JPH0675375A - Color resist material - Google Patents
Color resist materialInfo
- Publication number
- JPH0675375A JPH0675375A JP22725692A JP22725692A JPH0675375A JP H0675375 A JPH0675375 A JP H0675375A JP 22725692 A JP22725692 A JP 22725692A JP 22725692 A JP22725692 A JP 22725692A JP H0675375 A JPH0675375 A JP H0675375A
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- Prior art keywords
- dye
- resist material
- color resist
- filter
- color
- Prior art date
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、カラーレジスト材料に
係り、特に固体撮像素子のように微細パターンを必要と
するカラーフィルタの製造に用いられるカラーレジスト
材料に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color resist material, and more particularly to a color resist material used for manufacturing a color filter which requires a fine pattern such as a solid-state image pickup device.
【０００２】[0002]
【従来の技術】感光性樹脂に色素を含有させた、いわゆ
るカラーレジスト法によってカラー（色）フィルタを形
成する際、例えば赤色（Ｒ）のカラーレジストの塗布、
露光、現像によってレジストパターンを形成し、ポスト
ベークを行ってから次の色、例えば青色（Ｂ）等のレジ
ストパターンを形成する。このカラーレジスト法におい
てパターンを形成した後、ポストベークを行う目的は、
現像後のパターンを熱硬化して以後の工程でパターンが
変形したり、色素が溶出したりするのを防ぐことにあ
る。2. Description of the Related Art When forming a color filter by a so-called color resist method in which a photosensitive resin contains a dye, for example, a red (R) color resist is applied,
A resist pattern is formed by exposure and development, post-baking is performed, and then a resist pattern of the next color, for example, blue (B) is formed. The purpose of performing post-baking after forming a pattern in this color resist method is
This is to prevent the pattern after development from being thermally cured so that the pattern is deformed or the dye is not eluted in the subsequent steps.
【０００３】カラーレジスト材料としては、通常種々の
感光性樹脂が使用されるが、感度の点で有利な光重合型
のレジストが使用されることが多い。このようなカラー
レジスト材料のポストベーク時の硬化反応は、光硬化時
に未反応で残ったモノマーの２重結合をさらに重合する
ことが主であるが、このような重合反応を十分に行うた
めには２００℃以上の高温が必要である。As the color resist material, various photosensitive resins are usually used, but a photopolymerization type resist which is advantageous in terms of sensitivity is often used. The curing reaction during the post-baking of such a color resist material is mainly to further polymerize the double bond of the monomer that remains unreacted during the photo-curing. In order to sufficiently perform such a polymerization reaction. Requires a high temperature of 200 ° C. or higher.
【０００４】[0004]
【発明が解決しようとする課題】カラーレジスト材料の
色素として顔料を用いた場合は、２００℃以上の高温処
理にも耐えられるが、顔料を用いたカラーレジストは解
像度が悪いため固体撮像素子のように微細パターンが要
求される用途には適さなかった。When a pigment is used as a colorant of a color resist material, it can withstand high temperature treatment of 200 ° C. or more, but the color resist using the pigment has poor resolution and thus is likely to be used as a solid-state image sensor. It was not suitable for applications that require fine patterns.
【０００５】一方、カラーレジスト材料の色素として顔
料でなく染料を用いた場合は、固体撮像素子にも十分に
適用可能な解像度が得られるが、２００℃以上の耐熱性
と溶剤に対する十分な溶解性、さらに良好な分光特性の
３者を満足する染料を見い出すことはほとんど不可能だ
った。On the other hand, when a dye is used as a colorant of the color resist material instead of a pigment, a resolution sufficiently applicable to a solid-state image pickup device can be obtained, but heat resistance at 200 ° C. or more and sufficient solubility in a solvent are obtained. It was almost impossible to find a dye satisfying the three of the better spectral characteristics.
【０００６】そこで、本発明は、従来より低いポストベ
ーク温度でカラーフィルタが形成でき、従って、カラー
レジスト材に使用できる色素の選択範囲を拡げ、且つ固
体撮像素子のような微細パターンを要するカラーフィル
タを製造して得るカラーレジスト材料を提供することを
目的とする。Therefore, according to the present invention, a color filter can be formed at a lower post-baking temperature than conventional ones, and therefore, the selection range of dyes that can be used in a color resist material can be expanded and a color filter that requires a fine pattern such as a solid-state image sensor. It is an object of the present invention to provide a color resist material obtained by manufacturing.
