam, and an ion source housing housing the ion source body. The present invention relates to an ion source body attaching / detaching device in which an ion source body is detachably attached in a sealed state.

[Conventional technology]

FIG. 6 is a schematic side view partially showing an example of the ion source. The ion source 2 is, for example, a so-called Freeman type ion source, and is roughly divided into an ion source body 12 for extracting an ion beam (the extracted state is shown by a chain double-dashed line in the figure). , An ion source housing 4 that houses the ion source body 12.
The ion source housing 4 has, for example, a housing 6, an insulating flange 8 and a mounting flange 10. The ion source body 12 includes, for example, an arc chamber and an extraction electrode section.
14, a heat shield plate 16, a terminal 18, and a mounting flange 20.

In the ion source 2 as described above, for example, when the ion source body 12 is taken out from the ion source housing 4 attached to the ion implantation apparatus or the like for the exchange of the ion source material or the like as shown by arrow A, conventionally, The source body 12 was held by an operator's hand and taken out from the ion source housing 4. Then, the ion source body 12 is transported to, for example, a work place without any partition between the body and the human body, and the inside of the ion source housing 4 is exposed to the atmosphere until the same or another ion source body 12 is attached again. It was exposed without any barrier in between.

[Problems to be solved by the invention]

In the above case, since the ion source main body 12 is held by a human hand when the ion source main body 12 is attached or detached, a part of the ion source main body 12 is partially covered by the inner wall of the ion source housing 4 due to instability of holding which occurs inevitably. However, there is a risk of damaging the part or disturbing the predetermined setting.

Further, for example, when a toxic substance such as BF ₃ is used as the ion source substance, when the ion source body 12 is taken out, the powder, flakes and the like of the substance are not sealed, and thus the outside (a partition wall between the human body and There is a risk that it may leak into a space where there is no. Further, there is a possibility that the worker may directly touch the ion source body 12, and in order to prevent it, it is inconvenient to wear gloves when attaching or detaching the ion source body 12.

Then, this invention aims at providing the ion source main body attachment / detachment device which can attach / detach the ion source main body with respect to the ion source housing reliably in the sealed state.

[Means for solving problems]

The ion source body attaching / detaching device of the present invention is a device used for attaching / detaching the ion source body to / from the ion source housing of the ion source including an ion source body for extracting an ion beam and an ion source housing for housing the ion source body. A first shutter that is attached to the ion source housing side and seals the opening of the ion source housing after the ion source body is taken out; and a first shutter that is coupled to the first shutter. The ion source body taken out from the ion source housing is composed of a combination with a sealing device that supports the ion source body in a sealed state, and the sealing device includes a bellows capable of accommodating the ion source body therein and one end side of the bellows. A second shutter that can be coupled to the first shutter, and an ion source main unit attached to the other end of the bellows. A support flange for supporting the characterized by comprising a support for movably supporting the support flange.

[Action]

The ion source main body is taken out from the ion source housing while being surely supported by the sealing device, and the taken out product is kept in a sealed state by the sealing device. On the other hand, the opening of the ion source housing after the ion source body is taken out is closed by the first shutter. The attachment of the ion source body to the ion source housing is performed by the operation substantially opposite to the above. As a result, the ion source body can be surely attached to and detached from the ion source housing in a sealed state.

〔Example〕

FIG. 1 is a schematic sectional view showing an example of a state in which an ion source main body attaching / detaching device according to an embodiment of the present invention is attached to an ion source. The same or equivalent portions as those in FIG. 6 are designated by the same reference numerals and the description thereof will be omitted.

The ion source main body attaching / detaching device of this embodiment comprises a combination of a first shutter 22 as shown in FIG. 2 and a sealing device 30 as shown in FIGS. 3 and 4, for example.

First, referring to FIG. 2, the first shutter 22 is attached to, for example, a mounting flange 10 of the ion source housing 4 attached to, for example, an ion implanter by, for example, bolts. Is at least larger than the mounting flange 20 of the ion source body 12
It is provided with a frame body 24 having 26 and a shutter plate 28 which can be opened and closed as shown by an arrow B, and thereby can seal the opening 5 of the ion source housing 4 after the ion source body 12 is taken out. it can.

Next, referring to FIG. 3 and FIG. 4, the sealing device 30 has a bellows 40 having a size capable of accommodating the ion source body 12, and is attached to one end side of the bellows 40. A second shutter 32 that can be combined with the first shutter 22.
And a support flange 42 attached to the other end of the bellows 40 for supporting the ion source body 12, and a guide rail 48 for supporting the support flange 42 in a linearly movable manner as indicated by arrow C.
And the like.

More specifically, the bellows 40 is, for example, a tubular member made of metal, cloth, resin, or the like, and should separate the atmosphere inside and outside thereof at least to some extent (for example, to the extent that the above-mentioned toxic substances do not leak out). Is something that can be done.

