JPS61222011A - Composite material for producing magnetic head - Google Patents
Composite material for producing magnetic headInfo
- Publication number
- JPS61222011A JPS61222011A JP6476285A JP6476285A JPS61222011A JP S61222011 A JPS61222011 A JP S61222011A JP 6476285 A JP6476285 A JP 6476285A JP 6476285 A JP6476285 A JP 6476285A JP S61222011 A JPS61222011 A JP S61222011A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- composite material
- soft magnetic
- glass
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000011521 glass Substances 0.000 claims abstract description 8
- 239000010409 thin film Substances 0.000 claims description 15
- 230000004927 fusion Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 238000003466 welding Methods 0.000 abstract 1
- 239000011162 core material Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 10
- 229910000859 α-Fe Inorganic materials 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 5
- 229910000702 sendust Inorganic materials 0.000 description 4
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 208000024780 Urticaria Diseases 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000035606 childbirth Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気へ・・ド製造に用いる材料の構造に関する
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to the structure of materials used in the manufacture of magnetic heads.
本発明は、磁気へヴド製造用の材料において。 The present invention relates to materials for manufacturing magnetic heaving devices.
軟磁性薄膜と非磁性基板が交互に積層し几構造をとるこ
とにより、公知のフェライトへ9ド製造工穆と同様の工
程によりて狭トラヴク磁気ヘッドが製造できるようにし
友ものである。By alternately laminating soft magnetic thin films and non-magnetic substrates to form a box structure, a narrow magnetic head can be manufactured using a process similar to that used for manufacturing ferrite.
従来、磁気ヘッドの製造には、特公昭59−31772
号公報のように、材料としてフェライトを用V1,2つ
のフェライトウェハーに所定の形状加工を施した後に1
両ウェハーを薄膜を介して衝合することにより磁気ギャ
ップを形成したブロックとし、該ブロックをスライスし
て磁気へッドチリブを得て−た。ところが近年8tm
V T Rの商品化等により、メタルテープ等の高保磁
力記録媒体が使用されるようになり、磁気ヘダド材もフ
ェライトよりも透磁率の高いセンダスト・アモルファス
合金へと移行し、形状的にも高密度配置のために狭トラ
噌り化がされてき友。IF5図は狭トラツクへ噌ドの構
造を示す斜視図であるが、10〜20μmの狭トラダク
を形成する磁気へラドコア材4の両側を非磁性基板5.
6により補強する複合構造をとるため、従来の単一材料
からなるフェライトヘッドの製造工程を適要するととh
tできなくなった。Traditionally, magnetic heads were manufactured using the Japanese Patent Publication No. 59-31772.
As in the publication, V1 uses ferrite as the material, and after processing two ferrite wafers into a predetermined shape,
Both wafers were brought together via a thin film to form a block with a magnetic gap formed therein, and the block was sliced to obtain a magnetic head chib. However, in recent years 8tm
With the commercialization of VTRs, high coercive force recording media such as metal tapes were used, and the magnetic head material also shifted to Sendust amorphous alloy, which has higher magnetic permeability than ferrite, and the shape also increased. It has been made narrower due to the density arrangement. Figure IF5 is a perspective view showing the structure of a narrow track. Both sides of the magnetic core material 4 forming a narrow track of 10 to 20 μm are covered with non-magnetic substrates 5.
6, it is necessary to apply the conventional manufacturing process of ferrite heads made of a single material.
I can't do it anymore.
第3図は、このような複合型の狭トラ9クヘッドの製造
工程の一例を示すものであり、AKおり1て非磁性基板
上にセンダスト等の軟磁性薄膜をスパッタリングにより
形成し、さら経補強板を重ねて接着して%Bのようなラ
ミネート構造のブロックとする。該ブロックをCのよう
に細長い短冊状コアに切断して、片側のコアに巻線窓を
形成する溝を入れる。両コアの磁気ギャップ形成面を鏡
面研摩し之後に、磁気ギヤ9ブ形成部に所要ギヤ9プ長
のイの8i 0x膜をそれぞれスパッタリングにより形
成する。次に両コアを、軟磁性薄膜による狭トラツクh
’−正しく合っ友状態で衝合・接着し念ものがDであり
、これを切断して磁気ヘッドチップの大きさにしたもの
がE、テープ走行面の円筒研削を施し、厚2Lを落とし
九完成品の磁気ヘーIトチ・Iプb−Fである。Figure 3 shows an example of the manufacturing process for such a composite narrow track head, in which a soft magnetic thin film such as sendust is formed on a non-magnetic substrate by sputtering using an AK cage 1, and then the warp is reinforced. The plates are stacked and glued together to form a block with a laminate structure like %B. The block is cut into elongated strip cores as shown in C, and a groove forming a winding window is inserted into one of the cores. After mirror-polishing the magnetic gap forming surfaces of both cores, a 8i 0x film having the required gear length is formed on the magnetic gear 9 forming portions by sputtering. Next, both cores are covered with a narrow track h using a soft magnetic thin film.
