JPH0715523B2 - Aspherical mirror for laser - Google Patents
Aspherical mirror for laserInfo
- Publication number
- JPH0715523B2 JPH0715523B2 JP63135024A JP13502488A JPH0715523B2 JP H0715523 B2 JPH0715523 B2 JP H0715523B2 JP 63135024 A JP63135024 A JP 63135024A JP 13502488 A JP13502488 A JP 13502488A JP H0715523 B2 JPH0715523 B2 JP H0715523B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- reflecting mirror
- substrate
- mirror
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 239000010949 copper Substances 0.000 claims description 20
- 239000010409 thin film Substances 0.000 claims description 19
- 229910052750 molybdenum Inorganic materials 0.000 claims description 13
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 239000011733 molybdenum Substances 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は、CO2レーザ、COレーザなどの赤外レーザに
用いられるレーザ反射鏡に関するものである。TECHNICAL FIELD The present invention relates to a laser reflecting mirror used for an infrared laser such as a CO 2 laser or a CO laser.
［従来の技術］ 従来の赤外レーザ用反射鏡としては、大きく分けて２つ
のタイプがある。１つのタイプは、鏡面加工されたCuま
たはMoの反射鏡基板を用いるものである。Cuは、被加工
性および熱伝導性等の性質に優れ、かつ赤外レーザの理
論反射率も99％以上と高く、また素材価格も安いため、
最も多く用いられている材質である。Cuは鏡面加工され
たままの状態で、レーザ反射鏡として使用されることも
あるが、Cu表面が酸化しやすいため、第１図に示すよう
に、Au薄膜２をめっきやイオンプレーティング等の方法
で、Cu基板１上に形成して使用している。また、硬度を
増加させるため、第２図に示すように、Ni薄膜３をCu基
板１上に形成し、このNi薄膜３上にAu薄膜２を形成する
ことも行なわれている。[Prior Art] There are roughly two types of conventional infrared laser reflecting mirrors. One type uses a mirror-finished Cu or Mo reflector substrate. Cu has excellent properties such as machinability and thermal conductivity, the infrared laser has a high theoretical reflectance of 99% or more, and the material price is low.
It is the most used material. Cu is sometimes used as a laser reflecting mirror in a state where it is mirror-finished, but since the Cu surface is easily oxidized, as shown in FIG. 1, the Au thin film 2 is plated or ion-plated. It is formed on the Cu substrate 1 by the method and used. Further, in order to increase the hardness, as shown in FIG. 2, a Ni thin film 3 is formed on a Cu substrate 1 and an Au thin film 2 is formed on the Ni thin film 3.
MoもCuと同様に鏡面加工して用いられるが、他の材質に
比べ硬度が高いので、反射鏡として使用している際にス
パッタなどの汚れが付いても、ブラシ等で汚れを擦り落
すことができるという特徴がある。Moの場合には、その
硬度を維持するため、通常Auなどの薄膜を形成しない。Mo is also used after being mirror-finished like Cu, but since it has a higher hardness than other materials, even if it gets dirty such as spatter when used as a reflecting mirror, you should scrape off the dirt with a brush etc. There is a feature that you can In the case of Mo, in order to maintain its hardness, a thin film such as Au is not usually formed.
もう１つのタイプのものは、鏡面加工されたSiやGeの反
射鏡基板を用いるものである。このタイプのレーザ反射
鏡では、金属基板の反射率をさらに向上させる目的で、
第３図に示すように、SiまたはGe基板４の上に、Auまた
はAg薄膜５を形成し、この薄膜の上にThF4やZnSeの誘電
体薄膜を多数層積層した誘電体多層膜６を形成して使用
している。The other type uses a mirror-finished Si or Ge reflector substrate. In this type of laser reflector, in order to further improve the reflectance of the metal substrate,
As shown in FIG. 3, an Au or Ag thin film 5 is formed on a Si or Ge substrate 4, and a dielectric multilayer film 6 in which a large number of dielectric thin films of ThF 4 and ZnSe are laminated is formed on this thin film. Formed and used.
［発明が解決しようとする課題］ しかしながら、このような従来のレーザ反射鏡には、以
下に述べるような種々の欠点があった。[Problems to be Solved by the Invention] However, such a conventional laser reflecting mirror has various drawbacks as described below.
