JPH07311908A - Method of manufacturing magnetic head - Google Patents

Abstract

(57) [Summary] [Object] To provide a method of manufacturing a magnetic head capable of improving the process yield and the material yield at the time of gap welding. [Structure] The laminated block 30 is cut into laminated plates 40 having the same shape. After processing such as apex grooving and winding grooving on one surface of the laminated plate 40, a gap material is formed on both surfaces of the laminated plate 40, and the laminated plates 40 are superposed and welded together to form a gap The block 50 is produced. The gapped block 50 is cut into a gapped plate 60 composed of an I core plate 60A and a C core plate 60B, and the magnetic head chip 1 is obtained through known steps.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to a method of manufacturing a magnetic head constructed by abutting and joining two core halves with a predetermined gap length, and more particularly to a Fe-Si-Al alloy. The present invention relates to a method of manufacturing a magnetic head configured by abutting and joining two core halves having a structure in which a magnetic thin film such as a magnetic film is sandwiched between non-magnetic substrates with a predetermined gap length. Such a magnetic head is particularly suitable for use in high-density recording heads for high frequencies and high S / N ratios, computer heads, and the like.

[0002]

2. Description of the Related Art The recent improvement in recording density in the field of magnetic recording technology is accompanied by a consequent narrowing of tracks for a magnetic head as an electromagnetic transducer, an increase in saturation magnetization of a core material, and a transparency in a high frequency region. There is an increasing demand for improved magnetic susceptibility.

In recent years, for example, Fe--Si--Al has been used as a magnetic head satisfying the above requirements in the field of magnetic recording.
A thin film laminated magnetic head using an alloy film has been attracting attention. An example of a method of manufacturing such a magnetic head will be briefly described with reference to FIG.

In FIG. 12, first, a magnetic thin film laminated body, that is, a laminated block 90 is manufactured by a known method (A),
The laminated block 90 is cut to form an I core plate 91 and a C core plate 92 (B). At this time, as is apparent from the drawing, the thickness of the I core plate 91 is extremely smaller than the thickness of the C core plate 92.

Next, after grooving for the apex glass mold and grooving for the winding groove are performed on the surface of the C core plate 92, the C core plate 92 and the I core plate 91 are separated by spacers. After positioning the tracks through the bonding glass layer, heat and pressure bonding, so-called gap welding, is performed to obtain a gapped plate 93 (C). Further, the gapped plate 93 is processed by grinding or the like to produce a gapped plate 93 ′ having a predetermined thickness (D).

The gapped plate 93 'thus manufactured is subjected to a known process, and then I as shown in FIG.
The magnetic head 1 including the core 100 and the C core 200 was obtained.

[0007]

As described above, in the conventional manufacturing method, the gap welding is performed after the C core plate and the I core plate are produced to produce the gapped plate. Accurate alignment of the C core plate and the I core plate is required to align the tracks in the step of performing the gap welding.

However, since the C core plate and the I core plate have different thicknesses and asymmetrical shapes, the I core plate warps in a convex shape with respect to the C core plate, resulting in a defective gap length ( Gap length is large, gap is not welded, etc.) and / or misalignment (film pitch shift, parallel movement, etc.) occurs. As a result, there are many defective products at the time of gap welding, and there is a problem that the process yield is low.

In the above conventional manufacturing method, I
In order to accurately align the core plate and the C core plate, as shown in FIG. 12C, the desired thickness (t) in FIG.
After making a gapped plate by cutting with a thickness (T ₁ , T ₂ ) larger than ₁ , t ₂ ), grinding is performed to obtain an I core plate and a C core plate with a desired thickness (t ₁ , t ₂ ). Therefore, there is a problem in that the yield of the material is poor because many of the materials are discarded during the grinding process.

Therefore, it is an object of the present invention to provide a method of manufacturing a magnetic head having a good process yield and a good material yield during gap welding.

