JPH0660314A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH0660314A JPH0660314A JP966691A JP966691A JPH0660314A JP H0660314 A JPH0660314 A JP H0660314A JP 966691 A JP966691 A JP 966691A JP 966691 A JP966691 A JP 966691A JP H0660314 A JPH0660314 A JP H0660314A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- gap
- film
- cores
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 69
- 230000004907 flux Effects 0.000 claims abstract description 11
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 238000009826 distribution Methods 0.000 abstract description 15
- 239000000463 material Substances 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910000702 sendust Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910002796 Si–Al Inorganic materials 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気ヘッドに関し、詳し
くは高飽和磁束密度を有する金属磁性膜を積層したラミ
ネート層を非磁性体基板で挟み込んだ構造の積層型高密
度記録用磁気ヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head, and more particularly to a laminated high density recording magnetic head having a structure in which a laminated layer of metal magnetic films having a high saturation magnetic flux density is sandwiched between nonmagnetic substrates. Is.
【０００２】[0002]
【従来の技術】高密度用積層型磁気ヘッドは、図４およ
び図５に示すように高飽和磁束密度を有するセンダスト
やアモルファス等の金属磁性膜１ａ，１ａと、ＳｉＯ2
やＡｌ2 Ｏ3 等の絶縁薄膜２とを交互に積層したラミネ
ート層３をセラミック等の非磁性体基板４で両側から挟
み込んだ一対のコア５，６を接合一体化したコアチップ
７で構成され、コア５，６間のギャップ形成はＳｉＯ2
をスパッタ等にてギャップ形成予定突合せ面に成膜し、
コア５，６を低融点ガラス８により接合一体化してい
る。BACKGROUND OF THE INVENTION high density laminated magnetic head, the magnetic metal film 1a, such as sendust or amorphous having a high saturation magnetic flux density as shown in FIGS. 4 and 5, and 1a, SiO 2
A core chip 7 in which a pair of cores 5 and 6 in which a laminate layer 3 in which insulating thin films 2 such as Al 2 O 3 and the like are alternately laminated are sandwiched from both sides by a non-magnetic substrate 4 such as ceramic are integrally bonded, The gap between the cores 5 and 6 is made of SiO 2
Is formed on the abutting surface where a gap is to be formed by sputtering or the like,
The cores 5 and 6 are joined and integrated by the low melting point glass 8.
【０００３】また、従来技術文献および特許としては、
例えば特公昭５９−９４２２２号公報（松下電器産業
（株），第９回応用磁気学会講演概要集29PA-2 P283 Ｆ
ｅ−Ｓｉ−Ａｌ合金スパッタ膜ビデオヘッド（日本鉱業
（株）等がある。Further, as prior art documents and patents,
For example, Japanese Examined Patent Publication No. 59-94222 (Matsushita Electric Industrial Co., Ltd., 9th Applied Magnetics Society lecture summary 29PA-2 P283 F
e-Si-Al alloy sputtered film video head (Japan Mining Co., Ltd.).
【０００４】[0004]
【発明が解決しようとする課題】ところで、上述した磁
気ヘッドにおいて、ラミネート層３の金属磁性膜１ａは
成膜後多数の加工プロセスを経ており、その間で膜特性
の劣化が起き、成膜時の特性を維持することが困難であ
る。また、コア５，６を突合せ接合一体化するときにお
いて、突合せのズレ量がそのままトラックズレ量とな
り、突合せには十分な精度が要求されていた。なお、基
本的な磁気記録の問題として、媒体への記録時は配向方
向成分の磁界（水平記録方式では面方向），再生時は媒
体から磁束が流入するコアギャップ方向成分の磁界（水
平記録方式では面と垂直方向）が寄与しており、これら
の磁場分布を最適化，例えば図３から記録時は水平方向
のｘ磁界分布を大きく再生時は垂直方向のｙの磁界分布
を大きくとるようなコアを設けることにより、録再効率
を上げれるが、従来タイプでは図３の点線で示した磁界
分布となるため、録再効率に問題があった。By the way, in the above-described magnetic head, the metal magnetic film 1a of the laminating layer 3 has undergone a number of processing processes after film formation, and film characteristics are deteriorated during the process, resulting in deterioration of film properties during film formation. It is difficult to maintain the characteristics. Further, when the cores 5 and 6 are butt-joined and integrated, the displacement amount of the butt becomes the track displacement amount as it is, and a sufficient precision is required for the butt. As a basic magnetic recording problem, the magnetic field of the orientation component (plane direction in the horizontal recording method) at the time of recording on the medium, and the magnetic field of the core gap direction component in which the magnetic flux flows from the medium at the time of reproduction (the horizontal recording method). In the direction perpendicular to the plane), and the magnetic field distributions thereof are optimized. For example, from FIG. 3, the x magnetic field distribution in the horizontal direction is large during recording and the y magnetic field distribution in the vertical direction is large during reproduction. Although the recording / reproducing efficiency can be improved by providing the core, the conventional type has a problem in the recording / reproducing efficiency because the magnetic field distribution shown by the dotted line in FIG. 3 is obtained.