まず、Cu基板の上にAu薄膜を形成したレーザ反射鏡で
は、使用中表面が汚れた場合にガーゼ等で拭取ろうとす
ると、表面のAu薄膜が剥がれてしまい、反射性能が劣化
してしまうという欠点があった。First, in a laser reflecting mirror with an Au thin film formed on a Cu substrate, if the surface is dirty during use and you try to wipe it off with gauze etc., the Au thin film on the surface will peel off and the reflection performance will deteriorate. There was a flaw.
また、Moを基板とするレーザ反射鏡は、Cuに比べると硬
度がはるかに高く、使用の際に汚れが付いても傷をつけ
ることなくガーゼ等で拭取ることが可能であるが、材料
が高価であり、また研磨仕上げによらなければ鏡面加工
することができず、非球面を形成する際に、超精密切削
加工ができないという欠点があった。In addition, the laser reflecting mirror using Mo as the substrate has much higher hardness than Cu, and even if it gets dirty during use, it can be wiped with gauze etc. without scratching, but the material is It is expensive, and it cannot be mirror-finished unless it is finished by polishing, and it has the drawback that ultra-precision cutting cannot be performed when forming an aspherical surface.
また、SiまたはGe基板上にAuまたはAg薄膜を形成し、そ
の上に誘電体多層膜を形成したレーザ反射鏡の場合に
は、誘電体多層膜が、銅基板の上に金薄膜を形成したも
のより、さらに剥がれやすく、使用の際表面が汚れてこ
れを除去しようとすると、誘電体多層膜が容易に剥がれ
てしまうという欠点があった。Further, in the case of a laser reflecting mirror in which an Au or Ag thin film is formed on a Si or Ge substrate and a dielectric multilayer film is formed thereon, the dielectric multilayer film forms a gold thin film on a copper substrate. There is a drawback that the dielectric multi-layer film is easily peeled off when the surface is soiled during use and an attempt is made to remove it.
この発明の目的は、かかる従来のレーザ反射鏡の欠点を
解消し、安価で、しかも表面の汚れを落しても表面を傷
つけることのないレーザ反射鏡を提供することにある。An object of the present invention is to solve the drawbacks of the conventional laser reflecting mirror, and to provide an inexpensive laser reflecting mirror which does not damage the surface even if the surface is cleaned.
［課題を解決するための手段および作用］ この発明のレーザ反射鏡は、レーザ用非球面鏡であっ
て、非球面に加工された、銅または銅を主成分とする合
金からなる反射鏡基板の上に、モリブデンの薄膜を形成
したことを特徴としている。[Means and Actions for Solving the Problem] A laser reflecting mirror of the present invention is an aspherical mirror for a laser, which is formed on a reflecting mirror substrate made of copper or an alloy containing copper as a main component. In addition, it is characterized in that a thin film of molybdenum is formed.
この発明では、反射鏡基板に銅またはその合金を使用し
ているので、被加工性が良く、研磨による鏡面加工はも
ちろんのことながら、超精密旋盤による放物面などの非
球面の鏡面加工仕上げも可能である。また、銅またはそ
の合金を反射鏡基板に用いているので、安価に製造する
ことができる。さらに、銅またはその合金を基板に用い
ているので、熱伝導性に優れており、レーザ反射鏡とし
て使用する際に水冷による反射鏡の冷却効果を最大限に
発揮させることができる。すなわち、レーザによる反射
鏡の温度上昇を小さく抑えることができ、熱膨張による
形状変化を非常に小さくすることができるので、レーザ
ビームのモードを極めて安定化させることができる。In this invention, since copper or its alloy is used for the reflecting mirror substrate, it has good workability, not only mirror finishing by polishing, but also finishing of aspherical surface such as parabolic surface by ultra-precision lathe. Is also possible. Moreover, since copper or its alloy is used for the reflector substrate, it can be manufactured at low cost. Furthermore, since copper or its alloy is used for the substrate, it has excellent thermal conductivity, and when used as a laser reflecting mirror, the cooling effect of the reflecting mirror by water cooling can be maximized. That is, the temperature rise of the reflecting mirror due to the laser can be suppressed to a small level, and the shape change due to thermal expansion can be made extremely small, so that the mode of the laser beam can be extremely stabilized.
