JPH0715522B2 - Aspherical mirror for laser - Google Patents
Aspherical mirror for laserInfo
- Publication number
- JPH0715522B2 JPH0715522B2 JP63130973A JP13097388A JPH0715522B2 JP H0715522 B2 JPH0715522 B2 JP H0715522B2 JP 63130973 A JP63130973 A JP 63130973A JP 13097388 A JP13097388 A JP 13097388A JP H0715522 B2 JPH0715522 B2 JP H0715522B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- reflecting mirror
- mirror
- substrate
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 17
- 229910052750 molybdenum Inorganic materials 0.000 claims description 15
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 13
- 239000011733 molybdenum Substances 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 description 14
- 239000010931 gold Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は、CO2レーザ、COレーザなどの赤外レーザに
用いられるレーザ反射鏡に関するものである。TECHNICAL FIELD The present invention relates to a laser reflecting mirror used for an infrared laser such as a CO 2 laser or a CO laser.
［従来の技術］ 従来の赤外レーザ用反射鏡としては、大きく分けて２つ
のタイプがある。１つのタイプは、鏡面加工されたCuま
たはMoの反射鏡基板を用いるものである。Cuは、被加工
性および熱伝導性等の性質に優れ、かつ赤外レーザの理
論反射率も99％以上と高く、また素材価格も安いため、
最も多く用いられている材質である。Cuは鏡面加工した
ままの状態で、レーザ反射鏡として使用されることもあ
るが、銅表面が酸化しやすいため、第１図に示すよう
に、Au薄膜２をめっきやイオンプレーティングなどの方
法で、Cu基板１上に形成して使用している。また、硬度
を増加させるため、第２図に示すように、Ni薄膜３をCu
基板１上に形成し、このNi薄膜３上にAu薄膜２を形成す
ることも行なわれている。[Prior Art] There are roughly two types of conventional infrared laser reflecting mirrors. One type uses a mirror-finished Cu or Mo reflector substrate. Cu has excellent properties such as machinability and thermal conductivity, the infrared laser has a high theoretical reflectance of 99% or more, and the material price is low.
It is the most used material. Cu may be used as a laser reflecting mirror in a state where it is mirror-finished, but since the copper surface is easily oxidized, as shown in Fig. 1, the Au thin film 2 is plated or ion plated. Then, it is used by being formed on the Cu substrate 1. Further, in order to increase the hardness, as shown in FIG.
It is also practiced to form it on the substrate 1 and then form the Au thin film 2 on this Ni thin film 3.
MoもCuと同様に鏡面加工して用いられるが、他の材質に
比べ硬度が高いので、反射鏡として使用している際にス
パッタなどの汚れが付いても、ブラシ等で汚れを擦り落
とすことができるという特徴がある。Moの場合には、そ
の硬度を維持するため、通常Auなどの薄膜を形成しな
い。Mo is also used as a mirror finish like Cu, but since it has a higher hardness than other materials, even if it gets dirty such as spatter when used as a reflecting mirror, you should scrape off the dirt with a brush etc. There is a feature that you can In the case of Mo, in order to maintain its hardness, a thin film such as Au is not usually formed.
もう１つのタイプのものは鏡面加工されたSiやGeの反射
鏡基板を用いるものである。このタイプのレーザ反射鏡
では、金属基板の反射率をさらに向上させる目的で、第
３図に示すように、SiまたはGe基板４の上に、Auまたは
Ag薄膜５を形成し、この薄膜の上にThF4やZnSeの誘電体
薄膜を多数層積層した誘電体多層膜６を形成して使用し
ている。The other type uses a mirror-finished Si or Ge reflector substrate. In this type of laser reflector, in order to further improve the reflectance of the metal substrate, as shown in FIG.
An Ag thin film 5 is formed, and a dielectric multilayer film 6 in which a large number of dielectric thin films of ThF 4 and ZnSe are laminated is formed on this thin film and used.
［発明が解決しようとする課題］ しかしながら、このような従来のレーザ反射鏡には、以
下に述べるような種々の欠点があった。[Problems to be Solved by the Invention] However, such a conventional laser reflecting mirror has various drawbacks as described below.