[0011]

The above object can be achieved by the method of manufacturing a magnetic head according to the present invention. In summary, the present invention provides a method of manufacturing a magnetic head, which is formed by abutting and joining two core halves with a predetermined gap length, and a magnetic head including a substrate and an alloy film provided on the substrate. A step of cutting a magnetic thin film laminated body in which thin film layers are laminated to the same thickness to produce a plurality of laminated plates; and a process of apex grooving and winding grooving on at least one surface of each laminated plate. And forming a gap material on both surfaces of each laminated plate and then stacking and laminating each laminated plate to obtain a gapped block, and cutting the gapped block at equal intervals to form the gap block. And a step of obtaining a gapped plate including two core halves.

The two core halves are I core plates and C core plates, or both C core plates.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method of manufacturing a magnetic head according to the present invention will be described below in more detail with reference to the drawings. In this embodiment, the manufactured magnetic head uses Fe as a magnetic film.
A thin film laminated magnetic head using a -Si-Al alloy magnetic film is used. However, the magnetic head is not limited to this type.

First, a method of manufacturing the magnetic head of this embodiment will be described.
Compared with the conventional manufacturing method shown in FIG. 12, a schematic description will be given with reference to FIG. In the same figure, a magnetic thin film laminated body manufactured in the same manner as the conventional one, that is, a laminated block 30 is formed (A). Next, unlike the conventional manufacturing method, this laminated block 30 is cut to the same thickness to produce a plurality of laminated plates 40 having substantially the same shape (B). Next, at least one surface of each laminated plate 40 is subjected to processing such as apex grooving and winding grooving. Further, unlike the conventional manufacturing method, a gap material is formed on both surfaces of the laminated plate 40 by sputtering, and while performing track alignment, the laminated plates 40 are overlapped and welded to each other, that is, gap welding is performed, and the gapped block 50 is formed.
(C). Further to produce gapped plate 60 consisting of I core plate 60A, the thickness t ₂ C core plate 60B of the gapped block 50 the thickness at regular intervals (T) the thickness t ₁ is cut at (D) .

The gap plate 60 thus manufactured is subjected to a predetermined process similar to the conventional process to obtain a magnetic head 1 as shown in FIG.

Next, the above manufacturing method will be described in more detail with reference to FIGS.

First, as shown in FIG. 2, CoO--NiO
A non-magnetic substrate 11 such as a ceramic containing as a main component is prepared (A). An Fe-Si-Al alloy film 12 is formed on the substrate 11 by a sputtering method to obtain an alloy magnetic thin film layer 14 (B).

Next, on the alloy magnetic thin film layer 14, for example, a softening point of 600 ° C. or higher, preferably 650 ° C. to 8 °
The laminated glass 15 at 00 ° C. is formed by the sputtering method or the like (C). As the laminated glass 15, SiO ₂ —Al ₂ O
_3- Na ₂ O based glass or SiO ₂ -B ₂ O ₃ -Na
₂ O type glass is suitable.

Next, as shown in FIG. 3, a plurality of substrates 11 having the magnetic thin film layer 14 thus produced are laminated, a dummy plate 16 is arranged on the uppermost portion, and the substrate 11 is heated by a pressure machine. Pressurize. As a result, the laminated glasses 15 are melted and integrally joined to each other, and the magnetic thin film laminate (laminated block) 30 is formed. The dummy plate 16
Are made of the same material as the substrate 11.

Next, as shown by the alternate long and short dash line in FIG. 3, the layers are cut at equal intervals in the thickness direction, and as shown in FIG.
The laminated plate 40 for making the core and the I-core is cut out.

Further, as shown in FIG. 5, each laminated plate 4
0 for grooving for the apex glass mold 20 (see FIG. 11), and for winding groove 22 as shown in FIG.
Groove for (see FIG. 11).

Further, the spacer 21 and the bonding glass layer (m) are formed on both surfaces of each laminated plate 40 by the sputtering method. After that, as shown in FIG. 7, each laminated plate 40 is track-aligned through the spacer 21 and the bonding glass layer (m), and then heated and pressed to obtain the gapped block 50. In addition, in FIG.
Although only the set is shown, the laminated plate 40 cut out from the laminated block 30 may be divided into a plurality of sets and welded.

Then, as shown in FIG. 8, the gapped block 50 is cut parallel to the layer surface to obtain a gapped plate 60 consisting of an I core plate 60A and a C core plate 60B.