この発明のレーザ反射鏡では、反射鏡基板の上にモリブ
デンの薄膜を形成しているので、モリブデンを基板とし
たレーザ反射鏡と同様に、その表面の硬度が高くなる。
すなわち、ビッカース硬度で250程度になる。したがっ
て、反射鏡を使用中、スパッタやミストの焼きつき等が
生じても、トリクレンやアルコール等の溶媒中で拭取
り、表面を洗浄することができる。また、ナイロンブラ
シ等でスパッタ等の汚れを除去することもできる。ま
た、モリブデンの融点は2610℃と高いので、使用時にス
パッタや異物等が付き、レーザの照射により焼きつきや
蒸発を起こしても、モリブデンに損傷を生じるおそれが
ない。In the laser reflecting mirror of the present invention, since the thin film of molybdenum is formed on the reflecting mirror substrate, the hardness of the surface becomes high as in the laser reflecting mirror using the molybdenum substrate.
That is, the Vickers hardness is about 250. Therefore, even if spatter or mist sticking occurs during use of the reflecting mirror, the surface can be cleaned by wiping in a solvent such as trichlene or alcohol. Further, dirt such as spatter can be removed with a nylon brush or the like. Further, since the melting point of molybdenum is as high as 2610 ° C., there is no risk of damaging the molybdenum even if spatter, foreign matter, or the like is attached during use and burning or evaporation occurs due to laser irradiation.
この発明において、モリブデンの薄膜は、たとえばイオ
ンプレーティングにより形成することができる。また、
モリブデンの薄膜の厚みは、0.1〜20μｍの範囲内であ
ることが好ましい。0.1μｍより厚みが少ないと、モリ
ブデンを基板としたレーザ反射鏡のような硬度を期待す
ることができず、また20μｍより厚くしても、厚みに比
例した、より顕著な効果が得られなくなるからである。In the present invention, the molybdenum thin film can be formed by, for example, ion plating. Also,
The thickness of the molybdenum thin film is preferably in the range of 0.1 to 20 μm. If the thickness is less than 0.1 μm, it is not possible to expect the hardness of a laser reflecting mirror using a molybdenum substrate, and even if it is thicker than 20 μm, a more remarkable effect proportional to the thickness cannot be obtained. Is.
［実施例］ 無酸素銅（OFHC）を用いて、直径40mm、焦点距離150mm
の軸外し放物面鏡の基板をSPDT加工で切削し、Ra＝0.08
μｍ、面精度λ120（λ＝10.6μｍ）とした。[Example] Using oxygen-free copper (OFHC), diameter 40 mm, focal length 150 mm
Ra = 0.08 by cutting the off-axis parabolic mirror substrate of SPDT processing
μm and surface accuracy λ120 (λ = 10.6 μm).
次に、この軸外し放物面鏡基板の上に、純度99.99％の
モリブデンペレットを原料として、イオンプレーティン
グ法により、厚み５μｍのモリブデン薄膜を形成した。
得られた放物面鏡のCO2レーザの反射率は98.3％であ
り、表面のビッカース硬度は248であった。Next, a molybdenum thin film having a thickness of 5 μm was formed on the off-axis parabolic mirror substrate by using an ion plating method using molybdenum pellets having a purity of 99.99%.
The CO 2 laser reflectance of the obtained parabolic mirror was 98.3%, and the surface Vickers hardness was 248.
この放物面鏡を、出力5kwのCO2レーザ加工機の加工ヘッ
ドに取付け、鉄系材料の切断工程に使用した。使用につ
れて、放物面鏡の表面ではスパッタや工場雰囲気中のミ
ストの焼きつきを生じた。このような放物面鏡の表面に
付着したスパッタやミストを、水中でナイロンブラシに
より擦ったところ、ほぼ完全に除去することができた。
この後、放物面鏡の反射率および面精度を測定したとこ
ろ、初期の値と同じλ/20および98.3％の値が得られ
た。This parabolic mirror was attached to the processing head of a CO 2 laser processing machine with an output of 5 kw and used in the cutting process of ferrous materials. As it was used, spatter and seizure of mist in the factory atmosphere occurred on the surface of the parabolic mirror. The spatter and mist adhering to the surface of such a parabolic mirror were rubbed with a nylon brush in water, and could be almost completely removed.
After that, when the reflectance and surface accuracy of the parabolic mirror were measured, the same values of λ / 20 and 98.3% as the initial values were obtained.