【０００７】[0007]
【課題を解決するための手段】上記課題は本発明によれ
ば、以下に示す要素（１）〜（５）： （１）カルボキシル基または無水カルボン酸の構造を有
するバインダーポリマー、（２）重合可能な２重結合を
２つ以上有する多官能モノマー、（３）光重合開始剤、
（４）色素、（５）熱硬化剤、からなることを特徴とす
るカラーレジスト材料によって解決される。According to the present invention, the above-mentioned problems are solved by the following elements (1) to (5): (1) a binder polymer having a structure of carboxyl group or carboxylic acid anhydride, (2) polymerization. A polyfunctional monomer having two or more possible double bonds, (3) a photopolymerization initiator,
This is solved by a color resist material comprising (4) a dye and (5) a thermosetting agent.
【０００８】[0008]
【作用】本発明によれば、バインダポリマーのカルボキ
シル基または無水カルボン酸基と熱硬化剤が加熱（ポス
トベーク）時、架橋構造となり、従来より低温でのカラ
ーフィルタ形成を可能にする。従って、顔料よりも耐熱
性の低い染料を色素として使用できるため解像度向上を
図ることができる。According to the present invention, the carboxyl group or carboxylic acid anhydride group of the binder polymer and the thermosetting agent form a cross-linked structure when heated (post-baked), which enables formation of a color filter at a lower temperature than before. Therefore, since a dye having a lower heat resistance than a pigment can be used as a pigment, the resolution can be improved.
【０００９】[0009]
【実施例】以下、本発明の実施例を説明する。EXAMPLES Examples of the present invention will be described below.
【００１０】実施例１ 本発明のカラーレジスト材料の第１実施例として、まず
下記組成でマゼンタフィルタ形成感光液とした。Example 1 As a first example of the color resist material of the present invention, a magenta filter forming photosensitive solution having the following composition was first prepared.
【００１１】スチレン ／無水マレイン酸共重合物 ：１００部（バインダ
ーポリマー）ヘ゜ンタエリスリトールトリアクリレート ：１００部（多官能モ
ノマー） 2,4−シ゛エチルチオキサントン ： １０部（光重合開
始剤） ｐ−シ゛メチルアミノ安息香酸エチル ： ５部（光重合促
進剤） Solvent Red １３２（商品名） ： ４０部（マゼンタ
色素）エチレンク゛リコールシ゛ク゛リシシ゛ルエーテル ： ２０部（熱硬化
剤）シクロヘキサノン ：８００部（溶剤） また、上記組成と同様の組成で、色素のみを変更してイ
エロー形成感光液及びシアン形成感光液を用意した。Styrene / maleic anhydride copolymer: 100 parts (binder polymer) pentaerythritol triacrylate: 100 parts (polyfunctional monomer) 2,4-diethylthioxanthone: 10 parts (photopolymerization initiator) p-dimethylaminoaminobenzoic acid Ethyl acid: 5 parts (photopolymerization accelerator) Solvent Red 132 (trade name): 40 parts (magenta dye) ethylene glycol glycidyl ether: 20 parts (thermosetting agent) cyclohexanone: 800 parts (solvent) With the same composition, only the dye was changed to prepare a yellow forming photosensitive liquid and a cyan forming photosensitive liquid.