Next, as shown in FIG. 9, the I core side 60A and the C core side 60B of each gapped plate 60.
Each is subjected to a grinding treatment.

Further, as shown in FIG. 10, each gapped plate 60 is cut parallel to the grooving direction indicated by an arrow to obtain a bar.

Further, by cutting the chip,
The magnetic head chip 1 shown in FIG. 11 is obtained.

By going through the above-mentioned steps, it is possible to obtain more than twice as many head chips per block as compared with the conventional method. Also, when welding gaps,
There is no difference in warp, and the process yield can be improved.

As described above, in the method of manufacturing the magnetic head according to the present invention, the step of cutting the laminated block 30 into the laminated plates 40 having the same shape, and then the apex grooving and the winding on at least one surface of the laminated plate 40. After processing such as grooving, a gap material is formed on both surfaces of the laminated plate 40 by sputtering, and the laminated plates 40 are superposed and welded, that is, gap welding is performed.
By including the step of manufacturing the gapped block 50, the process yield at the time of gap welding and the material yield can be improved.

In the above embodiment, the case where the two core halves are the I core plate and the C core plate has been described, but it goes without saying that the method of the present invention can be applied to both C core plates.

[0030]

As is apparent from the above description, the method of manufacturing a magnetic head according to the present invention is a magnetic thin film laminated body formed by laminating magnetic thin film layers including a substrate and an alloy film provided on the substrate. And a step of cutting the laminated plate of the same shape,
At least one apex grooving and winding grooving treatment is performed on one surface of the laminated plate, a gap material is formed on both surfaces of the laminated plate, and the laminated plates are superposed and welded to form a gapped block. By including the step of obtaining and the step of cutting the gapped block at equal intervals to obtain a gapped blade including the two core halves, it is possible to improve the step yield at the time of gap welding and the material yield. , Productivity improvement can be achieved.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an example of important steps in a method of manufacturing a magnetic head according to the present invention.

FIG. 2 is an explanatory diagram showing a step of obtaining a magnetic thin film layer.

FIG. 3 is a perspective view showing a laminated block obtained by laminating the magnetic thin film layers of FIG.

FIG. 4 is a perspective view showing a laminated plate obtained by cutting the laminated block of FIG.

5 is a perspective view showing a state in which apex grooves are formed on the laminated plate of FIG.

6 is a perspective view showing a state in which winding grooving is further performed on the laminated plate of FIG.

FIG. 7 is a perspective view showing a gapped block obtained by gap welding the laminated plates of FIG.

8 is a perspective view showing a state in which the gapped block of FIG. 7 is cut.

9 is a perspective view showing a ground state of an I / C side of a gapped plate obtained by cutting the gapped block of FIG.

FIG. 10 is a perspective view showing a state in which the gapped plate of FIG. 9 is cut to obtain a bar.

FIG. 11 is a perspective view showing a magnetic head chip obtained by cutting a bar.

FIG. 12 is an explanatory diagram showing important steps in a conventional method of manufacturing a magnetic head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 magnetic head 11 substrate 12 alloy film 14 magnetic thin film layer 30 laminated block (magnetic thin film laminated body) 40 laminated plate 50 gapped block 60 gapped plate 60A I core plate 60B C core plate

[Procedure amendment]

[Submission date] August 9, 1994

[Procedure Amendment 1]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

[Figure 1]

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 12

[Correction method] Change

[Correction content]

[Fig. 12]

Claims (3)

[Claims] 1. A method of manufacturing a magnetic head constituted by abutting and joining two core halves with a predetermined gap length, wherein a magnetic thin film layer including a substrate and an alloy film provided on the substrate is provided. Cutting the laminated magnetic thin film laminate to the same thickness to produce a plurality of laminated plates, and subjecting at least one surface of each laminated plate to apex grooving and winding grooving, and Forming a gap material on both sides of each of the laminated plates and then stacking the laminated plates on each other and welding them to obtain a gapped block; and cutting the gapped block at equal intervals to form the two core halves. And a step of obtaining a gapped plate including a body. 2. The method of manufacturing a magnetic head according to claim 1, wherein the two core halves are an I core plate and a C core plate. 3. The method of manufacturing a magnetic head according to claim 1, wherein both of the two core halves are C core plates.