［発明の効果］ 以上説明したように、この発明のレーザ反射鏡は、安価
でかつ高いレーザ反射率を有する銅または銅を主成分と
する合金を反射鏡基板に使用しているため、低価格でか
つ高い反射率のレーザ反射鏡とすることができる。[Effects of the Invention] As described above, the laser reflector of the present invention uses copper or an alloy containing copper as a main component, which is inexpensive and has a high laser reflectivity, for the reflector substrate, and thus is inexpensive. In addition, a laser reflecting mirror having a high reflectance can be obtained.
また、この発明のレーザ反射鏡では、モリブデンの薄膜
が反射鏡基板の上に形成されているため、表面硬度が高
く、反射鏡使用の際に汚れが付着しても、表面を損傷さ
せることなくこの汚れを除去することができる。Further, in the laser reflecting mirror of the present invention, since the thin film of molybdenum is formed on the reflecting mirror substrate, the surface hardness is high, and even if dirt is attached when the reflecting mirror is used, the surface is not damaged. This dirt can be removed.
したがって、この発明のレーザ反射鏡は、CO2レーザやC
Oレーザなどの赤外レーザ用のレーザ反射鏡として使用
すると特に有用である。Therefore, the laser reflecting mirror of the present invention is a CO 2 laser or C
It is particularly useful when used as a laser reflecting mirror for an infrared laser such as an O laser.
第１図は、従来のレーザ反射鏡の一例を示す断面図であ
る。第２図は、従来のレーザ反射鏡の他の例を示す断面
図である。第３図は、従来のレーザ反射鏡のさらに他の
例を示す断面図である。FIG. 1 is a sectional view showing an example of a conventional laser reflecting mirror. FIG. 2 is a sectional view showing another example of a conventional laser reflecting mirror. FIG. 3 is a sectional view showing still another example of a conventional laser reflecting mirror.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 実開 昭56−52701（ＪＰ，Ｕ) Ａｐｐｌｉｅｄ Ｏｐｔｉｃｓ Ｖｏ ｌ．19 Ｎｏ．20（15 Ｏｃｔｏｂｅｒ 1980）Ｐ．3562〜3583 ─────────────────────────────────────────────────── ───Continued from the front page (56) Bibliography Sho 56-52701 (JP, U) Applied Optics Vol. 19 No. 20 (15 October 1980) P. 3562 ~ 3583
Claims (1)
とする合金からなる反射鏡基板の上に、厚みが0.1μｍ
〜20μｍであるモリブデンの薄膜を形成したことを特徴
とする、レーザ用非球面鏡。1. A reflecting mirror substrate made of copper or an alloy containing copper as a main component and having a thickness of 0.1 μm processed into an aspherical surface.
An aspherical mirror for a laser, characterized in that a thin film of molybdenum having a thickness of up to 20 μm is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63135024A JPH0715523B2 (en) | 1988-05-31 | 1988-05-31 | Aspherical mirror for laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63135024A JPH0715523B2 (en) | 1988-05-31 | 1988-05-31 | Aspherical mirror for laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01303404A JPH01303404A (en) | 1989-12-07 |
| JPH0715523B2 true JPH0715523B2 (en) | 1995-02-22 |
Family
ID=15142152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63135024A Expired - Lifetime JPH0715523B2 (en) | 1988-05-31 | 1988-05-31 | Aspherical mirror for laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0715523B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3002212B2 (en) * | 1989-11-30 | 2000-01-24 | 株式会社東芝 | Reflector |
| US5066611A (en) * | 1990-08-31 | 1991-11-19 | Micron Technology, Inc. | Method for improving step coverage of a metallization layer on an integrated circuit by use of molybdenum as an anti-reflective coating |
| DE102011002953A1 (en) | 2011-01-21 | 2012-07-26 | Carl Zeiss Smt Gmbh | Substrate for mirror for extreme ultraviolet lithography, comprises base body which is alloy system that is made of intermetallic phase having crystalline component, where intermetallic phase has bravais lattice |
| JP2019203946A (en) * | 2018-05-22 | 2019-11-28 | 三菱重工業株式会社 | Fiber coupling device and laser processing apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5652701U (en) * | 1979-09-27 | 1981-05-09 |
-
1988
- 1988-05-31 JP JP63135024A patent/JPH0715523B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| ＡｐｐｌｉｅｄＯｐｔｉｃｓＶｏｌ．１９Ｎｏ．２０（１５Ｏｃｔｏｂｅｒ１９８０）Ｐ．３５６２〜３５８３ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01303404A (en) | 1989-12-07 |
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