JPH067067U - Probe card - Google Patents

Abstract

(57) [Summary] [Purpose] Even if there are multiple types of measurement patterns for measurement on a large substrate, there is no need for a large probe card or multiple probe cards.
(EN) A probe card capable of inspecting a plurality of types of measurement patterns, improving the reliability and reducing the cost without lowering the inspection efficiency. [Constitution] The probe needle group 42a and the probe needle group 42b are arranged so that the needle tip heights thereof are different, and the needle tip height seen from the substrate side is low in the probe needle group 42a and low in the probe needle group. 42b is set high.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a probe card used for inspecting the electrical characteristics of a substrate on which electric wiring, electric elements, etc. are formed.

[0002]

[Prior art]

 Conventionally, for example, in the manufacturing process of liquid crystal displays, when measuring short-circuits, disconnections, electrical characteristics of electronic elements, etc., of the wiring formed on the glass substrate, electrical continuity with the fine wiring pattern on the substrate A probe card is used as a means for obtaining the information.

On one probe card, probe needles arranged according to a target wiring pattern and an edge sensor for detecting a substrate surface are fixed, and the probe card is selected according to the type of measurement. You can easily change the product type by replacing the.

By the way, for example, as shown in FIG. 4, when a plurality of wiring pattern groups 2 and 3 for measurement exist on a large-sized substrate 1, conventionally, as shown in FIG. On the probe card 11 of the same size, the probe needle group 12 corresponding to the wiring pattern group 2 and the probe needle group 13 corresponding to the wiring pattern group 3 and the like, all the necessary number of probe needles are erected, and these wiring pattern groups are formed. A method is known in which two or three probe needle groups 12 and 13 are brought into contact with each other at the same time, and an electrical channel is switched by a measuring device for measurement.

[0005]

[Problems to be solved by the device]

 However, in such a large area probe card 11, in order to accurately bring all the probe needles into contact with the wiring pattern, high precision is required, for example, very high flatness is required, and the cost of the device increases. However, there is a problem that the reliability is lowered.

In order to avoid such a problem, as shown in FIGS. 6 and 7, a probe card 22 having a probe needle group 12 corresponding to the wiring pattern group 2 and a wiring pattern group 3 are provided. It is also possible to measure by using a plurality of small probe cards such as the probe card 23 provided with the probe needle group 13 corresponding to.

However, when a plurality of small probe cards are used as described above, it is necessary to replace the probe cards during the inspection, which causes a problem of lowering the inspection efficiency. Further, in order to avoid such a problem, if the inspection apparatus is configured so that a plurality of probe cards can be simultaneously attached, there arises a problem that the manufacturing cost of the inspection apparatus increases.

The present invention has been made in response to such a conventional situation. Even when a plurality of types of measurement patterns for measurement exist on a large substrate, a large probe card or a plurality of measurement patterns are used. A probe that can inspect these multiple types of measurement patterns without the need for a single probe card, improve reliability, and reduce costs without lowering inspection efficiency. They are willing to offer a card.

[0009]

[Means for Solving the Problems]

 That is, in the probe card of the present invention, a plurality of probe needles are arranged according to the measurement pattern of the substrate to be measured, and these probe needles are brought into contact with the measurement pattern to electrically connect with the substrate to be measured. In a probe card that achieves high electrical continuity, the probe needles are set to a first probe needle group that is set to the same needle tip height and a needle tip height that is different from that of the first probe needle group. The second probe needle group is composed of at least two kinds of probe needle groups, and the first and second probe needle groups are sequentially brought into contact with the measurement pattern of the substrate to be measured to electrically connect them. Is configured to obtain.

[0010]

[Action]

 In the probe card of the present invention having the above-mentioned configuration, the probe needles are respectively set to the first probe needle group set to the same needle tip height and the needle tip height different from the first probe needle group. It is composed of at least two kinds of probe needle groups of the set second probe needle group.

Therefore, the lower probe needle group having a lower needle tip height viewed from the substrate side is brought into contact with the measurement pattern group, and the upper probe needle group having a higher needle tip height is floated from the substrate surface. Therefore, it is possible to perform electrical measurement using only the lower probe needle group, and by positioning the lower probe needle group with a low needle tip height at a position off the substrate. , Electrical measurement can be performed by contacting only the probe needle group with a high needle tip height with the measurement pattern group.

Therefore, even when a plurality of types of measurement patterns for the purpose of measurement are present on a large-sized substrate, these plural types of measurement patterns can be obtained without requiring a large-sized probe card or a plurality of probe cards. The measurement pattern can be inspected, and the reliability can be improved and the cost can be reduced without lowering the inspection efficiency.