まず、Cuを基板とするレーザ反射鏡では、Cuの硬度が低
いため、使用中表面が汚れた場合にガーゼ等で拭き取ろ
うとすると、表面に傷がついたり、あるいは表面のAu薄
膜が剥がれてしまい、反射性能が劣化してしまうという
欠点があった。First, in a laser reflecting mirror using Cu as the substrate, the hardness of Cu is low, so if you try to wipe it off with gauze etc. when the surface is dirty during use, the surface will be scratched or the Au thin film on the surface will peel off. However, there is a drawback that the reflection performance is deteriorated.
また、Moを基板とするレーザ反射鏡は、Cuに比べると硬
度がはるかに高く、使用の際汚れが付いても傷をつける
ことなくガーゼ等で拭き取ることが可能であるが、材料
は高価であり、また研磨仕上げによらなければ鏡面加工
することができず、非球面を形成する際に、超精密切削
加工ができないという欠点があった。In addition, the laser reflecting mirror using Mo as a substrate has much higher hardness than Cu, and it can be wiped off with a gauze or the like without damage even if it gets dirty during use, but the material is expensive. In addition, there is a drawback in that mirror finishing cannot be performed without polishing finishing, and ultra-precision cutting cannot be performed when forming an aspherical surface.
CuやMoはそれぞれ比重が8.76、10.22と重いため、これ
らを基板とするレーザ反射鏡は取付けにくく、作業性が
悪いという欠点もあった。Since Cu and Mo have heavy specific gravities of 8.76 and 10.22, respectively, there is a drawback in that it is difficult to attach a laser reflecting mirror using these as a substrate and workability is poor.
また、SiまたはGe基板上にAuまたはAg薄膜を形成しその
上に誘電体多層膜を形成したレーザ反射鏡の場合には、
誘電体多層膜が、銅基板上に金薄膜を形成したものよ
り、さらに剥がれやすく、使用の際表面が汚れてこれを
除去しようとすると、誘電体多層膜が容易に剥がれてし
まうという欠点があった。Further, in the case of a laser reflecting mirror in which an Au or Ag thin film is formed on a Si or Ge substrate and a dielectric multilayer film is formed thereon,
The dielectric multilayer film is easier to peel off than the one in which a gold thin film is formed on a copper substrate, and the surface of the dielectric multilayer film becomes dirty during use, and if you try to remove it, the dielectric multilayer film will easily peel off. It was
この発明の目的は、かかる従来のレーザ反射鏡の欠点を
解消し、安価かつ軽量で、しかも表面の汚れを落しても
表面を傷つけることのないレーザ反射鏡を提供すること
にある。An object of the present invention is to solve the drawbacks of the conventional laser reflecting mirror, to provide a laser reflecting mirror which is inexpensive and lightweight and which does not damage the surface even if the surface is cleaned.
［課題を解決するための手段および作用］ この発明のレーザ反射鏡は、レーザ用非球面鏡であって
非球面に加工された、アルミニウムまたはアルミニウム
を主成分とする合金からなる反射鏡基板の上に、モリブ
デンの薄膜を形成したことを特徴としている。[Means and Actions for Solving the Problems] A laser reflecting mirror of the present invention is an aspherical mirror for a laser, which is formed on a reflecting mirror substrate made of aluminum or an alloy containing aluminum as a main component. The feature is that a thin film of molybdenum is formed.
この発明では、反射鏡基板にアルミニウムまたはその合
金を使用しているので、被加工性が良く、研磨による鏡
面加工はもちろんのことながら、超精密旋盤による放物
面などの非鏡面の球面加工仕上げも可能である。また、
アルミニウムまたはその合金を反射鏡基板に用いている
ので、安価に製造することができる。さらに、アルミニ
ウムまたはその合金を基板に用いているので、熱伝導性
に優れており、レーザ反射鏡として使用する際に水冷に
よる反射鏡の冷却効果を最大限に発揮させることができ
る。すなわち、レーザによる反射鏡の温度上昇を小さく
抑えることができ、熱膨張による形状変化を非常に小さ
くすることができるので、レーザビームのモードを極め
て安定化させることができる。In this invention, since aluminum or its alloy is used for the reflecting mirror substrate, it has good workability, not only mirror-like surface processing by polishing, but also non-mirror-like spherical surface finishing such as parabolic surface by ultra-precision lathe. Is also possible. Also,
Since aluminum or its alloy is used for the reflector substrate, it can be manufactured at low cost. Furthermore, since aluminum or its alloy is used for the substrate, it has excellent thermal conductivity, and when used as a laser reflecting mirror, the cooling effect of the reflecting mirror by water cooling can be maximized. That is, the temperature rise of the reflecting mirror due to the laser can be suppressed to a small level, and the shape change due to thermal expansion can be made extremely small, so that the mode of the laser beam can be extremely stabilized.