【００１２】Solvent Yellow ８９（イエロー色素） Solvent Blue ３８（シアン色素） 固体撮像素子が形成されたシリコンウエハ上に、上記の
如き組成で予め用意されたマゼンタ感光液をスピンコー
ト法により塗布して、１００℃の温度で２分間プリベー
クの後、カラーフィルタを形成する箇所に紫外線を照射
してパターン露光を行った。次いで、炭酸ナトリウム水
溶液で現像することにより、マゼンタフィルタを形成し
た。その後、ポストベークを行い、該マゼンタフィルタ
を熱硬化した。このポストベークにはホットプレート２
枚を使用し、１段目を１５０℃：９０秒、２段目を１８
０℃：９０秒とした。この際、このポストベークの熱処
理によるマゼンタフィルタの分光スペクトルの変化は観
察されなかった。Solvent Yellow 89 (yellow dye) Solvent Blue 38 (cyan dye) A magenta photosensitive liquid prepared in advance with the above composition is applied onto a silicon wafer on which a solid-state image sensor is formed by spin coating. After pre-baking at a temperature of 100 ° C. for 2 minutes, ultraviolet rays were radiated to the area where the color filter was to be formed to perform pattern exposure. Then, a magenta filter was formed by developing with a sodium carbonate aqueous solution. After that, post-baking was performed to thermally cure the magenta filter. 2 hot plates for this post bake
1st stage 150 ° C: 90 seconds, 2nd stage 18
0 ° C .: 90 seconds. At this time, no change in the spectral spectrum of the magenta filter due to the heat treatment of the post bake was observed.
【００１３】次に同様に、上記の如き組成で予め用意さ
れたイエロー感光液を、スピンコート法により塗布して
同様のリソグラフィープロセスを用いてイエローフィル
タを形成した。このイエローフィルタ形成工程におい
て、マゼンタ色素の溶出は観察されず良好であった。Similarly, a yellow photosensitive solution prepared in advance with the above composition was applied by spin coating, and a yellow filter was formed using the same lithographic process. In this yellow filter forming step, elution of the magenta dye was not observed and was good.
【００１４】また、現像後のイエローフィルタのポスト
ベークによる分光スペクトルの変化も観察されなかっ
た。Further, no change in the spectrum due to post-baking of the yellow filter after development was observed.
【００１５】次に同様に、上記の如き組成で予め用意さ
れたシアン感光液を、スピンコート法により塗布して、
同様のリソグラフィープロセスを用いてシアンフィルタ
を形成した。Similarly, a cyan photosensitive solution prepared in advance with the above composition is applied by spin coating,
A cyan filter was formed using the same lithographic process.
【００１６】このシアンフィルタ形成工程において、マ
ゼンタ、イエロー色素の溶出は観察されず良好であっ
た。In this cyan filter forming step, elution of magenta and yellow dyes was not observed and was good.
【００１７】また、現像後のシアンフィルタのポストベ
ークによる分光スペクトルの変化も観察されなかった。Further, no change in the spectral spectrum due to post-baking of the cyan filter after development was observed.
【００１８】以上の工程により、固体撮像素子上に、マ
ゼンタ、イエロー、シアンの３色からなるカラーフィル
タを形成することができた。Through the above steps, a color filter composed of three colors of magenta, yellow and cyan could be formed on the solid-state image pickup device.
【００１９】なお、カラーフィルタを保護するために、
引き続きオーバーコート層を形成しても良い。さらに、
感度向上のために画素毎にマイクロレンズを形成しても
良い。また、カラーフィルタの下に平坦化層を設けても
良い。In order to protect the color filter,
An overcoat layer may be subsequently formed. further,
A microlens may be formed for each pixel in order to improve sensitivity. A flattening layer may be provided under the color filter.
【００２０】実施例２ 本発明のカラーレジストの第２実施例として、下記組成
でマゼンタフィルタ形成感光液とした。Example 2 As a second example of the color resist of the present invention, a magenta filter forming photosensitive solution having the following composition was used.
【００２１】 ＣＴ（商品名、フジハント(株)）：４０部（アクリル系
光重合型レジスト） Solvent Red ８４（商品名） ：２部（赤色色素）シクロヘキサノン ：１０部（溶剤） （ネオヘ゜ンチルク゛リコールシ゛ク゛リシシ゛ルエーテル）：（熱硬化剤） ＣＴはバインダーパリマーとしてベンジルメタクリレー
ト／メタクリル酸共重合体、他に光重合開始剤と多官能
モノマー及び溶剤を含有するアクリル系光重合型のレジ
ストである。CT (trade name, Fuji Hunt Co., Ltd.): 40 parts (acrylic photopolymerization type resist) Solvent Red 84 (trade name): 2 parts (red dye) cyclohexanone: 10 parts (solvent) (neopentyl glycol recall) (Glycidic ether): (Thermosetting agent) CT is an acrylic photopolymerization type resist containing a benzyl methacrylate / methacrylic acid copolymer as a binder polymer, a photopolymerization initiator, a polyfunctional monomer and a solvent.