The shutter 32 is, in this example, a mounting flange 20 and a support flange 42 of the ion source body 12 (more specifically, a cylindrical portion thereof).
It has a frame 34 having an opening 36 larger than 44) and a shutter plate 38 which can be opened and closed as shown by an arrow D, whereby one side of the bellows 40 can be sealed.

In this example, the support flange 42 includes the flange portion 43 and the tubular portion.
The flange portion 43 has several projections 46 (two in the illustrated example) which engage with a guide rail 48 described later.
However, the cylindrical portion 44 is provided with an opening 45 into which a protrusion such as the terminal 18 of the ion source body 12 can be inserted. Then, the ion source body 12 can be attached to the support flange 42 (more specifically, the cylindrical portion 44 thereof), and in this case, the other side of the bellows 40 is also sealed.

In FIG. 3 and FIG. 4, 50 is a frame that forms the framework of the entire sealing device 30, and 52 is a leg portion for supporting the sealing device 30. Between the shutter 32 and the frame 50 at the opposite end thereof, for example, a pair of guide rails 48 are provided which vertically support the projections 46 of the support flange 42 so as to be linearly movable as shown by arrow C, respectively. ing.

An example of the procedure for using the above device is shown below.

With reference to FIG. 2, the first shutter 22 is attached to the ion source housing 4 in an opened state, for example, in a state of being attached to a device such as an ion implanter, more specifically, to a mounting flange 10 thereof. .

Referring now to FIG. 1, the closure device 30, and more specifically its shutter 32, is coupled to the first shutter 22, for example in the open state.

The ion source body 12 is fixed to the support flange 42, more specifically, the mounting flange 20 thereof is fixed.

The ion source body 12 is separated from the ion source housing 4, and more specifically from its mounting flange 10.

The support flange 42 to which the ion source body 12 is attached is retracted along the guide rail 48 as indicated by arrow C. As a result, the ion source body 12 is taken out from the ion source housing 4.

Shutters 22 and 32 are closed as indicated by arrows B and D, respectively. As a result, the state shown in FIG. 5 is established, and the sealing device 30 accommodating the opening 5 of the ion source housing 4 and the ion source body 12 is sealed.

The closure device 30 is separated from the first shutter 22.

If necessary, the sealing device 30 accommodating the ion source body 12 is transported to, for example, an ion source workshop, and the ion source body
The desired work for 12 is performed.

Then, if necessary, the same or different source body 12
The attachment of the above to the ion source housing 4 is carried out in a procedure almost reverse to the above.

As described above, according to the above apparatus, the ion source main body 12 is attached / detached to / from the ion source housing 4 while being mechanically and reliably supported by the support flange 42 and the like. Therefore, the inner wall of the ion source housing 4 of the ion source main body 12 is And the like are prevented from colliding. Therefore, the ion source main body 12 is safe because it is not damaged or misaligned.

Moreover, after the ion source body 12 is taken out, the ion source housing 4 is opened by the first shutter 22.
Since 12 is sealed by the sealing device 30 and isolated from the human body, the danger to the human body is greatly reduced even when a toxic substance is used as the ion source substance.
Of course, when attaching or detaching the ion source body 12,
Since there is no danger of directly touching 12, it is not necessary to wear gloves.

[Effect of device]

As described above, according to this invention, the ion source main body can be surely attached to and detached from the ion source housing in a sealed state. Therefore, damage to the main body of the ion source is prevented, and the danger to the human body is greatly reduced even if a toxic substance is used as the ion source substance.

[Brief description of drawings]

FIG. 1 is a schematic sectional view showing an example of a state in which an ion source main body attaching / detaching device according to an embodiment of the present invention is attached to an ion source. FIG. 2 is a schematic sectional view showing a first shutter of the apparatus shown in FIG. FIG. 3 is a plan view showing a sealing device of the device of FIG. FIG. 4 shows line IV-IV in FIG.
It is a schematic sectional drawing which follows. FIG. 5 is a schematic sectional view showing another state of the apparatus shown in FIG. FIG. 6 is a schematic side view partially showing an example of the ion source. 2 ... Ion source, 4 ... Ion source housing, 12 ... Ion source body, 22 ... First shutter, 30 ... Sealing device,
32: second shutter, 40: bellows, 42: support flange, 48: guide rail.

Claims (1)

[Scope of utility model registration request] 1. An apparatus used for attaching and detaching an ion source body to and from an ion source housing of an ion source, the apparatus including an ion source body for extracting an ion beam and an ion source housing for housing the ion source body. A first shutter that is attached to the side and seals the opening of the ion source housing after the ion source body is taken out; and a first shutter that is coupled to the first shutter and is taken out from the ion source housing. The sealing device is a combination with a sealing device that supports the ion source body in a sealed state, and the sealing device includes a bellows capable of housing the ion source body therein, and a first shutter attached to one end side of the bellows. A second shutter that can be combined,
An ion source body attaching / detaching device, comprising: a support flange attached to the other end of the bellows to support the ion source body; and a support body to movably support the support flange.