【０００５】[0005]
【課題を解決するための手段】本発明は高飽和磁束密度
を有する金属磁性膜と絶縁膜とを交互に積層したラミネ
ート層を非磁性体基板で挟み込んでなるコアを一対、接
合一体化して磁気ギャップを形成した磁気ヘッドにおい
て、上記ギャップ形成前にコア５，６のどちらか一方
に、高飽和磁束密度を有する金属磁性膜１ｂを、例えば
スパッタリング法等によって磁気ギャップおよびギャッ
プの近傍の接合面に数ミクロン被着形成し、その後Ｓｉ
Ｏ2 等のギャップ材を介して接合一体化したことを特徴
とする。なお、金属磁性膜の厚さおよび膜質（ＢＳ，透
磁率）等の水準を変えることが、図３に示す磁界分布曲
線を任意に設定することができるようになる。例えば
（１ｂ）ＢＳ，透磁率を１ｃより上げることでＨｇは大
きく、また（１ｂ）コア側はより急俊となり磁化反転幅
を小さくでき、高密度記録に寄与する。膜厚については
薄すぎると膜の磁気特性が十分出ず、厚すぎると高周波
での渦電流損があるため、１〜２０μｍ厚が適当であ
る。SUMMARY OF THE INVENTION According to the present invention, a pair of cores sandwiching a laminated layer in which a metal magnetic film having a high saturation magnetic flux density and an insulating film are alternately laminated between nonmagnetic substrates are joined and integrated to form a magnetic layer. In the magnetic head having the gap formed, a metal magnetic film 1b having a high saturation magnetic flux density is formed on one of the cores 5 and 6 before the formation of the gap on the magnetic gap and the bonding surface in the vicinity of the gap by, for example, a sputtering method. Deposit several microns, then Si
It is characterized in that they are joined and integrated through a gap material such as O 2 . The magnetic field distribution curve shown in FIG. 3 can be arbitrarily set by changing the thickness and the quality (BS, magnetic permeability) of the metal magnetic film. For example, by increasing (1b) BS and the magnetic permeability above 1c, Hg is increased, and (1b) the core side becomes steeper and the magnetization reversal width can be reduced, which contributes to high density recording. If the film thickness is too thin, the magnetic properties of the film will not be sufficient, and if it is too thick, there will be eddy current loss at high frequencies, so a thickness of 1 to 20 μm is appropriate.
【０００６】[0006]
【作用】上記技術的手段によれば、ギャップ形成直前に
成膜した金属磁性膜１ｂは成膜時の特性をほぼ維持する
ことが可能となり、また、膜の磁気特性および膜厚をコ
ントロールすることにより、媒体への記録・再生各々に
必要な磁界分布を設定することが可能となる。According to the above technical means, the metal magnetic film 1b formed immediately before forming the gap can substantially maintain the characteristics at the time of film formation, and the magnetic characteristics and film thickness of the film can be controlled. This makes it possible to set the magnetic field distribution required for recording and reproducing on the medium.
【０００７】[0007]
【実施例】本発明にかかる磁気ヘッドの一実施例を図１
を参照して以下に説明する。図１，図２と同一参照符号
は同一部分を示し、その説明を省略する。本発明の特徴
は図１および図２に示すように、Ｉコア６のギャップ突
合せ面６ａに高飽和磁束密度を有する金属磁性材，例え
ばセンダスト（Ｆｅ，Ａｌ，Ｓｉ）をスパッタリング等
にて数ミクロン新たに成膜し、その上にギャップ長設定
のためのＳｉＯ2 を被着し、コア５，６を接合一体化す
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of a magnetic head according to the present invention.
Will be described below. The same reference numerals as those in FIGS. 1 and 2 indicate the same parts, and a description thereof will be omitted. The feature of the present invention is that, as shown in FIGS. 1 and 2, a metal magnetic material having a high saturation magnetic flux density, for example, sendust (Fe, Al, Si) is deposited on the gap abutting surface 6a of the I core 6 by several microns by sputtering or the like. A new film is formed, SiO 2 for setting the gap length is deposited thereon, and the cores 5 and 6 are joined and integrated.
【０００８】なお、磁界分布図３１ｂを任意の分布に設
定するパラメータとしては図２１ｂの膜厚を任意に設定
することにより図６に示すような磁界強度のピークレベ
ルを制御できることと、図２１ｂの飽和磁束密度をより
大きい材料，例えばＦｅ系薄帯を用いることでも図６に
示すようにより急俊な反転幅の小さな磁界分布を作るこ
とができる。As a parameter for setting the magnetic field distribution chart 31b to an arbitrary distribution, it is possible to control the peak level of the magnetic field strength as shown in FIG. 6 by arbitrarily setting the film thickness of FIG. 21b. By using a material having a higher saturation magnetic flux density, for example, an Fe-based ribbon, a sharper magnetic field distribution with a smaller reversal width can be created as shown in FIG.