【００２２】ガラス基板に上記組成のうち、熱硬化剤の
ない組成、すなわちアクリル系光重合型レジスト（Ｃ
Ｔ）、色素（赤色）、溶剤のみの赤色感光液の組成で２
０００ｒｐｍのスピンコート法により塗布し、１００℃
の温度で２分間プリベークした後、リソグラフィープロ
セスを用いてマゼンタフィルタを形成した。その後、１
５０℃の温度で２時間ポストベークを行い、赤フィルタ
（パターン）を硬化させた。Of the above-mentioned compositions on the glass substrate, a composition without a thermosetting agent, that is, an acrylic photopolymerizable resist (C
T), dye (red), solvent-only red photosensitive solution composition
Coated by spin coating method at 000 rpm, 100 ° C
After pre-baking at the temperature of 2 minutes, a magenta filter was formed using a lithographic process. Then 1
Post-baking was performed at a temperature of 50 ° C. for 2 hours to cure the red filter (pattern).
【００２３】上記の組成に熱硬化剤（ネオペンチルグリ
コールジグリシジルエーテル）を添加して、スピンコー
トからポストベークまで同様の工程を経て、赤フィルタ
（パターン）を形成した。色素固着率（色素溶出抑制効
果）をアセトンに５分間浸漬前後の吸光度変化で評価し
た。その結果、熱硬化剤を添加しないもので６４％、添
加したもので９６％と、明らかに熱硬化剤添加による改
善があった。A thermosetting agent (neopentyl glycol diglycidyl ether) was added to the above composition, and a red filter (pattern) was formed through the same steps from spin coating to post baking. The dye fixation ratio (dye elution suppression effect) was evaluated by the change in absorbance before and after immersion in acetone for 5 minutes. As a result, it was apparent that there was an improvement due to the addition of the heat curing agent, which was 64% without the heat curing agent and 96% with the heat curing agent.
【００２４】上記実施例１及び２として説明したカラー
レジスト材料は、 （１）カルボキシル基または無水カルボン酸の構造を有
するバインダーポリマー （２）重合可能な２重結合を２つ以上有する多官能モノ
マー （３）光重合開始剤 （４）色素（顔料、染料） （５）エポキシ基を２つ以上有する化合物（熱硬化剤） からなるものであり、（１）〜（３）の組み合せでネガ
レジストが形成される。The color resist materials described as Examples 1 and 2 are (1) a binder polymer having a structure of a carboxyl group or a carboxylic acid anhydride, (2) a polyfunctional monomer having two or more polymerizable double bonds ( 3) Photopolymerization initiator (4) Dye (pigment, dye) (5) It is composed of a compound having two or more epoxy groups (thermosetting agent), and the combination of (1) to (3) provides a negative resist. It is formed.
【００２５】以下、上記（１）〜（５）の構成材料で本
発明に好ましく使用される材料を以下に示す。 （１）バインダーポリマー スチレン、（メタ）アクリル酸メチル、（メタ）アクリ
ル酸エチル、（メタ）アクリル酸プロピル、（メタ）ア
クリル酸ブチル、（メタ）アクリル酸シクロヘキシル、
（メタ）アクリル酸ベンジル等の水不溶性のポリマーを
あたえるモノマーと（メタ）アクリル酸、無水マレイン
酸等のカルボキシル基または無水カルボン酸の構造を有
するモノマーとの共重合物（該ポリマーによりアルカリ
水溶液での現像が可能となる） （２）多官能モノマー エチレングリコールジアクリレート、ビスフェノールＡ
ジアクリレート、トリメチロールプロパントリアクリレ
ート、ジトリメチロールプロパンテトラアクリレート、
ペンタエリスリトールトリアクリレート、ジペンタエリ
スリトールヘキサアクリレート等の重合可能な２重結合
を２つ以上有するモノマー（該モノマーを光重合させる
ことにより露光部を現像液に不溶化させることができ
る） （３）光重合開始剤 ベンジル、ベンゾフェノン、ベンゾインエチルエーテ
ル、ベンジルジメチルケタール、2,4−ジエチルチオキ
サントン等の光によりラジカルを発生する化合物（該開
始剤より発生したラジカルが多官能モノマーの重合を開
始させる）（４）色素 前述のように、解像度の点で染料の使用が好ましい。Materials which are preferably used in the present invention among the constituent materials (1) to (5) are shown below. (1) Binder polymer Styrene, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, cyclohexyl (meth) acrylate,
Copolymer of a monomer giving a water-insoluble polymer such as benzyl (meth) acrylate and a monomer having a carboxyl group or a carboxylic acid anhydride structure such as (meth) acrylic acid or maleic anhydride (2) Polyfunctional monomer ethylene glycol diacrylate, bisphenol A
Diacrylate, trimethylolpropane triacrylate, ditrimethylolpropane tetraacrylate,
Monomers having two or more polymerizable double bonds such as pentaerythritol triacrylate and dipentaerythritol hexaacrylate (the exposed portion can be insolubilized in a developing solution by photopolymerizing the monomers) (3) Photopolymerization Initiators Compounds that generate radicals by light such as benzyl, benzophenone, benzoin ethyl ether, benzyl dimethyl ketal, and 2,4-diethylthioxanthone (radicals generated from the initiator initiate polymerization of polyfunctional monomer) (4) Dye As mentioned above, the use of a dye is preferable in terms of resolution.
