JPH0735580B2 - Airlock device for band - Google Patents
Airlock device for bandInfo
- Publication number
- JPH0735580B2 JPH0735580B2 JP16671986A JP16671986A JPH0735580B2 JP H0735580 B2 JPH0735580 B2 JP H0735580B2 JP 16671986 A JP16671986 A JP 16671986A JP 16671986 A JP16671986 A JP 16671986A JP H0735580 B2 JPH0735580 B2 JP H0735580B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- seal
- differential pressure
- vacuum chamber
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 230000002411 adverse Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は帯状物のエアーロック装置、特に金属ストリッ
プ等の帯状物の表面に真空室内でイオンプレーティング
等の物理的蒸着法によって金属、セラミックスその他の
薄い被膜を連続的にコーティングするための帯状物連続
真空蒸着処理装置の入側および出側に設けられるシール
用差圧室を具えるエアーロック装置の差圧室封止構造に
関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to an airlock device for strips, and in particular to a metal or ceramics on the surface of strips such as metal strips by a physical vapor deposition method such as ion plating in a vacuum chamber. The present invention relates to a differential pressure chamber sealing structure of an air lock device having sealing differential pressure chambers provided on the inlet side and the outlet side of a belt-shaped continuous vacuum deposition apparatus for continuously coating other thin films. .
（従来の技術） 従来、金属ストリップ等の帯状物の片面または両面にA
l,Ti等を連続的に蒸着するための連続真空蒸着装置の入
側および出側エアーロックとして、第６図に示すような
ものが既知である。この図示の形式の連続真空蒸着処理
装置は、真空蒸着処理を行うための高真空に維持される
真空室１と、この真空室１の入口1aおよび出口1bにそれ
ぞれ通じる入側および出側エアーロック２および３とを
具え、これら両エアーロック2,3は真空室１に近い程高
真空度に調圧された複数個の差圧室によりそれぞれ構成
され、金属ストリップ等の帯状物４を入口1aから出口1b
を経て連続的に真空室１内に通過させて蒸着処理を行っ
ている際に、真空室１内を高真空に維持するための真空
封止を確保するよう構成されている。(Prior Art) Conventionally, A is applied to one or both sides of a strip-shaped material such as a metal strip.
As an inlet side and an outlet side air lock of a continuous vacuum vapor deposition apparatus for continuously vapor-depositing l, Ti, etc., those shown in FIG. 6 are known. The continuous vacuum vapor deposition processing apparatus of the type shown in the figure includes a vacuum chamber 1 that is maintained at a high vacuum for performing vacuum vapor deposition processing, and an inlet side and an outlet side air lock leading to an inlet 1a and an outlet 1b of the vacuum chamber 1, respectively. 2 and 3, both air locks 2 and 3 are composed of a plurality of differential pressure chambers whose pressure is adjusted to a high degree of vacuum as they are closer to the vacuum chamber 1, respectively, and a strip 4 such as a metal strip is provided at an inlet 1a. Exit 1b
It is configured to ensure a vacuum seal for maintaining a high vacuum in the vacuum chamber 1 when the vapor deposition process is performed by continuously passing through the vacuum chamber 1 through the above.
入側エアーロック２の入口側および出側エアーロック３
の出口側には、それぞれコイル巻戻機５および巻取機６
が設けられ、これにより、巻戻機５によってコイルから
巻戻した帯状物４を入側エアーロック２の入口開口７か
ら真空室１を経て出側エアーロック３の出口開口８に連
続的に通し、真空室１内で蒸発ポットのような蒸発源９
から蒸発した金属蒸気を帯状物表面に蒸着させ、出側エ
アーロック３の出口開口８から出た帯状物４を巻取機６
によってコイル状に巻き取るよう構成されている。Inlet side airlock 2 and outlet side airlock 3
The coil rewinder 5 and the winder 6 are respectively provided on the outlet side of the
By this, the strip 4 unwound from the coil by the rewinding machine 5 is continuously passed from the inlet opening 7 of the inlet airlock 2 through the vacuum chamber 1 to the outlet opening 8 of the outlet airlock 3. , An evaporation source 9 such as an evaporation pot in the vacuum chamber 1.
The metal vapor evaporated from the vapor is vapor-deposited on the surface of the strip-shaped material, and the strip-shaped material 4 coming out of the outlet opening 8 of the outlet side air lock 3 is taken up by the winder 6.