さらに、アルミニウムの比重は、モリブデンに比べ約４
分の１、銅に比べ約３分の１であるので、従来のレーザ
反射鏡に比べ軽量化させることができる。このため、レ
ーザ反射鏡の取付けや取り外しの作業性が向上する。ま
た、NC装置等により、レーザ三次元；二次元加工機にこ
のレーザ反射鏡を装着した場合、レーザ反射鏡が軽量で
あるため従来に比べ慣性力を減らすことができ、従来よ
りも位置制御性を向上させ、また駆動系の小型化も図る
ことができる。Furthermore, the specific gravity of aluminum is about 4 compared to molybdenum.
Since it is one-third or about one-third that of copper, it can be made lighter than the conventional laser reflecting mirror. Therefore, the workability of attaching and detaching the laser reflecting mirror is improved. Also, when this laser reflecting mirror is mounted on a laser three-dimensional; two-dimensional processing machine using an NC device, etc., the weight of the laser reflecting mirror can reduce the inertial force compared with the conventional one, and the position controllability is better than the conventional one. Can be improved, and the drive system can be downsized.
この発明のレーザ反射鏡では、反射鏡基板の上にモリブ
デンの薄膜を形成しているので、モリブデンを基板とし
たレーザ反射鏡と同様に、その表面の硬度が高くなる。
すなわち、ビッカース硬度で250程度になる。したがっ
て、反射鏡を使用中、スパッタやミストの焼き付き等が
生じても、トリクレンやアルコールなどの溶媒中で拭き
取り、表面を洗浄することができる。また、ナイロンブ
ラシ等でスパッタ等の汚れを除去することもできる。ま
た、モリブデンの融点は2610℃と高いので、使用時にス
パッタや異物等が付き、レーザの照射により焼き付きや
蒸発を起こしても、モリブデンが溶けることがなく、損
傷を生じるおそれがない。In the laser reflecting mirror of the present invention, since the thin film of molybdenum is formed on the reflecting mirror substrate, the hardness of the surface becomes high as in the laser reflecting mirror using the molybdenum substrate.
That is, the Vickers hardness is about 250. Therefore, even if spatter or mist sticking occurs during use of the reflecting mirror, the surface can be cleaned by wiping it with a solvent such as trichlene or alcohol. Further, dirt such as spatter can be removed with a nylon brush or the like. Further, since the melting point of molybdenum is as high as 2610 ° C., even if spatter, foreign matter, or the like is attached during use, and even if seizure or evaporation occurs due to laser irradiation, molybdenum does not melt and there is no risk of damage.
この発明において、モリブデンの薄膜は、たとえばイオ
ンプレーティングにより形成することができる。また、
モリブデンの薄膜の厚みは、0.1〜20μｍの範囲内であ
ることが好ましい。0.1μｍより厚みが少ないと、モリ
ブデンを基板としたレーザ反射鏡のような硬度を期待す
ることができず、また20μｍより厚くしても厚みに比例
した、より顕著な効果が得られなくなるからである。In the present invention, the molybdenum thin film can be formed by, for example, ion plating. Also,
The thickness of the molybdenum thin film is preferably in the range of 0.1 to 20 μm. If the thickness is less than 0.1 μm, the hardness like that of a laser reflecting mirror using molybdenum as a substrate cannot be expected, and if the thickness is more than 20 μm, a more remarkable effect proportional to the thickness cannot be obtained. is there.
［実施例］ 純度99.98％のアルミニウムを用いて、直径40mm焦点距
離150mmの軸外し放射面鏡の基板をSPDT加工で切削し、R
a＝0.07μｍ、面精度λ/20（λ＝10.6μｍ）とした。[Example] Using aluminum having a purity of 99.98%, a substrate of an off-axis radiation mirror having a diameter of 40 mm and a focal length of 150 mm was cut by SPDT processing, and R
a = 0.07 μm and surface accuracy λ / 20 (λ = 10.6 μm).
次に、この軸外し放射面鏡の基板の上に、純度99.99％
のモリブデンペレットを原料にして、イオンプレーティ
ング法により厚み５μｍのモリブデン薄膜を形成した。
得られた放物面鏡のCO2レーザの反射率は98.2％であ
り、表面のビッカース硬度は245であった。Next, on the substrate of this off-axis radiation mirror, purity 99.99%
A molybdenum thin film having a thickness of 5 μm was formed by an ion plating method using the molybdenum pellets of No. 3 as a raw material.
