JPH07320263A - Metal thin film manufacturing equipment - Google Patents

Abstract

(57) [Summary] [Object] To provide an apparatus for producing a metal-based thin film having high vapor deposition efficiency, which can improve productivity. An apparatus for manufacturing a metal-based thin film body, comprising: a metal material evaporation source; and a plurality of guide means provided corresponding to the metal material evaporation source, wherein each of the guide means is provided. An apparatus for manufacturing a metal-based thin film body, wherein vaporized particles from the metal material vaporization source are vapor-deposited on each of the supports that are run along.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus, for example.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed.

Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording. An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally of an oblique incidence type configured as shown in FIG. In FIG. 5, 20 is a cooling can roll, 21 a is a polyethylene terephthalate (PET) film 22 supply roll, and 21 b is a PET film 22.
, A shield plate, a crucible 24, a magnetic metal 25, and these are housed in a vacuum container.

After evacuating the inside of the vacuum container to a predetermined vacuum degree, the electron gun 26 is operated to operate the crucible 2
4 evaporates the magnetic metal 25, deposits (evaporates) the evaporated particles of the magnetic metal 25 on the PET film 22, and thereafter is wound up by the winding roll 21b, and thereafter, the magnetic metal 25 is subjected to a cutting process and the like. Tapes, etc. are made.

However, in such a device of the oblique incidence vapor deposition system, only the vaporized particles within the range corresponding to the angle γ are deposited on the surface of the support, and the ratio to the total evaporation amount, so-called vapor deposition efficiency is low, and the productivity is low. There is a problem that is very bad, and improvement is awaited.

[0006]

DISCLOSURE OF THE INVENTION An object of the present invention is to provide an apparatus for producing a metal-based thin film having a high vapor deposition efficiency, which can improve productivity. An object of the present invention is an apparatus for producing a metal-based thin film body, comprising a metal material evaporation source and a plurality of guide means provided corresponding to the metal material evaporation source,
This is achieved by an apparatus for manufacturing a metal-based thin film body, characterized in that vaporized particles from the metal material vaporization source are vapor-deposited on each of the supports that run along the respective guide means.

In the present invention, a plurality of cooling rolls provided corresponding to the metal material evaporation source, and a supply roll and a take-up roll of a support that runs along each of the cooling rolls. And a vaporized particle from the metal material vaporization source is deposited on each of the supports that run along the respective cooling rolls. In addition, a plurality of cooling plate-like members provided corresponding to the metal material evaporation source, and a supply roll and a winding roll of a support that runs along each of the cooling plate-like members are provided. It is also possible that the evaporation particles from the evaporation source of the metal material are deposited on each of the supports that run along the cooling flat plate.

That is, in the apparatus for manufacturing a metal-based thin film body of the present invention, a plurality of supports are faced to one metal material evaporation source, and the metal material is vapor-deposited on the plurality of supports. Therefore, the magnetic metal that evaporates from the crucible will be caught on the support in a large area, and this will greatly increase the proportion of what is deposited on the support compared to the total evaporation amount, increasing the vapor deposition efficiency and increasing the metal material. It is possible to reduce waste, and it will be extremely effective in improving productivity.

Further, the amount of magnetic metal attached to the inner wall of the vacuum container is relatively small, and the pollution can be reduced accordingly.
The number of cleanings is small and continuous operation can be extended, which also improves productivity.

[0010]

1 to 3 show a first embodiment of an apparatus for manufacturing a magnetic recording medium according to the present invention, FIG. 1 is a side view of an essential part of the apparatus, FIG. 2 is a front view of the essential part of the apparatus, FIG. 3 is a plan view of the main part of the apparatus. 1 to 3, 1a to 1d are cooling rolls, which are arranged in a substantially cross shape as shown in FIG. In particular, the cooling rolls 1a and 1b are provided close to each other, and the cooling rolls 1c and 1d are provided so as to sandwich the cooling rolls 1a and 1b, so that the vapor deposition space is effectively used. There is.

Reference numerals 2a to 2d denote cooling rolls 1a to 1d, respectively.
Anti-adhesion plate corresponding to 1d, 3 crucibles, 4 magnetic metal, 5
Is a support that is drawn from a supply roll (not shown), and is wound on a winding roll (not shown) via cooling rolls 1a to 1d, and these are contained in a vacuum container. The support 5 is non-magnetic, and the support 5 is made of polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene, cellulose resin, vinyl chloride resin. Polymer materials such as, inorganic materials such as glass and ceramics, and metal materials such as aluminum alloys are used. An undercoat layer for improving the adhesion of the magnetic layer (magnetic thin film) is provided on the surface of the support 5 if necessary. That is, by appropriately roughening the surface roughness, for example, the adhesion of the magnetic thin film formed by the oblique vapor deposition method is improved, and the surface roughness of the magnetic recording medium surface is moderated to improve the running property. Therefore,
For example, the thickness including particles such as SiO ₂ is 0.005
The undercoat layer is formed by providing a coating film having a thickness of 0.1 μm.

As the magnetic metal with which the crucible 3 is filled,
For example, in addition to metals such as Fe, Co and Ni, Co-Ni alloys, Co-Pt alloys, Co-Ni-Pt alloys, Fe-C
o alloy, Fe-Ni alloy, Fe-Co-Ni alloy, Fe
-Co-B alloy, Co-Ni-Fe-B alloy, Co-C
Examples thereof include r alloys and alloys containing a metal such as Al.

