JPH07272896A - Split torch for high frequency inductively coupled plasma equipment - Google Patents

Abstract

PURPOSE:To facilitate maintenance work and raise overall durability by separating a torch outer cylindrical portion susceptable to violent depletion, deterioration etc., due to plasma high temperature and so subjected to replacement repair, detachable from a torch and forming it with heat-resisting material. CONSTITUTION:An injector cylinder 11 for introducing a sample solution atomization carrier gas 6, an inner cylinder for introducing auxiliary gas 5 on its outer periphery and an outer cylinder for introducing plasma gas 4 on the outer periphery are disposed. The outer cylinder is then divided as a torch base portion 13a and a torch outer cylindrical portion 13b. The two are mutually support-fixed in butting at the position of a torch support arm 2. When plasma 7 due to excitation of internal gas with a load coil 3 becomes unstable and the touches inside of the outer cylindrical portion 13b, it then deforms because of the heat. And thus, the plasma 7 becomes more unstable. Or otherwise when the ignition is not good, the outer cylindrical portion 13b is easily replaceable. Accordingly, the maintenance becomes easy. And the outer cylindrical portion alone can be formed of a highly heat-resisting material and so the overall durability is raised.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a torch for a high frequency inductively coupled plasma device (ICP).

[0002]

2. Description of the Related Art FIG. 4 is a sectional view showing a conventional ICP torch and its supporting state. The ICP torch is for atomizing a sample solution with a carrier gas, ionizing it in ignited plasma, and guiding it to an analyzer. Usually, the torch 1 is made as a quartz triple tube of an outer cylinder 13, an inner cylinder 12, and an injector cylinder 11, which are integrated or have a structure in which the injector cylinder 11 is separated. Such a torch 1 is sandwiched by upper and lower torch support arms 2 having hemispherical recesses at the ends, as shown in FIG. 4 (b). Then, the plasma gas 4, the auxiliary gas 5, and the carrier gas 6 are introduced into the respective cylinders of the torch 1, converted into plasma by the load coil 3, and guided to the analyzer.

[0003]

By the way, when the plasma becomes unstable due to plasma ignition or a sudden change in gas flow, the plasma comes into contact with the inside of the outer cylinder 13 of the torch 1 and the heat thereof causes the outer cylinder. May be deformed. If such deformation occurs, not only stable plasma formation cannot be achieved, but also ignition itself cannot be performed with good reproducibility. Although it is possible to use a heat-resistant member such as alumina as the outer cylinder, in that case, the molten component may act as an impurity, and in order to avoid this, a quartz tube should be used. desirable. Then, the outer cylinder deformed by heat needs to be replaced, but at present, there is a problem that the whole must be replaced because it is integrally manufactured.

SUMMARY OF THE INVENTION The present invention is intended to solve the above problems, and an object of the present invention is to provide a split type torch for a high frequency inductively coupled plasma device which can be easily attached and detached even if the outer cylinder of the torch is deformed. And

[0005]

According to the present invention, there are provided an injector cylinder into which a carrier gas atomized from a sample solution is introduced, an inner cylinder provided around the injector cylinder and into which an auxiliary gas is introduced, and an inner cylinder. For high-frequency inductively coupled plasma equipment, which consists of an outer cylinder that is provided in the periphery and into which plasma gas is introduced, is supported and fixed by a torch support arm, and the introduced gas is excited by a load coil to generate plasma. In the torch, the outer cylinder is divided into a torch base portion and a torch outer cylinder portion, which are abutted against each other, and the periphery is supported and fixed by a torch support arm.

[0006]

In the present invention, the torch outer cylinder portion, which is a component part of the torch, is divided from the torch base portion, so that even if the torch outer cylinder portion is worn, deteriorated, or deformed, it can be easily attached / detached / replaced. It is also possible to increase the heat resistance, the mechanical strength, etc. by using a material for the torch outer cylinder portion different from that of the torch base portion.

[0007]

FIG. 1 is a diagram showing an embodiment of the present invention. The same numbers as those in FIG. 4 indicate the same contents. In the present embodiment, the torch outer cylinder is divided into a torch base portion 13a and a torch outer cylinder portion 13b, and these are supported and fixed by abutting at the position of the torch support arm 2. In this way, the torch base portion 13a and the torch outer cylinder portion 13b are butted and fixed by the torch support arm 2,
The gas introduced into the inside is excited by the load coil 3 to generate plasma 7, and when the plasma 7 becomes unstable and comes into contact with the inner surface of the torch outer cylinder portion, the heat deforms the plasma.
There are cases where the plasma 7 becomes more unstable, or the ignition becomes difficult during ignition. However, since the torch outer cylinder portion 13b is divided from the torch base portion 13a, the torch outer cylinder portion 13b can be removed by extinguishing the plasma and easily replaced with a new one.

The present invention is not limited to the above embodiment, but various modifications are possible. For example, the torch outer cylinder portion 13b does not have to be made of the same material as the torch base portion 13a, and may be one having higher heat resistance, stronger mechanical strength, or the like. Further, the conductive mesh may be formed into a tubular shape, and a shield for enclosing quartz glass or the like in a shape that does not completely make a round may be used. The split torch may be supported and fixed by surrounding it with a connection adapter 8 as shown in FIG. 2 and fixing it by the torch support arm 2 via this, or as shown in FIG. 9 may be used to improve the degree of sealing and the supportability. Further, the torch base portion 13a is the injector cylinder 1
It is also possible to use a type in which one part can be separated.

[0009]

As described above, according to the present invention, the torch outer cylinder portion, which is subject to replacement and repair, is so worn and deteriorated by the high temperature of the plasma that it is detachable from the torch. Since only this part needs to be replaced, maintenance is easy, and it is also possible to use a different material for the torch outer cylinder from that of the torch base, for example, a heat-resistant material. It is also possible to improve the property.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of the present invention.

FIG. 2 is a view showing a torch of another embodiment of the present invention using a connection adapter.

FIG. 3 is a view showing a torch of another embodiment of the present invention using an O-ring.

FIG. 4 is a sectional view showing a conventional ICP torch and its supporting state.

[Explanation of symbols]

2 ... torch support arm, 7 ... plasma, 13a ... torch base, 13b ... torch outer cylinder,

Claims (1)

[Claims] 1. An injector cylinder into which a carrier gas obtained by atomizing a sample solution is introduced, an inner cylinder provided around the injector cylinder and into which an auxiliary gas is introduced, and a plasma gas provided around the inner cylinder. A torch for a high-frequency inductively coupled plasma device, comprising an outer cylinder to be introduced, the periphery of which is supported and fixed by a torch support arm, and the introduced gas is excited by a load coil to be turned into plasma. A split torch for a high-frequency inductively coupled plasma device, characterized in that a base portion and a torch outer cylinder portion are divided and abutted against each other, and a torch support arm is used to support and fix the periphery.