Is configured to be wound into a coil.
入側エアーロック２の複数個の差圧室2a,2b,2c,2dの内
部圧力は、真空室１内の真空度を所定値に維持するよう
に、大気圧に近い入側端の差圧室2aから順次の差圧室2
b,2c,2dの内部の真空度を高め、他方、出側エアーロッ
ク３の複数個の差圧室3a,3b,3c,3dの内部圧力は真空室
１内の所定の真空度から順次出側端に向けて低めていっ
て出側端の差圧室3aでは大気圧近くになるよう各差圧室
に接続された真空排気ダクト（図示せず）を経てそれぞ
れ排気されて調圧されている。The internal pressures of the plurality of differential pressure chambers 2a, 2b, 2c, 2d of the inlet side air lock 2 are set so as to maintain the degree of vacuum in the vacuum chamber 1 at a predetermined value. Differential pressure chamber 2 from chamber 2a
The degree of vacuum inside b, 2c, 2d is increased, while the internal pressures of the plurality of differential pressure chambers 3a, 3b, 3c, 3d of the outlet side air lock 3 are sequentially output from a predetermined degree of vacuum in the vacuum chamber 1. In the differential pressure chamber 3a at the outlet end, the pressure is reduced toward the side end and is evacuated and regulated via a vacuum exhaust duct (not shown) connected to each differential pressure chamber so that the pressure is close to atmospheric pressure. There is.
（発明が解決しようとする問題点） 上述したように帯状物を連続的に処理する場合には、大
気‐高真空‐大気（air-to-air）となるために、大気と
真空室との間の真空シールをどのようにするかが問題と
なっている。即ち、シール性が悪いと大気中のO2，CO2
および微細な浮遊物が真空室内に侵入して、蒸着被膜に
悪影響を与えるばかりでなく、真空ポンプによる真空
室、差圧室での排気量が増え、ランニングコストがかさ
むという問題がある。(Problems to be Solved by the Invention) When the strips are continuously treated as described above, since the atmosphere-high vacuum-air (air-to-air), the atmosphere and the vacuum chamber are separated from each other. The problem is how to make the vacuum seal between them. That is, if the sealing property is poor, the atmospheric O 2 , CO 2
In addition to the fact that fine suspended matter penetrates into the vacuum chamber and adversely affects the vapor-deposited coating, the exhaust amount in the vacuum chamber and the differential pressure chamber by the vacuum pump increases, which causes a problem of increasing running cost.
本発明は、上述した問題を解決しようとするものであ
る。The present invention seeks to solve the above problems.
（問題点を解決するための手段） 本発明によれば、高真空に排気される真空室内の高真空
を維持しながら真空処理すべき帯状物を入側大気雰囲気
中から真空室に導入するとともに出側大気雰囲気中に真
空室から導出し得るよう真空室の入側および出側に設け
られたシール用差圧室を具える帯状物のエアーロック装
置において、第１図に示すように差圧室の長さ方向にそ
れぞれ離間した一対の上シールロール13,14と一対の下
シールロール15,16とが差圧室10内に上下に設けられ、
上シールロール13,14間および下シールロール15,16間に
それぞれエンドレスシールベルト24,25が巻掛けられ、
これにより上下一対のエンドレスシールベルト24,25が
帯状物をはさんで差圧室10の内部空間を実質的に閉塞し
て帯状物４を通すよう構成したことを特徴とする。(Means for Solving the Problems) According to the present invention, while the high vacuum in the vacuum chamber that is evacuated to a high vacuum is maintained, the strip to be vacuum-treated is introduced into the vacuum chamber from the inlet side atmospheric atmosphere. In the air lock device for the belt-like material provided with the sealing differential pressure chambers provided on the inlet side and the outlet side of the vacuum chamber so as to be led out from the vacuum chamber to the atmosphere on the outlet side, as shown in FIG. A pair of upper seal rolls 13 and 14 and a pair of lower seal rolls 15 and 16 which are separated from each other in the longitudinal direction of the chamber are provided above and below in the differential pressure chamber 10,
Endless seal belts 24 and 25 are respectively wound between the upper seal rolls 13 and 14 and between the lower seal rolls 15 and 16,
Thus, the pair of upper and lower endless seal belts 24, 25 is characterized in that the strip 4 is sandwiched between the endless seal belts 24, 25 to substantially close the internal space of the differential pressure chamber 10 and allow the strip 4 to pass therethrough.