[0013]

【Example】

 Embodiments of the probe card of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows the configuration of an embodiment of the present invention. A probe card 40 of this embodiment is provided with a rectangular opening 41, and a peripheral portion of the opening 41 is formed. A plurality of probe needles 42 are fixed to the probe so that the needle tips thereof protrude toward the center of the opening. Further, at the end of the probe card 40, a connector portion 43 for electrically connecting to a measuring device (not shown) is provided, and the probe needle 42 has this connector portion 43 via a conductor pattern 44 or the like. Electrically connected to.

The probe needles 42 are arranged such that the needle tips thereof correspond to the measurement pattern of the substrate 1 shown in FIG. That is, the probe needle group 42a arranged downward from the upper edge of the opening 41 in FIG. 1 is arranged corresponding to the measurement pattern group 2 in FIG. The probe needle group 42b arranged upward from the lower edge of 41 is arranged corresponding to the measurement pattern group 3 in FIG.

Further, as shown in FIGS. 2 and 3, the probe needle group 42a and the probe needle group 42b are arranged so that the needle tip heights thereof are different, and the needle tips viewed from the substrate 1 side. Regarding the height, the probe needle group 42a is set low and the probe needle group 42b is set high. As is well known, in a normal inspection device, variations in needle tip height of the probe needle are absorbed, and the measurement pattern and the probe needle are surely brought into contact with each other to obtain electrical continuity. A so-called overdrive is applied to further press the needle tip after it comes into contact. The difference in needle tip height between the probe needle group 42a and the probe needle group 42b is set to be sufficiently large compared to such an overdrive amount. . Therefore, as shown in FIG. 2, when the probe needle group 42a is brought into contact with the measurement pattern group 2, the probe needle group 42b is not brought into contact with the substrate 1.

In the probe card 40 configured as described above, for example, as shown in FIG. 2, first, the probe needle group 42a having a low needle tip height as viewed from the substrate 1 side is brought into contact with the measurement pattern group 2 to generate electricity. A specific measurement. At this time, the probe needle group 42b is kept in a state where it does not come into contact with the substrate 1 and does not hinder the measurement.

Then, as shown in FIG. 3, the probe card 40 and the substrate 1 are brought closer to each other, and the probe needle group 42 b having a high needle tip height when viewed from the substrate 1 side is set to the measurement pattern group 3 And make an electrical measurement. At this time, since the probe needle group 42a is located at a portion separated from the substrate 1 and does not contact the substrate 1, it does not hinder the measurement.

As described above, in this embodiment, for example, without using the large-sized probe card 11 shown in FIG. 5 or the plurality of probe cards 22 and 23 shown in FIGS. 6 and 7, It is possible to measure a large substrate 1 with a single small probe card 40.

Therefore, a large substrate can be inspected without lowering the inspection efficiency, increasing the manufacturing cost of the device, or lowering the reliability.

In the above embodiment, the probe card 40 provided with two groups of probe needle groups 42a and 42b having two kinds of needle tip heights has been described. However, for example, three groups having three kinds of needle tip heights are described. It is also possible to provide the above probe needle group or more probe needle groups. Further, the shape of the probe card, the shape of the probe needle, the number of needles, the fixed position, etc. can be changed as appropriate.

[0022]

[Effect of device]

 As described above, according to the probe card of the present invention, even when there are multiple types of measurement patterns for measurement on a large substrate, a large probe card or multiple probe cards can be used. These plural types of measurement patterns can be inspected without need, and the reliability can be improved and the cost can be reduced without lowering the inspection efficiency.

[Brief description of drawings]

FIG. 1 is a diagram showing the configuration of a probe card according to an embodiment of the present invention.

FIG. 2 is a diagram for explaining a method of using the probe card of FIG.

FIG. 3 is a diagram for explaining a method of using the probe card of FIG.

FIG. 4 is a diagram showing an example of a substrate on which measurement is performed.

FIG. 5 is a diagram showing an example of a conventional large-sized probe card.

FIG. 6 is a diagram showing an example of a conventional small probe card.

FIG. 7 is a diagram showing an example of a conventional small probe card.

[Explanation of symbols]

 40 .... Probe card 41 .... Opening 42 .... Probe needles 42a..Probe needle group with a low needle tip height from the substrate side 42b..Probe needle group with a high needle tip height from the substrate side 43 ………… Connector part 44 ………… Conductor pattern

Claims (1)

[Scope of utility model registration request] 1. A plurality of probe needles are arranged according to a measurement pattern of a substrate to be measured, and these probe needles are brought into contact with the measurement pattern to obtain electrical conduction with the substrate to be measured. In the probe card, the probe needles have a first probe needle group set to the same needle tip height and a second probe needle set to a needle tip height different from that of the first probe needle group. The probe group is composed of at least two kinds of probe needle groups, and the first and second probe needle groups are sequentially contacted with the measurement pattern of the substrate to be measured to obtain electrical continuity. A probe card characterized in that