The CO 2 laser reflectance of the obtained parabolic mirror was 98.2%, and the surface Vickers hardness was 245.
この放物面鏡を、出力5kwのCO2レーザ加工機の加工ヘッ
ドに取付け、鉄系材料の切断工程に使用した。使用につ
れて、放物面鏡の表面ではスパッタや工場雰囲気中のミ
ストの焼き付きを生じた。このような放物面鏡の表面に
付着したスパッタやミストを、水中でナイロンブラシに
より擦ったところ、ほぼ完全に除去することができた。
この後、放物面鏡の反射率および面精度を測定したとこ
ろ初期の値と同じλ/20および98.2％の値が得られた。This parabolic mirror was attached to the processing head of a CO 2 laser processing machine with an output of 5 kw and used in the cutting process of ferrous materials. As it was used, spatter and seizure of mist in the factory atmosphere occurred on the surface of the parabolic mirror. The spatter and mist adhering to the surface of such a parabolic mirror were rubbed with a nylon brush in water, and could be almost completely removed.
After that, when the reflectance and surface accuracy of the parabolic mirror were measured, the same values as the initial values of λ / 20 and 98.2% were obtained.
またこの実施例で用いた放物面鏡は、従来使用していた
Cuの放物面鏡に比べ、重量が約３分の１であり、取付け
取外しの作業性が大幅に向上することが確認された。The parabolic mirror used in this example has been used conventionally.
Compared with the Cu parabolic mirror, the weight is about one-third, and it was confirmed that the workability of mounting and dismounting is greatly improved.
さらに、放物面鏡を取付けた加工ヘッドを移動させて加
工する、二次元NC制御CO2レーザ加工機に、上述の実施
例の放物面鏡を取付けた。加工ヘッドの移動速度に対す
るNC指令位置の追随性を測定したところ、従来のCuの放
物面鏡を取付けた場合には3m/秒で±0.3mmであったもの
が、3m/秒で±0.1mmとなり、従来よりもはるかに追随性
が向上することが明らかになった。Further, the parabolic mirror of the above-described embodiment was attached to a two-dimensional NC control CO 2 laser processing machine which moves and processes the processing head to which the parabolic mirror is attached. When the followability of the NC command position with respect to the moving speed of the processing head was measured, it was ± 0.3 mm at 3 m / s when it was ± 0.3 mm at 3 m / s when the conventional Cu parabolic mirror was attached. mm, and it has been clarified that the followability is improved much more than before.
［発明な効果］ 以上説明したように、この発明のレーザ反射鏡は、安価
で軽量なアルミニウムまたはアルミニウムを主成分とす
る合金を反射鏡基板に使用するため、低価格でかつ軽量
化を図ることができる。また、この発明のレーザ反射鏡
では、モリブデンの薄膜が反射鏡基板の上に形成されて
いるため、表面の硬度が硬く、反射鏡使用の際に汚れが
付着しても、表面を損傷させることなくこの汚れを除去
することができる。[Advantageous Effects] As described above, the laser reflecting mirror of the present invention uses inexpensive or lightweight aluminum or an alloy containing aluminum as a main component for the reflecting mirror substrate. You can Further, in the laser reflecting mirror of the present invention, since the thin film of molybdenum is formed on the reflecting mirror substrate, the surface hardness is so hard that even if dirt is attached when the reflecting mirror is used, the surface is damaged. Without this dirt can be removed.
したがって、この発明のレーザ反射鏡は、CO2レーザやC
Oレーザなどの赤外レーザ用のレーザ反射鏡として使用
すると特に有効である。Therefore, the laser reflecting mirror of the present invention is a CO 2 laser or C
It is particularly effective when used as a laser reflecting mirror for infrared laser such as O laser.