'-D is the one that was properly mated and bonded, and E is the one that is cut to the size of the magnetic head chip. This is the finished magnetic head I tochi Ipu b-F.
〔発明が解決しようとする問題点及び目的〕しかじな6
”−ら、前記のようなa遣工程では、コアl(:I?け
るへヴドチップの配列が平面的であり、1組のコアから
数個種度の磁気ヘッドチップしか得られないという、■
産、ヒの問題を有する。ま次軟磁性薄11Kによる狭ト
ラツクを衝合する際も、トラックずれの状態はコアの両
端にあ几る2ケ所の入でしか確認することができない。[Problem and purpose to be solved by the invention] Shikajina 6
In the above-mentioned process, the array of core chips is planar, and only a few types of magnetic head chips can be obtained from one set of cores.
I have problems with childbirth and hives. Even when colliding a narrow track using the soft magnetic thin 11K core, the state of track deviation can only be confirmed by the two holes located at both ends of the core.
さらに最終工程の円筒研削及び厚入出しを行なう時点の
ワークの大きさけ2〜3u角であり、扱いが非常に困難
であることが問題点として挙げられる。そこで本発明は
このような問題点を解決するもので、その目的とすると
ころは、センダストやアモルファス合金等の軟磁性薄膜
を形成した非磁性基板を積層してブロック化し、核ブロ
ックを磁気ヘッド製造の際のコア材として用いることに
より、狭トラツク型のヘッドを従来のフェライトへ・ノ
ドと同穆度の量産性と工程の容易さを備えた製造工程に
より製造できる手段を提供するところにある。Another problem is that the size of the workpiece during the final process of cylindrical grinding and thick loading/unloading is 2 to 3 square meters, making it extremely difficult to handle. The present invention is intended to solve these problems, and its purpose is to laminate non-magnetic substrates on which soft magnetic thin films such as sendust or amorphous alloys are formed into blocks, and use the core blocks to manufacture magnetic heads. By using it as a core material in the manufacturing process, it is possible to provide a means for manufacturing a narrow track type head by a manufacturing process that has the same degree of mass productivity and ease of process as conventional ferrite throats.
本発明の磁気へリド製造用複合材は、複数枚の非磁性基
板上に軟磁性薄膜を形成し、前記基板を重ね合わせてガ
ラス融着等の手段を用いて一体化することにより、軟磁
性薄膜と非磁性基板を交互に積層させていることを特徴
とする。The magnetic helide manufacturing composite material of the present invention is produced by forming a soft magnetic thin film on a plurality of non-magnetic substrates, overlapping the substrates and integrating them using means such as glass fusion. It is characterized by alternating layers of thin films and non-magnetic substrates.
11E1図は本発明の実施例における複合材の構造を示
す断面図であり、第4図は該複合材を使用し次狭トラッ
クヘッドの製造法の工程図である。FIG. 11E1 is a sectional view showing the structure of a composite material in an embodiment of the present invention, and FIG. 4 is a process diagram of a method for manufacturing a narrow track head using the composite material.
以下、この2図を用いて本発明の詳細な説明する。まず
第1図において1け非磁性基板であり後の熱工程を考慮
して、形成する軟磁性薄l!J2に熱膨張係数を合わせ
念ものを使用する。前記非磁性基板1の片面を鏡面仕上
げし、スパッタリングや蒸着等の薄噂形成手段により、
センダストやアモルファス合金等の軟磁性薄l!2を所
要のトラック幅に至るまで形成する。ここで形成されt
軟磁性薄膜2け熱処理を加えることにより、磁気特性h
Z改善される。次に軟磁性薄膜2上に前記熱処理温度よ
りも低融点の融着ガラス3をスパッタリングにより積′
層する。ここで前記工程まで終え友複数枚の基板を重ね
合わせて治具に挾持し、圧力を加えながら高温炉に入れ
て、融着ガラス3を溶融させること忙より、積層され几
複合材のプロ9りを得る。Hereinafter, the present invention will be explained in detail using these two figures. First, in Fig. 1, it is a 1 digit non-magnetic substrate, and a soft magnetic thin l! Match the coefficient of thermal expansion to J2 and use a special one. One side of the non-magnetic substrate 1 is mirror-finished, and by a thin layer forming means such as sputtering or vapor deposition,
Soft magnetic thin l such as sendust and amorphous alloy! 2 to the required track width. Here it is formed t
By applying two soft magnetic thin film heat treatments, the magnetic properties h
Z is improved. Next, a fused glass 3 having a melting point lower than the heat treatment temperature is deposited on the soft magnetic thin film 2 by sputtering.
Layer. After completing the above steps, I stacked multiple substrates, held them in a jig, put them in a high temperature furnace while applying pressure, and melted the fused glass 3. get the benefits.