（作用） 上述の構成になる本発明による帯状物のエアーロック装
置によれば、差圧室10を上下シールベルト24,25によっ
て実質的に閉塞して帯状物を通すことができる。したが
って、大気中のO2，CO2および微細な浮遊物の侵入によ
って生じる蒸着被膜に対する悪影響をなくし、また、真
空室および差圧室の排気に要するランニングコストを低
減することができる。(Operation) According to the belt-like air lock device of the present invention having the above-described configuration, the differential pressure chamber 10 can be substantially closed by the upper and lower seal belts 24 and 25 to allow the belt-like material to pass therethrough. Therefore, it is possible to eliminate the adverse effect on the vapor deposition film caused by the invasion of O 2 , CO 2 and fine floating substances in the atmosphere, and to reduce the running cost required for exhausting the vacuum chamber and the differential pressure chamber.
（実施例） 第１〜３図は本発明の一実施例を示す。図示の例では、
シール用差圧室10の頂壁11および底壁12間に一対の上シ
ールロール13,14および一対の下シールロール15,16がそ
れぞれ差圧室10の長さ方向に離間して上下に設けられ各
シールロール13,14,15,16のロール軸17,18,19,20は差圧
室10の側壁21に回転シール22を介して貫通されて軸受23
によってそれぞれ回転自在に支承されている。(Embodiment) FIGS. 1 to 3 show an embodiment of the present invention. In the example shown,
Between the top wall 11 and the bottom wall 12 of the sealing differential pressure chamber 10, a pair of upper sealing rolls 13 and 14 and a pair of lower sealing rolls 15 and 16 are provided vertically above and below each other in the length direction of the differential pressure chamber 10. The roll shafts 17, 18, 19, 20 of the respective seal rolls 13, 14, 15, 16 are penetrated through the side wall 21 of the differential pressure chamber 10 via the rotary seal 22 and the bearing 23.
Are rotatably supported by each.
上シールロール13,14間および下シールロール15,16間に
それぞれエンドレスシールベルト24,25が巻掛けられ、
これらの上下シールベルト24,25を上シールロール13,14
および下シールロール15,16によってそれぞれ帯状物４
に密着させて上下シールベルト24,25によってはさみ込
み、これにより差圧室10の入側及び出側間の空間をシー
ルベルト24,25が実質的に閉塞して封止するよう構成さ
ている。Endless seal belts 24 and 25 are respectively wound between the upper seal rolls 13 and 14 and between the lower seal rolls 15 and 16,
These upper and lower seal belts 24, 25 are attached to the upper seal rolls 13, 14
And the lower seal rolls 15 and 16 respectively for strip 4
The upper and lower seal belts 24 and 25 are sandwiched between the seal belts 24 and 25 and the seal belts 24 and 25 substantially close and seal the space between the inlet side and the outlet side of the differential pressure chamber 10.
図示の例では、帯状物４と、上下シールロール13,14,1
5,16と、シールベルト24,25との間に生じる空隙にサイ
ドシール片26が挿入さている。In the illustrated example, the strip 4 and the upper and lower seal rolls 13, 14, 1
The side seal piece 26 is inserted into the space formed between the seal belts 24 and 25 and the seal belts 24 and 25.
シール片26はロール13,15の両端部の前面およびロール1
4,16の両端部の後面を覆うよう形成され、これらのシー
ル片26間にスペーサー27を連結してシール片26がロール
端部を覆う位置に保持されるよう構成さている。The seal pieces 26 are formed on the front surfaces of both ends of the rolls 13 and 15 and the roll 1.
Spacers 27 are formed so as to cover the rear surfaces of both end portions of 4, 16 and a spacer 27 is connected between these seal pieces 26 so that the seal pieces 26 are held in a position to cover the roll end portions.