第１図は、従来のレーザ反射鏡の一例を示す断面図であ
る。第２図は、従来のレーザ反射鏡の他の例を示す断面
図である。第３図は、従来のレーザ反射鏡のさらに他の
例を示す断面図である。FIG. 1 is a sectional view showing an example of a conventional laser reflecting mirror. FIG. 2 is a sectional view showing another example of a conventional laser reflecting mirror. FIG. 3 is a sectional view showing still another example of a conventional laser reflecting mirror.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 実開 昭56−52701（ＪＰ，Ｕ) Ａｐｐｌｉｅｄ Ｏｐｔｉｃｓ Ｖｏ ｌ．19 Ｎｏ．20（15 Ｏｃｔｏｂｅｒ 1980）Ｐ．3562〜3583 ─────────────────────────────────────────────────── ───Continued from the front page (56) Bibliography Sho 56-52701 (JP, U) Applied Optics Vol. 19 No. 20 (15 October 1980) P. 3562 ~ 3583
Claims (1)
アルミニウムを主成分とする合金からなる反射鏡基板の
上に、厚みが0.1μｍ〜20μｍであるモリブデンの薄膜
を形成したことを特徴とする、レーザ用非球面鏡。1. A thin film of molybdenum having a thickness of 0.1 .mu.m to 20 .mu.m is formed on a reflecting mirror substrate made of aluminum or an alloy containing aluminum as a main component and processed into an aspherical surface. Aspherical mirror for laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63130973A JPH0715522B2 (en) | 1988-05-27 | 1988-05-27 | Aspherical mirror for laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63130973A JPH0715522B2 (en) | 1988-05-27 | 1988-05-27 | Aspherical mirror for laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01300203A JPH01300203A (en) | 1989-12-04 |
| JPH0715522B2 true JPH0715522B2 (en) | 1995-02-22 |
Family
ID=15046931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63130973A Expired - Lifetime JPH0715522B2 (en) | 1988-05-27 | 1988-05-27 | Aspherical mirror for laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0715522B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312504A (en) * | 1988-06-13 | 1989-12-18 | Sumitomo Electric Ind Ltd | Production of laser reflecting mirror |
| JP3002212B2 (en) * | 1989-11-30 | 2000-01-24 | 株式会社東芝 | Reflector |
| CH683188A5 (en) * | 1991-01-11 | 1994-01-31 | Alusuisse Lonza Services Ag | Aluminum surfaces. |
| CN107380072A (en) * | 2017-07-27 | 2017-11-24 | 信利光电股份有限公司 | A kind of electrochromic rearview structure |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5652701U (en) * | 1979-09-27 | 1981-05-09 |
-
1988
- 1988-05-27 JP JP63130973A patent/JPH0715522B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| ＡｐｐｌｉｅｄＯｐｔｉｃｓＶｏｌ．１９Ｎｏ．２０（１５Ｏｃｔｏｂｅｒ１９８０）Ｐ．３５６２〜３５８３ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01300203A (en) | 1989-12-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1178466A (en) | Laser mirrors | |
| KR100755582B1 (en) | High precision mirror, and a method of making it | |
| KR920010774B1 (en) | Process for manufacturing a corrosion resistant vacuum metallized article | |
| US9971073B2 (en) | Enhanced performance metallic based optical mirror substrates | |
| US4101365A (en) | Process of making high speed multifaceted polygonal scanners | |
| CA2313438C (en) | High quality optical surface and method of producing same | |
| JPH0534650B2 (en) | ||
| US4944581A (en) | Rear face reflection mirror of multilayer film for synthetic resin optical parts | |
| US4475794A (en) | Aluminum, aluminum oxide, cromium, gold mirror | |
| JPH0715522B2 (en) | Aspherical mirror for laser | |
| US4772111A (en) | Optical mirror with c/c composite substrate and an intermediate layer of molydenum, tungsten, or niobium 40 to 100 μm thick | |
| JPH0715523B2 (en) | Aspherical mirror for laser | |
| US5323266A (en) | Electroformed buried gratings for high-power shared aperture systems | |
| JPH0263002A (en) | laser reflector | |
| JP3033567B1 (en) | Protective window member for laser processing, reproducing method thereof, and assembled lens for laser processing | |
| US4403828A (en) | Damage resistant coated laser mirror | |
| JPS5895301A (en) | Laser total reflection mirror | |
| JPH0234009B2 (en) | ||
| US4556285A (en) | Reflection mirror for optical instrument | |
| KR102438291B1 (en) | Optical Components and Laser Processing Machines | |
| JPH03126644A (en) | Production of reflecting mirror | |
| Higashi et al. | New machining method for making precise and very smooth mirror surfaces made from Cu and Al alloys for synchrotron radiation optics | |
| JPH01312504A (en) | Production of laser reflecting mirror | |
| JPS58184902A (en) | Reflecting mirror | |
| SU1756846A1 (en) | Metallic mirror manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090222 Year of fee payment: 14 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090222 Year of fee payment: 14 |