【００２６】油溶性染料、分散染料、酸性染料、塩基性
染料、直接染料、その他種々の染料が使用可能であり、
主として使用する有機溶剤に対する溶解性と分光特性の
観点で選択される。 （５）エポキシ基を２つ以上有する化合物 ビスフェノールＡジグリシジルエーテル、エチレングリ
コールジグリシジルエーテル、ブタンジオールジグリシ
ジルエーテル、ヘキサンジオールジグリシジルエーテ
ル、ジヒドロキシビフェニルジグリシジルエーテル、フ
タル酸ジグリシジルエステル、Ｎ，Ｎ−ジグリシジルア
ニリン等 該化合物の添加が本発明の重要な点であり、熱硬化剤と
して作用する。すなわち、加熱時にバインダーポリマー
のカルボキシル基または無水カルボン酸基とエポキシ基
が反応して架橋構造となる。Oil-soluble dyes, disperse dyes, acid dyes, basic dyes, direct dyes, and various other dyes can be used.
It is selected mainly from the viewpoint of solubility in the organic solvent used and spectral characteristics. (5) Compound having two or more epoxy groups Bisphenol A diglycidyl ether, ethylene glycol diglycidyl ether, butanediol diglycidyl ether, hexanediol diglycidyl ether, dihydroxybiphenyl diglycidyl ether, phthalic acid diglycidyl ester, N, N -Diglycidylaniline etc. Addition of the compound is an important point of the present invention and acts as a thermosetting agent. That is, during heating, the carboxyl group or carboxylic acid anhydride group of the binder polymer reacts with the epoxy group to form a crosslinked structure.
【００２７】エポキシ樹脂とよばれている化合物は全て
この部類に属する。このような化合物は一般に多価アル
コール、多価フェノール、多価カルボン酸、芳香族アミ
ンとエピクロルヒドリンを反応させることにより得るこ
とができる。All compounds called epoxy resins belong to this class. Such a compound can be generally obtained by reacting a polyhydric alcohol, a polyhydric phenol, a polycarboxylic acid, an aromatic amine and epichlorohydrin.
【００２８】実施例３ 本発明のカラーレジスト材料の第３実施例として、まず
下記組成でマゼンタフィルタ形成感光液とした。Example 3 As a third example of the color resist material of the present invention, first, a magenta filter forming photosensitive solution having the following composition was prepared.
【００２９】スチレン ／無水カルホ゛ン酸共重合物 ：１００部（バインダ
ーポリマー）ヘ゜ンタエリスリトールトリアクリレート ：１００部（多官能モ
ノマー） 2,4−シ゛エチルチオキサントン ： １０部（光重合開
始剤） ｐ−シ゛メチルアミノ安息香酸エチル ： ５部（光重合促
進剤） Solvent Red １３２（商品名） ： ４０部（マゼンタ
色素）ヘキサメトキシメチルメラミン ： ２０部（熱硬化
剤）シクロヘキサノン ：８００部（溶剤） また、上記組成と同様の組成で、色素のみを変更してイ
エロー形成感光液及びシアン形成感光液を用意した。Styrene / carbonic anhydride copolymer: 100 parts (binder polymer) pentaerythritol triacrylate: 100 parts (polyfunctional monomer) 2,4-diethylthioxanthone: 10 parts (photopolymerization initiator) p-dimethylaminobenzoic acid Ethyl acid: 5 parts (photopolymerization accelerator) Solvent Red 132 (trade name): 40 parts (magenta dye) hexamethoxymethylmelamine: 20 parts (thermosetting agent) cyclohexanone: 800 parts (solvent) Further, the same as the above composition A yellow-forming photosensitive liquid and a cyan-forming photosensitive liquid were prepared by changing only the dye with the above composition.
