JPH066507Y2 - 減圧酸化ｃｖｄ装置 - Google Patents

減圧酸化ｃｖｄ装置

Info

Publication number
JPH066507Y2
JPH066507Y2 JP1986112717U JP11271786U JPH066507Y2 JP H066507 Y2 JPH066507 Y2 JP H066507Y2 JP 1986112717 U JP1986112717 U JP 1986112717U JP 11271786 U JP11271786 U JP 11271786U JP H066507 Y2 JPH066507 Y2 JP H066507Y2
Authority
JP
Japan
Prior art keywords
reaction chamber
film
flow rate
adjusting means
rate adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986112717U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320429U (fr
Inventor
貴俊 牛越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1986112717U priority Critical patent/JPH066507Y2/ja
Publication of JPS6320429U publication Critical patent/JPS6320429U/ja
Application granted granted Critical
Publication of JPH066507Y2 publication Critical patent/JPH066507Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986112717U 1986-07-24 1986-07-24 減圧酸化ｃｖｄ装置 Expired - Lifetime JPH066507Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986112717U JPH066507Y2 (ja) 1986-07-24 1986-07-24 減圧酸化ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986112717U JPH066507Y2 (ja) 1986-07-24 1986-07-24 減圧酸化ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6320429U JPS6320429U (fr) 1988-02-10
JPH066507Y2 true JPH066507Y2 (ja) 1994-02-16

Family

ID=30993849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986112717U Expired - Lifetime JPH066507Y2 (ja) 1986-07-24 1986-07-24 減圧酸化ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH066507Y2 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154235A (ja) * 1982-03-09 1983-09-13 Matsushita Electric Ind Co Ltd 減圧ｃｖｄ装置
JPS60167318A (ja) * 1984-02-09 1985-08-30 Mitsubishi Electric Corp 光応用半導体製造装置

Also Published As

Publication number Publication date
JPS6320429U (fr) 1988-02-10

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