JPH10197890A - Method of manufacturing liquid crystal display panel substrate - Google Patents

Abstract

(57) [Summary] [PROBLEMS] In a trace-type short-circuit inspection method for ITO parallel electrodes used in a liquid crystal display device, accurate positioning of a pair of inspection electrodes is not required, and the time required to switch the model of the inspection device is reduced. And highly reliable short circuit inspection. As shown in (a), each of electrodes n ₁ , n ₂ , n ₃ , n ₄ , n ₅ ,... To be parallel electrodes is connected to a first electrode group 4 connected every other electrode. Is patterned on the substrate 1 so that the second electrode group 5 sandwiched between the electrodes constituting the first electrode group 4 is formed, and as shown in FIG. And the second inspection electrode 2a
Are scanned in the direction of arrow A so as to sequentially contact the respective electrodes of the parallel electrodes to check the continuity.
Are electrically separated as shown in FIG.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a substrate used for a liquid crystal display panel.

[0002]

2. Description of the Related Art In manufacturing a liquid crystal display panel having liquid crystal sandwiched between upper and lower substrates, a substrate for a liquid crystal display panel on which a number of ITO parallel electrodes are formed is used.

Conventionally, in order to detect a short circuit between the parallel electrodes, a pair of test electrodes are sequentially brought into contact with an adjacent ITO parallel electrode, and the resistance between the test electrodes is measured (hereinafter, referred to as “test electrode”).
The resistance was measured by contacting a plurality of test electrodes at the same pitch as the ITO parallel electrode with the ITO parallel electrode.

FIG. 3 shows an ITO using the conventional tracing method.
3 shows an example of arrangement of parallel electrodes and an inspection method. Substrate 1
A plurality of ITO electrodes N arranged in parallel₁ , N
_Two , ..., N_n , N _{n + 1} , ... are formed. This I
To inspect the TO electrode, the tracing method detects the resistance value
The one inspection electrode 2a of the detector 2_n Contacted
And the other inspection electrode 2b is connected to the electrode N_{n + 1} Contact
Between the contacting electrodes (N_n -N_{n + 1} Check the continuity of
Similarly, the inspection electrodes 2a and 2b and the substrate 1 are relatively moved.
Specifically, the electrode arrangement direction (arrow A
Direction), the test electrodes 2a and 2b are moved in
To check for short-circuit (continuity)
Manufactures substrates for electronic devices.

[0005]

In such a conventional method of manufacturing a substrate for a liquid crystal display panel, a pair of test electrodes 2 are provided.
Since it is necessary to accurately match the pitch dimensions of a and 2b with the pitch dimensions of the ITO parallel electrodes, it takes time to switch the type of the inspection device when switching the type of the liquid crystal display panel to be manufactured, and the operating rate of the inspection device is high. Is decreasing.

Another problem is that if the error in the pitch dimension of the test electrodes 2a and 2b increases, the test cannot be performed correctly. An object of the present invention is to provide a method of manufacturing a substrate for a liquid crystal display panel, in which a model of a liquid crystal display panel to be manufactured can be easily switched and a correct inspection can be performed even if an error of a pitch dimension of the inspection electrodes 2a and 2b becomes large. And

[0007]

According to the method of manufacturing a substrate for a liquid crystal display panel of the present invention, when forming parallel electrodes on a substrate, each electrode is not completely separated and patterned. The first electrode group connected every other electrode and the second electrode group sandwiched between the electrodes constituting the first electrode group are patterned on the substrate to form the first electrode group. The continuity between the electrode group and all the electrodes including the first electrode group is measured, and the pass / fail of the parallel electrode is determined based on the result of the measurement. Thereafter, each electrode of the first electrode group is electrically connected. To complete a substrate having good parallel electrodes.

According to the present invention, it is easy to switch the type of the liquid crystal display panel to be manufactured, and a correct inspection can be performed even if an error in the pitch dimension of the inspection electrode becomes large.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION According to the method of manufacturing a substrate for a liquid crystal display panel of the present invention, when manufacturing a substrate for a liquid crystal display panel on which a large number of parallel electrodes are formed, every other electrode serving as the parallel electrode is alternately provided. Are patterned on the substrate so that a first electrode group connected to the first electrode group and a second electrode group sandwiched between the electrodes constituting the first electrode group are formed on the substrate. The first inspection electrode is connected to the first electrode group, and the second inspection electrode is scanned in the arrangement direction of the parallel electrodes so as to sequentially contact the respective electrodes of the parallel electrodes, thereby establishing conduction between the first and second inspection electrodes. Inspection and pass / fail of the parallel electrodes are determined based on a detection waveform obtained by the continuity test, and thereafter, each electrode of the first electrode group is electrically separated.

Specifically, each electrode of the first electrode group is patterned on the substrate so that one end is connected to a strip-shaped electrode portion formed at the end of the substrate and is electrically connected to each other. After the determination of pass / fail, the end of the substrate on which the strip-shaped electrode portion is formed is separated and removed to electrically separate the electrodes of the first electrode group.

Hereinafter, a method for manufacturing a substrate for a liquid crystal display panel according to the present invention will be described based on specific embodiments. FIG.
Shows the steps of the production method of the present invention.