【００３０】Solvent Yellow ８９（イエロー色素） Solvent Blue ３８（シアン色素） 固体撮像素子が形成されたシリコンウエハ上に、上記の
如き組成で予め用意されたマゼンタ感光液をスピンコー
ト法により塗布して、１００℃の温度で２分間プリベー
クの後、カラーフィルタを形成する箇所に紫外線を照射
してパターン露光を行った。次いで、炭酸ナトリウム水
溶液で現像することにより、マゼンタフィルタを形成し
た。その後、ポストベークを行い、該マゼンタを熱硬化
した。このポストベークにはホットプレート２枚を使用
し、１段目を１５０℃，９０秒、２段目を１８０℃，９
０秒とした。この際、このポストベークの熱処理による
マゼンタフィルタの分光スペクトルの変化は観察されな
かった。Solvent Yellow 89 (yellow dye) Solvent Blue 38 (cyan dye) A magenta photosensitive liquid prepared in advance with the above composition is applied onto a silicon wafer on which a solid-state image pickup device is formed by spin coating, After pre-baking at a temperature of 100 ° C. for 2 minutes, ultraviolet rays were radiated to the area where the color filter was to be formed to perform pattern exposure. Then, a magenta filter was formed by developing with a sodium carbonate aqueous solution. After that, post-baking was performed to thermally cure the magenta. Two hot plates were used for this post bake, the first stage was 150 ° C for 90 seconds, and the second stage was 180 ° C for 9 seconds.
It was set to 0 seconds. At this time, no change in the spectral spectrum of the magenta filter due to the heat treatment of the post bake was observed.
【００３１】次に同様に、上記の如き組成で予め用意さ
れたイエロー感光液を、スピンコート法により塗布して
同様のリソグラフィープロセスを用いてイエローフィル
タを形成した。このイエローフィルタ形成工程におい
て、マゼンタ色素の溶出は観察されず良好であった。Similarly, a yellow photosensitive solution prepared in advance with the above composition was applied by spin coating, and a yellow filter was formed using the same lithographic process. In this yellow filter forming step, elution of the magenta dye was not observed and was good.
【００３２】また、現像後のイエローフィルタのポスト
ベークによる分光スペクトルの変化も観察されなかっ
た。Further, no change in the spectral spectrum due to post-baking of the yellow filter after development was observed.
【００３３】次に同様に、上記の如き組成で予め用意さ
れたシアン感光液を、スピンコート法により塗布して、
同様のリソグラフィープロセスを用いてシアンフィルタ
を形成した。Similarly, a cyan photosensitive solution prepared in advance with the above composition is applied by spin coating,
A cyan filter was formed using the same lithographic process.
【００３４】このシアンフィルタ形成工程において、マ
ゼンタ、イエロー色素の溶出は観察されず良好であっ
た。In this cyan filter forming step, elution of magenta and yellow dyes was not observed and was good.
【００３５】また、現像後のシアンフィルタのポストベ
ークによる分光スペクトルの変化も観察されなかった。Further, no change in the spectral spectrum due to post-baking of the cyan filter after development was observed.
【００３６】以上の工程により、固体撮像素子上に、マ
ゼンタ、イエロー、シアンの３色からなるカラーフィル
タを形成することができた。Through the above steps, a color filter composed of three colors of magenta, yellow and cyan could be formed on the solid-state image pickup device.