（発明の効果） 本発明によれば、エアーロック装置の差圧室を実質的に
閉塞して帯状物を通すことができ、したがって、大気中
のO2，CO2および微細な浮遊物の侵入によって生じる蒸
着被膜に対する悪影響をなくし、また、真空室および差
圧室の排気に要するランニングコストを低減することが
できる。(Effect of the Invention) According to the present invention, the differential pressure chamber of the air lock device can be substantially closed to allow the belt-like material to pass therethrough, and therefore, the intrusion of O 2 , CO 2 and fine suspended matter in the atmosphere. It is possible to eliminate an adverse effect on the vapor deposition film caused by the above, and to reduce the running cost required for exhausting the vacuum chamber and the differential pressure chamber.
第１図は本発明によるエアーロック装置の長さ方向の部
分縦断面図、 第２図は第１図のII−II線上の断面図、 第３図は第１図のIII−III線上の断面図、 第４図は従来の帯状物連続真空蒸着装置の概略線図であ
る。 １…真空室 13,14…上シールロール 15,16…下シールロール 24…上エンドレスシールベルト 25…下エンドレスシールベルト 26…サイドシール片 27…スペーサー1 is a longitudinal partial longitudinal sectional view of an airlock device according to the present invention, FIG. 2 is a sectional view taken along line II-II of FIG. 1, and FIG. 3 is a sectional view taken along line III-III of FIG. FIG. 4 and FIG. 4 are schematic diagrams of a conventional belt-shaped continuous vacuum vapor deposition apparatus. 1 ... Vacuum chamber 13, 14 ... Upper seal roll 15, 16 ... Lower seal roll 24 ... Upper endless seal belt 25 ... Lower endless seal belt 26 ... Side seal piece 27 ... Spacer
Claims (1)
持しながら真空処理すべき帯状物を入側大気雰囲気中か
ら真空室に導入するとともに出側大気雰囲気中に真空室
から導出し得るよう真空室の入側および出側に設けられ
たシール用差圧室を具える帯状物のエアーロック装置に
おいて、差圧室の長さ方向にそれぞれ離間した一対の上
シールロールと一対の下シールロールとが差圧室内に上
下に設けられ、上シールロール間および下シールロール
間にそれぞれエンドレスシールベルトが巻掛けられ、こ
れにより上下一対のエンドレスシールベルトが帯状物を
はさんで差圧室の内部空間を実質的に閉塞して帯状物を
通すよう構成したことを特徴とする帯状物のエアーロッ
ク装置。1. A belt-like object to be vacuum-processed is introduced into the vacuum chamber from the inlet side atmospheric atmosphere while maintaining a high vacuum in the vacuum chamber evacuated to a high vacuum, and is discharged from the vacuum chamber into the outlet side atmospheric atmosphere. In order to obtain an air lock device for a belt-like object having sealing differential pressure chambers provided on the inlet side and the outlet side of a vacuum chamber, a pair of upper seal rolls and a pair of lower seal rolls spaced apart in the length direction of the differential pressure chamber are provided. The seal rolls are provided above and below in the differential pressure chamber, and the endless seal belts are respectively wound between the upper seal roll and the lower seal roll, so that the pair of upper and lower endless seal belts sandwiches the belt-shaped object. An airlock device for a strip-shaped article, characterized in that the interior space of the strip-shaped article is substantially closed to allow the strip-shaped article to pass therethrough.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16671986A JPH0735580B2 (en) | 1986-07-17 | 1986-07-17 | Airlock device for band |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16671986A JPH0735580B2 (en) | 1986-07-17 | 1986-07-17 | Airlock device for band |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6324067A JPS6324067A (en) | 1988-02-01 |
| JPH0735580B2 true JPH0735580B2 (en) | 1995-04-19 |
Family
ID=15836484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16671986A Expired - Lifetime JPH0735580B2 (en) | 1986-07-17 | 1986-07-17 | Airlock device for band |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735580B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0768622B2 (en) * | 1991-07-02 | 1995-07-26 | 中外炉工業株式会社 | Sealing device for continuous vacuum processing equipment |
| DE102009052873B4 (en) | 2009-11-13 | 2017-08-17 | THEVA DüNNSCHICHTTECHNIK GMBH | Device for the continuous moving introduction of a tape substrate into a high vacuum |
| CN104911554B (en) * | 2015-04-10 | 2017-07-25 | 中国钢研科技集团有限公司 | An industrialized fully continuous PVD production process for zinc-magnesium alloy coated steel strip |
-
1986
- 1986-07-17 JP JP16671986A patent/JPH0735580B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6324067A (en) | 1988-02-01 |
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