JPH0731496Y2 - Icp質量分析装置 - Google Patents
Icp質量分析装置Info
- Publication number
- JPH0731496Y2 JPH0731496Y2 JP1988144615U JP14461588U JPH0731496Y2 JP H0731496 Y2 JPH0731496 Y2 JP H0731496Y2 JP 1988144615 U JP1988144615 U JP 1988144615U JP 14461588 U JP14461588 U JP 14461588U JP H0731496 Y2 JPH0731496 Y2 JP H0731496Y2
- Authority
- JP
- Japan
- Prior art keywords
- mass
- ions
- output
- mass spectrometer
- channeltron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 21
- 238000005259 measurement Methods 0.000 claims description 19
- 230000010354 integration Effects 0.000 claims description 5
- 238000005070 sampling Methods 0.000 claims description 5
- 238000004458 analytical method Methods 0.000 claims description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988144615U JPH0731496Y2 (ja) | 1988-11-05 | 1988-11-05 | Icp質量分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988144615U JPH0731496Y2 (ja) | 1988-11-05 | 1988-11-05 | Icp質量分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0264155U JPH0264155U (fr) | 1990-05-14 |
| JPH0731496Y2 true JPH0731496Y2 (ja) | 1995-07-19 |
Family
ID=31412477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988144615U Expired - Lifetime JPH0731496Y2 (ja) | 1988-11-05 | 1988-11-05 | Icp質量分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731496Y2 (fr) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3430984A1 (de) * | 1984-08-23 | 1986-03-06 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zur registrierung von teilchen oder quanten mit hilfe eines detektors |
-
1988
- 1988-11-05 JP JP1988144615U patent/JPH0731496Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0264155U (fr) | 1990-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0458324B1 (fr) | Système multicanaux et méthode de détection de fin de processus dans une décharge plasma | |
| EP0660966B1 (fr) | Diminution des interferences dans les spectrometres de masse a source de plasma | |
| JP6773236B2 (ja) | 質量分析装置及び質量分析方法 | |
| US6716300B2 (en) | Emission spectroscopic processing apparatus | |
| JPH0731496Y2 (ja) | Icp質量分析装置 | |
| US6373067B1 (en) | Mass spectrometer | |
| JPH05101805A (ja) | プラズマイオン源極微量元素質量分析装置 | |
| US5464978A (en) | Method and apparatus for electron energy analysis | |
| US20240145225A1 (en) | Mass spectrometer | |
| US5426299A (en) | Inductive plasma mass spectrometer | |
| JP2773296B2 (ja) | クロマトグラフのデータ処理装置 | |
| JP3740853B2 (ja) | 質量分析計 | |
| JPS6226757A (ja) | 誘導結合プラズマ質量分析装置 | |
| JPH0455329B2 (fr) | ||
| JPS5943374A (ja) | 二次電子増倍管の利得検出器 | |
| US4686466A (en) | Method for automatically setting the voltage resolution in particle beam measuring devices and apparatus for implementation thereof | |
| WO1998050941A1 (fr) | Systeme de detecteur pour un spectrometre de masse | |
| JP3153337B2 (ja) | 誘導結合プラズマ質量分析装置 | |
| JP3274166B2 (ja) | 中性子検出器出力の監視装置 | |
| JPH0582078A (ja) | プラズマ質量分析装置 | |
| JPS6350749A (ja) | 四重極形質量分析計 | |
| JPH06180367A (ja) | 放射線測定装置 | |
| JPH05152254A (ja) | ドライエツチング装置 | |
| JP2006058015A (ja) | 波高分布表示機能を備えたx線分析装置 | |
| JPH06216013A (ja) | 荷電粒子ビーム露光装置 |