【００３７】なお、カラーフィルタを保護するために、
引き続きオーバーコート層を形成しても良い。さらに、
感度向上のために画素毎にマイクロレンズを形成しても
良い。また、カラーフィルタの下に平坦化層を設けても
良い。In order to protect the color filter,
An overcoat layer may be subsequently formed. further,
A microlens may be formed for each pixel in order to improve sensitivity. A flattening layer may be provided under the color filter.
【００３８】上記実施例３として説明したカラーレジス
ト材料は、 （１）カルボキシル基または無水カルボン酸の構造を有
するバインダーポリマー （２）重合可能な２重結合を２つ以上有する多官能モノ
マー （３）光重合開始剤 （４）色素（染料） （５）メラミン樹脂（熱硬化剤） からのものであり、（１）〜（３）の組み合せでネガレ
ジストが形成される。The color resist material described as Example 3 above includes (1) a binder polymer having a structure of a carboxyl group or a carboxylic acid anhydride (2) a polyfunctional monomer having two or more polymerizable double bonds (3) Photopolymerization initiator (4) Dye (dye) (5) Melamine resin (thermosetting agent), and the combination of (1) to (3) forms a negative resist.
【００３９】以下、上記（１）〜（５）の構成材料で本
発明に好ましく使用される材料、特に（１）〜（４）に
ついては、実施例１及び２と同一であり、（５）のメラ
ミン樹脂は、以下の通りである。Hereinafter, the materials preferably used in the present invention among the constituent materials (1) to (5), particularly (1) to (4), are the same as those in Examples 1 and 2, and (5) The melamine resin of is as follows.
【００４０】メラミン樹脂とは、メラミンをメチロール
化（通常はホルムアルデヒドを使用）し、さらに必要に
応じてアルキル化（アルコールでエーテル化する）して
得られる化合物の総称である。メラミン樹脂は本組成物
において熱硬化剤として作用する。すなわち、バインダ
ーポリマーのカルボキシル基とメラミン樹脂のメチロー
ル基が加熱時に反応し、架橋構造となる。The melamine resin is a general term for compounds obtained by converting melamine into methylol (usually formaldehyde is used) and, if necessary, alkylating (etherifying with alcohol). The melamine resin acts as a thermosetting agent in the composition. That is, the carboxyl group of the binder polymer and the methylol group of the melamine resin react with each other when heated to form a crosslinked structure.
【００４１】[0041]
【発明の効果】以上、説明したように、本発明によれ
ば、従来より低いポストベーク（熱処理）温度でカラー
フィルタを形成することができる。そのため、カラーフ
ィルタ形成のためのカラーレジスト材料の色素の選択範
囲が拡がり、固体撮像素子のような微細パターンのカラ
ーフィルタを製造することができる。As described above, according to the present invention, a color filter can be formed at a lower post-baking (heat treatment) temperature than ever before. Therefore, the selection range of the dye of the color resist material for forming the color filter is expanded, and a color filter having a fine pattern such as a solid-state image sensor can be manufactured.
Claims (4)
するバインダーポリマー、（２）重合可能な２重結合を
２つ以上有する多官能モノマー、（３）光重合開始剤、
（４）色素、（５）熱硬化剤、からなることを特徴とす
るカラーレジスト材料。1. Elements (1) to (5) shown below: (1) a binder polymer having a structure of a carboxyl group or a carboxylic acid anhydride, (2) a polyfunctional monomer having two or more polymerizable double bonds. , (3) photopolymerization initiator,
A color resist material comprising (4) a dye and (5) a thermosetting agent.
する化合物であることを特徴とする請求項１記載のカラ
ーレジスト材料。2. The color resist material according to claim 1, wherein the thermosetting agent is a compound having two or more epoxy groups.
を特徴とする請求項１記載のカラーレジスト材料。3. The color resist material according to claim 1, wherein the thermosetting agent is a melamine resin.
請求項１記載のカラーレジスト材料。4. The color resist material according to claim 1, wherein the dye is a dye.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22725692A JPH0675375A (en) | 1992-08-26 | 1992-08-26 | Color resist material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22725692A JPH0675375A (en) | 1992-08-26 | 1992-08-26 | Color resist material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0675375A true JPH0675375A (en) | 1994-03-18 |
Family
ID=16857974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22725692A Pending JPH0675375A (en) | 1992-08-26 | 1992-08-26 | Color resist material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0675375A (en) |
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-
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|---|---|---|---|---|
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