【０００９】さらに、上記実施例では、高飽和磁束密度
の金属磁性材としてセンダスト合金Ｆｅ系薄帯を示した
が、勿論他の材料，例えばパーマロイやＣｏ−Ｆｅ系ア
モルファス等の合金であってもよく、適宜選定すればよ
い。Further, in the above embodiment, the sendust alloy Fe-based ribbon was shown as the metal magnetic material having a high saturation magnetic flux density, but other materials such as permalloy and Co-Fe-based amorphous alloy may of course be used. Well, it may be selected appropriately.
【００１０】[0010]
【発明の効果】この発明によれば、ギャップ対向面に新
たな磁性膜を０．１〜５ミクロン厚被着形成することに
より、第１の利点として成膜時点の膜特性がほぼそのま
ま劣化することなく表れること。このため、ギャップ近
傍の磁界分布を任意にコントロールすることができ、媒
体の配向方向に対応する磁界分布をもった磁気ヘッドを
設計することができ、記録・再生効率に優れたヘッドが
可能となる。According to the present invention, by forming a new magnetic film by a thickness of 0.1 to 5 μm on the gap facing surface, the first advantage is that the film characteristics at the time of film formation deteriorate substantially as they are. To appear without any. Therefore, the magnetic field distribution in the vicinity of the gap can be controlled arbitrarily, a magnetic head having a magnetic field distribution corresponding to the orientation direction of the medium can be designed, and a head having excellent recording / reproducing efficiency becomes possible. .
【００１１】第２の利点としてヘッド突合せ時、図２か
ら理解できるように、トラックズレに対する特性への影
響がほとんど表れない構造となるため、サブミクロンの
突合せ精度確保のための設備，治具，工数等が大幅に省
くことができる。As a second advantage, as can be understood from FIG. 2 when the heads are abutted, the structure has almost no effect on the characteristics with respect to the track deviation. Man-hours can be greatly reduced.
【図１】 この発明の一実施例を示す斜視図FIG. 1 is a perspective view showing an embodiment of the present invention.
【図２】 図１の要部拡大図FIG. 2 is an enlarged view of a main part of FIG.
【図３】 ギャップ中心近傍の記録時の漏洩磁界分布FIG. 3 Leakage magnetic field distribution during recording near the gap center
【図４】 従来の積層型ヘッドFIG. 4 Conventional stacked head
【図５】 その要部拡大図[Figure 5] Enlarged view of the main part
１ａ，１ｂ 金属磁性膜 ２ 絶縁薄膜 ３ ラミネート層 ４ 非磁性基板 ５ Ｃコア ６ Ｉコア ７ コアチップ ８ 低融点ガラス 1a, 1b Metallic magnetic film 2 Insulating thin film 3 Laminate layer 4 Non-magnetic substrate 5 C core 6 I core 7 core Chip 8 Low melting glass
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年９月２１日[Submission date] September 21, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図６[Name of item to be corrected] Figure 6
【補正方法】追加[Correction method] Added
【補正内容】[Correction content]
【図６】 ギャップ中心近傍の記録時の従来の漏洩磁界
分布図FIG. 6 is a conventional leakage magnetic field distribution map at the time of recording near the center of the gap.
Claims (2)
膜とを交互に積層したコア部を非磁性体基板で挟み込ん
でなる一対のコアを接合一体化して磁気ギャップを形成
した磁気ヘッドにおいて、磁気ギャップ形成予定面を含
むギャップ突合せ面に高飽和磁束密度を有する金属磁性
膜を付着したことを特徴とする磁気ヘッド。1. A magnetic head in which a magnetic gap is formed by joining and integrating a pair of cores in which a core portion in which a metal magnetic film having a high saturation magnetic flux density and an insulating film are alternately laminated is sandwiched between nonmagnetic substrates. A magnetic head having a metal magnetic film having a high saturation magnetic flux density attached to a gap abutting surface including a magnetic gap formation planned surface.
ャップ突合せ面に付着させる金属磁性膜を、Ｃｏ−Ｆｅ
系アモルファス薄帯としたことを特徴とする磁気ヘッ
ド。2. The magnetic head according to claim 1, wherein the metal magnetic film attached to the gap abutting surface is Co--Fe.
A magnetic head characterized by using a system amorphous ribbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP966691A JPH0660314A (en) | 1991-01-30 | 1991-01-30 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP966691A JPH0660314A (en) | 1991-01-30 | 1991-01-30 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0660314A true JPH0660314A (en) | 1994-03-04 |
Family
ID=11726541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP966691A Pending JPH0660314A (en) | 1991-01-30 | 1991-01-30 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0660314A (en) |
-
1991
- 1991-01-30 JP JP966691A patent/JPH0660314A/en active Pending
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