Using the apparatus configured as described above, that is, in the vacuum vessel, about 10 ^-4 to 10 ^-6 Torr, for example, 2
After evacuation to a vacuum degree of × 10 ^-5 Torr, the magnetic metal 4 in the crucible 3 is heated and evaporated by an electron gun (not shown), and the support 5 such as a PET film supplied from four directions is supplied.
A magnetic thin film is formed by evaporating the magnetic metal 4 to a thickness of 0.04 to 2 μm.

At this time, for the cooling rolls 1a and 1b, as shown in FIG. 1, the magnetic metal in an amount corresponding to the angle α is vapor-deposited on the support 5 on the cooling rolls 1a and 1b, and this is At the same time, with respect to the cooling rolls 1c and 1d, as shown in FIG. 2, the magnetic metal in an amount corresponding to the angle β is deposited on the support 5 on the cooling rolls 1c and 1d, and is housed in the crucible 3. The magnetic metal 4 is efficiently deposited.

When forming this magnetic thin film, oxygen gas is blown from the nozzle onto the vapor-deposited portion of the magnetic metal 4 to forcibly oxidize the surface layer portion of the magnetic thin film. After that, the take-up roll is taken out, and a back coat coating material in which carbon black having an average particle diameter of 20 nm and a binder resin composed of a vinyl chloride resin and a urethane prepolymer are dispersed is formed into a magnetic layer by a direct gravure method. It is applied to the support 5 on the opposite side and the dry thickness is 0.5 μm.
The back coat layer is provided.

Fluorine perfluoropolyether (grade: FOMBLIN ZDIAC carboxyl group modified, manufactured by Nippon Montedison Co., Ltd.) was diluted with a fluorine inert liquid (Fluorinert, FC-84, manufactured by Sumitomo 3M Co., Ltd.) to a concentration of 0.1%. -The dispersed coating material is applied to the magnetic surface by a die coating method so that the thickness after drying is about 20Å, dried at 100 ° C, and slit into a predetermined width to form a magnetic tape or the like.

As described above, in the apparatus of the present invention, the magnetic metal is vapor-deposited from one crucible onto a plurality of supports at the same time, so that the ratio of the magnetic metal wasted without being deposited on the supports is greatly increased. It can be reduced, that is, the vapor deposition efficiency can be remarkably improved, and the manufacturing cost can be further reduced. In addition, the amount of magnetic metal attached to the inner wall of the vacuum container is relatively small, pollution can be reduced to that extent, the number of cleanings can be reduced, continuous operation can be lengthened, and productivity is improved also from this point.

FIG. 4 relates to a second embodiment of the magnetic recording medium manufacturing apparatus of the present invention, and is a side view of the main part of the apparatus. In the figure, 10a and 10b are rollers, 11 is a roller 10a,
The cooling endless belt 11 is hung on 10b, and the cooling endless belt 11 is provided at four positions with a deposition preventive plate sandwiched above the crucible in the same positional relationship as the cooling roll in the first embodiment. In particular, they are arranged with a gradient that spreads toward the end.

Reference numeral 12 is a support member which is pulled out from a supply roll (not shown) and is wound around a winding roll (not shown) via a cooling endless belt 11. Even in the apparatus of the second embodiment, the magnetic metal evaporated from the crucible is vapor-deposited on the surface of the support 12 fed from the four directions on the flat plate-shaped cooling endless belt 11, so that the evaporation is performed. Since the vapor deposition area of the magnetic metal is extremely large, the vapor deposition efficiency is increased and the productivity is dramatically improved.

In the present embodiment, four crucibles are arranged on the crucible, but the arrangement of the crucibles is not limited to this, and various other arrangements are possible. Is.

[0021]

[Effect] According to the present invention, the deposition efficiency of the magnetic material is high,
Greatly improve productivity.

[Brief description of drawings]

FIG. 1 is a side view of essential parts of a magnetic recording medium manufacturing apparatus.

FIG. 2 is a front view of a main part of a magnetic recording medium manufacturing apparatus.

FIG. 3 is a plan view of an essential part of a magnetic recording medium manufacturing apparatus.

FIG. 4 is a side view of a main part according to another embodiment of a magnetic recording medium manufacturing apparatus.

FIG. 5 is a schematic side view of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1a-1d Cooling rolls 2a-2d Adhesion-preventing plate 3 Crucibles 4 Magnetic metal 5 Supports 10a, 10b Rollers 11 Cooling endless belts 12 Supports

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Shigemi Wakabayashi Inventor Shigemi Wakabayashi 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao Co., Ltd.Institute of Information Science (72) Inventor Akira Shiga 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao Company Information Science Laboratory

Claims (3)

[Claims] 1. An apparatus for producing a metal-based thin film body, comprising:
The metal material evaporation source comprises a metal material evaporation source and a plurality of guide means provided corresponding to the metal material evaporation source, and the metal material evaporation source is provided on each of the supports that run along the respective guide means. An apparatus for manufacturing a metal-based thin film body, characterized in that vaporized particles from are vapor-deposited. 2. A plurality of cooling rolls provided corresponding to a metal material evaporation source, and a supply roll and a winding roll of a support that runs along each of the cooling rolls. The evaporation particles from the evaporation source of the metal material are deposited on each of the supports that run along the cooling rolls.
Manufacturing equipment for metal-based thin film. 3. A plurality of cooling flat plate-like members provided corresponding to the metal material evaporation source, and a supply roll and a winding roll of a support member that runs along each of the cooling flat plate-like members. The evaporation particles from the metal material evaporation source are vapor-deposited on each of the supports that run along the respective cooling flat plate-like bodies. Metal thin film manufacturing equipment.