前記複合材を用い之場合の磁気ヘッド製造工程例として
は、第4図の工程が考えられる。まずαに示し几複合材
をスライサーによりOBNま几はダイヤモンド砥石を用
いて切断し、bのようにトラックを形成する軟磁性薄膜
層hzアジマス角θだけ傾く形でコアブロックのペアを
得る。従来のフェライトヘッド製造工程の場合次工程で
ダイサーを用いてトラック形成用の溝を入れていff−
4z、ダイサーの累積ピッチ誤差の影響により、磁気ギ
ヤ9プ形成のための衝合時に、コアブロックの片端にお
けるトラックを衝合させると、他端においてトラックず
れを生じていた。しかしながら本工程では、トラック形
成のための機械加工が不要で前記の問題は生じない定め
、この点ではフェライトへリド製造工程よりも優れてい
ると言える。次にOK示すように1片側のコアブロック
の磁気ギャップ形成面にスライサーにより、巻線窓用の
溝を入れ、両コアブロックの磁気ギャップ形成面に。As an example of the magnetic head manufacturing process using the composite material, the process shown in FIG. 4 can be considered. First, the OBN composite material shown in α is cut by a slicer using a diamond grindstone to obtain a pair of core blocks with the soft magnetic thin film layer hz forming tracks tilted by an azimuth angle θ as shown in b. In the conventional ferrite head manufacturing process, a dicer is used to create grooves for track formation in the next processff-
4z, due to the influence of the cumulative pitch error of the dicer, when the tracks at one end of the core block were brought into abutment during the abutment to form the magnetic gear 9, track deviation occurred at the other end. However, this process does not require machining to form tracks, so the above-mentioned problem does not occur, and in this respect it can be said to be superior to the ferrite helide manufacturing process. Next, use a slicer to cut a groove for a winding window into the magnetic gap forming surface of one side of the core block as shown in OK, and then cut a groove into the magnetic gap forming surface of both core blocks.
所要ギャップ長の%ずつスパッタリングにより形成する
。得られた前記コアブロックのペアは、トラリフとなる
軟磁性薄膜層を正しく合わせた後、パックギャップ部を
接着し、dYt示すコアブロックとする。該コアブロッ
クの上面は研削砥石により円筒研削し、最後にグイサー
によりトラリフとし、磁気へラドチップfを得る。It is formed by sputtering in % of the required gap length. In the resulting pair of core blocks, the soft magnetic thin film layers serving as the trarifs are properly aligned, and then the pack gap portions are adhered to form a core block exhibiting dYt. The upper surface of the core block is cylindrically ground with a grinding wheel, and finally it is truffled with a grinder to obtain a magnetic held tip f.
以上述べたように本発明を磁気ヘッドの製造に用い之場
合、非磁性基板と軟磁性薄膜が積層され一体化された複
合材であることによ^、量産性・工程の難易度ともにフ
ェライトヘッド製造工程並に優れた狭トラツクへヴド製
造工程を採用することができるという効果を有する。As described above, when the present invention is used to manufacture a magnetic head, since it is a composite material in which a non-magnetic substrate and a soft magnetic thin film are laminated and integrated, it is possible to improve both mass production and process difficulty. It has the effect of being able to employ a narrow track manufacturing process that is as good as the manufacturing process.
第1図は本発明の磁気ヘッド製造用複合材の構造を示す
断面図。
1・・・・・・非磁性基板
2・・・・・・軟磁性薄膜
3・・・・・・融着ガラス
第2図は狭トラツクヘッドの構造を示す斜視図。
4・・・・・・磁気ヘリドコア材
5.6・・・・・・非磁性基板
第3図A−IPけ狭トラツクヘッドの製造法を示す工程
図。
第4図α〜、fけ複合材を使用し皮狭トラックヘヴドの
製造法を示す工程図。
以 上FIG. 1 is a sectional view showing the structure of the composite material for manufacturing a magnetic head of the present invention. 1...Nonmagnetic substrate 2...Soft magnetic thin film 3...Fusion glass FIG. 2 is a perspective view showing the structure of a narrow track head. 4... Magnetic helide core material 5. 6... Non-magnetic substrate FIG. Fig. 4 α~ is a process diagram showing a method of manufacturing a narrow-skinned track heave using a frayed composite material. that's all
Claims (1)
を重ね合わせてガラス融着等の手段を用いて一体化する
ことにより、軟磁性薄膜と非磁性基板を交互に積層させ
ていることを特徴とする磁気ヘッド製造用複合材。By forming soft magnetic thin films on multiple nonmagnetic substrates, overlapping the substrates, and integrating them using means such as glass fusion, the soft magnetic thin films and nonmagnetic substrates are alternately laminated. A composite material for manufacturing magnetic heads characterized by the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6476285A JPS61222011A (en) | 1985-03-28 | 1985-03-28 | Composite material for producing magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6476285A JPS61222011A (en) | 1985-03-28 | 1985-03-28 | Composite material for producing magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61222011A true JPS61222011A (en) | 1986-10-02 |
Family
ID=13267517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6476285A Pending JPS61222011A (en) | 1985-03-28 | 1985-03-28 | Composite material for producing magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61222011A (en) |
-
1985
- 1985-03-28 JP JP6476285A patent/JPS61222011A/en active Pending
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