Each electrode n serving as a parallel electrode on a substrate 1₁ ,
n_Two , N_Three , N_Four , N_Five For patterning, ……
In this case, along the edge of the substrate 1 as shown in FIG.
Electrode having one end connected to a strip electrode 3 formed by
Group 4 ITO electrode n₁ , N_Three, N_Five , ... and this first
N of the ITO electrode of the electrode group 4 of₁ And n_Three During n_Three And n _Five 
Between the ITO electrodes of the first electrode group 4
Each of the second electrode groups 5 formed electrically independently
ITO electrode n_Two , N_Four , ... and Pattani are formed
To run.

Next, as shown in FIG.
ITO electrode n at poles 2a and 2b₁ , N _Two , N_Three , N_Four , N
_Five , …… are scanned in the array direction (direction of arrow A) to
The continuity is measured by the detector 2.

Specifically, the resistance values are measured by moving the test electrodes 2a and 2b integrally at a constant speed in the arrangement direction (the direction of arrow A). At this time, the inspection electrode 2b is always in contact with the strip electrode 3 continuously.

When the inspection electrodes 2a and 2b are scanned as described above, the resistance value is detected as the presence or absence of periodic conduction as shown in FIG. However, if there is a short circuit between any adjacent ITO parallel electrodes, a short circuit can be detected to detect conduction at a place where there should be no conduction (broken line portion in FIG. 2).

A non-defective substrate having no short circuit between the adjacent ITO electrodes in the above measurement is then cut off at the end 1a of the substrate 1 on which the strip electrode 3 is formed as shown in FIG. After being removed, the ITO electrodes n ₁ , n ₃ ,
n _5, ... is a substrate for a liquid crystal display panel having parallel electrodes are electrically isolated is completed.

As described above, it is not necessary to accurately adjust the pitch dimension of the inspection electrodes 2a and 2b, and it is possible to shorten the switching time of the inspection apparatus and stabilize the inspection. In the above-described embodiment, the inspection electrodes 2a and 2b and the substrate 1 are relatively moved. However, the same applies when the inspection electrode 2a and the substrate 1 are relatively moved while the position of the inspection electrode 2b on the substrate 1 is fixed. The effect can be expected.

In the above-described embodiment, the patterned first electrode group 4 has the electrodes connected to each other by the strip-shaped electrode 3, but the electrode to be contacted with the inspection electrode 2b is placed at any corner of the substrate 1, for example, Provided in a square shape, the first electrode
The pattern for electrically connecting the ends of the electrode group 4 of
The same effect can be expected even if the test electrode 2b is brought into contact with the rectangular electrode and the test electrode 2a and the substrate 1 are relatively moved as described above.

[0019]

As described above, according to the present invention, each electrode serving as a parallel electrode is sandwiched between a first electrode group connected every other electrode and each electrode constituting the first electrode group. Second
Patterning on the substrate to form an electrode group of
A first inspection electrode is connected to a first electrode group, and a second inspection electrode is scanned in the arrangement direction of the parallel electrodes so as to sequentially contact the respective electrodes of the parallel electrodes to perform first and second inspections. Inspect the continuity between the electrodes, determine the quality of the parallel electrodes based on the detected waveform obtained by the continuity test, and then electrically separate the electrodes of the first electrode group. Short switching time and highly reliable short-circuit inspection can be realized.

[Brief description of the drawings]

FIG. 1 is a process chart of an embodiment of a method of manufacturing a substrate for a liquid crystal display panel according to the present invention.

FIG. 2 is a diagram showing a result of resistance measurement of the embodiment.

FIG. 3 is a schematic view of a conventional short-circuit inspection of an ITO parallel electrode.

[Explanation of symbols]

1 substrate 2 resistance detector 2a, 2b inspection electrodes 3 strip electrode 4 first electrode group 5 and the second electrode group _{n 1, n 2, n 3} , n 4, n 5, each becomes ...... parallel electrodes electrode

Claims (2)

[Claims] When manufacturing a liquid crystal display panel substrate on which a large number of parallel electrodes are formed, each of the electrodes serving as the parallel electrodes includes a first electrode group connected every other electrode and a first electrode. Patterning is performed on the substrate so that a second electrode group sandwiched between the electrodes constituting the group is formed, the first inspection electrode is connected to the first electrode group, and the second inspection electrode is connected to the first electrode group. Scanning is performed in the arrangement direction of the parallel electrodes so as to sequentially contact the respective electrodes of the parallel electrodes to check the continuity between the first and second test electrodes, and based on the detection waveform obtained by the continuity test, A method for manufacturing a substrate for a liquid crystal display panel, comprising: judging pass / fail of parallel electrodes, and thereafter electrically separating each electrode of the first electrode group. 2. The method according to claim 1, wherein each electrode of the first electrode group is patterned on the substrate so that one end is connected to a strip-shaped electrode portion formed at an end of the substrate and is electrically connected to each other. 2. The method for manufacturing a substrate for a liquid crystal display panel according to claim 1, wherein after the determination, an end of the substrate on which the strip-shaped electrode portion is formed is separated and removed to electrically separate each electrode of the first electrode group.